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1. 发明授权

US07286294B2 Beam-shaping element for optical radiation and a method for producing said element 有权
标题翻译：用于光辐射的光束成形元件和用于制造所述元件的方法
公开(公告)号：US07286294B2
公开(公告)日：2007-10-23
申请号：US10484214
申请日：2002-07-17
申请人： Hans-Joachim Quenzer , Wolfgang Reinert
发明人： Hans-Joachim Quenzer , Wolfgang Reinert
IPC分类号： G02B1/10 , F21V9/04
CPC分类号： G02B27/0927 , A61F9/00814 , G02B27/09 , G02B27/0938
摘要： A beam-shaping element comprises a carrier substrate (1) bearing a thin-layer metallization which is structured for shaping the beam of optical radiation. The thin-layer metallization includes at least two metallic layers (2, 3), which, upon impingement of the optical radiation (4), react with each other accompanied by a permanent change in color in response to a certain intensity and/or an irradiation period of the optical radiation (4).
摘要翻译：光束成形元件包括承载基板（1），该载体基板（1）承载用于使光辐射束成形的薄层金属化。薄层金属化包括至少两个金属层（2,3），其在光辐射（4）的撞击时响应于一定的强度而伴随着颜色的永久变化而相互反应和/或照射周期的光辐射（4）。

2. 发明授权

US09328010B2 Method for structuring a flat substrate composed of glass-type material, and optical component 有权
标题翻译：用于构造由玻璃型材料构成的平坦基板和光学部件的方法
公开(公告)号：US09328010B2
公开(公告)日：2016-05-03
申请号：US14238564
申请日：2012-08-02
申请人： Norman Marenco , Hans-Joachim Quenzer
发明人： Norman Marenco , Hans-Joachim Quenzer
IPC分类号： G02B6/26 , G02B6/42 , C03B23/02 , G02B6/43 , C03B40/02
CPC分类号： C03B23/02 , C03B40/02 , G02B6/4206 , G02B6/4214 , G02B6/43
摘要： The invention is a method for structuring a flat substrate composed of glass material in the course of a viscous flow process. The glass flat substrate is joined to a surface of a flat substrate, which is preferably a semiconductor flat substrate, having at least one depression bounded by a circumferential edge located in the surface. In the course of a subsequent tempering process, glass material is changed to a viscous free-flowing state in which at least proportions of the free-flowing glass material of the flat substrate flow over the circumferential edge into the depression in the flat substrate. The invention is also characterized in that a flat substrate is provided of which the at least one depression has at least one wetting surface that is countersunk with respect to the surface of the flat substrate and is at least partly bounded by a line-type edge which, at the same time, is an edge of a trench structure provided within the depression and countersunk with respect to the wetting surface and/or is determined by a discontinuous change in a wetting property for the free-flowing glass material that can be assigned to the wetting surface.
摘要翻译：本发明是一种用于在粘性流动过程中构造由玻璃材料组成的平坦基底的方法。玻璃平板基板连接到平坦基板的表面，该平坦基板优选为半导体平面基板，该平坦基板具有至少一个由位于该表面中的圆周边缘限定的凹陷。在随后的回火处理过程中，玻璃材料变为粘性自由流动状态，其中平坦基底的自由流动的玻璃材料的至少一部分在圆周边缘上流动到平坦基底中的凹陷中。本发明的特征还在于提供一种平坦的基底，其中至少一个凹陷具有至少一个相对于平坦基底的表面沉入的润湿表面，并且至少部分地由线型边缘界定同时，是相对于润湿表面设置在凹陷和沉头内的沟槽结构的边缘和/或由可自由流动的玻璃材料的润湿性的不连续变化确定润湿表面。

3. 发明授权

US5938911A Process for producing glass coatings for anodic bonding purposes 失效
标题翻译：用于生产用于阳极结合目的的玻璃涂层的方法
公开(公告)号：US5938911A
公开(公告)日：1999-08-17
申请号：US875239
申请日：1997-07-18
申请人： Hans-Joachim Quenzer , Carola Dell
发明人： Hans-Joachim Quenzer , Carola Dell
IPC分类号： C03B8/02 , C03C1/00 , C03C27/00 , C03C27/04 , C03C29/00 , H01L21/316 , H01L21/56 , H01L21/58 , C04B37/00
CPC分类号： H01L24/83 , C03C1/008 , C03C27/00 , C03C27/044 , C03C29/00 , H01L21/56 , H01L24/29 , H01L2224/29298 , H01L2224/8319 , H01L2224/8385 , H01L2224/83894 , H01L2924/00011 , H01L2924/00013 , H01L2924/01005 , H01L2924/01006 , H01L2924/01011 , H01L2924/01013 , H01L2924/01032 , H01L2924/01033 , H01L2924/01058 , H01L2924/01082 , H01L2924/07802
摘要： The invention relates to a method of anodic bonding and a method for producing glass coatings for purposes of anodic bonding and colloidal solutions suitable for this purpose. The method is particularly suitable for anodic bonding with glass coatings with a thickness of greater than 100 nm up to 10 .mu.m, which are used for connecting two semiconductor layers. In order to produce the required glass coating, an SiO.sub.2 -sol is dissolved in at least one or in a mixture of n-alkanols (n=1 to 5). Then tetraethyl orthosilicate (TEOS), methyl triethoxysilane (MTEOS) and water are added to this organosol. Furthermore, a small quantity of acid is added to the desired quantity of alkali salts, and the colloidal solution is at least partly polymerized. The colloidal solution thus obtained is suitable for coating conductive materials by cost-effective methods such as immersion, spin-on deposition or spraying and subsequent tempering. After one coating there results a glass coating with a thickness of up to 2 .mu.m. When the method is repeated a plurality of times, coating thicknesses of over 10 .mu.m can be obtained.
摘要翻译： PCT No.PCT / DE96 / 00103 Sec。 371日期1997年7月18日 102（e）1997年7月18日PCT PCT 1996年1月17日PCT公布。第WO96 / 22256号公报日期1996年7月25日本发明涉及一种阳极结合方法以及用于生产用于阳极结合的玻璃涂层和适用于该目的的胶体溶液的方法。该方法特别适用于与用于连接两个半导体层的厚度大于100nm至10μm的玻璃涂层的阳极接合。为了制备所需的玻璃涂层，将SiO 2溶胶溶解在正烷烃（n = 1至5）中的至少一种或混合物中。然后将原硅酸四乙酯（TEOS），甲基三乙氧基硅烷（MTEOS）和水加入到该有机溶胶中。此外，将少量的酸加入到所需量的碱金属盐中，并且胶体溶液至少部分聚合。由此获得的胶体溶液适用于通过诸如浸渍，旋涂沉积或喷涂和随后的回火的成本有效的方法来涂覆导电材料。在一次涂层之后，产生厚度达2微米的玻璃涂层。当多次重复该方法时，可以获得超过10μm的涂层厚度。

4. 发明授权

US08758590B2 Method for treating the surface of an electrically conducting substrate surface 有权
标题翻译：用于处理导电基底表面的表面的方法
公开(公告)号：US08758590B2
公开(公告)日：2014-06-24
申请号：US12295321
申请日：2007-04-20
申请人： Hans-Joachim Quenzer , Gerfried Zwicker
发明人： Hans-Joachim Quenzer , Gerfried Zwicker
IPC分类号： C25D17/00 , C25D5/02 , B23H3/00
CPC分类号： B23H3/00 , B81C1/00634 , B81C2201/0146 , C25F3/14
摘要： Disclosed is a method of treating the surface of an electrically conducting substrate surface wherein a tool comprising an ion-conducting solid material is brought into contact at least in some areas with the substrate surface. The tool conducts the metal ions of the substrate and an electric potential is applied so that an electrical potential gradient is applied between the substrate surface and the tool in such a manner that metal ions are drawn from the substrate surface or deposited onto the substrate surface by means of the tool.
摘要翻译：公开了一种处理导电衬底表面的方法，其中包括离子导电固体材料的工具至少在一些区域与衬底表面接触。该工具传导衬底的金属离子并且施加电位，使得电位梯度以这样的方式施加在衬底表面和工具之间，使得金属离子从衬底表面被拉出或沉积到衬底表面上手段的工具。

5. 发明申请

US20100277782A1 Micromechanical Device and Method for Projecting Electromagnetic Radiation 审中-公开
标题翻译：微机电装置及投射电磁辐射方法
公开(公告)号：US20100277782A1
公开(公告)日：2010-11-04
申请号：US12668140
申请日：2008-07-10
申请人： Hans-Joachim Quenzer , Ulrich Hofmann , Marten Oldsen
发明人： Hans-Joachim Quenzer , Ulrich Hofmann , Marten Oldsen
IPC分类号： G02B26/10 , G21K5/04 , G02B26/08 , H05B3/00
CPC分类号： G02B7/008 , G02B26/0833 , G02B26/105
摘要： A micromechanical apparatus includes a moving element which comprises a controllable heating apparatus for introduction of a defined amount of heat into the moving element, wherein the apparatus furthermore has a control unit which is designed to control the heating apparatus as a function of an instantaneous temperature and/or of an instantaneous amount of heat that is introduced. The apparatus can be designed to project electromagnetic radiation when the moving element is in the form of a beam deflection unit for deflection of radiation, which originates from a radiation source, onto a projection surface.
摘要翻译：一种微机械装置包括一个移动元件，该移动元件包括一个可控制的加热装置，用于将一定量的热量引入到移动元件中，其中该装置还具有控制单元，该控制单元被设计成根据瞬时温度控制加热装置， /或引入的瞬时热量。该装置可以被设计成当移动元件是用于将来自辐射源的辐射偏转到投射表面上的光束偏转单元的形式时投射电磁辐射。

6. 发明申请

US20060096321A1 Method and device for aftertreating an optical lens 有权
标题翻译：光学透镜后处理方法和装置
公开(公告)号：US20060096321A1
公开(公告)日：2006-05-11
申请号：US10540211
申请日：2003-12-19
申请人： Hans-Joachim Quenzer , Peter Merz , Uwe Bott
发明人： Hans-Joachim Quenzer , Peter Merz , Uwe Bott
IPC分类号： C03B23/00
CPC分类号： C03B23/02 , C03B11/082 , C03B2215/414 , C03B2215/44
摘要： The invention relates to a method and a device for follow-up treatment of the contour of the surface of at least one optical lens, in particular a microlens which is made of glass or a glass-type material and which has a convex lens surface delimited by a circumferential line abutting on a plane section surrounding said circumferential line and which has a lens underside facing the convex lens surface. The invention, wherein along said circumferential line of the optical lens on said plane section is placed a means perfectly matching said circumferential line and at least laterally bordering said convex lens surface, said optical lens is heated to a temperature of at least the transformation temperature of said glass or glass-type material, pressure equalization prevails between said convex lens surface and said lens underside, after a certain period of time, during which said optical lens undergoes said temperature treatment and subsequent cooling below said transformation temperature, said means is removed from said optical lens.
摘要翻译：本发明涉及一种用于后续处理至少一个光学透镜的表面轮廓的方法和装置，特别是由玻璃或玻璃类材料制成并具有凸透镜表面限定的微透镜通过邻接在围绕所述圆周线的平面部分并且具有面向凸透镜表面的透镜下侧的圆周线。本发明，其中沿着所述平面部分上的光学透镜的所述圆周线设置完全匹配所述圆周线并且至少横向邻接所述凸透镜表面的装置，所述光学透镜被加热至至少相对于所述玻璃或玻璃类材料在所述凸透镜表面和所述透镜下侧之间经过一段时间之后，在所述光学透镜经历所述温度处理并随后冷却到所述转变温度以下之前，压力均衡化是所述装置从所述光学透镜。

7. 发明授权

US06700299B2 Assembly having variable capacitance 有权
标题翻译：组件具有可变电容
公开(公告)号：US06700299B2
公开(公告)日：2004-03-02
申请号：US10343975
申请日：2003-03-31
申请人： Hans-Joachim Quenzer , Bernd Wagner , Beatrice Wenk
发明人： Hans-Joachim Quenzer , Bernd Wagner , Beatrice Wenk
IPC分类号： H03H970
CPC分类号： H01G5/16 , H01G5/14 , H01G5/18
摘要： The present invention relates to an assembly of variable capacitance as well as to a method of operating the assembly. In the assembly, a variable capacitor is formed by a variable coverage or a variable distance of at least one first (4) and one second electrically conductive region (5). The first electrically conductive region (4) is configured on or in a substrate (1) and said second electrically conductive region (5) is configured on or in an actuator element (3) of a first micro-mechanical actuator (2). The actuator (2) is disposed on the substrate (1) in such a way that it can perform a movement of the actuator element (3) with the second region (5) along a surface of the substrate (1) at different positions relative to the first region (4), at which positions the second region (5) overlaps the first region (4) at least partly. Moreover, holding means (6, 10, 11) are provided which are capable of pulling or pushing the actuator element (3) in the different positions towards the substrate (1) or a mechanical stop (13) on the substrate (1), and of holding it in these positions. The inventive assembly serves to implement a variable capacitance that presents a high stability in resistance to outside influences according to its respective setting.
摘要翻译：本发明涉及可变电容的组件以及操作组件的方法。在组件中，可变电容器由至少一个第一（4）和一个第二导电区域（5）的可变覆盖或可变距离形成。第一导电区域（4）构造在衬底（1）上或衬底（1）中，并且所述第二导电区域（5）构造在第一微机械致动器（2）的致动器元件（3）上或其中。致动器（2）以这样的方式设置在基板（1）上，使得其可以在相对于基板（1）的不同位置处沿着基板（1）的表面执行致动器元件（3）与第二区域（5）的移动到所述第一区域（4），所述第二区域（5）至少部分地与所述第一区域（4）重叠的位置。此外，提供保持装置（6,10,11），其能够将致动器元件（3）在朝向基板（1）的不同位置或基板（1）上的机械止动件（13）上拉或推动，并将其保持在这些位置。本发明的组件用于实现根据其各自设置呈现出对外部影响的高稳定性的可变电容。

8. 发明申请

US20100296151A1 MICROSYSTEM AND METHOD FOR THE PRODUCTION OF A MICROSYSTEM 有权
标题翻译：用于生产微结构的微结构和方法
公开(公告)号：US20100296151A1
公开(公告)日：2010-11-25
申请号：US12669333
申请日：2008-07-10
申请人： Ulrich Hofmann , Hans-Joachim Quenzer , Marten Oldsen
发明人： Ulrich Hofmann , Hans-Joachim Quenzer , Marten Oldsen
IPC分类号： G02B26/08 , B23P11/00
CPC分类号： G02B26/0841 , B81B3/0054 , B81B2201/033 , B81B2201/042 , G02B26/105
摘要： The invention relates to a microsystem having at least one micromirror (1) and at least one micromirror actuator (2) for pivoting the at least one micromirror (1) about at least one axis from a relaxed resting position, comprising a frame chip and a transparent cover (3) disposed on the frame chip, wherein the frame chip has a chip frame (10), on which the at least one micromirror (1) is articulated in an elastically pivoting manner, wherein the at least one micromirror (1) is further disposed within the chip frame (10) and in a cavity (11) that is formed between the transparent cover (3) and a carrier layer. To this end, the at least one micromirror (1) is articulated on a frame (14) pivotally about the at least one axis, the frame (14) in turn being pivotally articulated on the chip frame (10), wherein the frame (14) is permanently pivoted out of a chip plane defined by the carrier layer such that the micromirror (1) in the resting position thereof is tilted about a non-pivoting angle relative to the chip plane. The invention further relates to a method for the production of such a microsystem.
摘要翻译：本发明涉及一种具有至少一个微反射镜（1）和至少一个微反射镜致动器（2）的微系统，用于将至少一个微反射镜（1）从松弛的静止位置绕至少一个轴线枢转，包括框架芯片和透明盖（3），其中所述框架芯片具有芯片框架（10），所述至少一个微镜（1）以弹性枢转的方式铰接在所述芯片框架（10）上，其中所述至少一个微镜（1）进一步设置在所述芯片框架（10）内并且形成在所述透明盖（3）和载体层之间的空腔（11）中。为此，所述至少一个微镜（1）铰接在围绕所述至少一个轴线枢转的框架（14）上，所述框架（14）依次被枢转地铰接在所述芯片框架（10）上，其中所述框架 14）从由载体层限定的切屑平面永久地枢转，使得其静止位置中的微镜（1）相对于切屑平面倾斜不转动的角度。本发明还涉及一种用于生产这种微系统的方法。

9. 发明申请

US20050239228A1 Method for producing micromechanical and micro-optic components consisting of glass-type materials 有权
标题翻译：用于生产由玻璃型材料组成的微机械和微光部件的方法
公开(公告)号：US20050239228A1
公开(公告)日：2005-10-27
申请号：US11172892
申请日：2005-07-05
申请人： Hans-Joachim Quenzer , Peter Merz , Arne Schulz
发明人： Hans-Joachim Quenzer , Peter Merz , Arne Schulz
IPC分类号： G02B3/00 , C03B11/00 , C03B11/08 , C03B23/02 , C03B23/025 , C03B23/203 , C03C19/00 , H01L21/00
CPC分类号： B81C1/00047 , B81B2201/018 , B81B2201/047 , B81C99/008 , B81C99/0085 , B81C2201/034 , C03B11/082 , C03B23/0252 , C03B23/203 , C03B2215/41 , C03B2215/412
摘要： What is proposed here is a method of structuring surfaces of glass-type materials and variants of this method, comprising the following steps of operation: providing a semiconductor substrate, structuring, with the formation of recesses, of at least one surface of the semiconductor substrate, providing a substrate of glass-type material, joining the semiconductor substrate to the glass-type substrate, with a structured surface of the semiconductor substrate being joined to a surface of the glass-type surface in an at least partly overlapping relationship, and heating the substrates so bonded by annealing in a way so as to induce an inflow of the glass-type material into the recesses of the structured surface of the semiconductor substrate. The variants of the method are particularly well suitable for the manufacture of micro-optical lenses and micro-mechanical components such as micro-relays or micro-valves.
摘要翻译：这里提出的是一种结构玻璃型材料的表面和该方法的变型的方法，包括以下步骤：提供半导体衬底，形成半导体衬底的至少一个表面的凹槽的形成提供玻璃型材料的基板，将半导体基板与玻璃型基板接合，半导体基板的结构化表面以至少部分重叠的关系连接到玻璃类型表面的表面，并且加热通过退火以使得玻璃类材料流入半导体衬底的结构化表面的凹槽中的方式被粘合的衬底。该方法的变型特别适用于制造微光学透镜和微机械部件，例如微型继电器或微型阀。

10. 发明授权

US06951119B1 Method for producing micromechanical and micro-optic components consisting of glass-type materials 有权
标题翻译：用于生产由玻璃型材料组成的微机械和微光部件的方法
公开(公告)号：US06951119B1
公开(公告)日：2005-10-04
申请号：US09889956
申请日：2000-11-23
申请人： Hans-Joachim Quenzer , Peter Merz , Arne Veit Schulz
发明人： Hans-Joachim Quenzer , Peter Merz , Arne Veit Schulz
IPC分类号： G02B3/00 , C03B11/00 , C03B11/08 , C03B23/02 , C03B23/025 , C03B23/203 , C03C19/00 , C03B23/00
CPC分类号： B81C1/00047 , B81B2201/018 , B81B2201/047 , B81C99/008 , B81C99/0085 , B81C2201/034 , C03B11/082 , C03B23/0252 , C03B23/203 , C03B2215/41 , C03B2215/412
摘要： What is proposed here is a method of structuring surfaces of glass-type materials and variants of this method, comprising the following steps of operation: providing a semiconductor substrate, structuring, with the formation of recesses, of at least one surface of the semiconductor substrate, providing a substrate of glass-type material, joining the semiconductor substrate to the glass-type substrate, with a structured surface of the semiconductor substrate being joined to a surface of the glass-type substrate in an at least partly overlapping relationship, and heating the substrates so bonded by annealing in a way so as to induce an inflow of the glass-type material into the recesses of the structured surface of the semiconductor substrate. The variants of the method are particularly well suitable for the manufacture of micro-optical lenses and micro-mechanical components such as micro-relays or micro-valves.
摘要翻译：这里提出的是一种结构玻璃型材料的表面和该方法的变型的方法，包括以下步骤：提供半导体衬底，形成半导体衬底的至少一个表面的凹槽的形成提供玻璃型材料的基板，将所述半导体基板接合到所述玻璃型基板，所述半导体基板的结构化表面以至少部分重叠的关系与所述玻璃基板的表面接合，并且加热通过退火以使得玻璃类材料流入半导体衬底的结构化表面的凹槽中的方式被粘合的衬底。该方法的变型特别适用于制造微光学透镜和微机械部件，例如微型继电器或微型阀。

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