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1. 发明授权

US07760327B2 Reflecting optical element with eccentric optical passageway 有权
标题翻译：用偏心光学通道反射光学元件
公开(公告)号：US07760327B2
公开(公告)日：2010-07-20
申请号：US11395719
申请日：2006-03-31
申请人： Hans-Jürgen Scherle , Yim-Bun Patrick Kwan , Stefan Xalter , Johannes Lippert , Ulrich Weber , Bernhard Geuppert , Bernhard Gellrich , Jens Kugler , Franz Sorg , Willi Heintel , Harald Kirchner , Wolfgang Keller , Andreas Frommeyer , Fraser G. Morrison
发明人： Hans-Jürgen Scherle , Yim-Bun Patrick Kwan , Stefan Xalter , Johannes Lippert , Ulrich Weber , Bernhard Geuppert , Bernhard Gellrich , Jens Kugler , Franz Sorg , Willi Heintel , Harald Kirchner , Wolfgang Keller , Andreas Frommeyer , Fraser G. Morrison
IPC分类号： G03B27/42 , G03B27/54 , G03B27/32 , G02B5/10
CPC分类号： G03F7/70225 , G02B17/0812
摘要： There is provided an optical element comprising an optical element body, a reflecting area and an optical passageway. The optical element body defines an axis of rotational symmetry. The reflecting area is disposed on the optical element body and adapted to be optically used in an exposure process. The optical passageway is arranged within the optical element body and allows light to pass the optical element body, the optical passageway being arranged eccentrically with respect to the axis of rotational symmetry.
摘要翻译：提供了一种包括光学元件主体，反射区域和光学通道的光学元件。光学元件主体限定旋转对称轴。反射区域设置在光学元件主体上并且适于在曝光过程中被光学地使用。光学通道布置在光学元件主体内并允许光通过光学元件主体，光学通道相对于旋转对称轴线偏心地布置。

2. 发明申请

US20060262704A1 Reflecting optical element with eccentric optical passageway 有权
标题翻译：用偏心光学通道反射光学元件
公开(公告)号：US20060262704A1
公开(公告)日：2006-11-23
申请号：US11395719
申请日：2006-03-31
申请人： Hans-Jurgen Scherle , Yim-Bun Kwan , Stefan Xalter , Johannes Lippert , Ulrich Weber , Bernhard Geuppert , Bernhard Gellrich , Jens Kugler , Franz Sorg , Willi Heintel , Harald Kirchner , Wolfgang Keller , Andreas Frommeyer , Fraser Morrison
发明人： Hans-Jurgen Scherle , Yim-Bun Kwan , Stefan Xalter , Johannes Lippert , Ulrich Weber , Bernhard Geuppert , Bernhard Gellrich , Jens Kugler , Franz Sorg , Willi Heintel , Harald Kirchner , Wolfgang Keller , Andreas Frommeyer , Fraser Morrison
IPC分类号： G11B7/135
CPC分类号： G03F7/70225 , G02B17/0812
摘要： There is provided an optical element comprising an optical element body, a reflecting area and an optical passageway. The optical element body defines an axis of rotational symmetry. The reflecting area is disposed on the optical element body and adapted to be optically used in an exposure process. The optical passageway is arranged within the optical element body and allows light to pass the optical element body, the optical passageway being arranged eccentrically with respect to the axis of rotational symmetry.
摘要翻译：提供了一种包括光学元件主体，反射区域和光学通道的光学元件。光学元件主体限定旋转对称轴。反射区域设置在光学元件主体上并且适于在曝光过程中被光学地使用。光学通道布置在光学元件主体内并允许光通过光学元件主体，光学通道相对于旋转对称轴线偏心地布置。

3. 发明授权

US07448763B2 Optical subassembly and projection objective in semiconductor lithography 有权
标题翻译：半导体光刻中的光学组件和投影物镜
公开(公告)号：US07448763B2
公开(公告)日：2008-11-11
申请号：US10573216
申请日：2003-12-03
申请人： Andreas Frommeyer , G Fraser Morrison , Wolfgang Keller , Yim-Bun Patrick Kwan , Harald Kirchner , Willi Heintel
发明人： Andreas Frommeyer , G Fraser Morrison , Wolfgang Keller , Yim-Bun Patrick Kwan , Harald Kirchner , Willi Heintel
IPC分类号： G02B5/08 , G02B7/02
CPC分类号： G03F7/70825 , G02B7/181 , G02B7/182
摘要： An optical subassembly with an optical element, for example a mirror element (7), has an optical surface (9) and bearing points (12) arranged on the circumference. The optical element (7) is connected to a mount (13) at the bearing points (12) via connecting elements (14, 15, 16, 17, 18). Stress-decoupling cutouts, for example curved slots (11), are provided between the optical surface (9) and the bearing points (12).
摘要翻译：具有光学元件（例如镜子元件）的光学子组件具有布置在圆周上的光学表面（9）和支承点（12）。光学元件（7）通过连接元件（14,15,16,17,18）在轴承点（12）处连接到安装件（13）。在光学表面（9）和支承点（12）之间设置有应力分离切口，例如弯曲槽（11）。

4. 发明申请

US20070014037A1 Optical subassembly and projection objective in semiconductor lithography 有权
标题翻译：半导体光刻中的光学组件和投影物镜
公开(公告)号：US20070014037A1
公开(公告)日：2007-01-18
申请号：US10573216
申请日：2003-12-03
申请人： Andreas Frommeyer , G. Morrison , Wolfgang Keller , Yim-Bun Kwan , Harald Kirchner , Willi Heintel
发明人： Andreas Frommeyer , G. Morrison , Wolfgang Keller , Yim-Bun Kwan , Harald Kirchner , Willi Heintel
IPC分类号： G02B7/02
CPC分类号： G03F7/70825 , G02B7/181 , G02B7/182
摘要： An optical subassembly with an optical element, for example a mirror element (7), has an optical surface (9) and bearing points (12) arranged on the circumference. The optical element (7) is connected to a mount (13) at the bearing points (12) via connecting elements (14, 15, 16, 17, 18). Stress-decoupling cutouts, for example curved slots (11), are provided between the optical surface (9) and the bearing points (12).
摘要翻译：具有光学元件（例如镜子元件）的光学子组件具有布置在圆周上的光学表面（9）和支承点（12）。光学元件（7）通过连接元件（14,15,16,17,18）在轴承点（12）处连接到安装件（13）。在光学表面（9）和支承点（12）之间设置有应力分离切口，例如弯曲槽（11）。

5. 发明授权

US08696861B2 Grindable silicone elastomer composition and the use thereof 有权
标题翻译：可研磨硅橡胶组合物及其用途
公开(公告)号：US08696861B2
公开(公告)日：2014-04-15
申请号：US13822532
申请日：2011-09-27
申请人： Wolfgang Keller , Werner Brennenstuhl , Andreas Köllnberger
发明人： Wolfgang Keller , Werner Brennenstuhl , Andreas Köllnberger
IPC分类号： C09J183/06
CPC分类号： C09J183/06 , C08G77/12 , C08G77/16 , C08G77/18 , C08G77/20 , C08K5/56 , C08L83/00 , C08L83/04
摘要： Temporary adhesive compositions used to adhesively bond a substrate to be abraded or polished onto a substrate are themselves abradable or polishable, and contain a non-reinforcing filler or particulate silicone resin in a curable organopolysiloxane composition, and have defined physical characteristics in addition to being thermally stable.
摘要翻译：用于将要研磨或抛光的基材粘合粘合到基材上的临时粘合剂组合物本身是可磨损的或可抛光的，并且在可固化的有机基聚硅氧烷组合物中含有非增强填料或颗粒状硅氧烷树脂，并且除了具有热定义的物理特性稳定。

6. 发明申请

US20130186564A1 GRINDABLE SILICONE ELASTOMER COMPOSITION AND THE USE THEREOF 有权
标题翻译：可磨光硅胶弹性体组合物及其用途
公开(公告)号：US20130186564A1
公开(公告)日：2013-07-25
申请号：US13822532
申请日：2011-09-27
申请人： Wolfgang Keller , Werner Brennenstuhl , Andreas Köellnberger
发明人： Wolfgang Keller , Werner Brennenstuhl , Andreas Köellnberger
IPC分类号： C09J183/06
CPC分类号： C09J183/06 , C08G77/12 , C08G77/16 , C08G77/18 , C08G77/20 , C08K5/56 , C08L83/00 , C08L83/04
摘要： Temporary adhesive compositions used to adhesively bond a substrate to be abraded or polished onto a substrate are themselves abradable or polishable, and contain a non-reinforcing filler or particulate silicone resin in a curable organopolysiloxane composition, and have defined physical characteristics in addition to being thermally stable.
摘要翻译：用于将要研磨或抛光的基材粘合粘合到基材上的临时粘合剂组合物本身是可磨损的或可抛光的，并且在可固化的有机基聚硅氧烷组合物中含有非增强填料或颗粒状硅氧烷树脂，并且除了具有热定义的物理特性稳定。

7. 发明申请

US20100118643A1 AGITATOR FOR ABRASIVE MEDIA 有权
标题翻译：磨料介质搅拌机
公开(公告)号：US20100118643A1
公开(公告)日：2010-05-13
申请号：US12598698
申请日：2008-04-30
申请人： Wolfgang Keller
发明人： Wolfgang Keller
IPC分类号： B01F13/00
CPC分类号： B01F3/1221 , B01F7/00041 , B01F7/00116 , B01F7/00133 , B01F7/00275 , B01F7/00316 , B01F7/00466
摘要： Disclosed is a agitator (1; 1a-1h), particularly for abrasive media, comprising a support disk (2; 2a-2h) to which agitator blades (3; 3a-3h) are connected substantially perpendicular to the support disk (2; 2a-2h), said blades (3; 3a-3h) being arranged substantially in a radial direction. The support disk (2; 2a-2h) is also provided with a hub that receives an agitator shaft which is preferably motor-driven in a suitable manner. The trailing faces of the blades (3; 3a-3h) of the agitator (1; 1a-1h) and/or the area of the blade connections to the support disk (2; 2a-2h) is/are designed to largely prevent vortex shedding. For this purpose, preferred geometrical measures for the agitator blades (3; 3a-3h), the support disk (2; 2a-2h), and the connection of the blades (3; 3a-3h) to the support disk (2; 2a-2h) are disclosed and described.
摘要翻译：公开了一种搅拌器（1; 1a-1h），特别是用于研磨介质的搅拌器（1; 1a-1h），其包括支撑盘（2; 2a-2h），搅拌器叶片（3; 3a-3h）基本上垂直于支撑盘 2a-2h），所述叶片（3; 3a-3h）基本上沿径向布置。支撑盘（2; 2a-2h）还设置有接收搅拌器轴的轮毂，搅拌轴优选以合适的方式由马达驱动。搅拌器（1; 1a-1h）的叶片（3; 3a-3h）的后表面和/或连接到支撑盘（2; 2a-2h）的叶片的区域被设计成大大地防止涡流脱落。为此目的，用于搅拌器叶片（3; 3a-3h），支撑盘（2; 2a-2h）和叶片（3; 3a-3h）与支撑盘（2; 2a-2h）。

8. 发明授权

US4900887A Floating zone drawing circuitry for semiconductor rods 失效
标题翻译：半导体棒的浮动区域绘图电路
公开(公告)号：US4900887A
公开(公告)日：1990-02-13
申请号：US322749
申请日：1989-03-13
申请人： Wolfgang Keller
发明人： Wolfgang Keller
IPC分类号： C30B13/20 , H05B6/30
CPC分类号： H05B6/30 , C30B13/20
摘要： For floating zone drawing of semiconductor rods having diameters greater than 100 mm, at the beginning of the zone drawing process, in particular during melting on of the seed crystal to the semiconductor rod to be drawn, a high load change and impedance change occurs. The power from the high-frequency (HF) generator is no longer coupled thereto optimally. Heating up the feed line to the induction heating coil is the result. This heating is avoided by connecting the HF generator via a feed line to a tank circuit device. A variable tank circuit capacitor connected in parallel and to the series oscillator circuit coil feeding one side of a parallel circuit of a heating circuit capacitor and the induction heating coil. The variable oscillator circuit capacitor is adjusted as a function of the voltage drop across the induction heating coil.
摘要翻译：对于具有直径大于100mm的半导体棒的浮动区域拉伸，在区域拉伸处理开始时，特别是在晶种与待拉制的半导体棒的熔融之间，发生高负载变化和阻抗变化。来自高频（HF）发生器的功率不再与其最佳耦合。结果，加热到感应加热线圈的馈线。通过将HF发生器通过馈线连接到储罐回路装置来避免这种加热。并联连接的可变储能电路电容器和馈送加热电路电容器和感应加热线圈的并联电路的一侧的串联振荡器电路线圈。可变振荡器电路电容器被调整为感应加热线圈两端的电压降的函数。

9. 发明授权

US4538279A Induction coil in the form of a pancake coil for crucible-free zone melting 失效
标题翻译：用于无坩埚区熔化的煎饼线圈形式的感应线圈
公开(公告)号：US4538279A
公开(公告)日：1985-08-27
申请号：US514166
申请日：1983-07-15
申请人： Wolfgang Keller
发明人： Wolfgang Keller
IPC分类号： C30B13/20 , H05B6/30 , H05B6/36 , C03B20/00 , H05B6/44
CPC分类号： C30B13/20 , H05B6/30
摘要： A pancake induction heating coil for crucible-free zone melting of semiconductor crystal rods, includes a primary winding surrounding a semiconductor rod to be remelted in the form of a ring through which cooling liquid flows, a secondary winding surrounding the primary winding and having a side facing the semiconductor rod, and an energy concentrator lying in the plane of the primary winding and having a circular opening formed substantially in the center thereof for the semiconductor rod, the side of the secondary winding facing the semiconductor rod being electrically conductingly connected to the energy concentrator.
摘要翻译：一种用于半导体晶体棒的无坩埚区熔化的煎饼感应加热线圈，包括围绕半导体棒的初级绕组，其以冷却液流过的环形式重熔，围绕初级绕组的次级绕组，并具有侧面面向半导体棒的能量集中器和位于初级绕组的平面中的能量集中器，并且具有基本上在其中心形成半导体棒的圆形开口，面向半导体棒的次级绕组的侧面与能量导通地连接集中器

10. 发明授权

US4436578A Method of setting a stable melting zone in a semiconductor crystalline rod during crucible-free zone melting thereof 失效
标题翻译：在无坩埚区熔化期间设置半导体结晶棒中的稳定熔融区的方法
公开(公告)号：US4436578A
公开(公告)日：1984-03-13
申请号：US231028
申请日：1981-02-03
申请人： Wolfgang Keller , Gerhard Schrotter
发明人： Wolfgang Keller , Gerhard Schrotter
IPC分类号： C30B13/20 , C30B13/30 , H01L21/208
CPC分类号： C30B13/30 , C30B13/20 , Y10T117/1084
摘要： Method of setting a stable melting zone in a semiconductor crystalline rod during crucible-free zone melting thereof, by means of a single-winding induction heating coil having an inner diameter smaller than the diameter of a portion of the rod being fed to the melting zone which includes performing the crucible-free zone melting in an argon atmosphere at an overpressure in vicinity of at least 1.5 ata and maximally 6 ata, and setting the outer melting-zone height at a value of between 15 and 23 mm for a diameter of the recrystallized rod portion within a range of 30 to 50 mm, at a value of between 18 and 26 mm for a diameter of the recrystallized rod portion within a range of 50 to 75 mm and at a limiting value of 32 mm for a rod diameter greater than 75 mm.
摘要翻译：在半导体晶体棒的无坩埚区熔化期间通过单个绕组的感应加热线圈设定稳定的熔融区域的方法，所述单绕组感应加热线圈的内径小于供给到熔融区域的棒的一部分的直径其包括在氩气氛中在至少1.5ata和最大6ata附近的超压下进行无坩埚区熔化，并将外部熔融区高度设定在15和23mm之间，直径为再结晶棒部分在30至50mm的范围内，对于直径为50至75mm的再结晶棒部分的直径为18至26mm，杆直径较大的极限值为32mm 超过75毫米。

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