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    • 1. 发明授权
    • Flow sensor
    • 流量传感器
    • US07040160B2
    • 2006-05-09
    • US10432542
    • 2001-10-11
    • Hans ArtmannThorsten PannekUwe Konzelmann
    • Hans ArtmannThorsten PannekUwe Konzelmann
    • G01F1/68
    • G01F1/6845
    • A flow sensor is described, in particular for analysis of gas flows, having a substrate and at least one sensor component which is sensitive to a flow of a medium, the sensor component being separated from the substrate in at least some areas by a region that is a poor heat conductor compared to the substrate. In addition, the region having poor heat conductivity is a porous silicon region or a porous silicon oxide region, or the region having poor heat conductivity is a recess in the surface of the substrate above which the sensor element (15) is situated on at least one web which bridges the recess and is at least mostly unsupported. The flow sensor described here is particularly suitable for angle-dependent detection of a gas flow.
    • 描述了一种流量传感器,特别是用于分析气体流动,具有基底和至少一个对介质流动敏感的传感器部件,传感器部件在至少一些区域与基底分离,区域为 与基底相比,导热系数差。 此外,导热性差的区域是多孔硅区域或多孔氧化硅区域,或者导热性差的区域是衬底表面中的凹部,传感器元件(15)至少位于其上 一个网桥连接凹槽,并且至少几乎不被支撑。 这里描述的流量传感器特别适用于气流的角度依赖检测。