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1. 发明授权

US07189638B2 Method for manufacturing metal structure using trench 有权
标题翻译：使用沟槽制造金属结构的方法
公开(公告)号：US07189638B2
公开(公告)日：2007-03-13
申请号：US10739578
申请日：2003-12-19
申请人： Dong-sik Shim , Kyung-won Na , Sang-on Choi , Hae-seok Park
发明人： Dong-sik Shim , Kyung-won Na , Sang-on Choi , Hae-seok Park
IPC分类号： H01L21/4763
CPC分类号： H01L21/76879
摘要： A method for manufacturing a metal structure using a trench includes etching a semiconductor substrate to form a trench, depositing a seed layer over the semiconductor substrate including in the trench, stacking an insulating layer over the seed layer, removing a portion of the insulating layer to expose a portion of the seed layer at a bottom of the trench, filling the trench with a metal material, and removing the seed layer and the insulating layer on the semiconductor substrate. As a result, a subsequent process in forming a multi-layered structure may be easily carried out, thereby simplifying a manufacturing process.
摘要翻译：使用沟槽制造金属结构的方法包括蚀刻半导体衬底以形成沟槽，在包括沟槽中的半导体衬底上沉积晶种层，在种子层上堆叠绝缘层，去除绝缘层的一部分在沟槽的底部露出种子层的一部分，用金属材料填充沟槽，以及去除半导体衬底上的晶种层和绝缘层。结果，可以容易地进行形成多层结构的后续处理，从而简化制造过程。

2. 发明授权

US07071688B2 Magnetic field sensing device and method for fabricating thereof 有权
公开(公告)号：US07071688B2
公开(公告)日：2006-07-04
申请号：US10773456
申请日：2004-02-09
申请人： Hae-seok Park , Kyung-won Na , Dong-sik Shim , Sang-on Choi
发明人： Hae-seok Park , Kyung-won Na , Dong-sik Shim , Sang-on Choi
IPC分类号： G01R33/02
CPC分类号： G01R33/02
摘要： Disclosed is a magnetic field sensor of high sensitivity, and which is power-saving and can be manufactured with low cost in a very small size. The magnetic field sensor includes a soft magnetic core formed to construct a closed-magnetic circuit on a semiconductor substrate, a magnetic field sensing coil formed by a metal film in a shape that winds the soft magnetic core, and a drive line for exciting the soft magnetic core by directly applying an electric current thereto. The drive line is formed in a rectangular angle to the magnetic field sensing coil, and connected to the both ends of the soft magnetic core in a length direction.

3. 发明授权

US06728017B2 Micromirror actuator 失效
标题翻译：微镜执行器
公开(公告)号：US06728017B2
公开(公告)日：2004-04-27
申请号：US09973746
申请日：2001-10-11
申请人： Hae-seok Park
发明人： Hae-seok Park
IPC分类号： G02B2608
CPC分类号： G02B26/085 , Y10S359/904
摘要： A micromirror actuator includes a substrate; two posts having predetermined heights and installed a predetermined distance apart on the substrate; a torsion bar ends of which are fixed to respective posts; a stopper extending from a portion of the torsion bar and contacting or coming apart from the surface of the substrate; a mirror connected to the middle portion of the torsion bar; parallel elements connected to the torsion bar being isolated from the mirror and causing the torsion bar to be distorted; and a magnet providing a rotation force to the parallel elements through being affected by an external magnetic field. Accordingly, the rotation characteristics of the mirror of the micromirror actuator of the present invention become insensitive to a change of the strength of the external magnetic field applied after the stopper contacts the surface, thereby uniformly maintaining the rotation angle of the mirror at a desired level.
摘要翻译：微镜致动器包括基板; 两个柱具有预定的高度并且在衬底上分开预定的距离; 其扭杆的端部固定到各个柱上; 从所述扭杆的一部分延伸并从所述基板的表面接触或分离的止动件; 连接到扭杆的中间部分的反射镜; 连接到扭杆的平行元件与反射镜隔离并使扭杆变形; 以及通过受到外部磁场影响而向平行元件提供旋转力的磁体。因此，本发明的微反射镜致动器的反射镜的旋转特性对于在止动器接触表面之后施加的外部磁场的强度的变化不敏感，从而将反射镜的旋转角度均匀地保持在期望的水平。

4. 发明授权

US07615842B2 Inductor integrated chip 有权
标题翻译：电感集成芯片
公开(公告)号：US07615842B2
公开(公告)日：2009-11-10
申请号：US11473079
申请日：2006-06-23
申请人： Joo-ho Lee , Hae-seok Park , Byeoung-ju Ha , Seog-woo Hong , Hyung Choi , In-sang Song
发明人： Joo-ho Lee , Hae-seok Park , Byeoung-ju Ha , Seog-woo Hong , Hyung Choi , In-sang Song
IPC分类号： H01L29/00
CPC分类号： H03H9/0542 , H03H9/105
摘要： An inductor integrated chip and fabrication method thereof is provided. The inductor integrated chip includes a wafer; an inductor bonded on a surface of the wafer; a circuit element formed on the surface of the wafer and coupled to a first end of the inductor; a packaging wafer connected to the surface of the wafer and packaging the inductor and the circuit element; and a connecting electrode formed on the packaging wafer and connected to a second end of the inductor. The method includes forming an inductor and a circuit element on a surface of a wafer, wherein the circuit element is coupled to a first end of the inductor; forming a connecting electrode on a packaging wafer; and packaging the inductor and the circuit element by joining the wafer and the packaging wafer so as to connect the connecting electrode with a second end of the inductor.
摘要翻译：提供一种电感器集成芯片及其制造方法。电感器集成芯片包括晶片; 结合在晶片表面上的电感器; 电路元件，其形成在所述晶片的表面上并且耦合到所述电感器的第一端; 连接到晶片表面并封装电感器和电路元件的封装晶片; 以及形成在封装晶片上并连接到电感器的第二端的连接电极。该方法包括在晶片的表面上形成电感器和电路元件，其中电路元件耦合到电感器的第一端; 在封装晶片上形成连接电极; 并且通过接合晶片和封装晶片来封装电感器和电路元件，以将连接电极与电感器的第二端连接。

5. 发明授权

US07382123B2 Micro fluxgate sensor and method of manufacturing the same 有权
标题翻译：微型磁通门传感器及其制造方法
公开(公告)号：US07382123B2
公开(公告)日：2008-06-03
申请号：US10859591
申请日：2004-06-03
申请人： Kyung-won Na , Sang-on Choi , Hae-seok Park , Dong-sik Shim
发明人： Kyung-won Na , Sang-on Choi , Hae-seok Park , Dong-sik Shim
IPC分类号： G01R33/04 , G01R33/02
CPC分类号： G01R33/05
摘要： A micro-machining method of manufacturing a micro fluxgate sensor manufactured having an amorphous magnetic core includes forming lower coils of an excitation coil and a magnetic field detecting coil on a wafer, depositing a first insulating layer on the lower coils and forming an amorphous magnetic core, depositing a second insulating layer on the amorphous magnetic core and forming upper coils connected to the lower coils to complete the excitation coil and the magnetic field detecting coil, and covering the excitation coil and the magnetic field detecting coil with a protective film, and etching the protective film to expose a portion of the excitation coil and magnetic field detecting coil, thereby forming a pad.
摘要翻译：制造具有非晶磁芯的微通道门传感器的微加工方法包括在晶片上形成励磁线圈和磁场检测线圈的下线圈，在第一下层线圈上沉积第一绝缘层，并形成无定形磁芯在非晶磁芯上沉积第二绝缘层，形成连接到下线圈的上部线圈，以完成励磁线圈和磁场检测线圈，并用保护膜覆盖励磁线圈和磁场检测线圈，以及蚀刻所述保护膜暴露所述激励线圈和磁场检测线圈的一部分，从而形成焊盘。

6. 发明申请

US20060109065A1 Monolithic duplexer 有权
标题翻译：单片双工器
公开(公告)号：US20060109065A1
公开(公告)日：2006-05-25
申请号：US11262889
申请日：2005-11-01
申请人： Yun-kwon Park , In-sang Song , Seok-chul Yun , Seog-woo Hong , Byeoung-ju Ha , Dong-ha Shim , Hae-seok Park , Kuang-woo Nam , Duck-hwan Kim
发明人： Yun-kwon Park , In-sang Song , Seok-chul Yun , Seog-woo Hong , Byeoung-ju Ha , Dong-ha Shim , Hae-seok Park , Kuang-woo Nam , Duck-hwan Kim
IPC分类号： H03H9/70
CPC分类号： H03H3/02 , H03H9/0571 , H03H9/706 , Y10T29/42 , Y10T29/43 , Y10T29/4902 , Y10T29/49155
摘要： A subminiature, high-performance monolithic duplexer is disclosed. The monolithic duplexer includes a substrate, a transmitting-end filter formed in a first area on an upper surface of the substrate, a receiving-end filter formed in a second area on the upper surface of the substrate, a packaging substrate, bonded on an area on the upper surface of the substrate, for packaging the transmitting-end filter and the receiving-end filter in a sealed state, and a phase shifter, formed on one surface of the packaging substrate and connected to the transmitting-end filter and the receiving-end filter, respectively, for intercepting a signal inflow between the transmitting-end filter and the receiving-end filter.
摘要翻译：公开了一种超小型高性能单片双工器。单片双工器包括基板，形成在基板的上表面上的第一区域中的透射端滤光器，形成在基板的上表面上的第二区域中的接收端滤光器，粘合在基板上的封装基板在封装状态下将发送端滤波器和接收端滤波器封装在基板的上表面上的区域，以及形成在封装基板的一个表面上并与发送端滤波器连接的移相器接收端滤波器分别用于截取发送端滤波器与接收端滤波器之间的信号流入。

7. 发明申请

US20050024050A1 Micro fluxgate sensor and method of manufacturing the same 有权
标题翻译：微型磁通门传感器及其制造方法
公开(公告)号：US20050024050A1
公开(公告)日：2005-02-03
申请号：US10859591
申请日：2004-06-03
申请人： Kyung-won Na , Sang-on Choi , Hae-seok Park , Dong-sik Shim
发明人： Kyung-won Na , Sang-on Choi , Hae-seok Park , Dong-sik Shim
IPC分类号： G01R29/08 , G01R33/04 , G01R33/05 , H01F10/13 , H01F41/34 , G11B5/147
CPC分类号： G01R33/05
摘要： A micro-machining method of manufacturing a micro fluxgate sensor manufactured having an amorphous magnetic core includes forming lower coils of an excitation coil and a magnetic field detecting coil on a wafer, depositing a first insulating layer on the lower coils and forming an amorphous magnetic core, depositing a second insulating layer on the amorphous magnetic core and forming upper coils connected to the lower coils to complete the excitation coil and the magnetic field detecting coil, and covering the excitation coil and the magnetic field detecting coil with a protective film, and etching the protective film to expose a portion of the excitation coil and magnetic field detecting coil, thereby forming a pad.
摘要翻译：制造具有非晶磁芯的微通道门传感器的微加工方法包括在晶片上形成励磁线圈和磁场检测线圈的下线圈，在第一下层线圈上沉积第一绝缘层，并形成无定形磁芯在非晶磁芯上沉积第二绝缘层，形成连接到下线圈的上部线圈，以完成励磁线圈和磁场检测线圈，并用保护膜覆盖励磁线圈和磁场检测线圈，以及蚀刻所述保护膜暴露所述激励线圈和磁场检测线圈的一部分，从而形成焊盘。

8. 发明申请

US20050006713A1 Method for manufacturing magnetic field detecting element 有权
标题翻译：磁场检测元件的制造方法
公开(公告)号：US20050006713A1
公开(公告)日：2005-01-13
申请号：US10784479
申请日：2004-02-23
申请人： Dong-sik Shim , Kyung-won Na , Sang-on Choi , Hae-seok Park , Jun-sik Hwang
发明人： Dong-sik Shim , Kyung-won Na , Sang-on Choi , Hae-seok Park , Jun-sik Hwang
IPC分类号： G01R33/02 , G01R33/028 , G01R33/04 , G01R33/05 , H01F17/00 , H01F41/04 , H01F41/14 , H01F41/34 , H01L43/00 , G11B5/127
CPC分类号： G01R33/02 , G01R33/04 , G01R33/05 , H01F17/0006 , H01F41/046
摘要： Disclosed is a method for manufacturing a magnetic field detecting element, capable of simplifying the manufacturing process and providing a thin-type magnetic field detecting element. The disclosed method for manufacturing a magnetic field detecting element according to the present invention, is characterized in forming a seed film on the semiconductor substrate, then partially removing the seed film using a predetermined pattern in advance, for insulation of a plurality of coil lines that would be formed on the seed film, forming a soft magnetic core, and cutting off edges of the semiconductor substrate so that a plurality of the coil lines may be insulated.
摘要翻译：公开了一种能够简化制造工艺并提供薄型磁场检测元件的磁场检测元件的制造方法。所公开的本发明的磁场检测元件的制造方法的特征在于，在半导体基板上形成种子膜，然后预先使用预定图案来部分地除去种子膜，以绝缘多条线圈线将形成在种子膜上，形成软磁芯，并切断半导体衬底的边缘，使得多个线圈线可以被绝缘。

9. 发明授权

US07675154B2 RF module with multi-stack structure 有权
标题翻译： RF模块具有多堆叠结构
公开(公告)号：US07675154B2
公开(公告)日：2010-03-09
申请号：US11634247
申请日：2006-12-06
申请人： Seog-woo Hong , In-sang Song , Byeong-ju Ha , Hae-seok Park , Jun-sik Hwang , Joo-ho Lee
发明人： Seog-woo Hong , In-sang Song , Byeong-ju Ha , Hae-seok Park , Jun-sik Hwang , Joo-ho Lee
IPC分类号： H01L23/02 , H01L23/34 , H01L23/48 , H01L23/52 , H01L29/40
CPC分类号： H03H9/0547 , H01L2924/0002 , H03H9/587 , H01L2924/00
摘要： A radio frequency (RF) module and a multi RF module including the same include a base substrate, a first element capable of processing RF signals formed on the base substrate, a second element capable of processing RF signals separated from and disposed over the first element, a cap substrate coupled with the base substrate to encapsulate the first and second elements including a plurality of through electrodes that electrically connect the first and second elements to the outside, and a bonding pad that encapsulates and joins the base substrate and the cap substrate and electrically connects the first and second elements to the through electrodes.
摘要翻译：射频（RF）模块和包括其的多RF模块包括基底基板，能够处理形成在基底基板上的RF信号的第一元件，能够处理从第一元件分离并布置在第一元件上的RF信号的第二元件，与所述基底衬底耦合以封装所述第一和第二元件的帽衬底，所述第一和第二元件包括将所述第一和第二元件电连接到外部的多个通孔，以及封装并连接所述基底衬底和所述帽衬底的焊盘，以及将第一和第二元件电连接到贯通电极。

10. 发明授权

US07612428B2 Inductor fabricated with dry film resist and cavity and method of fabricating the inductor 有权
标题翻译：用干膜抗蚀剂和腔体制造的电感器和制造电感器的方法
公开(公告)号：US07612428B2
公开(公告)日：2009-11-03
申请号：US11291894
申请日：2005-12-02
申请人： Hae-seok Park , In-sang Song , Hyung Choi
发明人： Hae-seok Park , In-sang Song , Hyung Choi
IPC分类号： H01L29/00
CPC分类号： H01L23/5227 , H01F17/0006 , H01F41/041 , H01F2017/0046 , H01L21/764 , H01L27/08 , H01L2924/0002 , H01L2924/00
摘要： An inductor fabricated with a dry film resist and a cavity and a method of fabricating the inductor. The cavity can be formed in a substrate to minimize a parasitic capacitance generated by structures of upper electrodes, an insulating layer, and a lower electrode and minimize energy loss caused by an eddy current generated through the substrate. Also, a process of forming and planarizing the cavity can be simplified so as to form the cavity to a sufficient depth. As a result, an inductor having a high quality factor and a high self resonant frequency can be fabricated. Also, a scheme for simply forming and planarizing a cavity is contemplated.
摘要翻译：用干膜抗蚀剂和空腔制造的电感器和制造电感器的方法。空腔可以形成在衬底中以最小化由上电极，绝缘层和下电极的结构产生的寄生电容，并且使由通过衬底产生的涡流引起的能量损失最小化。此外，可以简化形成和平坦化空腔的过程，以便将空腔形成为足够的深度。结果，可以制造具有高品质因数和高自谐振频率的电感器。此外，可以想到简单地形成和平坦化空腔的方案。

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