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1. 发明授权

US09536703B2 Scanning electron microscope 有权
标题翻译：扫描电子显微镜
公开(公告)号：US09536703B2
公开(公告)日：2017-01-03
申请号：US14899795
申请日：2014-07-11
申请人： Hitachi High-Technologies Corporation
发明人： Toshihide Agemura , Hideo Morishita
IPC分类号： H01J37/26 , H01J37/244 , H01J37/28
CPC分类号： H01J37/265 , H01J37/244 , H01J37/28 , H01J2237/0475 , H01J2237/103 , H01J2237/1534 , H01J2237/24475 , H01J2237/2448
摘要： This scanning electron microscope is provided with: a deceleration means that decelerates an electron beam (5) when the electron beam is passing through an objective lens; and a first detector (8) and a second detector (7) that are disposed between the electron beam and the objective lens and have a sensitive surface having an axially symmetric shape with respect to the optical axis of the electron beam. The first detector is provided at the sample side with respect to the second detector, and exclusively detects the signal electrons having a high energy that have passed through a retarding field energy filter (9A). When the distance between the tip (13) at the sample side of the objective lens and the sensitive surface of the first detector is L1 and the distance between the tip at the sample side of the objective lens and the sensitive surface of the second detector is L2, then L1/L2≦5/9. As a result, when performing low-acceleration observation using a deceleration method by means of a scanning electron microscope, it is possible to detect signal electrons without the effect of shading in a magnification range of a low magnification on the order of hundreds of times to a high magnification of at least 100,000×. Also, it is possible to highly efficiently detect backscattered electrons, of which the amount generated is less than that of secondary electrons.
摘要翻译：该扫描电子显微镜具备：当电子束通过物镜时减速电子束（5）的减速装置; 以及设置在电子束和物镜之间并且具有相对于电子束的光轴具有轴对称形状的敏感表面的第一检测器（8）和第二检测器（7）。第一检测器相对于第二检测器在样本侧设置，并且专门检测已经通过延迟场能量滤波器（9A）的具有高能量的信号电子。当物镜的样品侧的尖端（13）和第一检测器的敏感表面之间的距离为L1，物镜的样品侧的尖端与第二检测器的敏感表面之间的距离为 L2，则L1 /L2≤5/ 9。结果，当利用扫描电子显微镜使用减速方法进行低加速度观察时，可以在几百倍数倍的低倍数的倍率范围内检测信号电子而不影响阴影效果高倍数至少为100,000×。此外，可以高效地检测产生的量小于二次电子的反向散射电子。

2. 发明授权

US10241062B2 Charged particle beam device, sample observation method, sample platform, observation system, and light emitting member 有权
公开(公告)号：US10241062B2
公开(公告)日：2019-03-26
申请号：US14774367
申请日：2014-01-22
申请人： Hitachi High-Technologies Corporation
发明人： Yusuke Ominami , Mitsugu Sato , Kenko Uchida , Sadamitsu Aso , Taku Sakazume , Hideo Morishita , Sukehiro Ito , Takashi Ohshima
IPC分类号： H01J37/20 , H01J37/28 , H01J37/244 , G01N23/22 , G01N23/2251 , G01N23/2204
摘要： The purpose of the present invention is to eliminate the effort in placement and extraction of samples in observations using transmitted charged particles. A charged particle beam device (601) is characterized by having: a charged particle optical lens tube that irradiates a sample (6) with a primary charged particle beam; a sample stage on which a light emitting member (500) that emits light because of charged particles that have come by transmission internally in the sample (6) or scattering therefrom or a sample platform (600) having the light emitting member (500) is attachably and detachably disposed; and a detector (503) that detects the light emitted by the light emitting member.

3. 发明授权

US09812288B2 Sample holder with light emitting and transferring elements for a charged particle beam apparatus 有权
公开(公告)号：US09812288B2
公开(公告)日：2017-11-07
申请号：US15119950
申请日：2015-01-09
申请人： HITACHI HIGH-TECHNOLOGIES CORPORATION
发明人： Minami Shouji , Takashi Ohshima , Yuusuke Oominami , Hideo Morishita , Kunio Harada
IPC分类号： H01J37/20 , H01J37/16 , H01J37/244 , H01J37/26
CPC分类号： H01J37/244 , H01J37/20 , H01J37/26 , H01J2237/2445 , H01J2237/2808
摘要： The objective of the present invention is to simply perform image observation through transmitted charged particles. A sample irradiated by a charged particle beam is disposed directly or via a predetermined member on a light-emitting element (23) whereinto charged particles that have traversed or scattered inside the sample enter, causing a light to be emitted therefrom, which is collected and detected efficiently using a light transmission means (203) to generate a transmission charged particle image of the sample.

4. 发明授权

US10014151B2 Composite charged particle beam device 有权
公开(公告)号：US10014151B2
公开(公告)日：2018-07-03
申请号：US15548321
申请日：2016-02-04
申请人： HITACHI HIGH-TECHNOLOGIES CORPORATION
发明人： Yuta Imai , Hideo Morishita , Toshihide Agemura
IPC分类号： H01J37/12 , H01J37/28 , H01J37/06 , H01J37/20 , H01J37/08
CPC分类号： H01J37/12 , H01J37/06 , H01J37/08 , H01J37/145 , H01J37/20 , H01J37/28 , H01J2237/08 , H01J2237/121 , H01J2237/244 , H01J2237/2801
摘要： This composite charged particle beam device comprises a first charged particle beam column (6), a second charged particle beam column (1) which is equipped with a deceleration system, and is equipped with a detector (3) inside the column, a test piece stage (10) on which a test piece (9) is placed, and an electric field correction electrode (13) which is provided around the tip of the first charged particle beam column, wherein the electric field correction electrode is an electrode that corrects the electric field distribution formed in the vicinity of the test piece, and the electric field correction electrode is positioned between the test piece and the first charged particle beam column, and on the opposite side from the second charged particle beam column with respect to the optical axis of the first charged particle beam column.

5. 发明授权

US09570268B2 Electron gun, charged particle gun, and charged particle beam apparatus using electron gun and charged particle gun 有权
标题翻译：电子枪，带电粒子枪和使用电子枪和带电粒子枪的带电粒子束装置
公开(公告)号：US09570268B2
公开(公告)日：2017-02-14
申请号：US14787263
申请日：2014-04-14
申请人： HITACHI HIGH-TECHNOLOGIES CORPORATION
发明人： Yuta Imai , Takashi Ohshima , Hideo Morishita
IPC分类号： H01J29/28 , H01J29/00 , H01J27/02 , H01J37/073 , H01J27/26 , H01J37/063 , H01J37/08 , H01J37/28 , H01J37/06 , H01J29/48 , H01J37/145 , H01J37/20
CPC分类号： H01J37/073 , H01J27/02 , H01J27/26 , H01J29/481 , H01J37/06 , H01J37/063 , H01J37/08 , H01J37/145 , H01J37/20 , H01J37/28 , H01J2237/062 , H01J2237/06341 , H01J2237/06375 , H01J2237/0802 , H01J2237/1508 , H01J2237/2007 , H01J2237/2801
摘要： The purpose of the present invention is to provide a charged particle gun using merely an electrostatic lens, said charged particle gun being relatively small and having less aberration, and to provide a field emission-type charged particle gun having high luminance even with a high current. This charged particle gun has: a charged particle source; an acceleration electrode that accelerates charged particles emitted from the charged particle source; a control electrode, which is disposed further toward the charged particle source side than the acceleration electrode, and which has a larger aperture diameter than the aperture diameter of the acceleration electrode; and a control unit that controls, on the basis of a potential applied to the acceleration electrode, a potential to be applied to the control electrode.
摘要翻译：本发明的目的是提供一种仅使用静电透镜的带电粒子枪，所述带电粒子枪相对较小并且具有较小的像差，并且提供即使具有高电流也具有高亮度的场致发射型带电粒子枪。该带电粒子枪具有：带电粒子源; 加速电极，其加速从带电粒子源发射的带电粒子; 控制电极，其设置成比加速电极更加朝向带电粒子源侧，并且具有比加速电极的开口直径大的孔径; 以及控制单元，其基于对加速电极施加的电位控制施加到控制电极的电位。

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