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1. 发明申请

US20190214240A1 APPARATUS FOR AND METHOD OF MASS ANALYSIS 审中-公开
公开(公告)号：US20190214240A1
公开(公告)日：2019-07-11
申请号：US16244359
申请日：2019-01-10
申请人： HITACHI HIGH-TECH SCIENCE CORPORATION
发明人： Masahiro SAKUTA , Yoshiki MATOBA
IPC分类号： H01J49/00 , H01J49/34 , H01J49/04 , H01J49/02
CPC分类号： H01J49/0036 , H01J49/025 , H01J49/0422 , H01J49/0468 , H01J49/34
摘要： Disclosed is an apparatus for and a method of mass analysis, the apparatus and the method being capable of improving a detection accuracy of a target substance including impurities, without increasing a size of the apparatus, and shortening measuring time. The apparatus analyzing a sample containing a target substance and one or more interfering substances, which have a peak of a mass spectrum overlapping that of the target substance includes: a peak correction unit calculating an intensity of net peak D of the mass spectrum of the target substance by subtracting a total sum of estimated intensities of the peak B, which are calculated every predetermined time interval according to the intensity of the peak A and a nonlinear relation F between the peak A and the peak B, from an intensity of peak C of a mass spectrum of the target substance of the sample.

2. 发明申请

US20200041425A1 X-RAY TRANSMISSION INSPECTION APPARATUS AND X-RAY TRANSMISSION INSPECTION METHOD 审中-公开
公开(公告)号：US20200041425A1
公开(公告)日：2020-02-06
申请号：US16525352
申请日：2019-07-29
申请人： HITACHI HIGH-TECH SCIENCE CORPORATION
发明人： Yoshiki MATOBA
IPC分类号： G01N23/046 , G01N23/083 , G01N23/18
摘要： An X-ray transmission inspection apparatus includes an X-ray source for irradiating a sample with X-rays, a two-dimensional sensor for detecting transmission X-rays passing through the sample, a sample moving mechanism for moving the sample, a calculation unit for processing an image of the transmission X-rays detected by the two-dimensional sensor, and a display unit for displaying a cross-sectional image. When V1 is a speed at which the sample moves, F is a frame rate of the two-dimensional sensor, A is a sample pitch of the two-dimensional sensor, and LS is a distance between the X-ray source and the two-dimensional sensor, the calculation unit creates a cross-sectional image taken at a distance L from the X-ray source by adding the images of the pixels positioned at an interval of [(LS×V2)/(L×F×A)] in a direction in which the sample moves.

3. 发明申请

US20180202947A1 X-RAY INSPECTION METHOD AND X-RAY INSPECTION DEVICE 审中-公开
公开(公告)号：US20180202947A1
公开(公告)日：2018-07-19
申请号：US15744223
申请日：2016-05-13
申请人： HITACHI HIGH-TECH SCIENCE CORPORATION
发明人： Yuta URANO , Kaifeng ZHANG , Yoshiki MATOBA , Akihiro TAKEDA
IPC分类号： G01N23/04 , G01N23/10 , G01N23/18
CPC分类号： G01N23/04 , G01N23/10 , G01N23/18 , G01N2223/60
摘要： Detection can be performed even for a thick inspection target object through time delay integration without degradation of spatial resolution. There is provided an X-ray inspection device configured to include: an X-ray source that generates X-rays; a transport unit that performs transporting a sample; a detecting unit that has a time delay integration type detector which detects X-rays generated by the X-ray source and transmitted through the sample transported by the transport unit; and a defect determining unit that processes a signal obtained by detecting the X-rays transmitted through the sample by the time delay integration type detector of the detecting unit and determines a defect in the sample. The transport unit performs transporting the sample while causing the sample to rotate in synchronization with the transporting when the sample passes in front of the time delay integration type detector of the detecting unit.

4. 发明公开

US20240297316A1 HYDROGEN IMPURITY TESTING SYSTEM AND HYDROGEN IMPURITY TESTING METHOD 审中-公开
公开(公告)号：US20240297316A1
公开(公告)日：2024-09-05
申请号：US18584812
申请日：2024-02-22
申请人： HITACHI HIGH-TECH SCIENCE CORPORATION
发明人： Yoshitaka SASAGO , Daisuke RYUZAKI , Naoki SUZUKI , Toshiyuki TAKAHARA , Yoshiki MATOBA
IPC分类号： H01M8/0444 , G01N27/00
CPC分类号： H01M8/0444 , G01N27/002
摘要： The highly reliable hydrogen impurity testing system includes a sensor unit installed in an atmosphere with highly concentrated hydrogen containing toxic impurities, a heater unit capable of heating the sensor unit, and a system controller controlling the sensor unit and the heater unit. The heater unit includes a semiconductor substrate, an impurity layer of a first conductive type, a metal oxide layer, and a metal electrode layer capable of adsorbing toxic impurities being present on the surface of the metal oxide layer. The system controller detects the concentration of the toxic impurities by measuring the change in work function of the metal electrode layer according to the type and concentration of the toxic impurities, and performs a refreshing operation of desorbing the toxic impurities adsorbed on the metal electrode layer by heating the metal electrode layer with the heater unit based on the result of detection.

5. 发明申请

US20190027349A1 MASS ANALYSIS APPARATUS AND METHOD 审中-公开
公开(公告)号：US20190027349A1
公开(公告)日：2019-01-24
申请号：US16041679
申请日：2018-07-20
申请人： HITACHI HIGH-TECH SCIENCE CORPORATION
发明人： Masahiro SAKUTA , Shin OKAWA , Yoshiki MATOBA
IPC分类号： H01J49/00 , H01J49/42 , H01J49/10
摘要： Disclosed is a mass analysis apparatus and method, wherein the precision of detection of a first material including a second material is improved, without enlarging the apparatus, and the measurement time is reduced. The mass analysis apparatus for analyzing a sample containing a first material including an organic compound and at least one second material including an organic compound and having a mass spectrum peak overlapping that of the first material includes a peak correction unit, wherein, when an intensity ratio (peak B)/(peak A) of peak A, not overlapping that of the first material, and peak B, overlapping that of the first material, is a correction coefficient (W), an intensity of a net peak D of the mass spectrum of the first material is calculated by subtracting W×(intensity of peak A) from an intensity of a peak C of the mass spectrum of the first material in the sample.

6. 发明申请

US20170031054A1 X-RAY TRANSMISSION INSPECTION APPARATUS AND INSPECTION METHOD USING THE SAME 审中-公开
标题翻译： X射线透射检测装置及使用该检测装置的检查方法
公开(公告)号：US20170031054A1
公开(公告)日：2017-02-02
申请号：US15220880
申请日：2016-07-27
申请人： HITACHI HIGH-TECH SCIENCE CORPORATION
发明人： Yoshiki MATOBA , Akihiro TAKEDA , Shingo TSUBOI , Toshihiro SAKAI
IPC分类号： G01V5/00 , G01S17/08
CPC分类号： G01N23/04 , G01N2223/50 , G01N2223/652 , G01S17/08
摘要： Disclosed are an X-ray transmission inspection apparatus and an inspection method using the same that are capable of preventing over-detection and erroneous detection of foreign matter even when variations in vertical position of the sample occur. The X-ray transmission inspection apparatus includes: an X-ray source (2) irradiating a sample with X-rays; a sample moving device (3) moving the sample S continuously to a predetermined direction while X-rays X are emitted from the X-ray source; a time delay integration sensor (TDI sensor) (4) provided opposed to the X-ray source based on the sample, and detecting the X-rays transmitted through the sample; a distance sensor (5) measuring a distance between the X-ray source and the sample; and a TDI controller (6) controlling the TDI sensor by changing a charge transfer speed of the TDI sensor (4) in real time based on variations in the distance measured by the distance sensor.
摘要翻译：公开了即使在发生样品的垂直位置的变化的情况下也能够防止异物的过检测和错误检测的X射线透射检查装置及其检查方法。 X射线透射检查装置包括：X射线源（2），用X射线照射样品; 样品移动装置（3），在从X射线源发射X射线X的同时，将样品S连续移动到规定的方向; 延迟积分传感器（TDI传感器）（4），其基于所述样本与所述X射线源相对设置，并且检测通过所述样本透射的X射线; 距离传感器（5），其测量所述X射线源与所述样本之间的距离; 和TDI控制器（6），其通过基于由距离传感器测量的距离的变化实时改变TDI传感器（4）的电荷转移速度来控制TDI传感器。

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