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1. 发明授权

US07607647B2 Stabilizing a substrate using a vacuum preload air bearing chuck 有权
标题翻译：使用真空预压空气轴承卡盘稳定基板
公开(公告)号：US07607647B2
公开(公告)日：2009-10-27
申请号：US11688720
申请日：2007-03-20
申请人： Guoheng Zhao , Alexander Belyaev , Christian H. Wolters , Paul Andrew Doyle , Howard W. Dando , Mehdi Vaez-Iravani
发明人： Guoheng Zhao , Alexander Belyaev , Christian H. Wolters , Paul Andrew Doyle , Howard W. Dando , Mehdi Vaez-Iravani
IPC分类号： B25B11/00
CPC分类号： B25B11/005 , F16C29/025 , F16C32/0603 , H01L21/67784 , H01L21/6838
摘要： Substrate processing method and apparatus are disclosed. The substrate processing apparatus includes a non-contact air bearing chuck with a vacuum preload.
摘要翻译：公开了基板处理方法和装置。基板处理装置包括具有真空预载的非接触式空气轴承卡盘。

2. 发明申请

US20080229811A1 STABILIZING A SUBSTRATE USING A VACUUM PRELOAD AIR BEARING CHUCK 有权
标题翻译：使用真空预紧空气轴承座稳定基板
公开(公告)号：US20080229811A1
公开(公告)日：2008-09-25
申请号：US11688720
申请日：2007-03-20
申请人： Guoheng Zhao , Alexander Belyaev , Christian H. Wolters , Paul Andrew Doyle , Howard W. Dando , Mehdi Vaez-Iravani
发明人： Guoheng Zhao , Alexander Belyaev , Christian H. Wolters , Paul Andrew Doyle , Howard W. Dando , Mehdi Vaez-Iravani
IPC分类号： G01N21/00
CPC分类号： B25B11/005 , F16C29/025 , F16C32/0603 , H01L21/67784 , H01L21/6838
摘要： Substrate processing method and apparatus are disclosed. The substrate processing apparatus includes a non-contact air bearing chuck with a vacuum preload.
摘要翻译：公开了基板处理方法和装置。基板处理装置包括具有真空预载的非接触式空气轴承卡盘。

3. 发明授权

US08817250B2 Air bearing for substrate inspection device 有权
标题翻译：基板检查装置用空气轴承
公开(公告)号：US08817250B2
公开(公告)日：2014-08-26
申请号：US13226032
申请日：2011-09-06
申请人： Paul Doyle , Guoheng Zhao , Alexander Belyaev , Christian H. Wolters , Howard W. Dando , Mehdi Vaez-Iravani , Carmela C. Moreno
发明人： Paul Doyle , Guoheng Zhao , Alexander Belyaev , J. Rex Runyon , Christian H. Wolters , Howard W. Dando , Mehdi Vaez-Iravani
IPC分类号： G01N21/00
CPC分类号： H01L21/6838
摘要： A tool for investigating a substrate, where the tool has a tool head for investigating the substrate, a chuck for disposing an upper surface of the substrate in proximity to the tool head, and an air bearing disposed on the tool head adjacent the substrate. The air bearing has a pressure source and a vacuum source, where the vacuum source draws the substrate toward the air bearing and the pressure source prevents the substrate from physically contacting the air bearing. The pressure source and the vacuum source work in cooperation to dispose the upper surface of the substrate at a known distance from the tool head. By using the air bearing as part of the tool in this manner, registration of the substrate to the tool head is accomplished relative to the upper surface of the substrate, not the back side of the substrate.
摘要翻译：一种用于调查基板的工具，其中该工具具有用于检查基板的工具头，用于将基板的上表面设置在工具头附近的卡盘以及设置在与基板相邻的工具头上的空气轴承。空气轴承具有压力源和真空源，其中真空源将基板拉向空气轴承，并且压力源防止基板物理接触空气轴承。压力源和真空源协同工作，将衬底的上表面设置在与工具头一段已知距离处。通过以这种方式使用空气轴承作为工具的一部分，基板相对于基板的上表面而不是基板的背面完成对准工具头。

4. 发明申请

US20120062877A1 Referenced Inspection Device 有权
标题翻译：参考检验装置
公开(公告)号：US20120062877A1
公开(公告)日：2012-03-15
申请号：US13226032
申请日：2011-09-06
申请人： Paul Doyle , Guoheng Zhao , Alexander Belyaev , J. Rex Runyon , Christian H. Wolters , Howard W. Dando , Mehdi Vaez-Iravani
发明人： Paul Doyle , Guoheng Zhao , Alexander Belyaev , J. Rex Runyon , Christian H. Wolters , Howard W. Dando , Mehdi Vaez-Iravani
IPC分类号： G01N21/88 , G01R31/26
CPC分类号： H01L21/6838
摘要： A tool for investigating a substrate, where the tool has a tool head for investigating the substrate, a chuck for disposing an upper surface of the substrate in proximity to the tool head, and an air bearing disposed on the tool head adjacent the substrate. The air bearing has a pressure source and a vacuum source, where the vacuum source draws the substrate toward the air bearing and the pressure source prevents the substrate from physically contacting the air bearing. The pressure source and the vacuum source work in cooperation to dispose the upper surface of the substrate at a known distance from the tool head. By using the air bearing as part of the tool in this manner, registration of the substrate to the tool head is accomplished relative to the upper surface of the substrate, not the back side of the substrate.
摘要翻译：一种用于调查基板的工具，其中该工具具有用于检查基板的工具头，用于将基板的上表面设置在工具头附近的卡盘以及设置在与基板相邻的工具头上的空气轴承。空气轴承具有压力源和真空源，其中真空源将基板拉向空气轴承，并且压力源防止基板物理接触空气轴承。压力源和真空源协同工作，将衬底的上表面设置在与工具头一段已知距离处。通过以这种方式使用空气轴承作为工具的一部分，基板相对于基板的上表面而不是基板的背面完成对准工具头。

5. 发明授权

US08042254B1 Method for improving edge handling chuck aerodynamics 有权
标题翻译：改善边缘处理卡盘空气动力学的方法
公开(公告)号：US08042254B1
公开(公告)日：2011-10-25
申请号：US11963271
申请日：2007-12-21
申请人： Alexander Belyaev , Christian H. Wolters , Aleksey Petrenko , Paul Doyle
发明人： Alexander Belyaev , Christian H. Wolters , Aleksey Petrenko , Paul Doyle
IPC分类号： B23B31/18 , B05C13/00
CPC分类号： H01L21/68785 , Y10T29/49998 , Y10T279/18
摘要： An edge-handling chuck, a system for holding and rotating a test substrate at a high speed and a method for chucking a rotating substrate are disclosed. The Chuck includes a plate having a central axis, a fluid opening and a top surface with a varied topography characterized by symmetry about the central axis. The topography is such that a volume flow rate of fluid between the fluid opening and a periphery of the top surface sufficient to counteract substrate sagging is significantly less than a volume flow rate needed for a similar but flat-surfaced chuck to similarly counteract such sagging. The system may further include a spindle motor and a gas system that supplies gas through the fluid opening to a gap between the top surface and a back surface of the substrate. A radial velocity of the fluid through the gap is approximately constant.
摘要翻译：公开了一种边缘处理卡盘，用于高速保持和旋转测试基板的系统以及用于夹持旋转基板的方法。卡盘包括具有中心轴线的板，流体开口和具有以围绕中心轴线对称为特征的不同形貌的顶部表面。这种形状使得流体开口和足以抵消底物下垂的顶表面周边之间的流体的体积流速显着小于类似但平坦表面的卡盘相似地抵消这种下垂所需的体积流量。该系统还可以包括主轴电动机和气体系统，其将气体通过流体开口提供到衬底的顶表面和后表面之间的间隙。通过间隙的流体的径向速度近似恒定。

6. 发明授权

US07436508B2 Systems, circuits and methods for reducing thermal damage and extending the detection range of an inspection system 有权
标题翻译：用于减少热损伤并延长检查系统检测范围的系统，电路和方法
公开(公告)号：US07436508B2
公开(公告)日：2008-10-14
申请号：US11181228
申请日：2005-07-14
申请人： Christian H. Wolters , Anatoly Romanovsky
发明人： Christian H. Wolters , Anatoly Romanovsky
IPC分类号： G01N21/00
CPC分类号： G01N21/47 , G01N21/21 , G01N21/9501 , G01N21/95607
摘要： Inspection systems, circuits, and methods are provided to enhance defect detection by reducing thermal damage to large particles by dynamically altering the incident laser beam power level supplied to the specimen during a surface inspection scan. In one embodiment, an inspection system includes an illumination subsystem for directing light to a specimen at a first power level, a detection subsystem for detecting light scattered from the specimen, and a power attenuator subsystem for dynamically altering the power level directed to the specimen based on the scattered light detected from the specimen. For example, the power attenuator subsystem may reduce the directed light to a second power level, which is lower than the first, if the detected scattered light exceeds a predetermined threshold level. In addition reducing thermal damage, the systems and methods described herein may be used to extend the measurement detection range of an inspection system by providing a variable-power inspection system.
摘要翻译：提供检查系统，电路和方法以通过在表面检查扫描期间动态地改变提供给样本的入射激光束功率水平来减小对大颗粒的热损伤来增强缺陷检测。在一个实施例中，检查系统包括用于将光引导到第一功率级的样本的照明子系统，用于检测从样本散射的光的检测子系统和用于动态地改变针对标本的功率水平的功率衰减器子系统对从样品检测到的散射光。例如，如果检测到的散射光超过预定的阈值电平，则功率衰减器子系统可以将定向光减少到低于第一功率电平的第二功率电平。此外，减少热损伤，本文所述的系统和方法可以用于通过提供可变功率检查系统来扩展检查系统的测量检测范围。

7. 发明申请

US20090096505A1 SYSTEMS, CIRCUITS AND METHODS FOR REDUCING THERMAL DAMAGE AND EXTENDING THE DETECTION RANGE OF AN INSPECTION SYSTEM 有权
标题翻译：用于减少热损害并延长检测系统检测范围的系统，电路和方法
公开(公告)号：US20090096505A1
公开(公告)日：2009-04-16
申请号：US12251227
申请日：2008-10-14
申请人： Christian H. Wolters , Anatoly Romanovsky
发明人： Christian H. Wolters , Anatoly Romanovsky
IPC分类号： G05F1/00
CPC分类号： G01N21/47 , G01N21/21 , G01N21/9501 , G01N21/95607
摘要： Inspection systems, circuits, and methods are provided to enhance defect detection by reducing thermal damage to large particles by dynamically altering the incident laser beam power level supplied to the specimen during a surface inspection scan. In one embodiment, an inspection system includes an illumination subsystem for directing light to a specimen at a first power level, a detection subsystem for detecting light scattered from the specimen, and a power attenuator subsystem for dynamically altering the power level directed to the specimen based on the scattered light detected from the specimen. For example, the power attenuator subsystem may reduce the directed light to a second power level, which is lower than the first, if the detected scattered light exceeds a predetermined threshold level. In addition reducing thermal damage, the systems and methods described herein may be used to extend the measurement detection range of an inspection system by providing a variable-power inspection system.
摘要翻译：提供检查系统，电路和方法以通过在表面检查扫描期间动态地改变提供给样本的入射激光束功率水平来减小对大颗粒的热损伤来增强缺陷检测。在一个实施例中，检查系统包括用于将光引导到第一功率级的样本的照明子系统，用于检测从样本散射的光的检测子系统和用于动态地改变针对标本的功率水平的功率衰减器子系统对从样品检测到的散射光。例如，如果检测到的散射光超过预定的阈值电平，则功率衰减器子系统可以将定向光减少到低于第一功率电平的第二功率电平。此外，减少热损伤，本文所述的系统和方法可以用于通过提供可变功率检查系统来扩展检查系统的测量检测范围。

8. 发明授权

US07414715B2 Systems, circuits and methods for extending the detection range of an inspection system by avoiding detector saturation 有权
标题翻译：用于通过避免检测器饱和来扩展检测系统的检测范围的系统，电路和方法
公开(公告)号：US07414715B2
公开(公告)日：2008-08-19
申请号：US11181519
申请日：2005-07-14
申请人： Christian H. Wolters , Anatoly Romanovsky , Alexander Slobodov
发明人： Christian H. Wolters , Anatoly Romanovsky , Alexander Slobodov
IPC分类号： G01N21/00
CPC分类号： G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/95607 , H01J43/30
摘要： Inspection systems, circuits and methods are provided to enhance defect detection by addressing anode saturation as a limiting factor of the measurement detection range of a photomultiplier tube (PMT) detector. In accordance with one embodiment of the invention, a method for inspecting a specimen includes directing light to the specimen and detecting light scattered from the specimen. The step of detecting may include monitoring an anode current of the PMT detector, and detecting features, defects or light scattering properties of the specimen using the anode current until the anode current reaches a predetermined threshold. Thereafter, the method may use a dynode current of the PMT for detecting the features, defects or light scattering properties of the specimen.
摘要翻译：提供检测系统，电路和方法，以通过寻址阳极饱和度作为光电倍增管（PMT）检测器的测量检测范围的限制因素来增强缺陷检测。根据本发明的一个实施例，用于检查样本的方法包括将光引导到样本并检测从样本散射的光。检测步骤可以包括监测PMT检测器的阳极电流，并且使用阳极电流检测样品的特征，缺陷或光散射特性，直到阳极电流达到预定阈值。此后，该方法可以使用PMT的倍增电流来检测样品的特征，缺陷或光散射性质。

9. 发明授权

US07671982B2 Systems, circuits and methods for reducing thermal damage and extending the detection range of an inspection system 有权
标题翻译：用于减少热损伤并延长检查系统检测范围的系统，电路和方法
公开(公告)号：US07671982B2
公开(公告)日：2010-03-02
申请号：US12251227
申请日：2008-10-14
申请人： Christian H. Wolters , Anatoly Romanovsky
发明人： Christian H. Wolters , Anatoly Romanovsky
IPC分类号： G01N21/00
CPC分类号： G01N21/47 , G01N21/21 , G01N21/9501 , G01N21/95607
摘要： Inspection systems, circuits, and methods are provided to enhance defect detection by reducing thermal damage to large particles by dynamically altering the incident laser beam power level supplied to the specimen during a surface inspection scan. In one embodiment, an inspection system includes an illumination subsystem for directing light to a specimen at a first power level, a detection subsystem for detecting light scattered from the specimen, and a power attenuator subsystem for dynamically altering the power level directed to the specimen based on the scattered light detected from the specimen. The power attenuator subsystem may reduce the directed light to a second power level, which is lower than the first, if the detected scattered light exceeds a predetermined threshold level. The systems and methods described herein may also be used to extend the measurement detection range of an inspection system by providing a variable-power inspection system.
摘要翻译：提供检查系统，电路和方法以通过在表面检查扫描期间动态地改变提供给样本的入射激光束功率水平来减小对大颗粒的热损伤来增强缺陷检测。在一个实施例中，检查系统包括用于将光引导到第一功率级的样本的照明子系统，用于检测从样本散射的光的检测子系统和用于动态地改变针对标本的功率水平的功率衰减器子系统对从样品检测到的散射光。如果检测到的散射光超过预定的阈值电平，则功率衰减器子系统可将定向光减少至低于第一功率电平的第二功率电平。本文所述的系统和方法还可以用于通过提供可变功率检查系统来扩展检查系统的测量检测范围。

10. 发明授权

US07746462B2 Inspection systems and methods for extending the detection range of an inspection system by forcing the photodetector into the non-linear range 有权
标题翻译：用于通过强制光电探测器进入非线性范围来扩展检查系统的检测范围的检查系统和方法
公开(公告)号：US07746462B2
公开(公告)日：2010-06-29
申请号：US11751293
申请日：2007-05-21
申请人： Zhongping Cai , Alexander Slobodov , Anatoly Romanovsky , Christian H. Wolters
发明人： Zhongping Cai , Alexander Slobodov , Anatoly Romanovsky , Christian H. Wolters
IPC分类号： G01N21/00
CPC分类号： G01N21/9501 , G01N21/8851 , G01N2201/1241 , G01N2201/12769 , H01J43/18 , H01J43/30
摘要： An inspection system and method is provided herein for increasing the detection range of the inspection system. According to one embodiment, the inspection system may include a photodetector having a plurality of stages, which are adapted to convert light scattered from a specimen into an output signal, and a voltage divider network coupled for extending the detection range of the photodetector (and thus, the detection range of the inspection system) by saturating at least one of the stages. This forces the photodetector to operate in a non-linear manner. However, measurement inaccuracies are avoided by calibrating the photodetector output to remove any non-linear effects that may be created by intentionally saturating the at least one of the stages. In one example, a table of values may be generated during a calibration phase to convert the photodetector output into an actual amount of scattered light.
摘要翻译：本文提供了一种用于增加检查系统的检测范围的检查系统和方法。根据一个实施例，检查系统可以包括具有多个级的光电检测器，其适于将从样本散射的光转换成输出信号，以及耦合的用于扩展光电检测器的检测范围的分压器网络，检查系统的检测范围）通过饱和至少一个级。这迫使光电探测器以非线性方式工作。然而，通过校准光电检测器输出以消除可能通过故意饱和至少一个级而产生的任何非线性效应来避免测量不准确。在一个示例中，可以在校准阶段期间生成值表，以将光电检测器输出转换成实际的散射光量。

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