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    • 4. 发明申请
    • Hardened nano-imprinting stamp
    • 硬化纳米印记邮票
    • US20050150404A1
    • 2005-07-14
    • US11065171
    • 2005-02-23
    • Heon LeeGun-Young Jung
    • Heon LeeGun-Young Jung
    • B82B3/00B81C1/00G03F7/00H01L21/027B41K1/42
    • B82Y10/00B81C99/009B82Y40/00G03F7/0002G03F7/0017Y10T428/24355
    • A hardened nano-imprinting stamp and a method of forming a hardened nano-imprinting stamp are disclosed. The hardened nano-imprinting stamp includes a plurality of silicon-based nano-sized features that have an hardened shell of silicon carbide, silicon nitride, or silicon carbide nitride. The hardened shell is made harder than the underlying silicon by a plasma carburization and/or a plasma nitridation process. During the plasma process atoms of carbon and/or nitrogen bombard and penetrate a plurality of exposed surfaces of the nano-sized features and chemically react with the silicon to form the hardened shell of silicon carbide, silicon nitride, or silicon carbide nitride. The lifetime, durability, economy, and accuracy of the resulting hardened nano-imprinting stamp are improved.
    • 公开了一种硬化的纳米压印印模和形成硬化的纳米压印印模的方法。 硬化的纳米压印印模包括多个硅基纳米尺寸特征,其具有碳化硅,氮化硅或碳化硅氮化物的硬化壳。 通过等离子体渗碳和/或等离子体氮化处理使硬化的壳比下面的硅更硬。 在等离子体工艺期间,碳和/或氮原子轰击并穿透纳米尺寸特征的多个暴露表面并与硅发生化学反应以形成碳化硅,氮化硅或碳化硅氮化物的硬化壳。 提高了所得到的硬化纳米压印印模的寿命,耐久性,经济性和精度。
    • 10. 发明授权
    • Electronic device, method for manufacturing the same and touch panel including the same
    • 电子装置及其制造方法以及包含该装置的触摸面板
    • US09081460B2
    • 2015-07-14
    • US13475341
    • 2012-05-18
    • Huisu JeongGun-Young Jung
    • Huisu JeongGun-Young Jung
    • H01B13/00G06F3/045B82Y10/00
    • G06F3/045B82Y10/00G06F2203/04103
    • Provided are an electronic device, a method of manufacturing the same, and a touch panel including the device. The electronic device includes a nanostructure having a plurality of metal oxide nanorods vertically aligned at predetermined intervals in intersection regions between bottom electrodes and top electrodes that perpendicularly cross each other. The nanorods are formed to the same diameter and the same height so that the electronic device can exhibit uniform performance. Also, a method of manufacturing an electronic device includes selectively vertically growing the same number of metal oxide nanostructures with a uniform size only on the bottom electrodes using a nano-template with a plurality of vertical holes. Furthermore, a touch panel includes a nanostructure having a plurality of piezoelectric nanorods disposed in a plurality of touch cells arranged in a matrix.
    • 提供了一种电子设备,其制造方法和包括该设备的触摸面板。 电子器件包括具有多个金属氧化物纳米棒的纳米结构,该金属氧化物纳米棒在底部电极和彼此垂直交叉的顶部电极之间的交叉区域中以预定间隔垂直对准。 纳米棒形成为相同的直径和相同的高度,使得电子器件可以表现出均匀的性能。 此外,制造电子器件的方法包括使用具有多个垂直孔的纳米模板,在底部电极上选择性地垂直生长具有均匀尺寸的相同数量的金属氧化物纳米结构。 此外,触摸面板包括具有布置在矩阵中的多个触摸单元中的多个压电纳米棒的纳米结构。