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    • 2. 发明申请
    • DEFLECTING MIRROR FOR DEFLECTING AND SCANNING LIGHT BEAM
    • 用于偏转和扫描光束的偏转镜
    • US20100195180A1
    • 2010-08-05
    • US12695522
    • 2010-01-28
    • Goichi AkanumaTomofumi KitazawaFumiko Sakoh
    • Goichi AkanumaTomofumi KitazawaFumiko Sakoh
    • G02B26/10
    • G02B26/0858G02B26/105H01L41/0933
    • The deflecting mirror includes a fixed base member; a mirror having a reflection surface; a support member swingably supporting the mirror; a pair of driving beam members, each having a first end connected with the fixed base member and a second end connected with the support member to support the support member from both sides; and a piezoelectric member fixed to each driving beam member and extending from the first or second end of each driving beam member while having length not longer than about half the length of the driving beam member. The piezoelectric member and the driving beam members constitute piezoelectric unimorph or bimorph structure. By applying voltage to the piezoelectric member, the driving beam members are driven at the same time in the same direction, thereby vibrating the support member in a direction perpendicular to the reflection surface of the mirror, resulting in swinging of the mirror.
    • 偏转镜包括固定基座构件; 具有反射面的反射镜; 可摆动地支撑镜子的支撑构件; 一对驱动梁构件,每个具有与固定基座构件连接的第一端和与支撑构件连接的第二端以从两侧支撑支撑构件; 以及压电构件,其固定到每个驱动梁构件并且从每个驱动梁构件的第一端或第二端延伸,同时具有不大于驱动梁构件的长度的大约一半的长度。 压电构件和驱动梁构件构成压电单压块或双压电晶片结构。 通过向压电构件施加电压,驱动梁构件同时被驱动,沿与垂直于反射镜反射面的方向振动支撑构件,从而使反射镜摆动。
    • 3. 发明授权
    • Deflecting mirror for deflecting and scanning light beam
    • 用于偏转和扫描光束的偏转镜
    • US08395834B2
    • 2013-03-12
    • US12695522
    • 2010-01-28
    • Goichi AkanumaTomofumi KitazawaFumiko Sakoh
    • Goichi AkanumaTomofumi KitazawaFumiko Sakoh
    • G02B26/08
    • G02B26/0858G02B26/105H01L41/0933
    • The deflecting mirror includes a fixed base member; a mirror having a reflection surface; a support member swingablly supporting the mirror; a pair of driving beam members, each having a first end connected with the fixed base member and a second end connected with the support member to support the support member from both sides; and a piezoelectric member fixed to each driving beam member and extending from the first or second end of each driving beam member while having length not longer than about half the length of the driving beam member. The piezoelectric member and the driving beam members constitute piezoelectric unimorph or bimorph structure. By applying voltage to the piezoelectric member, the driving beam members are driven at the same time in the same direction, thereby vibrating the support member in a direction perpendicular to the reflection surface of the mirror, resulting in swinging of the mirror.
    • 偏转镜包括固定基座构件; 具有反射面的反射镜; 支撑构件摆动地支撑镜子; 一对驱动梁构件,每个具有与固定基座构件连接的第一端和与支撑构件连接的第二端以从两侧支撑支撑构件; 以及压电构件,其固定到每个驱动梁构件并且从每个驱动梁构件的第一端或第二端延伸,同时具有不大于驱动梁构件的长度的大约一半的长度。 压电构件和驱动梁构件构成压电单压块或双压电晶片结构。 通过向压电构件施加电压,驱动梁构件同时被驱动,沿与垂直于反射镜反射面的方向振动支撑构件,从而使反射镜摆动。