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1. 发明申请

US20060141304A1 Method and apparatus for a combined fuel cell and hydrogen purification system 有权
标题翻译：用于组合燃料电池和氢气净化系统的方法和装置
公开(公告)号：US20060141304A1
公开(公告)日：2006-06-29
申请号：US11364419
申请日：2006-02-28
申请人： Glen Benson , Arne Ballantine , John Parks , Wieslaw Zielinski , Eric White , Robert Sinuc
发明人： Glen Benson , Arne Ballantine , John Parks , Wieslaw Zielinski , Eric White , Robert Sinuc
IPC分类号： H01M8/04 , H01M8/06
CPC分类号： C01B3/32 , C01B2203/0205 , C01B2203/04 , C01B2203/0415 , C01B2203/066 , C01B2203/0811 , C01B2203/0822 , C01B2203/0827 , C01B2203/1288 , F17C11/005 , H01M8/04089 , H01M8/04201 , H01M8/04225 , H01M8/04302 , H01M8/04619 , H01M8/04776 , H01M8/0612 , H01M8/0662 , H01M8/241 , H01M8/2457 , H01M2008/1095 , Y02E60/321 , Y02P20/128
摘要： Fuel cell systems and associated methods of operation are provided whereby application of a fuel cell is coordinated with a fuel processor and a hydrogen separator. One such method includes the following steps: (1) operating a fuel processor to convert a hydrocarbon to reformate; (2) reacting the reformate in a fuel cell to generate electrical power; (3) supplying the electrical power to an electrical load, wherein the electrical load has a power requirement threshold; (4) determining whether the electrical power from the fuel cell is below the power requirement threshold; (5) increasing a flow of reformate from the fuel processor to the fuel cell when the electrical power from the fuel cell is below the power requirement threshold; (6) flowing a portion of the reformate from the fuel processor to a hydrogen separator; (7) storing hydrogen from the hydrogen separator in a hydrogen storage vessel; (8) monitoring an amount of hydrogen stored in the hydrogen storage vessel; and (9) adjusting a proportional valve upstream from the fuel cell toward a closed position when the amount of hydrogen in the hydrogen storage tank is below a predetermined threshold to increase a proportion of the reformate from the fuel processor that is flowed to the hydrogen separator.
摘要翻译：提供燃料电池系统和相关联的操作方法，由此燃料电池的应用与燃料处理器和氢气分离器协调。一种这样的方法包括以下步骤：（1）操作燃料处理器以将碳氢化合物转化为重整产物; （2）使重整产物在燃料电池中反应以产生电力; （3）向电负载供电，其中所述电负载具有功率需求阈值; （4）确定来自燃料电池的电力是否低于功率需求阈值; （5）当来自燃料电池的电力低于功率需求阈值时，增加从燃料处理器到燃料电池的重整产物流; （6）使一部分重整产物从燃料处理器流到氢分离器; （7）将来自所述氢分离器的氢存储在氢存储容器中; （8）监测储存在氢存储容器中的氢的量; 和（9）当储氢箱中的氢气量低于预定阈值时，将燃料电池上游的比例阀调节到关闭位置，以增加重整产物从流向氢气分离器的燃料处理器的比例。

2. 发明申请

US20070128476A1 Method and apparatus for controlling a combined heat and power fuel cell system 审中-公开
标题翻译：用于控制燃料电池组合系统的方法和装置
公开(公告)号：US20070128476A1
公开(公告)日：2007-06-07
申请号：US11593457
申请日：2006-11-06
申请人： Arne Ballantine , Ryan Hallum , John Parks , Dustan Skidmore
发明人： Arne Ballantine , Ryan Hallum , John Parks , Dustan Skidmore
IPC分类号： H01M8/04
CPC分类号： H01M8/04007 , H01M8/04089 , H01M8/0432 , H01M8/04373 , H01M8/04559 , H01M8/04589 , H01M8/04604 , H01M8/04701 , H01M8/04731 , H01M8/04738 , H01M8/04753 , H01M8/04768 , H01M8/04776 , H01M8/0612 , Y02E20/14
摘要： A cogeneration fuel cell system and associated methods of operation are provided that accommodate a demand for heat as well as a demand for electric power. The system is operated among various modes to balance heat and power demand signals. In general, a fuel cell system is coupled to a power sink and a heat sink, and a controller is adapted to respond to data signals from the power sink and the heat sink. As examples, such data signals from the heat sink may include a temperature indication or a heat demand signal (such as from a thermostat), and such data signals from the power sink may include a voltage or current measurement, an electrical power demand signal, or an electrical load.
摘要翻译：提供了热电联产燃料电池系统和相关的操作方法，其适应对热量的需求以及对电力的需求。该系统在各种模式之间运行，以平衡热和电力需求信号。通常，燃料电池系统耦合到电力接收器和散热器，并且控制器适于响应于来自电力接收器和散热器的数据信号。作为示例，来自散热器的这种数据信号可以包括温度指示或热量需求信号（例如来自恒温器），并且来自功率吸收器的这种数据信号可以包括电压或电流测量，电力需求信号，或电负载。

3. 发明申请

US20060014058A1 Method and apparatus for controlling a combined heat and power fuel cell system 失效
公开(公告)号：US20060014058A1
公开(公告)日：2006-01-19
申请号：US11220201
申请日：2005-09-06
申请人： Arne Ballantine , Ryan Hallum , John Parks , Dustan Skidmore
发明人： Arne Ballantine , Ryan Hallum , John Parks , Dustan Skidmore
IPC分类号： H01M8/04
CPC分类号： H01M8/04007 , H01M8/04089 , H01M8/0432 , H01M8/04373 , H01M8/04559 , H01M8/04589 , H01M8/04604 , H01M8/04701 , H01M8/04731 , H01M8/04738 , H01M8/04753 , H01M8/04768 , H01M8/04776 , H01M8/0612 , Y02E20/14
摘要： A cogeneration fuel cell system and associated methods of operation are provided that accommodate a demand for heat as well as a demand for electric power. The system is operated among various modes to balance heat and power demand signals. In general, a fuel cell system is coupled to a power sink and a heat sink, and a controller is adapted to respond to data signals from the power sink and the heat sink. As examples, such data signals from the heat sink may include a temperature indication or a heat demand signal (such as from a thermostat), and such data signals from the power sink may include a voltage or current measurement, an electrical power demand signal, or an electrical load.

4. 发明申请

US20060003199A1 Method and apparatus for controlling a combined heat and power fuel cell system 失效
公开(公告)号：US20060003199A1
公开(公告)日：2006-01-05
申请号：US11219904
申请日：2005-09-06
申请人： Arne Ballantine , Ryan Hallum , John Parks , Dustan Skidmore
发明人： Arne Ballantine , Ryan Hallum , John Parks , Dustan Skidmore
IPC分类号： H01M8/04
CPC分类号： H01M8/04007 , H01M8/04089 , H01M8/0432 , H01M8/04373 , H01M8/04559 , H01M8/04589 , H01M8/04604 , H01M8/04701 , H01M8/04731 , H01M8/04738 , H01M8/04753 , H01M8/04768 , H01M8/04776 , H01M8/0612 , Y02E20/14
摘要： A cogeneration fuel cell system and associated methods of operation are provided that accommodate a demand for heat as well as a demand for electric power. The system is operated among various modes to balance heat and power demand signals. In general, a fuel cell system is coupled to a power sink and a heat sink, and a controller is adapted to respond to data signals from the power sink and the heat sink. As examples, such data signals from the heat sink may include a temperature indication or a heat demand signal (such as from a thermostat), and such data signals from the power sink may include a voltage or current measurement, an electrical power demand signal, or an electrical load.

5. 发明申请

US20050287403A1 Method and apparatus for controlling a combined heat and power fuel cell system 有权
标题翻译：用于控制燃料电池组合系统的方法和装置
公开(公告)号：US20050287403A1
公开(公告)日：2005-12-29
申请号：US11219898
申请日：2005-09-06
申请人： Arne Ballantine , Ryan Hallum , John Parks , Dustan Skidmore
发明人： Arne Ballantine , Ryan Hallum , John Parks , Dustan Skidmore
IPC分类号： H01M8/00 , H01M8/04 , H01M8/06
CPC分类号： H01M8/04007 , H01M8/04089 , H01M8/0432 , H01M8/04373 , H01M8/04559 , H01M8/04589 , H01M8/04604 , H01M8/04701 , H01M8/04731 , H01M8/04738 , H01M8/04753 , H01M8/04768 , H01M8/04776 , H01M8/0612 , Y02E20/14
摘要： A cogeneration fuel cell system and associated methods of operation are provided that accommodate a demand for heat as well as a demand for electric power. The system is operated among various modes to balance heat and power demand signals. In general, a fuel cell system is coupled to a power sink and a heat sink, and a controller is adapted to respond to data signals from the power sink and the heat sink. As examples, such data signals from the heat sink may include a temperature indication or a heat demand signal (such as from a thermostat), and such data signals from the power sink may include a voltage or current measurement, an electrical power demand signal, or an electrical load.
摘要翻译：提供了热电联产燃料电池系统和相关的操作方法，其适应对热量的需求以及对电力的需求。该系统在各种模式之间运行，以平衡热和电力需求信号。通常，燃料电池系统耦合到电力接收器和散热器，并且控制器适于响应于来自电力接收器和散热器的数据信号。作为示例，来自散热器的这种数据信号可以包括温度指示或热量需求信号（例如来自恒温器），并且来自功率吸收器的这种数据信号可以包括电压或电流测量，电力需求信号，或电负载。

6. 发明申请

US20050089729A1 Technique and apparatus to control the response of a fuel cell system to load transients 审中-公开
标题翻译：控制燃料电池系统负载瞬变响应的技术和设备
公开(公告)号：US20050089729A1
公开(公告)日：2005-04-28
申请号：US10993016
申请日：2004-11-19
申请人： Daniel Jones , John Parks , Eric White , Dustan Skidmore
发明人： Daniel Jones , John Parks , Eric White , Dustan Skidmore
IPC分类号： H01M8/04 , H01M8/06 , H01M16/00 , H02J7/00
CPC分类号： H01M8/04753 , H01M8/04014 , H01M8/04559 , H01M8/04589 , H01M8/04626 , H01M8/04888 , H01M8/04947 , H01M8/0612 , H01M16/006 , H02J7/0068 , H02J2001/004
摘要： A system includes a first load, a second load, a fuel processor, a fuel cell stack and a circuit. The fuel processor provides a fuel flow, and the fuel cell stack is coupled to the first load and adapted to provide a power in response to the fuel flow. At least some of this power is consumed by the first load. The circuit is adapted to in response to a decrease in the power produced by the fuel cell stack and consumed by the first load, determine whether to route at least some of the power produced by the fuel cell stack and not consumed by the first load to the second load, and based on the determination, selectively route some of the power that is produced by the fuel cell stack to the second load.
摘要翻译：系统包括第一负载，第二负载，燃料处理器，燃料电池堆和电路。燃料处理器提供燃料流，并且燃料电池堆耦合到第一负载并且适于响应于燃料流提供功率。这种功率中的至少一些是由第一负载消耗的。电路适于响应于由燃料电池堆产生的功率的降低并由第一负载消耗，确定是否将由燃料电池堆产生的功率的至少一些路由至不被第一负载消耗的功率第二负载，并且基于该确定，选择性地将燃料电池堆产生的功率路由到第二负载。

7. 发明授权

US08555903B2 Method and apparatus for removing contamination from substrate 失效
标题翻译：去除基材污染的方法和装置
公开(公告)号：US08555903B2
公开(公告)日：2013-10-15
申请号：US12620288
申请日：2009-11-17
申请人： Erik M. Freer , John M. de Larios , Katrina Mikhaylichenko , Michael Ravkin , Mikhail Korolik , Fred C. Redeker , Clint Thomas , John Parks
发明人： Erik M. Freer , John M. de Larios , Katrina Mikhaylichenko , Michael Ravkin , Mikhail Korolik , Fred C. Redeker , Clint Thomas , John Parks
IPC分类号： B08B3/00
CPC分类号： H01L21/02057 , B05D3/10 , B08B7/02 , C11D1/04 , C11D3/042 , C11D3/044 , C11D3/18 , C11D3/2079 , C11D3/222 , C11D3/225 , C11D3/3765 , C11D9/00 , C11D9/02 , C11D9/267 , C11D11/0047 , C11D17/0004 , C11D17/0013 , C11D17/0017 , C11D17/003 , C11D17/041 , C23G1/00 , C23G1/18 , G03F7/42 , G03F7/423 , H01L21/02052 , H01L21/02096 , H01L21/31133 , H01L21/67051 , H01L21/67057 , H01L21/6708 , H01L21/67086
摘要： A cleaning material is disposed over a substrate. The cleaning material includes solid components dispersed within a liquid medium. A force is applied to the solid components within the liquid medium to bring the solid components within proximity to contaminants present on the substrate. The force applied to the solid components can be exerted by an immiscible component within the liquid medium. When the solid components are brought within sufficient proximity to the contaminants, an interaction is established between the solid components and the contaminants. Then, the solid components are moved away from the substrate such that the contaminants having interacted with the solid components are removed from the substrate.
摘要翻译：清洁材料设置在基板上。清洁材料包括分散在液体介质中的固体组分。将力施加到液体介质中的固体组分以使固体组分接近存在于基底上的污染物。施加到固体组分的力可以通过液体介质中的不混溶组分施加。当固体组分被充分接近污染物时，在固体组分和污染物之间建立了相互作用。然后，将固体组分从衬底移开，使得与固体组分相互作用的污染物从衬底上除去。

8. 发明授权

US08069813B2 Wafer electroless plating system and associated methods 有权
标题翻译：晶圆化学镀系统及相关方法
公开(公告)号：US08069813B2
公开(公告)日：2011-12-06
申请号：US11735984
申请日：2007-04-16
申请人： William Thie , John M. Boyd , Fritz C. Redeker , Yezdi Dordi , John Parks , Tiruchirapalli Arunagiri , Aleksander Owczarz , Todd Balisky , Clint Thomas , Jacob Wylie , Alan M. Schoepp
发明人： William Thie , John M. Boyd , Fritz C. Redeker , Yezdi Dordi , John Parks , Tiruchirapalli Arunagiri , Aleksander Owczarz , Todd Balisky , Clint Thomas , Jacob Wylie , Alan M. Schoepp
IPC分类号： B05C3/00
CPC分类号： H01L21/288 , C23C18/1619 , C23C18/1632 , H01L21/76873
摘要： A dry-in/dry-out system is disclosed for wafer electroless plating. The system includes an upper zone for wafer ingress/egress and drying operations. Proximity heads are provided in the upper zone to perform the drying operations. The system also includes a lower zone for electroless plating operations. The lower zone includes an electroless plating apparatus that implements a wafer submersion by fluid upwelling method. The upper and lower zones of the system are enclosed by a dual-walled chamber, wherein the inner wall is a chemically inert plastic and the outer wall is a structural metal. The system interfaces with a fluid handling system which provides the necessary chemistry supply and control for the system. The system is ambient controlled. Also, the system interfaces with an ambient controlled managed transfer module (MTM).
摘要翻译：公开了一种用于晶片无电镀的干/干输出系统。该系统包括用于晶片入口/出口和干燥操作的上部区域。靠近头部设置在上部区域以执行干燥操作。该系统还包括用于无电镀操作的下部区域。下部区域包括通过流体上升流法实现晶片浸没的化学镀设备。系统的上部和下部区域由双壁室围住，其中内壁是化学惰性塑料，外壁是结构金属。系统与流体处理系统接口，为系统提供必要的化学物质供应和控制。系统是环境控制的。此外，系统与环境受控的托管传输模块（MTM）接口。

9. 发明授权

US07416370B2 Method and apparatus for transporting a substrate using non-Newtonian fluid 失效
标题翻译：使用非牛顿流体输送基材的方法和装置
公开(公告)号：US07416370B2
公开(公告)日：2008-08-26
申请号：US11154129
申请日：2005-06-15
申请人： John M. de Larios , Mike Ravkin , John Parks , Mikhail Korolik , Fred C. Redeker
发明人： John M. de Larios , Mike Ravkin , John Parks , Mikhail Korolik , Fred C. Redeker
IPC分类号： B65G51/16
CPC分类号： H01L21/67784 , H01L21/67057
摘要： A method for transporting a substrate is provided. In this method, a non-Newtonian fluid is provided and the substrate is suspended in the non-Newtonian fluid. The non-Newtonian fluid is capable of supporting the substrate. Thereafter, a supply force is applied on the non-Newtonian fluid to cause the non-Newtonian fluid to flow, whereby the flow is capable of moving the substrate along a direction of the flow. Apparatuses and systems for transporting the substrate using the non-Newtonian fluid also are described.
摘要翻译：提供了一种输送基板的方法。在该方法中，提供了非牛顿流体，并将基底悬挂在非牛顿流体中。非牛顿流体能够支撑基底。此后，向非牛顿流体施加供应力以使非牛顿流体流动，由此流动能够沿着流动方向移动基底。还描述了使用非牛顿流体输送基底的装置和系统。

10. 发明申请

US20080142048A1 Wafer Clamping Apparatus and Method for Operating the Same 有权
标题翻译：晶圆夹紧装置及其操作方法
公开(公告)号：US20080142048A1
公开(公告)日：2008-06-19
申请号：US12036111
申请日：2008-02-22
申请人： John Parks
发明人： John Parks
IPC分类号： B08B3/00
CPC分类号： H01L21/6875 , H01L21/67109 , H01L21/6838 , Y10S134/902
摘要： A wafer clamping apparatus is provided to secure a wafer within a chamber during wafer processing. The wafer clamping apparatus creates a pressure differential between a top surface and a bottom surface of the wafer. The pressure differential serves to pull the wafer toward a wafer support structure in contact with the wafer bottom surface, whereby the wafer is secured and maintained in an immobile state. The wafer clamping apparatus also includes options for controlling the pressure differential between the top and bottom surfaces of the wafer. The wafer clamping apparatus is implemented without requiring contact with the wafer top surface and with minimal increase in chamber design complexity.
摘要翻译：提供晶片夹紧装置，用于在晶片处理期间将晶片固定在腔室内。晶片夹紧装置在晶片的顶表面和底表面之间产生压差。压差用于将晶片拉向与晶片底表面接触的晶片支撑结构，由此晶片被固定并保持在不动的状态。晶片夹紧装置还包括用于控制晶片的顶表面和底表面之间的压力差的选项。实现晶片夹紧装置，而不需要与晶片顶表面接触并且以最小的室设计复杂性增加。

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