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1. 发明授权

US08746975B2 Thermal management systems, assemblies and methods for grazing incidence collectors for EUV lithography 有权
标题翻译：用于EUV光刻的放电收集器的热管理系统，组件和方法
公开(公告)号：US08746975B2
公开(公告)日：2014-06-10
申请号：US13355725
申请日：2012-01-23
申请人： Giovanni Bianucci , Fabio Zocchi , Robert Banham , Marco Pedrali , Boris Grek , Natale Ceglio , Dean Shough , Gordon Yue , Daniel Stearns , Richard A. Levesque , Giuseppe Valsecchi
发明人： Giovanni Bianucci , Fabio Zocchi , Robert Banham , Marco Pedrali , Boris Grek , Natale Ceglio , Dean Shough , Gordon Yue , Daniel Stearns , Richard A. Levesque , Giuseppe Valsecchi
IPC分类号： H01J35/02 , H01J35/16 , G21K1/06
CPC分类号： G02B5/09 , G02B5/10 , G02B7/1815 , G03F7/70033 , G03F7/70166 , G03F7/70891
摘要： Systems, assemblies and methods for thermally managing a grazing incidence collector (GIC) for EUV lithography applications are disclosed. The GIC thermal management assembly includes a GIC mirror shell interfaced with a jacket to form a sealed chamber. An open cell, heat transfer (OCHT) material is disposed within the metal chamber and is thermally and mechanically bonded with the GIC mirror shell and jacket. A coolant is flowed in an azimuthally symmetric fashion through the OCHT material between input and output plenums to effectuate cooling when the GIC thermal management assembly is used in a GIC mirror system configured to receive and form collected EUV radiation from an EUV radiation source.
摘要翻译：公开了用于EUV光刻应用的用于热管理掠入射收集器（GIC）的系统，组件和方法。 GIC热管理组件包括与夹套接合以形成密封室的GIC镜壳。开放式电池，传热（OCHT）材料设置在金属室内，并与GIC反射镜外壳和护套热和机械结合。当GIC热管理组件用于被配置为从EUV辐射源接收和形成收集的EUV辐射的GIC镜系统中时，冷却剂以方位角对称的方式通过输入和输出增压室之间的OCHT材料流动，以实现冷却。

2. 发明申请

US20120212719A1 THERMAL MANAGEMENT SYSTEMS, ASSEMBLIES AND METHODS FOR GRAZING INCIDENCE COLLECTORS FOR EUV LITHOGRAPHY 有权
标题翻译：热管理系统，组装和方法，用于对EUV LITHOGRAPHY进行收集
公开(公告)号：US20120212719A1
公开(公告)日：2012-08-23
申请号：US13355725
申请日：2012-01-23
申请人： Giovanni Bianucci , Fabio Zocchi , Robert Banham , Marco Pedrali , Boris Grek , Natale Ceglio , Dean Shough , Daniel Stearns , Richard A. Levesque , Gordon Yue , Giuseppe Valsecchi
发明人： Giovanni Bianucci , Fabio Zocchi , Robert Banham , Marco Pedrali , Boris Grek , Natale Ceglio , Dean Shough , Daniel Stearns , Richard A. Levesque , Gordon Yue , Giuseppe Valsecchi
IPC分类号： G03B27/54 , G02B5/08
CPC分类号： G02B5/09 , G02B5/10 , G02B7/1815 , G03F7/70033 , G03F7/70166 , G03F7/70891
摘要： Systems, assemblies and methods for thermally managing a grazing incidence collector (GIC) for EUV lithography applications are disclosed. The GIC thermal management assembly includes a GIC mirror shell interfaced with a jacket to form a sealed chamber. An open cell, heat transfer (OCHT) material is disposed within the metal chamber and is thermally and mechanically bonded with the GIC mirror shell and jacket. A coolant is flowed in an azimuthally symmetric fashion through the OCHT material between input and output plenums to effectuate cooling when the GIC thermal management assembly is used in a GIC mirror system configured to receive and form collected EUV radiation from an EUV radiation source.
摘要翻译：公开了用于EUV光刻应用的用于热管理掠入射收集器（GIC）的系统，组件和方法。 GIC热管理组件包括与夹套接合以形成密封室的GIC镜壳。开放式电池，传热（OCHT）材料设置在金属室内，并与GIC反射镜外壳和护套热和机械结合。当GIC热管理组件用于被配置为从EUV辐射源接收和形成收集的EUV辐射的GIC镜系统中时，冷却剂以方位角对称的方式通过输入和输出增压室之间的OCHT材料流动，以实现冷却。

3. 发明授权

US08643823B2 Stress-decoupling devices and methods for cooled mirror systems 有权
标题翻译：用于冷却镜系统的应力消除装置和方法
公开(公告)号：US08643823B2
公开(公告)日：2014-02-04
申请号：US12660222
申请日：2010-02-23
申请人： Giovanni Bianucci , Stefano Moretti , Gordon Yue , Gian Luca Cassol
发明人： Giovanni Bianucci , Stefano Moretti , Gordon Yue , Gian Luca Cassol
IPC分类号： G03B27/42
CPC分类号： G03B27/52 , G02B7/1815 , G03F7/70166 , G03F7/70891 , G21K1/067
摘要： A stress-decoupling device and methods of using same in a cooled grazing-incidence collector (GIC) mirror system are disclosed. A method includes providing a cooled GIC shell, providing input and output primary cooling-fluid manifolds, and fluidly connecting the cooled GIC shell to the input and output primary cooling-fluid manifolds through respective stress-decoupling devices. An exemplary stress-decoupling device includes inner and outer bellows that define a sealed cavity filled with a gas. An expansion-limiting member within the sealed cavity limits the expansion of the inner bellows due to the pressure of the cooling fluid flowing therethrough. The stress-decoupling device reduces or prevents the communication of stress from parts of the GIC mirror system to the GIC shells. Stress-decoupling systems and methods for a cooled spider as used in a GIC mirror system are also disclosed.
摘要翻译：公开了一种应用解耦装置及其在冷却式入射收集器（GIC）镜系统中的使用方法。一种方法包括提供冷却的GIC壳体，提供输入和输出主要冷却流体歧管，以及通过相应的应力解耦装置将冷却的GIC壳体流体连接到输入和输出主冷却液歧管。示例性的应力解耦装置包括限定填充有气体的密封腔的内部和外部波纹管。密封空腔内的膨胀限制构件由于冷却流体流过其中的压力而限制了内部波纹管的膨胀。应力消除装置减少或阻止了GIC镜系统部件到GIC外壳的应力传递。还公开了用于GIC镜系统中的冷却蜘蛛的应力去耦系统和方法。

4. 发明申请

US20110205506A1 Stress-decoupling devices and methods for cooled mirror systems 有权
标题翻译：用于冷却镜系统的应力消除装置和方法
公开(公告)号：US20110205506A1
公开(公告)日：2011-08-25
申请号：US12660222
申请日：2010-02-23
申请人： Giovanni Bianucci , Stefano Moretti , Gordon Yue , Gian Luca Cassol
发明人： Giovanni Bianucci , Stefano Moretti , Gordon Yue , Gian Luca Cassol
IPC分类号： G03B27/52 , H05K7/20 , G01J3/10
CPC分类号： G03B27/52 , G02B7/1815 , G03F7/70166 , G03F7/70891 , G21K1/067
摘要： A stress-decoupling device and methods of using same in a cooled grazing-incidence collector (GIC) mirror system are disclosed. A method includes providing a cooled GIC shell, providing input and output primary cooling-fluid manifolds, and fluidly connecting the cooled GIC shell to the input and output primary cooling-fluid manifolds through respective stress-decoupling devices. An exemplary stress-decoupling device includes inner and outer bellows that define a sealed cavity filled with a gas. An expansion-limiting member within the sealed cavity limits the expansion of the inner bellows due to the pressure of the cooling fluid flowing therethrough. The stress-decoupling device reduces or prevents the communication of stress from parts of the GIC mirror system to the GIC shells. Stress-decoupling systems and methods for a cooled spider as used in a GIC mirror system are also disclosed.
摘要翻译：公开了一种应用解耦装置及其在冷却式入射收集器（GIC）镜系统中的使用方法。一种方法包括提供冷却的GIC壳体，提供输入和输出主要冷却流体歧管，以及通过相应的应力解耦装置将冷却的GIC壳体流体连接到输入和输出主冷却液歧管。示例性的应力解耦装置包括限定填充有气体的密封腔的内部和外部波纹管。密封空腔内的膨胀限制构件由于冷却流体流过其中的压力而限制了内部波纹管的膨胀。应力消除装置减少或阻止了GIC镜系统部件到GIC外壳的应力传递。还公开了用于GIC镜系统中的冷却蜘蛛的应力去耦系统和方法。

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