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1. 发明授权

US06784425B1 Energy filter multiplexing 有权
标题翻译：能量滤波器复用
公开(公告)号：US06784425B1
公开(公告)日：2004-08-31
申请号：US10008253
申请日：2001-11-09
申请人： Gian Francesco Lorusso , Laurence Stuart Hordon , Sander Josef Gubbens , Douglas Keith Masnaghetti
发明人： Gian Francesco Lorusso , Laurence Stuart Hordon , Sander Josef Gubbens , Douglas Keith Masnaghetti
IPC分类号： H01J4700
CPC分类号： H01J37/28 , H01J2237/22 , H01J2237/2804
摘要： The present invention pertains to a technique of electron spectroscopic imaging that is easy to perform and cost effective. This technique allows for spatial resolution enhancement of electron beam semiconductor inspection systems (for example a critical dimension scanning electron microscope CD-SEM) as well as to obtain useful physical or chemical information on the investigated specimen. The technique involves a high pass energy filter that is alternately set, or multiplexed, at two energies. For an inspected area on a specimen, the detected intensity level at the higher energy setting is subtracted from the intensity level at the lower energy setting. The obtained differential value corresponds to electrons having energy within the range of the first and second filter settings. This obtained differential value is used to generate an image of the specimen for inspection purposes.
摘要翻译：本发明涉及易于执行和成本有效的电子分光成像技术。该技术允许电子束半导体检查系统（例如临界尺寸扫描电子显微镜CD-SEM）的空间分辨率增强，以及获得关于被研究样本的有用的物理或化学信息。该技术涉及在两个能量下交替地设置或多路复用的高通能量滤波器。对于样本上的检查区域，在较低能量设置下从强度水平减去较高能量设定下的检测强度水平。获得的微分值对应于具有在第一和第二滤波器设置范围内的能量的电子。该获得的差分值用于产生用于检查目的的样本的图像。

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