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    • 1. 发明授权
    • Arrangement for measuring angular velocity
    • 测量角速度的布置
    • US06467349B1
    • 2002-10-22
    • US09600919
    • 2000-09-12
    • Gert AnderssonNils HedenstiernaPer Svensson
    • Gert AnderssonNils HedenstiernaPer Svensson
    • G01C1900
    • G01C19/5656G01C19/574
    • In a sensor for measuring angular velocity a body is formed from a planer substrate The body defines a beam, the opposed ends of which are adapted to be fixed in position, the beam having a preferential bending direction which makes an acute angle with the plane of the planar substrate. The beam carries an inertia mass comprising two arms interconnected by a connecting bar, the central part of the connecting bar being formed integrally with part of the beam. Capacitative plates located adjacent a conductive layer on the arms are provided with potentials which cause the inertia mass to rotate about the axis of the connecting bar with a “see-saw” action which, because of the configuration of the beam leads to a rotational oscillation of the inertia mass in the plane of the substrate. If the arrangement is rotated about an axis coincident with the connecting bar, the inertia mass rotates about an axis coincident with the beam with an oscillating rotation. This is detected by capacitative plates to determine angular velocity.
    • 在用于测量角速度的传感器中,主体由平面基板形成。主体限定一个梁,其相对端适于固定在适当的位置,该梁具有优先弯曲方向,该倾斜方向与 平面基板。 梁承载包括通过连接杆互连的两个臂的惯性质量块,连接杆的中心部分与梁的一部分一体形成。 设置在臂附近的导电层附近的电容板具有使惯性质量围绕连接杆的轴线旋转的电位,具有“跷跷板”的作用,由于梁的结构导致旋转振荡 的基质平面内的惯性质量。 如果该布置围绕与连接杆重合的轴线旋转,则惯性质量块以与摆动轴一致的轴线旋转。 这是通过电容板检测以确定角速度。