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1. 发明授权

US08025775B2 Vacuum plasma generator 有权
标题翻译：真空等离子发生器
公开(公告)号：US08025775B2
公开(公告)日：2011-09-27
申请号：US10507095
申请日：2003-02-19
申请人： Gerhard Tuymer , Andreas Schutze
发明人： Gerhard Tuymer , Andreas Schutze
IPC分类号： C23C14/00 , C23C14/32 , C25B9/00 , C25B11/00 , C25B13/00 , H01J7/24 , H05B31/26 , H05B41/16 , H05B41/24 , H02M7/00
CPC分类号： H01J37/32027 , H01J37/32045 , H01J37/34 , H01J37/3444
摘要： A vacuum plasma generator with an output for feeding a plasma discharge for treatment of workpieces in a vacuum chamber has a connection for the junction to AC voltage mains, a rectifier connected to a converter with a control input for the setting and/or regulation of the converter output voltage, and a controlled full bridge circuit connected to the converter output with a potential-free generator output, which transposes the converter output voltage into pulses of 1 to 500 kHz. A potential-isolating transformer is switched into the bridge for the galvanic decoupling of the generator output.
摘要翻译：具有用于馈送用于处理真空室中的工件的等离子体放电的输出的真空等离子体发生器具有用于连接到交流电压电源的连接，连接到具有用于设置和/或调节的电压的控制输入的转换器的整流器转换器输出电压，以及与无电压发生器输出连接到转换器输出的受控全桥电路，其将转换器输出电压转换为1至500kHz的脉冲。电隔离变压器切换到桥接器，用于发电机输出的电流去耦。

2. 发明申请

US20080143260A1 Vacuum Plasma Generator 有权
标题翻译：真空等离子发生器
公开(公告)号：US20080143260A1
公开(公告)日：2008-06-19
申请号：US11817443
申请日：2006-03-01
申请人： Gerhard Tuymer , Jurgen Ramm , Daniel Lendi
发明人： Gerhard Tuymer , Jurgen Ramm , Daniel Lendi
IPC分类号： H01J37/32
CPC分类号： H01J37/32174 , H01J37/32091 , H02M7/10
摘要： The invention relates to a vacuum plasma generator for providing a plasma discharge (10) for treating work pieces (5) by way of a pulsed plasma process in a vacuum chamber (2). Said vacuum plasma generator comprises a generator output (9, 9′) having an AC mains supply (6a), an AC/DC mains rectifier system (6) for rectifying the AC mains voltage to a DC voltage, a filter capacitor (6b), a first stage as clocked DC/DC voltage converter (7) with means for adjusting the DC output voltage which produces an intermediate circuit voltage (Uz), comprising a controlled power switch (7a) which feeds the primary winding of a transformer (14) and the secondary winding of which is connected to a rectifier (15) and a downstream intermediate capacitor (12) and configures a floating transformer secondary circuit (23). Said secondary circuit is connected to a downstream second stage which is a pulse output stage (8) and is connected to the generator output (9, 9′). The DC/DC voltage converter (7) has at least two floating transformer secondary circuits (23) and comprises a switch-over device (20) with a switch controller (22) for optionally switching the floating transformer secondary circuits (23) in parallel or in series.
摘要翻译：本发明涉及一种用于通过脉冲等离子体处理在真空室（2）中提供用于处理工件（5）的等离子体放电（10）的真空等离子体发生器。所述真空等离子体发生器包括具有AC电源（6a）的发电机输出（9,9'），用于将AC电源电压整流为DC电压的AC / DC电源整流器系统（6），滤波电容器 b），作为时钟的DC / DC电压转换器（7）的第一级，具有用于调节产生中间电路电压（Uz）的DC输出电压的装置，包括受控电源开关（7a），其馈送一个变压器（14），其次级绕组连接到整流器（15）和下游中间电容器（12），并构成浮动变压器次级电路（23）。所述次级电路连接到作为脉冲输出级（8）并连接到发电机输出（9,9'）的下游第二级。 DC / DC电压转换器（7）具有至少两个浮动变压器次级电路（23），并且包括具有开关控制器（22）的切换装置（20），用于可选地平行地切换浮动变压器次级电路（23）或串联。

3. 发明授权

US07455755B2 Vacuum plasma generator 有权
标题翻译：真空等离子发生器
公开(公告)号：US07455755B2
公开(公告)日：2008-11-25
申请号：US11817443
申请日：2006-03-20
申请人： Gerhard Tuymer , Jürgen Ramm , Daniel Lendi
发明人： Gerhard Tuymer , Jürgen Ramm , Daniel Lendi
IPC分类号： C23C14/00
CPC分类号： H01J37/32174 , H01J37/32091 , H02M7/10
摘要： The invention relates to a vacuum plasma generator for providing a plasma discharge (10) for treating work pieces (5) by way of a pulsed plasma process in a vacuum chamber (2). Said vacuum plasma generator comprises a generator output (9, 9′) having an AC mains supply (6a), an AC/DC mains rectifier system (6) for rectifying the AC mains voltage to a DC voltage, a filter capacitor (6b), a first stage as clocked DC/DC voltage converter (7) with means for adjusting the DC output voltage which produces an intermediate circuit voltage (Uz), comprising a controlled power switch (7a) which feeds the primary winding of a transformer (14) and the secondary winding of which is connected to a rectifier (15) and a downstream intermediate capacitor (12) and configures a floating transformer secondary circuit (23). Said secondary circuit is connected to a downstream second stage which is a pulse output stage (8) and is connected to the generator output (9, 9′). The DC/DC voltage converter (7) has at least two floating transformer secondary circuits (23) and comprises a switch-over device (20) with a switch controller (22) for optionally switching the floating transformer secondary circuits (23) in parallel or in series.
摘要翻译：本发明涉及一种用于通过脉冲等离子体处理在真空室（2）中提供用于处理工件（5）的等离子体放电（10）的真空等离子体发生器。所述真空等离子体发生器包括具有AC电源（6a）的发电机输出（9,9'），用于将AC电源电压整流为DC电压的AC / DC电源整流器系统（6），滤波电容器 b），作为时钟的DC / DC电压转换器（7）的第一级，具有用于调节产生中间电路电压（Uz）的DC输出电压的装置，包括受控电源开关（7a），其馈送一个变压器（14），其次级绕组连接到整流器（15）和下游中间电容器（12），并构成浮动变压器次级电路（23）。所述次级电路连接到作为脉冲输出级（8）并连接到发电机输出（9,9'）的下游第二级。 DC / DC电压转换器（7）具有至少两个浮动变压器次级电路（23），并且包括具有开关控制器（22）的切换装置（20），用于可选地平行地切换浮动变压器次级电路（23）或串联。

4. 发明申请

US20050098430A1 Vacuum plasma generator 有权
标题翻译：真空等离子发生器
公开(公告)号：US20050098430A1
公开(公告)日：2005-05-12
申请号：US10507095
申请日：2003-02-19
申请人： Gerhard Tuymer , Andrea Schutze
发明人： Gerhard Tuymer , Andrea Schutze
IPC分类号： H05H1/24 , C23C14/34 , C23C26/00 , H01J37/32 , H01J37/34 , H03K17/56 , H05H1/46 , C23C14/32
CPC分类号： H01J37/32027 , H01J37/32045 , H01J37/34 , H01J37/3444
摘要： A vacuum plasma generator with an output for feeding a plasma discharge for treatment of workpieces in a vacuum chamber has a connection for the junction to AC voltage mains, a rectifier connected to a converter with a control input for the setting and/or regulation of the converter output voltage, and a controlled full bridge circuit connected to the converter output with a potential-free generator output, which transposes the converter output voltage into pulses of 1 to 500 kHz. A potential-isolating transformer is switched into the bridge for the galvanic decoupling of the generator output.
摘要翻译：具有用于馈送用于处理真空室中的工件的等离子体放电的输出的真空等离子体发生器具有用于连接到交流电压电源的连接，连接到具有用于设置和/或调节的电压的控制输入的转换器的整流器转换器输出电压，以及与无电压发生器输出连接到转换器输出的受控全桥电路，其将转换器输出电压转换为1至500kHz的脉冲。电隔离变压器切换到桥接器，用于发电机输出的电流去耦。

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