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    • 6. 发明授权
    • Wafer handling apparatus
    • 晶圆处理装置
    • US4597708A
    • 1986-07-01
    • US616979
    • 1984-06-04
    • William R. WheelerRusmin KudinarGeorge J. KrenDavid D. Clementson
    • William R. WheelerRusmin KudinarGeorge J. KrenDavid D. Clementson
    • H01L21/677B65G1/06
    • H01L21/67766Y10T74/1892Y10T74/1896
    • A wafer handler featuring a carriage movable along a rail path, the carriage supporting an upright rotatable arm with a cantilevered wafer chuck. Elevators for raising and lowering trays containing wafer stacks are disposed on either side of the rail path. Each elevator has a curved track section which may be interposed along the rail path. The upright arm has a track follower, parallel to a boom supporting the wafer chuck and freely movable along the rail path, except when it encounters a curved track section. In this instance, the track follower will follow the curved track section, causing rotation of the arm, boom and wafer chuck, bringing the chuck into the wafer stack at an elevation determined by the elevator. In this manner, motion in the X, Y and Z planes may be provided for stacked wafers over extended distances.
    • 具有可沿轨道移动的支架的晶片处理器,该支架支撑具有悬臂晶片卡盘的直立可旋转臂。 用于升高和降低包含晶片堆叠的托盘的升降机设置在轨道的任一侧。 每个电梯具有弯曲的轨道部分,其可以沿着轨道路线插入。 直立臂具有轨道跟随器,平行于支撑晶片卡盘的悬臂,并且可以沿着轨道路径自由移动,除非它遇到弯曲的轨道部分。 在这种情况下,跟踪跟随器将跟随弯曲的轨道部分,引起臂,吊臂和晶片卡盘的旋转,使得卡盘以电梯确定的仰角进入晶片堆叠。 以这种方式,X,Y和Z平面中的运动可以用于延长距离上的堆叠晶片。
    • 7. 发明授权
    • Wafer orientation system
    • 晶圆定向系统
    • US4376482A
    • 1983-03-15
    • US265412
    • 1981-05-19
    • William R. WheelerGeorge J. KrenDavid D. Clementson
    • William R. WheelerGeorge J. KrenDavid D. Clementson
    • B65G47/244H01L21/68B65G47/24
    • H01L21/68B65G47/244
    • A wafer orienting apparatus having inwardly biased rollers, spaced about the circumferential edge of a wafer in contact with the edge. Two of the rollers are spaced apart a distance less than the dimension of a primary flat registration edge and are mounted to follow the wafer edge upon rotation of the wafer. When a flat registration edge passes these closely spaced rollers they move inwardly, activating switches associated with a coincidence circuit. When both switches are simultaneously activated, the coincidence circuit produces a signal which stops wafer rotation, thereby orienting the wafer. The rollers are mounted so that they can be moved from the path of wafer travel after wafer orientation, permitting a queue of wafers to be oriented, one after the other.
    • 具有向内偏压的辊的晶片定向装置,其间隔开与所述边缘接触的晶片的周边边缘。 两个辊间隔开一个小于主平面配准边缘的尺寸的距离,并且在晶片旋转时安装成跟随晶片边缘。 当平面配准边缘通过这些紧密间隔的辊时,它们向内移动,启动与重合电路相关联的开关。 当两个开关同时被激活时,符合电路产生停止晶片旋转的信号,从而使晶片定向。 辊子被安装成使得它们可以在晶片取向之后从晶片移动的路径移动,从而允许晶片排队一个接一个地定向。