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    • 7. 发明授权
    • Method for producing photonic wire bonds
    • 光子线接合方法
    • US09034222B2
    • 2015-05-19
    • US13385505
    • 2012-02-23
    • Christian KoosWolfgang FreudeNicole LindenmannJuerg Leuthold
    • Christian KoosWolfgang FreudeNicole LindenmannJuerg Leuthold
    • G02B6/26G02B6/138G02B6/30G02B6/12G02B6/122
    • G02B6/138G02B6/12002G02B6/12004G02B6/1221G02B6/26G02B6/305
    • A method for making optical connections with optical waveguides includes mounting the optical waveguides or a device comprising the optical waveguides, on a component carrier. A partial region of the optical waveguides is embedded in a volume of resist material. Positions of the optical waveguides to be connected are detected with reference to a coordinate system using a measuring system. Favorable, three-dimensional geometries are determined for optical waveguide structures for connecting the optical waveguides to each other at predetermined connecting locations and the optical waveguide structure geometries are converted to a machine-readable dataset. The optical waveguide geometries in the volume of the resist material are three-dimensionally structured using a direct-writing lithography device operating on the basis of the machine-readable dataset. The structured resist material is treated using physical or chemical methods to form at least one optical waveguide structure having ends connected to predetermined connecting locations of the optical waveguides.
    • 用于与光波导进行光学连接的方法包括将光波导或包括光波导的装置安装在分量载体上。 光波导的部分区域嵌入一定量的抗蚀剂材料中。 参考使用测量系统的坐标系来检测要连接的光波导的位置。 确定用于在预定连接位置处将光波导彼此连接的光波导结构的有利的三维几何形状,并将光波导结构几何形状转换为机器可读数据集。 抗蚀剂材料体积中的光波导几何形状使用基于机器可读数据集操作的直写光刻设备进行三维构造。 使用物理或化学方法处理结构化抗蚀剂材料,以形成具有连接到光波导的预定连接位置的端部的至少一个光波导结构。
    • 8. 发明授权
    • Electrooptical high-index contrast waveguide component
    • 电光高折射率对比度波导部件
    • US08081851B2
    • 2011-12-20
    • US12442176
    • 2007-09-14
    • Christian KoosJurg LeutholdWolfgang FreudeJan Michael Brosi
    • Christian KoosJurg LeutholdWolfgang FreudeJan Michael Brosi
    • G02F1/035G02B6/00
    • G02F1/011G02F1/025G02F1/0316G02F1/065G02F2201/127G02F2202/104
    • A high-index contrast waveguide component is presented, which is based on the fast changing of the transmission properties of an optical waveguide by applying electric voltages, or by embossing electric currents. The waveguide consists of a high-refractive waveguide core surrounded by a low-refractive surrounding material, which at least area by area has electro-optical properties. By applying a voltage to completely or partially optically transparent electrodes, an electric field is generated having a strong overlap with the optical mode, being in interaction with it, and therefore changing the transmission properties of the waveguide. The transparent electrodes or supply line areas are laminar, connected at low resistance with conductor paths of high conductivity by means of structures continually repeated along the propagation direction. Thus, it is possible for example to very fast load the capacity being effective between the electrodes, and to thus achieve a high electric band width. In certain embodiments, the waveguide core itself consists of one or more electrically conductive stripes being used as electrodes at the same time. These embodiments make especially small switching voltages possible.For example, the presented component makes fast electro-optical modulators with small switching voltages possible, which modulators may be integrated together with electronic components on a common semiconductor substrate (e.g. silicon).
    • 提出了一种高折射率对比度波导部件,其基于通过施加电压或通过压花电流快速改变光波导的传输特性。 波导包括由低折射周围材料包围的高折射波导芯,该低折射波导芯至少面积具有电光性质。 通过对完全或部分光学透明的电极施加电压,产生与光学模式强烈重叠的电场,与其相互作用,因此改变波导的透射特性。 透明电极或电源线区域是层状的,通过沿着传播方向连续重复的结构以低电阻连接导电路径高导电性。 因此,例如,可以非常快速地加载在电极之间有效的容量,从而实现高电带宽度。 在某些实施例中,波导芯本身由同时用作电极的一个或多个导电条构成。 这些实施例使得特别小的开关电压成为可能。 例如,所提出的组件使得具有小开关电压的快速电光调制器成为可能,这些调制器可以与公共半导体衬底(例如硅)上的电子部件集成在一起。
    • 9. 发明申请
    • ELECTROOPTICAL HIGH-INDEX CONTRAST WAVEGUIDE COMPONENT
    • 电子高指数对比度波形组件
    • US20100021124A1
    • 2010-01-28
    • US12442176
    • 2007-09-14
    • Christian KoosJurg LeutholdWolfgang FreudeJan Michael Brosi
    • Christian KoosJurg LeutholdWolfgang FreudeJan Michael Brosi
    • G02B6/00
    • G02F1/011G02F1/025G02F1/0316G02F1/065G02F2201/127G02F2202/104
    • A high-index contrast waveguide component is presented, which is based on the fast changing of the transmission properties of an optical waveguide by applying electric voltages, or by embossing electric currents. The waveguide consists of a high-refractive waveguide core surrounded by a low-refractive surrounding material, which at least area by area has electro-optical properties. By applying a voltage to completely or partially optically transparent electrodes, an electric field is generated having a strong overlap with the optical mode, being in interaction with it, and therefore changing the transmission properties of the waveguide. The transparent electrodes or supply line areas are laminar, connected at low resistance with conductor paths of high conductivity by means of structures continually repeated along the propagation direction. Thus, it is possible for example to very fast load the capacity being effective between the electrodes, and to thus achieve a high electric band width. In certain embodiments, the waveguide core itself consists of one or more electrically conductive stripes being used as electrodes at the same time. These embodiments make especially small switching voltages possible.For example, the presented component makes fast electro-optical modulators with small switching voltages possible, which modulators may be integrated together with electronic components on a common semiconductor substrate (e.g. silicon).
    • 提出了一种高折射率对比度波导部件,其基于通过施加电压或通过压花电流快速改变光波导的传输特性。 波导包括由低折射周围材料包围的高折射波导芯,该低折射波导芯至少面积具有电光性质。 通过对完全或部分光学透明的电极施加电压,产生与光学模式强烈重叠的电场,与其相互作用,因此改变波导的透射特性。 透明电极或电源线区域是层状的,通过沿着传播方向连续重复的结构以低电阻连接导电路径高导电性。 因此,例如,可以非常快速地加载在电极之间有效的容量,从而实现高电带宽度。 在某些实施例中,波导芯本身由同时用作电极的一个或多个导电条构成。 这些实施例使得特别小的开关电压成为可能。 例如,所提出的组件使得具有小开关电压的快速电光调制器成为可能,这些调制器可以与公共半导体衬底(例如硅)上的电子部件集成在一起。
    • 10. 发明授权
    • Measuring unit, measuring system and method for determining a relative position and relative orientation
    • 测量单元,测量系统和确定相对位置和相对方向的方法
    • US09329027B2
    • 2016-05-03
    • US13818242
    • 2011-07-26
    • Oliver SchmidtChristian KoosBernd SpruckFrank Höller
    • Oliver SchmidtChristian KoosBernd SpruckFrank Höller
    • G01B11/24G01B11/14G01B11/26G01B11/00G01S17/87
    • G01B11/14G01B11/005G01B11/26G01S17/875
    • A measuring unit is set up to determine a relative position and relative orientation between the measuring unit and an arrangement of at least three optical elements. The measuring unit comprises a length measuring device, which emits measuring beams at at least three locations spaced apart from one another, and at least one beam directing device set up to direct the measuring beams to optical elements of the arrangement. The beam directing device is controllable in order to guide at least one of the measuring beams to a plurality of optical elements of the arrangement in a time-sequential manner in order to carry out a plurality of length measuring operations in a time-sequential manner in such a manner that, in the plurality of length measuring operations, each measuring beam of the at least one measuring beam strikes precisely one of the optical elements. A total of six lengths are measured in this manner.
    • 设置测量单元以确定测量单元和至少三个光学元件的布置之间的相对位置和相对取向。 测量单元包括长度测量装置,其在彼此间隔开的至少三个位置处发射测量光束,以及设置用于将测量光束引导到该装置的光学元件的至少一个光束引导装置。 光束引导装置是可控的,以便以时间顺序的方式将至少一个测量光束引导到该装置的多个光学元件,以便以时间顺序的方式执行多个长度测量操作 这样的方式是,在多个长度测量操作中,至少一个测量光束的每个测量光束精确地照射光学元件中的一个。 以这种方式测量总共六个长度。