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    • 1. 发明授权
    • Flat display panel assembly
    • 平板显示面板组件
    • US5175467A
    • 1992-12-29
    • US741614
    • 1991-08-07
    • Fumio YamazakiToshifumi NakataniSeiichi TaniguchiTetsuya ShiratoriKiyoshi HamadaKanji Imai
    • Fumio YamazakiToshifumi NakataniSeiichi TaniguchiTetsuya ShiratoriKiyoshi HamadaKanji Imai
    • H01J29/02H01J31/12
    • H01J29/028H01J31/126H01J2329/00
    • A flat display panel assembly includes an evacuated glass envelope having a faceplate, a source of electron beams, a control electrode assembly including a stack of electrode substrates each having a predetermined pattern of electrode holes defined therein, and anodes formed by depositing phosphor material on the faceplate in correspondence with the electrode holes in the electrode substrates. At least one of the electrode substrates is made of a material having a coefficient of thermal expansion different from that of the remaining electrode substrates. The electrodes holes in such one of the electrode substrates are so defined and so arranged as to be offset from the corresponding electrode holes in the other electrode substrates by an increasing as a distance increases from a center portion of the electrode assembly towards the perimeter of the electrode assembly. With the electrode holes so defined and so arranged, the electrode substrates are movably supported to accomodate the thermal expansion.
    • 平板显示面板组件包括具有面板,电子束源的真空玻璃外壳,包括每个具有限定在其中的电极孔的预定图案的电极基板的堆叠的控制电极组件,以及通过在其上沉积磷光体材料而形成的阳极 面板对应于电极基板中的电极孔。 电极基板中的至少一个由与其余电极基板不同的热膨胀系数的材料制成。 这样一个电极基板中的电极孔如此限定,并被设置成随着电极组件的中心部分向着电极组件的周边的距离增加而从其它电极基板中的相应的电极孔偏移 电极组件。 在电极孔如此限定和布置的情况下,可移动地支撑电极基板以适应热膨胀。
    • 3. 发明授权
    • Flat panel display device and a method of making the same
    • 平板显示装置及其制造方法
    • US5232389A
    • 1993-08-03
    • US956428
    • 1992-10-01
    • Fumio YamazakiYuichi MoriyamaToshifumi NakataniKanji Imai
    • Fumio YamazakiYuichi MoriyamaToshifumi NakataniKanji Imai
    • H01J9/18
    • H01J9/185H01J2329/8625
    • An electrode structure comprising a plurality of beam control electrodes, a plurality of electrically insulating spacers disposed between each neighboring members of the beam control electrodes, an electrode substrate, a plurality of metallic pins planted on the beam control electrode so as to extend therefrom through the electrode substrate, and a fixing member mounted on each of the metallic pins from rear of the electrode substrate for retaining the beam control electrodes. The electrode structure is manufactured by abutting a first support bench of high rigidity against the beam control electrodes in a predetermined shape and abutting a second support bench of high rigidity in a predetermined shape from rear of the electrode substrate, applying a predetermined load to the electrode structure, applying a predetermined load to the fixing means to press the latter towards the electrode substrate, and welding each of the metallic pins and the associated fixing means together by the use of a laser welding process.
    • 一种电极结构,包括多个光束控制电极,设置在光束控制电极的每个相邻部件之间的多个电绝缘间隔件,电极基板,植入在光束控制电极上的多个金属引脚, 电极基板和从电极基板的后方安装在每个金属引脚上的固定部件,用于保持光束控制电极。 电极结构是通过将具有高刚性的第一支撑台与预定形状的光束控制电极相抵而制成的,并且从电极基板的后面将预定形状的高刚性的第二支撑台与电极基板的后方相接触, 结构,向定影装置施加预定的负载以将其压向电极基板,并且通过使用激光焊接工艺将每个金属销和相关联的固定装置焊接在一起。
    • 7. 发明授权
    • Flat picture display device
    • 平面图像显示装置
    • US5183425A
    • 1993-02-02
    • US833723
    • 1992-02-11
    • Tetsuya ShiratoriFumio YamazakiSeiichi Taniguchi
    • Tetsuya ShiratoriFumio YamazakiSeiichi Taniguchi
    • H01J1/18H01J29/46H01J31/12
    • H01J29/46H01J1/18H01J31/126
    • A picture display device includes an envelope having a faceplate, having an inner surface formed with a phosphor screen, and a back covering coupled to the faceplate to define an evacuated chamber; filament-like cathode electrodes and electron beam control electrodes disposed within the evacuated chamber for emitting electron beams towards the phosphor screen; a cathode electrode support member for retaining the cathode electrodes and having one of opposite surfaces held in contact therewith; a shape retention plate for retaining at least the cathode electrodes and the support member in a predetermined curved shape; a plurality of support struts for fixing the shape retention plate in a face-to-face relationship with the phosphor screen; and a reinforcement grid structure disposed in contact with a surface of the shape retention plate opposite that facing the phosphor screen so as to follow the curvature of the shape retention plate.
    • 图像显示装置包括具有面板的外壳,其具有形成有荧光屏的内表面和连接到面板以限定抽真空室的背面覆盖物; 布置在真空室内的丝状阴极和电子束控制电极,用于向荧光屏发射电子束; 阴极电极支撑构件,用于保持阴极电极并且具有与其保持接触的相对表面之一; 形状保持板,用于至少将阴极电极和支撑部件保持为预定的弯曲形状; 多个支撑支柱,用于以与荧光屏面对面的关系固定形状保持板; 以及加强网格结构,其设置成与形状保持板的与荧光屏相对的表面接触,以便遵循形状保持板的曲率。
    • 10. 发明授权
    • Plasma etching method, plasma etching apparatus and storage medium
    • 等离子体蚀刻方法,等离子体蚀刻装置和存储介质
    • US08383001B2
    • 2013-02-26
    • US12707957
    • 2010-02-18
    • Hiromasa MochikiYoshinobu OoyaFumio YamazakiToshio Haga
    • Hiromasa MochikiYoshinobu OoyaFumio YamazakiToshio Haga
    • B44C1/22
    • H01J37/32174H01J37/32027H01J37/32091H01J2237/334
    • There is provided a plasma etching method capable of achieving a sufficient organic film modifying effect by high-velocity electrons. In forming a hole in an etching target film by plasma etching, a first condition of generating plasma within a processing chamber by way of turning on a plasma-generating high frequency power application unit and a second condition of not generating the plasma within the processing chamber by way of turning off the plasma-generating high frequency power application unit are repeated alternately. Further, a negative DC voltage is applied from a first DC power supply such that an absolute value of the applied negative DC voltage during a period of the second condition is greater than an absolute value of the applied negative DC voltage during a period of the first condition.
    • 提供了能够通过高速电子获得充分的有机膜修饰效果的等离子体蚀刻方法。 在通过等离子体蚀刻在蚀刻靶膜中形成孔时,通过开启等离子体产生高频电力施加单元和在处理室内不产生等离子体的第二条件,在处理室内产生等离子体的第一条件 通过关闭等离子体产生高频电力应用单元交替重复。 此外,从第一直流电源施加负的直流电压,使得在第二状态的周期期间所施加的负的直流电压的绝对值大于在第一状态期间施加的负的直流电压的绝对值 条件。