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    • 1. 发明授权
    • Methacrylic resin composition for optical discs
    • 用于光盘的甲基丙烯酸树脂组合物
    • US5252440A
    • 1993-10-12
    • US866303
    • 1992-04-13
    • Fumio SatoYasunori ShimomuraMasaaki Kishimura
    • Fumio SatoYasunori ShimomuraMasaaki Kishimura
    • C08K5/101G03C1/00
    • C08K5/101Y10S430/146
    • A methacrylic resin composition for optical discs comprising 100 parts by weight of a copolymer composed of from 95 to 99.7% by weight of methyl methacrylate (A) and from 0.3 to 5% by weight of at least one monomer (B) selected from the group consisting of methyl acrylate, ethyl acrylate and butyl acrylate, and having a heat distortion temperature of at least 95.degree. C., a melt flow rate of from 1.0 to 10.0 g/10 min and a tensile strength of at least 660 kg/cm.sup.2, and from 0.05 to 2.0 parts by weight of at least one releasing agent (C) selected from the group consisting of a fatty acid alkyl ester of the formula R.sub.1 COOR.sub.2 wherein each of R.sub.1 and R.sub.2 is an alkyl group having from 5 to 20 carbon atoms, cetanol and a stearic acid glycerol ester.
    • 一种用于光盘的甲基丙烯酸树脂组合物,包括100重量份由95至99.7重量%的甲基丙烯酸甲酯(A)和0.3至5重量%的至少一种选自以下的单体(B)的共聚物 由丙烯酸甲酯,丙烯酸乙酯和丙烯酸丁酯组成,热变形温度为95℃以上,熔体流动速率为1.0〜10.0g / 10min,拉伸强度为660kg / cm 2以上, 和0.05〜2.0重量份的选自由式R 1 COOR 2的脂肪酸烷基酯组成的组中的至少一种脱模剂(C),其中R1和R2各自为具有5至20个碳原子的烷基, 鲸蜡醇和硬脂酸甘油酯。
    • 3. 发明申请
    • PROCESS FOR PRODUCING PHOTORESIST POLYMERIC COMPOUNDS
    • 生产光催化剂聚合物的方法
    • US20080268377A1
    • 2008-10-30
    • US12146594
    • 2008-06-26
    • Hitoshi WATANABEHidetaka HayamizuMasaaki Kishimura
    • Hitoshi WATANABEHidetaka HayamizuMasaaki Kishimura
    • G03F7/004
    • C08F220/18C08F6/00C08F6/02C08F6/06G03F7/0397
    • Process for producing photoresist polymeric compound having repeated units corresponding to at least one monomer selected from monomer (a) having lactone skeleton, monomer (b) having group which becomes soluble in alkali by elimination with acid, and monomer (c) having alicyclic skeleton having hydroxyl group. Process includes (A) polymerizing mixture of monomers containing at least one monomer selected from the above monomers (a), (b), and (c), and (B) extracting polymer formed in the polymerization by using organic solvent and water to partition the formed polymer into organic solvent layer and metal component impurity into aqueous layer, or passing polymer solution, which contains polymer having repeated units corresponding to at least one of the above monomers (a), (b), and (c) and metal content of which is 1000 ppb by weight or less relative to the polymer through filter comprising porous polyolefin membrane having cation-exchange group. The photoresist polymeric compounds have a metallic impurity content that is extremely low.
    • 具有对应于选自具有内酯骨架的单体(a)的单体的重复单元的反应单元的光致抗蚀剂聚合物的制造方法,具有通过用酸去除而变得易溶于碱的单体(b)和具有脂环族骨架的单体(c)具有 羟基。 方法包括(A)含有至少一种选自上述单体(a),(b)和(c)的单体的单体的混合物的聚合,和(B)通过使用有机溶剂和水来分离聚合中形成的聚合物 将形成的聚合物转化为有机溶剂层和金属组分杂质进入水层或通过聚合物溶液,其含有对应于上述单体(a),(b)和(c)中的至少一种的重复单元的聚合物,并且金属含量 其相对于包含具有阳离子交换基团的多孔聚烯烃膜的聚合物通过过滤器为1000ppb以下。 光致抗蚀剂聚合物的金属杂质含量极低。
    • 4. 发明申请
    • Process for the production of high-molecular compounds for photoresist
    • 用于制造光刻胶的高分子化合物的方法
    • US20050100815A1
    • 2005-05-12
    • US10476211
    • 2003-03-14
    • Hitoshi WatanabeHidetaka HayamizuMasaaki Kishimura
    • Hitoshi WatanabeHidetaka HayamizuMasaaki Kishimura
    • C08F6/00C08F6/02C08F6/06G03F7/039G03C1/73
    • C08F220/18C08F6/00C08F6/02C08F6/06G03F7/0397
    • The process for producing a photoresist polymeric compound of the present invention is characterized by a process for producing a photoresist polymeric compound having a repeated unit corresponding to at least one monomer selected from a monomer (a) having a lactone skeleton, a monomer (b) having a group which becomes soluble in alkali by elimination with an acid and a monomer (c) having an alicyclic skeleton having a hydroxyl group, wherein the process comprises the step of; (i) the polymerization step (A) polymerizing a mixture of monomers containing at least one monomer selected from the above monomers (a), (b) and (c), and the extraction step (B) of extracting a polymer formed in the polymerization by using an organic solvent and water to partition the formed polymer into an organic solvent layer and a metal component as an impurity into an aqueous layer, or (ii) the step (I) passing a polymer solution, which contains a polymer having a repeated unit corresponding to at least one of the above monomers (a), (b) and (c), and a metal content of which is 1000 ppb by weight or less relative to the polymer, through a filter comprising a porous polyolefin membrane having cation-exchange group. The method of the present invention can efficiently provide a photoresist polymeric compound having an impurity content such as metal of extremely low.
    • 制备本发明的光致抗蚀剂聚合物的方法的特征在于一种制备光致抗蚀剂聚合物的方法,其具有对应于至少一种选自具有内酯骨架的单体(a),单体(b) 具有通过用酸去除碱溶性的基团和具有羟基的脂环骨架的单体(c),其中该方法包括以下步骤: (i)聚合步骤(A)聚合含有至少一种选自上述单体(a),(b)和(c)的单体的单体的混合物和提取步骤(B) 通过使用有机溶剂和水将形成的聚合物分解成有机溶剂层和作为杂质的金属组分进入水层进行聚合,或(ii)通过聚合物溶液的步骤(I),所述聚合物溶液含有具有 对应于上述单体(a),(b)和(c)中的至少一种的重复单元,其金属含量相对于聚合物为1000ppb以下,通过包含多孔聚烯烃膜的过滤器,所述多孔聚烯烃膜具有 阳离子交换基团。 本发明的方法可以有效地提供具有非常低的金属杂质含量的光致抗蚀剂聚合物。
    • 9. 发明授权
    • Process for producing photoresist polymeric compounds
    • 光致抗蚀剂聚合物的制备方法
    • US07655743B2
    • 2010-02-02
    • US12146594
    • 2008-06-26
    • Hitoshi WatanabeHidetaka HayamizuMasaaki Kishimura
    • Hitoshi WatanabeHidetaka HayamizuMasaaki Kishimura
    • C08F124/00
    • C08F220/18C08F6/00C08F6/02C08F6/06G03F7/0397
    • Process for producing photoresist polymeric compound having repeated units corresponding to at least one monomer selected from monomer (a) having lactone skeleton, monomer (b) having group which becomes soluble in alkali by elimination with acid, and monomer (c) having alicyclic skeleton having hydroxyl group. Process includes (A) polymerizing mixture of monomers containing at least one monomer selected from the above monomers (a), (b), and (c), and (B) extracting polymer formed in the polymerization by using organic solvent and water to partition the formed polymer into organic solvent layer and metal component impurity into aqueous layer, or passing polymer solution, which contains polymer having repeated units corresponding to at least one of the above monomers (a), (b), and (c) and metal content of which is 1000 ppb by weight or less relative to the polymer through filter comprising porous polyolefin membrane having cation-exchange group. The photoresist polymeric compounds have a metallic impurity content that is extremely low.
    • 具有对应于选自具有内酯骨架的单体(a)的单体的重复单元的反应单元的光致抗蚀剂聚合物的制造方法,具有通过用酸去除而变得易溶于碱的单体(b)和具有脂环族骨架的单体(c)具有 羟基。 方法包括(A)含有至少一种选自上述单体(a),(b)和(c)的单体的单体的混合物的聚合,和(B)通过使用有机溶剂和水来分离聚合中形成的聚合物 将形成的聚合物转化为有机溶剂层和金属组分杂质进入水层或通过聚合物溶液,其含有具有对应于上述单体(a),(b)和(c)中的至少一种的重复单元的聚合物和金属含量 其相对于包含具有阳离子交换基团的多孔聚烯烃膜的聚合物通过过滤器为1000ppb或更小。 光致抗蚀剂聚合物的金属杂质含量极低。
    • 10. 发明申请
    • Process for producing photoresist polymeric compounds
    • 光致抗蚀剂聚合物的制备方法
    • US20060116493A1
    • 2006-06-01
    • US11335580
    • 2006-01-20
    • Hitoshi WatanabeHidetaka HayamizuMasaaki Kishimura
    • Hitoshi WatanabeHidetaka HayamizuMasaaki Kishimura
    • C08F24/00
    • C08F220/18C08F6/00C08F6/02C08F6/06G03F7/0397
    • Process for producing photoresist polymeric compound having repeated units corresponding to at least one monomer selected from monomer (a) having lactone skeleton, monomer (b) having group which becomes soluble in alkali by elimination with acid, and monomer (c) having alicyclic skeleton having hydroxyl group. Process includes (A) polymerizing mixture of monomers containing at least one monomer selected from the above monomers (a), (b), and (c), and (B) extracting polymer formed in the polymerization by using organic solvent and water to partition the formed polymer into organic solvent layer and metal component impurity into aqueous layer, or passing polymer solution, which contains polymer having repeated units corresponding to at least one of the above monomers (a), (b), and (c) and metal content of which is 1000 ppb by weight or less relative to the polymer through filter comprising porous polyolefin membrane having cation-exchange group. The photoresist polymeric compounds have a metallic impurity content that is extremely low.
    • 具有对应于选自具有内酯骨架的单体(a)的单体的重复单元的反应单元的光致抗蚀剂聚合物的制造方法,具有通过用酸去除而变得易溶于碱的单体(b)和具有脂环族骨架的单体(c)具有 羟基。 方法包括(A)含有至少一种选自上述单体(a),(b)和(c)的单体的单体的混合物的聚合,和(B)通过使用有机溶剂和水来分离聚合中形成的聚合物 将形成的聚合物转化为有机溶剂层和金属组分杂质进入水层或通过聚合物溶液,其含有具有对应于上述单体(a),(b)和(c)中的至少一种的重复单元的聚合物和金属含量 其相对于包含具有阳离子交换基团的多孔聚烯烃膜的聚合物通过过滤器为1000ppb以下。 光致抗蚀剂聚合物的金属杂质含量极低。