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    • 4. 发明授权
    • Exposure apparatus, exposure method, and device manufacturing method
    • 曝光装置,曝光方法和装置制造方法
    • US08896806B2
    • 2014-11-25
    • US12644703
    • 2009-12-22
    • Shinji Sato
    • Shinji Sato
    • G03B27/52
    • G03F7/70341G03F7/70916
    • An exposure apparatus that exposes a substrate includes: an optical system that includes an emission surface from which an exposure light is emitted; a first surface that is disposed in at least a part of a surrounding of an optical path of the exposure light emitted from the emission surface; a second surface that is disposed in at least a part of a surrounding of the first surface and at a position lower than the first surface; a space portion into which a liquid can flow via a first aperture between the first surface and the second surface and which is opened to the atmosphere via a second aperture different from the first aperture; and a first recovery portion that recovers at least a part of the liquid flowing into the space portion. Here, the emission surface, the first surface, and the second surface are opposed to the surface of the substrate in at least a part of the exposure of the substrate, and the substrate is exposed with the exposure light from the emission surface via the liquid between the emission surface and the surface of the substrate.
    • 曝光基板的曝光装置包括:包括发射曝光光的发射面的光学系统; 第一表面,其设置在从所述发射表面发射的所述曝光光的光路的周围的至少一部分中; 第二表面,其设置在所述第一表面的周围的至少一部分中并且位于比所述第一表面低的位置; 空间部分,液体可以经由第一表面和第二表面之间的第一孔流动,并且经由不同于第一孔的第二孔向大气开放; 以及第一回收部,其回收流入空间部的液体的至少一部分。 这里,在基板的曝光的至少一部分中,发光面,第一表面和第二表面与基板的表面相对,并且通过液体从发射表面暴露出曝光的基板 在发射表面和衬底的表面之间。
    • 5. 发明申请
    • TANK-TYPE CIRCUIT BREAKER
    • 油罐式断路器
    • US20140166622A1
    • 2014-06-19
    • US14233305
    • 2012-08-24
    • Junichi AbeShinji SatoTomoko TanabeNaoaki Inoue
    • Junichi AbeShinji SatoTomoko TanabeNaoaki Inoue
    • H01H33/26
    • H01H33/26G01R31/1227H01H33/668H02B13/0655
    • Capacitors (5a, 5b) are provided in the insulators of bushings (4a, 4b), respectively. One ends of the capacitors (5a, 5b) are connected to central conductors (3a, 3b) side, and the other ends are connected to a tank (1) side at the ground potential. When a discharge signal from the outside of the tank (1) reaches the capacitors (5a, 5b) through the central conductors (3a, 3b), the capacitors (5a, 5b) work as a filter to attenuate and prevent the signal in the frequency band of the discharge waveform from propagating to the inside of the tank (1). When an antenna (7) placed in the tank (1) receives a signal in the frequency band of the discharge waveform, a discharge detection unit (20) determines that a discharge inside the tank has been detected.
    • 电容器(5a,5b)分别设置在衬套(4a,4b)的绝缘体中。 电容器(5a,5b)的一端与中心导体(3a,3b)侧连接,另一端与接地电位的水箱(1)侧连接。 当来自罐(1)的外部的放电信号通过中心导体(3a,3b)到达电容器(5a,5b)时,电容器(5a,5b)用作滤波器,以衰减并防止 放电波形的频带从传播到罐(1)的内部。 当放置在储罐(1)中的天线(7)接收到放电波形的频带中的信号时,放电检测单元(20)确定已经检测到罐内的放电。
    • 6. 发明授权
    • Selected word line dependent select gate voltage during program
    • 程序中所选字线相关选择栅极电压
    • US08638608B2
    • 2014-01-28
    • US13430502
    • 2012-03-26
    • Chun-Hung LaiDeepanshu DuttaShinji SatoGerrit Jan Hemink
    • Chun-Hung LaiDeepanshu DuttaShinji SatoGerrit Jan Hemink
    • G11C11/34
    • G11C11/5628G11C16/0483G11C16/10
    • Methods and devices for operating non-volatile storage are disclosed. One or more programming conditions depend on the location of the word line that is selected for programming, which may reduce or eliminate program disturb. The voltage applied to the gate of a select transistor of a NAND string may depend on the location of the selected word line. This could be either a source side or drain side select transistor. This may prevent or reduce program disturb that could result due to DIBL. This may also prevent or reduce program disturb that could result due to GIDL. A negative bias may be applied to the gate of a source side select transistor when programming at least some of the word lines. In one embodiment, progressively lower voltages are used for the gate of the drain side select transistor when programming progressively higher word lines.
    • 公开了用于操作非易失性存储器的方法和装置。 一个或多个编程条件取决于选择用于编程的字线的位置,这可以减少或消除程序干扰。 施加到NAND串的选择晶体管的栅极的电压可以取决于所选字线的位置。 这可以是源极侧或漏极侧选择晶体管。 这可能会阻止或减少由于DIBL而导致的程序干扰。 这也可以防止或减少由于GIDL可能导致的程序干扰。 当编程至少一些字线时,负偏压可以施加到源极侧选择晶体管的栅极。 在一个实施例中,当编程逐渐增加的字线时,逐渐降低的电压用于漏极侧选择晶体管的栅极。
    • 8. 发明申请
    • PARTICLE BEAM IRRADIATION APPARATUS AND CONTROL METHOD OF THE PARTICLE BEAM IRRADIATION APPARATUS
    • 颗粒光束辐射装置和颗粒光束辐射装置的控制方法
    • US20120305790A1
    • 2012-12-06
    • US13577741
    • 2011-02-07
    • Katsushi HanawaYasushi IsekiNobukazu KakutaniTakuji FurukawaTaku InaniwaShinji SatoKouji Noda
    • Katsushi HanawaYasushi IsekiNobukazu KakutaniTakuji FurukawaTaku InaniwaShinji SatoKouji Noda
    • A61N5/10
    • A61N5/1043A61N5/1071A61N2005/1074A61N2005/1087G21K1/025
    • Provided is a particle beam irradiation apparatus capable of highly reliable measurement of a dose of each beam and capable of highly sensitive measurement of a leakage dose caused by momentary beam emission. The particle beam irradiation apparatus according to the present invention includes: an emission control portion that controls emission and termination of a particle beam; a control portion that sequentially changes an irradiation position of the particle beam relative to an affected area; first and second dosimeters that measure dose rates of the particle beam directed to the affected area; and an abnormality determination portion that accumulates the dose rates output from the first and second dosimeters for each of predetermined determination periods to calculate first and second sectional dose measurement values and that performs second abnormality determination of determining that there is an abnormality and outputs an interlock signal for terminating the emission of the particle beam in at least one of a case in which the first sectional dose measurement value exceeds a predetermined first reference range and a case in which the second sectional dose measurement value exceeds a predetermined second reference range.
    • 提供一种能够高度可靠地测量每个光束的剂量并且能够高度敏感地测量由瞬时光束发射引起的泄漏剂量的粒子束照射装置。 根据本发明的粒子束照射装置包括:发射控制部分,其控制粒子束的发射和终止; 控制部,其依次改变所述粒子束相对于受影响区域的照射位置; 测量指向受影响区域的粒子束的剂量率的第一和第二剂量计; 以及异常判定部,其对于每个规定的判定期间累积从第一和第二剂量计输出的剂量率,以计算第一和第二截面剂量测量值,并且执行确定存在异常的第二异常判定并输出互锁信号 用于在第一部分剂量测量值超过预定的第一参考范围的情况和第二部分剂量测量值超过预定的第二参考范围的情况中的至少一个中终止粒子束的发射。
    • 9. 发明申请
    • Non-Volatile Storage With Temperature Compensation Based On Neighbor State Information
    • 基于邻居状态信息的温度补偿非易失性存储
    • US20120236670A1
    • 2012-09-20
    • US13486305
    • 2012-06-01
    • Gerrit Jan HeminkShinji Sato
    • Gerrit Jan HeminkShinji Sato
    • G11C7/04
    • G11C16/26G11C7/04G11C11/5642
    • Data is programmed into and read from a set of target memory cells. When reading the data, temperature compensation is provided. The temperature compensation is based on temperature information and the state of one or more neighbor memory cells. In one embodiment, when data is read from set of target memory cells, the system senses the current temperature and determines the differences in temperature between the current temperature and the temperature at the time the data was programmed. If the difference in temperature is greater than a threshold, then the process of reading the data includes providing temperature compensation based on temperature information and neighbor state information. In one alternative, the decision to provide the temperature compensation can be triggered by conditions other than a temperature differential.
    • 数据被编程到一组目标存储器单元中并从其读取。 读取数据时,提供温度补偿。 温度补偿基于温度信息和一个或多个相邻存储单元的状态。 在一个实施例中,当从目标存储器单元的集合读取数据时,系统感测当前温度并确定当前温度与数据编程时的温度之间的温度差。 如果温度差大于阈值,则读取数据的过程包括基于温度信息和邻近状态信息提供温度补偿。 在一个替代方案中,提供温度补偿的决定可以由温差以外的条件触发。