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    • 9. 发明申请
    • ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
    • 照明光学系统,曝光装置和装置制造方法
    • US20120013877A1
    • 2012-01-19
    • US13166316
    • 2011-06-22
    • Hirohisa TanakaHiroyuki Hirota
    • Hirohisa TanakaHiroyuki Hirota
    • G03B27/54
    • G02B27/0961G02B26/008G03F7/70091G03F7/70191
    • According to one embodiment, an illumination optical system comprises an optical integrator which forms a secondary light source on an illumination pupil plane in an illumination optical path of the illumination optical system with incidence of exposure light from a light source device thereinto; a first transmission filter arranged in an optical path of the exposure light emitted from a first surface illuminant of the secondary light source and having a transmittance characteristic varying according to angles of incidence of the exposure light; a second transmission filter arranged in an optical path of the exposure light emitted from a second surface illuminant of the secondary light source and having a transmittance characteristic varying according to the angles of incidence of the exposure light; and a rotation mechanism which rotates the first and second transmission filters so as to vary an angle of inclination thereof relative to the optical axis of the illumination optical system.
    • 根据一个实施例,照明光学系统包括光学积分器,其在照明光学系统的照明光路中的照明光瞳平面上形成二次光源,其中光源装置的曝光光入射到照明光学系统中; 第一透射滤光器,其布置在从所述次级光源的第一表面光源发射的曝光光的光路中,并且具有根据所述曝光光的入射角度而变化的透射特性; 第二透射滤光器,其布置在从所述次级光源的第二表面光源发射的曝光光的光路中,并且具有根据所述曝光光的入射角度而变化的透射特性; 以及旋转机构,其使第一和第二透射滤光片旋转以改变其相对于照明光学系统的光轴的倾斜角。