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1. 发明授权

US5208124A Method of making a mask for proximity effect correction in projection lithography 失效
标题翻译：在投影光刻中制作接近效应校正的掩模的方法
公开(公告)号：US5208124A
公开(公告)日：1993-05-04
申请号：US671567
申请日：1991-03-19
申请人： Frederik Sporon-Fiedler , Nader Shamma , Edward Lin
发明人： Frederik Sporon-Fiedler , Nader Shamma , Edward Lin
IPC分类号： G03F1/00 , G03F7/20 , H01L21/027
CPC分类号： G03F7/70441 , G03F1/36
摘要： Reticle data used to form a reticle pattern is modified to substantially compensate for proximity effects resulting from the diffraction of light by opaque portions of the reticle pattern.The reticle pattern is thus modified so that the exposed pattern on the wafer results in a desired pattern, wherein isolated features and features in a dense pattern of features formed on the wafer will be identical and have predictable characteristics.
摘要翻译：用于形成掩模版图案的掩模版数据被修改以基本上补偿由掩模版图案的不透明部分衍射的光所产生的邻近效应。因此修改掩模版图案，使得晶片上的曝光图案产生期望的图案，其中形成在晶片上的特征的致密图案中的隔离特征和特征将是相同的并且具有可预测的特性。

2. 发明授权

US5331370A Method and apparatus for determining a feature-forming variant of a lithographic system 失效
标题翻译：用于确定光刻系统的特征形成变型的方法和装置
公开(公告)号：US5331370A
公开(公告)日：1994-07-19
申请号：US56099
申请日：1993-05-03
申请人： S. Jeffrey Rosner , Nader Shamma , Frederik Sporon-Fiedler
发明人： S. Jeffrey Rosner , Nader Shamma , Frederik Sporon-Fiedler
IPC分类号： G02B27/46 , G03F7/20 , G03F7/207 , H01L21/027 , G03B27/42
CPC分类号： G03F7/70558 , G03F7/70625 , G03F7/70641
摘要： A method of determining a feature-forming variant, such as focus or exposure, for a lithographic system or the like includes Fourier processing that extracts a figure of merit. In a preferred embodiment, the lithographic system fabricates a series of formations of a single pattern. An optical image of each exposure is formed. A Fourier power spectrum is determined for each optical image. An angular power function is extracted from each power spectrum by quantifying optical power along lines originating at various angles from an origin of the power spectrum. With regard to axes of maximum power, the distribution of on-axes and off-axes power is quantified for each angular power function. An optimum for the lithographic system is determined based upon the data extracted from the angular power functions. Preferably, the extraction of an angular power function from the associated Fourier power spectrum is an averaging of the optical power along selected portions of the lines originating from the origin, thereby improving the signal-to-noise ratio.
摘要翻译：确定用于光刻系统等的特征形成变型（例如焦点或曝光）的方法包括提取品质因数的傅里叶处理。在优选实施例中，光刻系统制造单一图案的一系列结构。形成每次曝光的光学图像。为每个光学图像确定傅立叶功率谱。通过沿着源自功率谱的原点的各种角度的线进行量化光功率，从每个功率谱提取角功率函数。关于最大功率的轴，对于每个角功率函数量化轴上和离轴功率的分布。基于从角功率函数提取的数据来确定光刻系统的最佳值。优选地，从相关联的傅里叶功率谱中提取角功率函数是沿着源自原点的线的选定部分的光功率的平均，从而提高信噪比。

3. 发明授权

US08797756B2 Integrated overmolded interconnect tab for surface-mounted circuits 有权
标题翻译：用于表面安装电路的集成的包覆成型互连接头
公开(公告)号：US08797756B2
公开(公告)日：2014-08-05
申请号：US13198646
申请日：2011-08-04
申请人： Frederik Sporon-Fiedler , Eric Austin , Barry Haskins
发明人： Frederik Sporon-Fiedler , Eric Austin , Barry Haskins
IPC分类号： H05K7/10
CPC分类号： H05K3/284 , H05K1/111 , H05K3/325 , Y02P70/611 , Y10T29/4913
摘要： An integrated interconnect tab that provides a mechanically repeatable connection point to electrical components mounted on a printed circuit board. The integrated interconnect tab comprises a conductive pad surrounded by a vertical sidewall structure formed in an overmolded insulating layer. In one embodiment, a large pad accommodates connections to high-power circuit elements such as batteries and high-voltage capacitors. The sidewall structure helps align and guide the position of an interconnecting device such as a wire ribbon connector, facilitating automation of a subsequent attachment process. An automated method of making a PCB assembly having integrated interconnect tabs entails attaching circuit elements and interconnect tabs to a surface of a PCB substrate, encapsulating the attached components, and selectively machining the encapsulating layer to expose weld tabs, to form the vertical sidewall structure surrounding the tabs, and to create mechanical retention features to aid in welding.
摘要翻译：一个集成的互连接头，为安装在印刷电路板上的电气元件提供机械可重复的连接点。集成互连接片包括由形成在包覆模制的绝缘层中的垂直侧壁结构包围的导电焊盘。在一个实施例中，大的焊盘容纳与诸如电池和高压电容器的大功率电路元件的连接。侧壁结构有助于对齐和引导诸如线带连接器之类的互连装置的位置，从而有助于随后的附接过程的自动化。制造具有集成互连突片的PCB组件的自动化方法需要将电路元件连接到PCB基板的表面并将引线互连到封装所附连的部件，并且选择性地加工封装层以露出焊接接头，以形成围绕的垂直侧壁结构翼片，并创建机械保持特征以辅助焊接。

4. 发明授权

US06895139B2 Bistable thermopneumatic optical switch 失效
标题翻译：双稳态热气动光开关
公开(公告)号：US06895139B2
公开(公告)日：2005-05-17
申请号：US10417024
申请日：2003-04-15
申请人： Matt Schwiebert , Frederik Sporon-Fiedler
发明人： Matt Schwiebert , Frederik Sporon-Fiedler
IPC分类号： G02B6/35 , G02B6/26
CPC分类号： G02B6/3538 , G02B6/355 , G02B6/358
摘要： An apparatus and method for switching optical signal is disclosed. An optical signal switch array includes a plurality of optical switches, each optical switch having a first trench adapted to hold index-matching fluid, and a second trench adapted to hold the index-matching fluid, but initially containing gas, the second trench connected to said first trench. A first expansion chamber is connected to the first trench, the first expansion chamber adapted to hold gas. A second expansion chamber is connected to the second trench, the second expansion chamber adapted to hold gas. To effect switching, the first expansion chamber is heated expanding gas in the first expansion chamber, the expanding gas shifting the index-matching fluid in the first trench to the second trench. Bistability is achieved by the use of capillary action, which passively holds the droplet of working fluid in either of two stable states until actuation.
摘要翻译：公开了一种用于切换光信号的装置和方法。光信号开关阵列包括多个光开关，每个光开关具有适于保持折射率匹配流体的第一沟槽和适于保持折射率匹配流体但最初包含气体的第二沟槽，第二沟槽连接到说第一个沟。第一膨胀室连接到第一沟槽，第一膨胀室适于保持气体。第二膨胀室连接到第二沟槽，第二膨胀室适于保持气体。为了实现切换，第一膨胀室是第一膨胀室中的加热膨胀气体，膨胀气体将第一沟槽中的折射率匹配流体移动到第二沟槽。通过使用毛细作用实现双稳态，其被动地将工作液体的液滴保持在两种稳定状态中的任一状态直到致动。

5. 发明授权

US5020006A Method for finding a reference point 失效
标题翻译：查找参考点的方法
公开(公告)号：US5020006A
公开(公告)日：1991-05-28
申请号：US346766
申请日：1989-05-03
申请人： Frederik Sporon-Fiedler
发明人： Frederik Sporon-Fiedler
IPC分类号： G01B21/00 , G03F9/00 , H01L21/027 , H01L21/30
CPC分类号： G03F9/70
摘要： A method for locating the signal from a fiducial mark which is separated by a known distance from a second fiducial mark is disclosed. The signals from the fiducial marks are presumed to be corrupted by noise. The method utilizes the known spacing of the fiducial marks to construct a filter function which, when convolved with the corrupted signal, produces an enhanced signal having a peak at the location of the fiducial mark.
摘要翻译：公开了一种用于将来自基准标记的信号定位成与第二基准标记已知距离分开的方法。来自基准标记的信号被推定为被噪声破坏。该方法利用基准标记的已知间距来构造滤波器函数，当与损坏的信号进行卷积时，产生在基准标记位置具有峰值的增强信号。

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