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    • 7. 发明授权
    • Method of operating an ultrasonic transmitter and receiver
    • 操作超声波发射器和接收器的方法
    • US08667846B2
    • 2014-03-11
    • US13089524
    • 2011-04-19
    • James D. HuffmanGary A. Kneezel
    • James D. HuffmanGary A. Kneezel
    • G01N29/04
    • G01N29/2437B06B1/0622G01N29/04G10K9/122G10K13/00
    • Operating an ultrasonic transmitter and receiver includes providing a MEMS composite transducer. The MEMS composite transducer includes a substrate. Portions of the substrate define an outer boundary of a cavity. A first MEMS transducing member includes a first size. A first portion of the first MEMS transducing member is anchored to the substrate. A second portion of the first MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. A second MEMS transducing member includes a second size smaller than the first size of the first MEMS transducing member. A first portion of the second MEMS transducing member is anchored to the substrate. A second portion of the second MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. A compliant membrane is positioned in contact with the first and second MEMS transducing members. A first portion of the compliant membrane covers the first and second MEMS transducing members. A second portion of the compliant membrane is anchored to the substrate. Electrical pulses are sent to the first MEMS transducing member which causes the first MEMS transducing member and the compliant membrane to vibrate. The vibrations of the first MEMS transducing member and the compliant membrane are transmitted to an object. Echo signals are received from the object. The received echo signals are converted into electrical signals by the second MEMS transducing member.
    • 操作超声波发射器和接收器包括提供MEMS复合传感器。 MEMS复合传感器包括基板。 基板的一部分限定了空腔的外边界。 第一MEMS转换构件包括第一尺寸。 第一MEMS转换构件的第一部分被锚固到基底。 第一MEMS转换构件的第二部分在空腔的至少一部分上延伸并且相对于空腔自由移动。 第二MEMS转换构件包括小于第一MEMS转换构件的第一尺寸的第二尺寸。 第二MEMS转换构件的第一部分被锚固到基底。 第二MEMS转换构件的第二部分在空腔的至少一部分上延伸并且相对于空腔自由移动。 柔性膜定位成与第一和第二MEMS转导构件接触。 柔性膜的第一部分覆盖第一和第二MEMS转导构件。 顺应性膜的第二部分锚定到基底。 电脉冲被发送到第一MEMS转换构件,这导致第一MEMS换能构件和柔性膜振动。 第一MEMS转换构件和柔性膜的振动被传送到物体。 从对象接收回波信号。 所接收的回波信号由第二MEMS转换构件转换成电信号。
    • 10. 发明授权
    • Methods for making internal die filters with multiple passageways which are fluidically in parallel
    • 用于制造具有多个流体平行的多个通道的内部模具过滤器的方法
    • US07922924B2
    • 2011-04-12
    • US11987492
    • 2007-11-30
    • Gary A. Kneezel
    • Gary A. Kneezel
    • B31D3/00
    • B41J2/17563Y10T29/49345Y10T29/49794Y10T29/49798
    • An internal filter includes a lower substrate and an upper substrate. Fluid passages are formed by etching grooves into the surface(s) of the upper and/or lower substrates, and/or in one or more intermediate layers. The filter pores extending between the fluid passages are formed by etching second grooves that fluidly connect the fluid passages. Two or more sets of the one or two intermediate layers can be implemented to provide additional filter passages and/or pores. Each set can be connected to a separate fluid source and/or a separate microfluidic device. In another internal filter, the inlet and outlet passages and the filter pores are formed on the same upper or lower substrate. The inlet and outlet passages are partially formed in a first step. In a second step, the inlet and outlet passages are completed at the same time that the filter pores are formed.
    • 内部滤波器包括下基板和上基板。 通过将凹槽蚀刻到上基板和/或下基板的表面中和/或在一个或多个中间层中形成流体通道。 通过蚀刻流体连接流体通道的第二凹槽来形成在流体通道之间延伸的过滤器孔。 可以实施两组或更多套一个或两个中间层,以提供额外的过滤通道和/或孔。 每组可以连接到单独的流体源和/或单独的微流体装置。 在另一个内部过滤器中,入口和出口通道和过滤器孔形成在相同的上或下基板上。 入口和出口通道部分地形成在第一步骤中。 在第二步骤中,入口和出口通道在形成过滤器孔的同时完成。