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    • 2. 发明授权
    • Flow-through liquid ejection using compliant membrane transducer
    • 使用柔性膜传感器的流通液体喷射
    • US08517516B2
    • 2013-08-27
    • US13089632
    • 2011-04-19
    • James A. KaterbergJames D. Huffman
    • James A. KaterbergJames D. Huffman
    • B41J2/04
    • B41J2/14B41J2002/14346B41J2002/14403B41J2002/14475B41J2202/12
    • A method of ejecting a liquid includes providing a liquid dispenser including a substrate. A first portion of the substrate defines a liquid dispensing channel including an outlet opening. A second portion of the substrate defines a liquid supply channel and a liquid return channel. A diverter member is positioned on a wall of the liquid dispensing channel that includes the outlet opening. The diverter member includes a MEMS transducing member anchored to the wall of the liquid dispensing channel. A compliant membrane is positioned in contact with the MEMS transducing member. The diverter member is selectively actuated to divert a portion of the liquid flowing through the liquid dispensing channel through outlet opening of the liquid dispensing channel.
    • 喷射液体的方法包括提供包括基底的液体分配器。 衬底的第一部分限定了包括出口开口的液体分配通道。 衬底的第二部分限定了液体供应通道和液体返回通道。 分流器构件定位在包括出口开口的液体分配通道的壁上。 分流器构件包括锚定在液体分配通道的壁上的MEMS换能构件。 柔性膜定位成与MEMS换能件接触。 分流器构件被选择性地致动以使流过液体分配通道的液体的一部分通过液体分配通道的出口打开。
    • 3. 发明授权
    • Fluid ejector including MEMS composite transducer
    • 流体喷射器包括MEMS复合传感器
    • US08434855B2
    • 2013-05-07
    • US13089528
    • 2011-04-19
    • James D. HuffmanWeibin ZhangJohn A. Lebens
    • James D. HuffmanWeibin ZhangJohn A. Lebens
    • B41J2/04
    • B41J2/14427
    • A fluid ejector includes a substrate, a MEMS transducing member, a compliant membrane, walls, and a nozzle. First portions of the substrate define an outer boundary of a cavity. Second portions of the substrate define a fluidic feed. A first portion of the MEMS transducing member is anchored to the substrate. A second portion of the MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. The compliant membrane is positioned in contact with the MEMS transducing member. A first portion of the compliant membrane covers the MEMS transducing member. A second portion of the compliant membrane is anchored to the substrate. Partitioning walls define a chamber that is fluidically connected to the fluidic feed. At least the second portion of the MEMS transducing member is enclosed within the chamber. The nozzle is disposed proximate to the second portion of the MEMS transducing member and distal to the fluidic feed.
    • 流体喷射器包括基板,MEMS转换构件,柔性膜,壁和喷嘴。 基板的第一部分限定空腔的外边界。 衬底的第二部分限定了流体进料。 MEMS转换构件的第一部分被锚定到基底。 MEMS转换构件的第二部分在空腔的至少一部分上延伸并且相对于空腔自由移动。 柔性膜定位成与MEMS换能件接触。 柔性膜的第一部分覆盖MEMS换能构件。 顺应性膜的第二部分锚定到基底。 分隔壁限定了流体连接到流体进料的室。 至少MEMS转换构件的第二部分被封闭在腔室内。 喷嘴靠近MEMS转换构件的第二部分并且远离流体进料设置。
    • 5. 发明申请
    • FABRICATING MEMS COMPOSITE TRANSDUCER INCLUDING COMPLIANT MEMBRANE
    • 制造包括合成膜的MEMS复合传感器
    • US20120270352A1
    • 2012-10-25
    • US13089532
    • 2011-04-19
    • James D. HuffmanMaria J. Lehmann
    • James D. HuffmanMaria J. Lehmann
    • H01L21/02
    • B81C1/00182B81B2201/038B81B2203/053G01H11/06H02N1/002H04R1/222H04R17/02H04R31/00H04R2201/003
    • A method of fabricating a MEMS composite transducer includes providing a substrate having a first surface and a second surface opposite the first surface. A transducing material is deposited over the first surface of the substrate. The transducing material is patterned by retaining transducing material in a first region and removing transducing material in a second region. A polymer layer is deposited over the first region and the second region. The polymer layer is patterned by retaining polymer in a third region and removing polymer in a fourth region. A first portion of the third region is coincident with a portion of the first region and a second portion of the third region is coincident with a portion of the second region. A cavity is etched from the second surface to the first surface of the substrate. An outer boundary of the cavity at the first surface of the substrate intersects the first region where transducing material is retained, so that a first portion of the transducing material is anchored to the first surface of the substrate and a second portion of the transducing material extends over at least a portion of the cavity.
    • 制造MEMS复合换能器的方法包括提供具有第一表面和与第一表面相对的第二表面的基底。 在衬底的第一表面上沉积换能材料。 通过将传感材料保持在第一区域中并且在第二区域中去除换能材料来对转导材料进行图案化。 聚合物层沉积在第一区域和第二区域上。 通过在第三区域中保持聚合物并在第四区域中除去聚合物来对聚合物层进行图案化。 第三区域的第一部分与第一区域的一部分重合,第三区域的第二部分与第二区域的一部分重合。 空腔从第二表面蚀刻到衬底的第一表面。 在基板的第一表面处的空腔的外边界与保持换能材料的第一区域相交,使得转换材料的第一部分锚定到基板的第一表面,并且换能材料的第二部分延伸 在空腔的至少一部分上方。
    • 6. 发明申请
    • FLOW-THROUGH LIQUID EJECTION USING COMPLIANT MEMBRANE TRANSDUCER
    • 使用合适的膜传感器流动液体喷射
    • US20120268528A1
    • 2012-10-25
    • US13089582
    • 2011-04-19
    • Carolyn R. EllingerJames A. KaterbergJames D. Huffman
    • Carolyn R. EllingerJames A. KaterbergJames D. Huffman
    • B41J2/04
    • B41J2/14B41J2002/14346B41J2002/14403B41J2002/14475B41J2202/12
    • A method of ejecting liquid includes providing a liquid dispenser including a substrate and a diverter member. A first portion of the substrate defines a liquid dispensing channel including an outlet opening and a second portion of the substrate defines an outer boundary of a cavity. Other portions of the substrate define a liquid supply channel and a liquid return channel. The diverter member includes a MEMS transducing member. A first portion of the MEMS transducing member is anchored to the substrate. A second portion of the MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. A compliant membrane is positioned in contact with the MEMS transducing member. A first portion of the compliant membrane covers the MEMS transducing member. A second portion of the compliant membrane is anchored to the substrate such that the compliant membrane forms a portion of a wall of the liquid dispensing channel. The wall is positioned opposite the outlet opening. A continuous flow of liquid is provided from a liquid supply through the liquid supply channel through the liquid dispensing channel through the liquid return channel and back to the liquid supply. The diverter member is selectively actuated to divert a portion of the liquid flowing through the liquid dispensing channel through outlet opening of the liquid dispensing channel when drop ejection is desired.
    • 喷射液体的方法包括提供包括基底和转向构件的液体分配器。 衬底的第一部分限定包括出口开口的液体分配通道,并且衬底的第二部分限定空腔的外边界。 衬底的其他部分限定了液体供应通道和液体返回通道。 分流器构件包括MEMS换能构件。 MEMS转换构件的第一部分被锚定到基底。 MEMS转换构件的第二部分在空腔的至少一部分上延伸并且相对于空腔自由移动。 柔性膜定位成与MEMS换能件接触。 柔性膜的第一部分覆盖MEMS换能构件。 柔性膜的第二部分锚固到基底上,使得柔顺膜形成液体分配通道的壁的一部分。 墙壁位于出口开口对面。 从液体供应通道通过液体分配通道通过液体返回通道提供连续的液体流并返回到液体供应。 当需要液滴喷射时,分流器构件被选择性地致动以使流过液体分配通道的液体的一部分通过液体分配通道的出口打开。
    • 7. 发明申请
    • FLUID EJECTOR INCLUDING MEMS COMPOSITE TRANSDUCER
    • 流体喷射器包括MEMS复合传感器
    • US20120268526A1
    • 2012-10-25
    • US13089528
    • 2011-04-19
    • James D. HuffmanWeibin ZhangJohn A. Lebens
    • James D. HuffmanWeibin ZhangJohn A. Lebens
    • B41J2/04
    • B41J2/14427
    • A fluid ejector includes a substrate, a MEMS transducing member, a compliant membrane, walls, and a nozzle. First portions of the substrate define an outer boundary of a cavity. Second portions of the substrate define a fluidic feed. A first portion of the MEMS transducing member is anchored to the substrate. A second portion of the MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. The compliant membrane is positioned in contact with the MEMS transducing member. A first portion of the compliant membrane covers the MEMS transducing member. A second portion of the compliant membrane is anchored to the substrate. Partitioning walls define a chamber that is fluidically connected to the fluidic feed. At least the second portion of the MEMS transducing member is enclosed within the chamber. The nozzle is disposed proximate to the second portion of the MEMS transducing member and distal to the fluidic feed.
    • 流体喷射器包括基板,MEMS转换构件,柔性膜,壁和喷嘴。 基板的第一部分限定空腔的外边界。 衬底的第二部分限定了流体进料。 MEMS转换构件的第一部分被锚定到基底。 MEMS转换构件的第二部分在空腔的至少一部分上延伸并且相对于空腔自由移动。 柔性膜定位成与MEMS换能件接触。 柔性膜的第一部分覆盖MEMS换能构件。 顺应性膜的第二部分锚定到基底。 分隔壁限定了流体连接到流体进料的室。 至少MEMS转换构件的第二部分被封闭在腔室内。 喷嘴靠近MEMS转换构件的第二部分并且远离流体进料设置。
    • 8. 发明申请
    • ENERGY HARVESTING DEVICE INCLUDING MEMS COMPOSITE TRANSDUCER
    • 包括MEMS复合传感器的能量采集装置
    • US20120267900A1
    • 2012-10-25
    • US13089507
    • 2011-04-19
    • James D. HuffmanGary A. Kneezel
    • James D. HuffmanGary A. Kneezel
    • H02K57/00
    • H02N2/186H01L41/1138
    • An energy harvesting device includes a MEMS composite transducer. The MEMS composite transducer includes a substrate. Portions of the substrate define an outer boundary of a cavity. A MEMS transducing member includes a beam having a first end and a second end. The first end is anchored to the substrate and the second end cantilevers over the cavity. A compliant membrane is positioned in contact with the MEMS transducing member. A first portion of the compliant membrane covers the MEMS transducing member. A second portion of the compliant membrane is anchored to the substrate. The compliant member is configured to be set into oscillation by excitations produced externally relative to the energy harvesting device.
    • 能量收集装置包括MEMS复合传感器。 MEMS复合传感器包括基板。 基板的一部分限定了空腔的外边界。 MEMS转换构件包括具有第一端和第二端的梁。 第一端锚固到基底上,第二端悬臂在空腔上。 柔性膜定位成与MEMS换能件接触。 柔性膜的第一部分覆盖MEMS换能构件。 顺应性膜的第二部分锚定到基底。 柔性构件被配置成通过相对于能量收集装置在外部产生的激励而被设置成振荡。
    • 9. 发明申请
    • ENERGY HARVESTING USING MEMS COMPOSITE TRANSDUCER
    • 使用MEMS复合传感器的能量采集
    • US20120267899A1
    • 2012-10-25
    • US13089500
    • 2011-04-19
    • James D. HuffmanGary A. Kneezel
    • James D. HuffmanGary A. Kneezel
    • H02K57/00
    • H02N2/186H01L41/1138
    • A method of harvesting energy from the environment includes providing an energy harvesting device. The energy harvesting device includes a MEMS composite transducer. The MEMS composite transducer includes a substrate. Portions of the substrate define an outer boundary of a cavity. A MEMS transducing member includes a beam having a first end and a second end. The first end is anchored to the substrate and the second end cantilevers over the cavity. A compliant membrane is positioned in contact with the MEMS transducing member. A first portion of the compliant membrane covers the MEMS transducing member. A second portion of the compliant membrane is anchored to the substrate. The energy harvesting device is configured so that the compliant membrane is set into oscillation by excitations produced external to the energy harvesting device. The MEMS transducing member is caused to move into and out of the cavity by the oscillating compliant membrane. The motion of the MEMS transducing member is converted into an electrical signal.
    • 从环境中收集能量的方法包括提供能量收集装置。 能量收集装置包括MEMS复合传感器。 MEMS复合传感器包括基板。 基板的一部分限定了空腔的外边界。 MEMS转换构件包括具有第一端和第二端的梁。 第一端锚固到基底上,第二端悬臂在空腔上。 柔性膜定位成与MEMS换能件接触。 柔性膜的第一部分覆盖MEMS换能构件。 顺应性膜的第二部分锚定到基底。 能量收集装置被配置为使得顺应性膜通过能量收集装置外部产生的激发而被设置成振荡。 通过振荡柔性膜使MEMS转换元件进入和流出空腔。 MEMS转换构件的运动被转换为电信号。
    • 10. 发明申请
    • METHOD OF OPERATING AN ULTRASONIC TRANSMITTER AND RECEIVER
    • 操作超声波发射机和接收机的方法
    • US20120266675A1
    • 2012-10-25
    • US13089524
    • 2011-04-19
    • James D. HuffmanGary A. Kneezel
    • James D. HuffmanGary A. Kneezel
    • G01N29/04
    • G01N29/2437B06B1/0622G01N29/04G10K9/122G10K13/00
    • Operating an ultrasonic transmitter and receiver includes providing a MEMS composite transducer. The MEMS composite transducer includes a substrate. Portions of the substrate define an outer boundary of a cavity. A first MEMS transducing member includes a first size. A first portion of the first MEMS transducing member is anchored to the substrate. A second portion of the first MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. A second MEMS transducing member includes a second size smaller than the first size of the first MEMS transducing member. A first portion of the second MEMS transducing member is anchored to the substrate. A second portion of the second MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. A compliant membrane is positioned in contact with the first and second MEMS transducing members. A first portion of the compliant membrane covers the first and second MEMS transducing members. A second portion of the compliant membrane is anchored to the substrate. Electrical pulses are sent to the first MEMS transducing member which causes the first MEMS transducing member and the compliant membrane to vibrate. The vibrations of the first MEMS transducing member and the compliant membrane are transmitted to an object. Echo signals are received from the object. The received echo signals are converted into electrical signals by the second MEMS transducing member.
    • 操作超声波发射器和接收器包括提供MEMS复合传感器。 MEMS复合传感器包括基板。 基板的一部分限定了空腔的外边界。 第一MEMS转换构件包括第一尺寸。 第一MEMS转换构件的第一部分被锚固到基底。 第一MEMS转换构件的第二部分在空腔的至少一部分上延伸并且相对于空腔自由移动。 第二MEMS转换构件包括小于第一MEMS转换构件的第一尺寸的第二尺寸。 第二MEMS转换构件的第一部分被锚固到基底。 第二MEMS转换构件的第二部分在空腔的至少一部分上延伸并且相对于空腔自由移动。 柔性膜定位成与第一和第二MEMS转导构件接触。 柔性膜的第一部分覆盖第一和第二MEMS转导构件。 顺应性膜的第二部分锚定到基底。 电脉冲被发送到第一MEMS转换构件,这导致第一MEMS换能构件和柔性膜振动。 第一MEMS转换构件和柔性膜的振动被传送到物体。 从对象接收回波信号。 所接收的回波信号由第二MEMS转换构件转换成电信号。