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1. 发明申请

US20050150597A1 Apparatus and method for controlled cleaving 审中-公开
标题翻译：用于控制切割的装置和方法
公开(公告)号：US20050150597A1
公开(公告)日：2005-07-14
申请号：US10754980
申请日：2004-01-09
申请人： Francois Henley , Hongbee Teoh , Anthony Paler , Albert Lamm , Philip Ong
发明人： Francois Henley , Hongbee Teoh , Anthony Paler , Albert Lamm , Philip Ong
IPC分类号： B28D5/00 , B32B1/00 , H01L21/00 , H01L21/762
CPC分类号： H01L21/67092 , B28D5/00 , H01L21/76251 , Y10T156/1928
摘要： An apparatus and method for controlled cleaving is presented. Embodiments of the present invention include an apparatus for cleaving a substrate comprising a bottom shell coupled to a hinge mechanism, a top shell coupled to the hinge mechanism, a plurality of o-rings or suction cups coupled to the top and bottom shells for providing a suction force sufficient to exert a tensile force to the top and bottom of a substrate, a compliant member for sealing a portion of a grove edge of a substrate and for maintaining a pressure inside a volume formed between the groove edge and the groove edge of the substrate, a gas port for supplying gas to the volume, and a height adjustment mechanism coupled to the top shell and the bottom shell for separating the top shell from the bottom shell. One embodiment of the invention eliminates the use of gas system and is replaced by a blade edge to initiate propagation and applied tensile force of suction cups to apply tensile forces prior to initiation, control cleave process and maintain layer separation during and after cleaving.
摘要翻译：提出了一种控制劈裂的装置和方法。本发明的实施例包括一种用于切割基底的装置，包括联接到铰链机构的底壳，联接到铰链机构的顶壳，耦合到顶壳和底壳的多个O形圈或吸盘，用于提供足以向基材的顶部和底部施加张力的吸力，用于密封基材的凹槽边缘的一部分并用于保持形成在凹槽边缘和凹槽边缘之间的体积内的压力衬底，用于向体积供应气体的气体端口，以及联接到顶部壳体和底部壳体的高度调节机构，用于将顶部壳体与底部壳体分离。本发明的一个实施例消除了气体系统的使用，并且被叶片边缘替代以启动吸盘的传播和施加的拉力，以在开始之前施加拉伸力，控制裂开过程并且在裂开期间和之后维持层分离。

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