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    • 2. 发明申请
    • METHOD AND DEVICE FOR AUTOMATIC PREDICTION OF A VALUE ASSOCIATED WITH A DATA TUPLE
    • 用于自动预测与数据轮相关的数值的方法和装置
    • US20130211803A1
    • 2013-08-15
    • US13879407
    • 2010-10-18
    • Feng XuDe Bing LiuXiao Dong GuZhi Bo Chen
    • Feng XuDe Bing LiuXiao Dong GuZhi Bo Chen
    • G06F17/50
    • G06F17/5018G06F17/18G06K9/6276G06N20/00H04N19/14H04N19/154H04N19/162
    • The invention relates to a method and a device for automatic prediction of a current value using a weighted average of a number of current reference values, wherein the current value is associated with a current pair consisting of a first and a second current data tuple. The method comprises using a set of reference pairs, each reference pair consisting of a first and a second reference data tuple and being associated with a reference value, for selecting the current reference values wherein the first reference data tuples, the first current data tuple and a first metric is used for selecting, determining, for each current reference value, an associated weight using the second reference data tuples of the pair associated with the respective selected reference value, the second current data tuple and a second metric, and using the current reference values and the determined weights for determining the weighted average.
    • 本发明涉及一种使用多个当前参考值的加权平均来自动预测当前值的方法和装置,其中当前值与由第一和第二当前数据元组组成的当前对相关联。 该方法包括使用一组参考对,每个参考对由第一和第二参考数据元组组成并与参考值相关联,用于选择当前参考值,其中第一参考数据元组,第一当前数据元组和 第一度量用于使用与相应选择的参考值,第二当前数据元组和第二度量相关联的对的第二参考数据元组来选择,确定每个当前参考值相关联的权重,并且使用当前 参考值和确定加权平均值的确定权重。
    • 7. 发明授权
    • Focus detection apparatus for projection lithography system
    • 投影光刻系统的焦点检测装置
    • US08760626B2
    • 2014-06-24
    • US13464321
    • 2012-05-04
    • Jinlong LiSong HuLixin ZhaoFeng XuLanlan LiZhuang Sheng
    • Jinlong LiSong HuLixin ZhaoFeng XuLanlan LiZhuang Sheng
    • G03B27/52G03B27/70G03F9/00
    • G03F9/7026G03F9/7061
    • Disclosed is a focus detection apparatus for a projection lithography system. The apparatus includes: a laser; a focus optical unit configured to focusing the emitted laser beam; a force detection unit configured to reflect the focused laser beam at the backside; a position detection unit configured to detect variations in position of a light spot formed by the reflected laser beam, and output a strength signal indicating the strength of the interaction force between the force detection unit and the object; a differential amplifier configured to output a Z-direction differential signal based on the strength signal and a reference signal; a Z-direction feedback control unit configured to perform feedback control; and a scan signal generator configured to output a signal for controlling the movement of the stage in the XY plane. The focus detection apparatus has high precision, efficiency and process applicability.
    • 公开了一种用于投影光刻系统的焦点检测装置。 该装置包括:激光器; 被配置为聚焦所发射的激光束的聚焦光学单元; 力检测单元,被配置为将聚焦的激光束反射到背面; 位置检测单元,被配置为检测由所述反射的激光束形成的光点的位置的变化,并且输出表示所述力检测单元与所述物体之间的相互作用力的强度的强度信号; 差分放大器,被配置为基于强度信号和参考信号输出Z​​方向差分信号; 配置为执行反馈控制的Z方向反馈控制单元; 以及扫描信号发生器,被配置为输出用于控制所述载物台在XY平面中的运动的信号。 焦点检测装置具有高精度,高效率和工艺适用性。