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    • 3. 发明授权
    • Device for plasma-activated vapor coating of large surfaces
    • 用于大面积等离子体激活蒸气涂层的装置
    • US07803255B2
    • 2010-09-28
    • US10480791
    • 2002-06-13
    • Manfred NeumannSteffen StraachMario KrugNicolas Schiller
    • Manfred NeumannSteffen StraachMario KrugNicolas Schiller
    • C23C14/34C23C16/00
    • H01J37/32422C23C14/32C23C14/56
    • The invention relates to a device for the plasma activated vapor coating of large-surface moved substrates, comprising at least one vacuum recipient, one pump system, one evaporator, one device for holding and transporting the substrates to be coated and at least one arc discharge plasma source, whereby at least one device for generating a magnetic field is included, which device can generate a magnetic field between the evaporator and the substrate, the field lines of which magnetic field are aligned approximately perpendicular to the movement direction and parallel to the transport plane of the substrate, and at least one arc discharge plasma source is arranged such that the axis of the arc discharge plasma source is aligned approximately perpendicular to the field lines of the magnetic field.
    • 本发明涉及一种用于大面积移动的基板的等离子体活化蒸气涂层的装置,包括至少一个真空接收器,一个泵系统,一个蒸发器,一个用于保持和输送待涂覆的基板的装置和至少一个电弧放电 等离子体源,由此包括用于产生磁场的至少一个装置,该装置可以在蒸发器和基板之间产生磁场,其中磁场线大致垂直于运动方向排列并平行于运送 平面,并且布置至少一个电弧放电等离子体源,使得电弧放电等离子体源的轴线大致垂直于磁场的场线排列。