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1. 发明授权

US09606345B2 Microscope device 有权
公开(公告)号：US09606345B2
公开(公告)日：2017-03-28
申请号：US14346906
申请日：2012-09-28
申请人： FEI Company , TILL I.D. GMBH
发明人： Rainer Uhl , Martin Schropp
IPC分类号： G02B21/00 , G02B21/06 , G02B21/14 , G02B21/36 , G02B27/58 , G01N21/64
CPC分类号： G02B21/06 , G01N21/6458 , G02B21/0032 , G02B21/14 , G02B21/367 , G02B27/58
摘要： A microscope has an objective, a light source illuminating a sample over an illumination beam path, an arrangement producing a flat illumination pattern which is structured in both spatial directions on the sample, a surface detector detecting light coming over one picture beam path, an arrangement shifting the illumination pattern on the sample in one displacement direction, and a control unit taking one picture at a time of the light which was detected by the detector as phase picture in different positions of the pattern along the displacement direction and to computationally reconstruct from these phase pictures an overall picture of the illuminated sample region. The displacement direction is oblique to the main axes of symmetry of the illumination pattern and depending on the illumination pattern is chosen such that the number of phase pictures which is necessary for the picture reconstruction corresponds to the theoretically minimally required value.

2. 发明申请

US20140313576A1 Microscope Device 有权
标题翻译：显微镜装置
公开(公告)号：US20140313576A1
公开(公告)日：2014-10-23
申请号：US14346906
申请日：2012-09-28
申请人： FEI Company
发明人： Rainer Uhl , Martin Schropp
IPC分类号： G02B21/06
CPC分类号： G02B21/06 , G01N21/6458 , G02B21/0032 , G02B21/14 , G02B21/367 , G02B27/58
摘要： A microscope has an objective, a light source illuminating a sample over an illumination beam path, an arrangement producing a flat illumination pattern which is structured in both spatial directions on the sample, a surface detector detecting light coming over one picture beam path, an arrangement shifting the illumination pattern on the sample in one displacement direction, and a control unit taking one picture at a time of the light which was detected by the detector as phase picture in different positions of the pattern along the displacement direction and to computationally reconstruct from these phase pictures an overall picture of the illuminated sample region. The displacement direction is oblique to the main axes of symmetry of the illumination pattern and depending on the illumination pattern is chosen such that the number of phase pictures which is necessary for the picture reconstruction corresponds to the theoretically minimally required value.
摘要翻译：显微镜具有目的，在照明光束路径上照射样本的光源，产生在样本上沿两个空间方向构造的平坦照明图案的布置，检测来自一个图像束路径的光的表面检测器，在一个位移方向上移动样品上的照明图案，以及控制单元，将由检测器检测到的光中的一个图像作为沿图案的位移方向的不同位置的相位图像，并从这些位置进行计算重建照相样品区域的整体图像。位移方向与照明图案的主要对称轴倾斜，并且根据照明图案被选择，使得图像重建所需的相位图像的数量对应于理论上最低要求的值。

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