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1. 发明申请

US20140302252A1 Low Energy Ion Milling or Deposition 有权
标题翻译：低能离子研磨或沉积
公开(公告)号：US20140302252A1
公开(公告)日：2014-10-09
申请号：US14243583
申请日：2014-04-02
申请人： FEI Company
发明人： Johannes Jacobus Lambertus Mulders , Remco Theodorus Johannes Petrus Geurts , Petrus Hubertus Franciscus Trompenaars , Eric Gerardus Theodoor Bosch
IPC分类号： C23C14/48 , H01J37/305 , H01J37/317
CPC分类号： C23C14/48 , G01N1/286 , G01N1/32 , H01J37/02 , H01J37/3053 , H01J37/3171 , H01J37/3178 , H01J2237/004 , H01J2237/006 , H01J2237/31732 , H01J2237/3174 , H01J2237/31742 , H01J2237/31745 , H01J2237/31749
摘要： Samples to be imaged in a Transmission Electron Microscope must be thinned to form a lamella with a thickness of, for example, 20 nm. This is commonly done by sputtering with ions in a charged particle apparatus equipped with a Scanning Electron Microscope (SEM) column, a Focused Ion Beam (FIB) column, and one or more Gas Injection Systems (GISses). A problem that occurs is that a large part of the lamella becomes amorphous due to bombardment by ions, and that ions get implanted in the sample. The invention provides a solution by applying a voltage difference between the capillary of the GIS and the sample, and directing a beam of ions or electrons to the jet of gas. The beam ionizes gas that is accelerated to the sample, where (when using a low voltage between sample and GIS) low energy milling occurs, and thus little sample thickness becomes amorphous.
摘要翻译：在透射电子显微镜中成像的样品必须变薄以形成厚度为例如20nm的薄片。这通常通过在装备有扫描电子显微镜（SEM）柱，聚焦离子束（FIB）柱和一个或多个气体注入系统（GISs））的带电粒子装置中用离子溅射来完成。发生的一个问题是，由于离子的轰击，大部分薄片变成无定形，并且离子被植入样品中。本发明通过在GIS的毛细管和样品之间施加电压差并且将一束离子或电子引导到气体射流来提供解决方案。光束电离加速到样品的气体，其中（当在样品和GIS之间使用低电压时）发生低能量铣削，因此样品厚度变得非晶态。

2. 发明申请

US20160244871A1 MULTI-SOURCE GIS FOR PARTICLE-OPTICAL APPARATUS 审中-公开
标题翻译：用于颗粒光学设备的多源GIS
公开(公告)号：US20160244871A1
公开(公告)日：2016-08-25
申请号：US15052716
申请日：2016-02-24
申请人： FEI Company
发明人： Johannes Jacobus Lambertus Mulders , Petrus Hubertus Franciscus Trompenaars , Pleun Dona
IPC分类号： C23C14/22 , B05B1/14 , B05B7/24 , B05B1/00
CPC分类号： C23C14/221 , B05B1/005 , B05B1/14 , B05B7/24 , H01J37/30 , H01J2237/006 , H01J2237/31732 , H01J2237/3174 , H01J2237/31749
摘要： A Gas Injection System (GIS) applies at least two fluids in the vacuum chamber of a particle-optical apparatus, the gas injection system having two or more channels. Each channel is connected to an associated reservoir holding a fluid at a first side and having an associated exit opening at the other side, the exit sides individually exiting to the outside of the GIS via a nozzle with a nozzle opening. At least two exit openings separated by less than the diameter of the channels near the exit openings, preferably concentric to each other.
摘要翻译：气体注入系统（GIS）在颗粒光学装置的真空室中应用至少两种流体，气体注入系统具有两个或更多个通道。每个通道连接到在第一侧保持流体并且在另一侧具有相关联的出口的相关储存器，出口侧通过具有喷嘴开口的喷嘴单独地离开GIS的外部。至少两个出口开口分开，小于靠近出口开口的通道的直径，优选彼此同心。

3. 发明授权

US09206504B2 Low energy ion milling or deposition 有权
标题翻译：低能离子研磨或沉积
公开(公告)号：US09206504B2
公开(公告)日：2015-12-08
申请号：US14243583
申请日：2014-04-02
申请人： FEI Company
发明人： Johannes Jacobus Lambertus Mulders , Remco Theodorus Johannes Petrus Geurts , Petrus Hubertus Franciscus Trompenaars , Eric Gerardus Theodoor Bosch
IPC分类号： C23C14/28 , H05B6/00 , C23C14/48 , H01J37/305 , H01J37/317 , H01J37/02 , G01N1/28 , G01N1/32
CPC分类号： C23C14/48 , G01N1/286 , G01N1/32 , H01J37/02 , H01J37/3053 , H01J37/3171 , H01J37/3178 , H01J2237/004 , H01J2237/006 , H01J2237/31732 , H01J2237/3174 , H01J2237/31742 , H01J2237/31745 , H01J2237/31749
摘要： Samples to be imaged in a Transmission Electron Microscope must be thinned to form a lamella with a thickness of, for example, 20 nm. This is commonly done by sputtering with ions in a charged particle apparatus equipped with a Scanning Electron Microscope (SEM) column, a Focused Ion Beam (FIB) column, and one or more Gas Injection Systems (GISses). A problem that occurs is that a large part of the lamella becomes amorphous due to bombardment by ions, and that ions get implanted in the sample. The invention provides a solution by applying a voltage difference between the capillary of the GIS and the sample, and directing a beam of ions or electrons to the jet of gas. The beam ionizes gas that is accelerated to the sample, where (when using a low voltage between sample and GIS) low energy milling occurs, and thus little sample thickness becomes amorphous.
摘要翻译：在透射电子显微镜中成像的样品必须变薄以形成厚度为例如20nm的薄片。这通常通过在装备有扫描电子显微镜（SEM）柱，聚焦离子束（FIB）柱和一个或多个气体注入系统（GISs））的带电粒子装置中用离子溅射来完成。发生的一个问题是，由于离子的轰击，大部分薄片变成无定形，并且离子被植入样品中。本发明通过在GIS的毛细管和样品之间施加电压差并且将一束离子或电子引导到气体射流来提供解决方案。光束电离加速到样品的气体，其中（当在样品和GIS之间使用低电压时）发生低能量铣削，因此样品厚度变得非晶态。

4. 发明申请

US20190172696A1 SIMS Spectrometry Technique 审中-公开
公开(公告)号：US20190172696A1
公开(公告)日：2019-06-06
申请号：US16173194
申请日：2018-10-29
申请人： FEI Company
发明人： Johannes Jacobus Lambertus Mulders
IPC分类号： H01J49/04 , H01J49/00
摘要： A method of performing Secondary Ion Mass Spectrometry, comprising: Providing a specimen on a specimen holder; Using an ion beam to irradiate a region of a surface of said specimen, thereby producing ablated specimen material; Collecting ionized constituents of said ablated material in a mass analyzer, and sorting them according to species, further comprising: Providing a catalytic gas proximal said region of the specimen surface during said irradiation, said gas comprising a component selected from the group comprising perfluoroalkanes and their isomers.

5. 发明申请

US20150009489A1 CHARGED-PARTICLE MICROSCOPE WITH RAMAN SPECTROSCOPY CAPABILITY 审中-公开
标题翻译：具有拉曼光谱能力的带电粒子显微镜
公开(公告)号：US20150009489A1
公开(公告)日：2015-01-08
申请号：US14326341
申请日：2014-07-08
申请人： FEI Company
发明人： Johannes Jacobus Lambertus Mulders , Laurens Kuipers
IPC分类号： H01J37/26 , G01N21/65
CPC分类号： H01J37/261 , G01N21/65 , H01J37/226 , H01J37/28 , H01J2237/31745
摘要： A charged-particle microscope with Raman spectroscopy capability and a method for examining a sample using a combined charged-particle microscope and Raman spectroscope. The method includes imaging a region of a sample by irradiating the sample with a beam of charged particles from the microscope; identifying a feature of interest in the region using the microscope; radiatively stimulating and spectroscopically analyzing a portion of the region comprising the feature of interest using a light spot of a width D from the spectroscope, wherein the feature of interest has at least one lateral dimension smaller than width D and, prior to using the light spot of the width D from the spectroscope, an in situ surface modification technique is used to cause positive discrimination of an expected Raman signal from the feature of interest relative to an expected Raman signal from the part of the portion other than the feature of interest.
摘要翻译：具有拉曼光谱能力的带电粒子显微镜和使用组合带电粒子显微镜和拉曼光谱仪检查样品的方法。该方法包括用来自显微镜的带电粒子束照射样品来对样品的区域进行成像; 使用显微镜识别该地区感兴趣的特征; 使用来自分光器的宽度为D的光点对包含感兴趣特征的区域的一部分进行辐射刺激和光谱分析，其中感兴趣的特征具有至少一个小于宽度D的横向尺寸，并且在使用光斑之前的来自分光器的宽度D，使用原位表面修饰技术来引起来自感兴趣特征的预期拉曼信号相对于除感兴趣特征部分以外的部分的预期拉曼信号的正面鉴别。

6. 发明申请

US20130205808A1 Forming a Vitrified Sample for Electron Microscopy 有权
标题翻译：形成电子显微镜的玻璃化样品
公开(公告)号：US20130205808A1
公开(公告)日：2013-08-15
申请号：US13766221
申请日：2013-02-13
申请人： FEI Company
发明人： Johannes Jacobus Lambertus Mulders , Rudolf Johannes Peter Gerardus Schampers , Petrus Hubertus Franciscus Trompenaars
IPC分类号： F25D31/00
CPC分类号： F25D31/00 , B01L7/50 , G01N1/00 , G01N1/42
摘要： The invention relates to a method of forming a vitrified sample on a sample holder for inspection in an electron microscope. It is known to spray a solution on a grid and then immerse the grid in a cryogenic liquid, such as ethane or liquid nitrogen. The invention proposes to spray small droplets of the liquid on a cryogenic surface, such as a grid or a sample holder in vacuum. The liquid forms vitrified sample material when hitting the surface due to the low temperature of the grid or sample holder.A lamella may be excavated from the thus formed sample material, to be studied in a TEM, or the vitrified sample material may be directly observed in a SEM. In an embodiment the material may be sprayed on a cryogenic liquid, to be scooped from the liquid and placed on a grid.
摘要翻译：本发明涉及一种在电子显微镜下在样品架上形成玻璃化样品以进行检查的方法。已知将溶液喷洒在栅格上，然后将栅格浸入低温液体如乙烷或液氮中。本发明提出将液体的小液滴喷射到低温表面，例如真空中的格栅或样品保持器。由于电网或样品架的低温，液体在撞击表面时形成玻璃化样品。可以从如此形成的样品材料中挖出薄片，以在TEM中进行研究，或者可以在SEM中直接观察玻璃化样品材料。在一个实施方案中，材料可以喷在低温液体上，从液体中取出并放置在网格上。

7. 发明授权

US09406482B2 Charged-particle microscope with Raman spectroscopy capability 有权
标题翻译：带拉曼光谱能力的带电粒子显微镜
公开(公告)号：US09406482B2
公开(公告)日：2016-08-02
申请号：US14326341
申请日：2014-07-08
申请人： FEI Company
发明人： Johannes Jacobus Lambertus Mulders , Laurens Kuipers
IPC分类号： G01N21/00 , H01J37/26 , G01N21/65 , H01J37/22 , H01J37/28
CPC分类号： H01J37/261 , G01N21/65 , H01J37/226 , H01J37/28 , H01J2237/31745
摘要： A charged-particle microscope with Raman spectroscopy capability and a method for examining a sample using a combined charged-particle microscope and Raman spectroscope. The method includes imaging a region of a sample by irradiating the sample with a beam of charged particles from the microscope; identifying a feature of interest in the region using the microscope; radiatively stimulating and spectroscopically analyzing a portion of the region comprising the feature of interest using a light spot of a width D from the spectroscope, wherein the feature of interest has at least one lateral dimension smaller than width D and, prior to using the light spot of the width D from the spectroscope, an in situ surface modification technique is used to cause positive discrimination of an expected Raman signal from the feature of interest relative to an expected Raman signal from the part of the portion other than the feature of interest.
摘要翻译：具有拉曼光谱能力的带电粒子显微镜和使用组合带电粒子显微镜和拉曼光谱仪检查样品的方法。该方法包括用来自显微镜的带电粒子束照射样品来对样品的区域进行成像; 使用显微镜识别该地区感兴趣的特征; 使用来自分光器的宽度为D的光点对包含感兴趣特征的区域的一部分进行辐射刺激和光谱分析，其中感兴趣的特征具有至少一个小于宽度D的横向尺寸，并且在使用光斑之前的来自分光器的宽度D，使用原位表面修饰技术来引起来自感兴趣特征的预期拉曼信号相对于除感兴趣特征部分以外的部分的预期拉曼信号的正面鉴别。

8. 发明授权

US08884248B2 Forming a vitrified sample for electron microscopy 有权
标题翻译：形成玻璃化的电子显微镜样品
公开(公告)号：US08884248B2
公开(公告)日：2014-11-11
申请号：US13766221
申请日：2013-02-13
申请人： FEI Company
发明人： Johannes Jacobus Lambertus Mulders , Rudolf Johannes Peter Gerardus Schampers , Petrus Hubertus Franciscus Trompenaars
IPC分类号： H01J37/26 , G01N1/00 , G01N1/42 , F25D31/00 , B01L7/00
CPC分类号： F25D31/00 , B01L7/50 , G01N1/00 , G01N1/42
摘要： The invention relates to a method of forming a vitrified sample on a sample holder for inspection in an electron microscope. It is known to spray a solution on a grid and then immerse the grid in a cryogenic liquid, such as ethane or liquid nitrogen. The invention proposes to spray small droplets of the liquid on a cryogenic surface, such as a grid or a sample holder in vacuum. The liquid forms vitrified sample material when hitting the surface due to the low temperature of the grid or sample holder.A lamella may be excavated from the thus formed sample material, to be studied in a TEM, or the vitrified sample material may be directly observed in a SEM. In an embodiment the material may be sprayed on a cryogenic liquid, to be scooped from the liquid and placed on a grid.
摘要翻译：本发明涉及一种用于在电子显微镜中检查的样品架上形成玻璃化样品的方法。已知将溶液喷洒在栅格上，然后将栅格浸入低温液体如乙烷或液氮中。本发明提出将液体的小液滴喷射到低温表面，例如真空中的格栅或样品保持器。由于电网或样品架的低温，液体在撞击表面时形成玻璃化样品。可以从如此形成的样品材料中挖出薄片，以在TEM中进行研究，或者可以在SEM中直接观察玻璃化样品材料。在一个实施方案中，材料可以喷在低温液体上，从液体中取出并放置在网格上。

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