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1. 发明授权

US09331606B2 Device with suspended beam and piezoresistive means of detecting displacement of the beam and method of manufacturing the device 有权
标题翻译：具有悬挂梁和压阻的装置，用于检测梁的位移和制造装置的方法
公开(公告)号：US09331606B2
公开(公告)日：2016-05-03
申请号：US13821701
申请日：2011-09-09
申请人： Sebastien Hentz , Philippe Andreucci , Eric Colinet , Laurent Duraffourg , Sebastien Labarthe
发明人： Sebastien Hentz , Philippe Andreucci , Eric Colinet , Laurent Duraffourg , Sebastien Labarthe
IPC分类号： G01L1/00 , G01B7/16 , H02N2/18 , H03H9/02 , H03H9/24 , B81B3/00 , H02N2/00
CPC分类号： H02N2/18 , B81B3/0086 , B81B2201/0271 , B81B2203/0109 , H02N2/22 , H03H9/02259 , H03H9/2405 , H03H2009/0244 , H03H2009/02496 , Y10T29/42
摘要： A device with a suspended beam and piezoresistive means of detecting displacement of the beam and a method of manufacturing the device are disclosed. The device comprises a support, a suspended beam, moving parallel to the plane of the support, and means of detecting displacement, comprising at least two piezoresistive strain gauges that are not in line with each other. The beam is suspended through detection means. The two gauges are located on two opposite lateral faces of the beam respectively.
摘要翻译：公开了一种具有悬挂梁的装置和用于检测梁的位移的压阻装置和制造该装置的方法。该装置包括支撑件，悬挂梁，平行于支撑件的平面移动，以及检测位移的装置，包括至少两个彼此不一致的压阻应变计。光束通过检测装置悬挂。两个量规分别位于梁的两个相对的侧面上。

2. 发明授权

US08115556B2 Resonant device with improved features 有权
标题翻译：具有改进功能的共振器件
公开(公告)号：US08115556B2
公开(公告)日：2012-02-14
申请号：US12710678
申请日：2010-02-23
申请人： Laurent Duraffourg , Philippe Andreucci , Eric Colinet , Sebastien Hentz , Eric Ollier
发明人： Laurent Duraffourg , Philippe Andreucci , Eric Colinet , Sebastien Hentz , Eric Ollier
IPC分类号： H03L7/00
CPC分类号： H03B5/323
摘要： The device resonant comprises a plurality of synchronized oscillators. Each oscillator comprises a resonator which comprises detection means providing detection signals representative of oscillation of the resonator to a feedback loop connected to an excitation input of the resonator. The detection signals control the conductivity of the feedback loop of the oscillator. The excitation inputs of all the resonators are connected to a common point which constitutes the output of the resonant device. A capacitive load is connected between said common point and a reference voltage.
摘要翻译：器件谐振包括多个同步振荡器。每个振荡器包括谐振器，该谐振器包括检测装置，其将表示谐振器的振荡的检测信号提供给连接到谐振器的激励输入的反馈环路。检测信号控制振荡器的反馈回路的电导率。所有谐振器的激励输入连接到构成谐振装置的输出的公共点。电容性负载连接在所述公共点和参考电压之间。

3. 发明授权

US10216698B2 Analysis device including a MEMS and/or NEMS network 有权
公开(公告)号：US10216698B2
公开(公告)日：2019-02-26
申请号：US13702790
申请日：2011-06-06
申请人： Thomas Ernst , Philippe Andreucci , Eric Colinet , Laurent Duraffourg , Edward B. Myers , Michael L. Roukes
发明人： Thomas Ernst , Philippe Andreucci , Eric Colinet , Laurent Duraffourg , Edward B. Myers , Michael L. Roukes
IPC分类号： G06F17/00 , B81C1/00 , G01N30/60
摘要： A device for analyzing a fluid, including a layer including a plurality of sensors of MEMS and/or NEMS type, a layer including a mechanism controlling the sensor and for processing information transmitted by the sensors, the control and processing mechanism being electrically connected to the detectors, and a layer positioned on the layer including the sensors on a side of a face including the sensors including a mechanism spatially and temporally distributing the fluid on the sensors.

4. 发明授权

US08018291B2 Transistor-based micrometric or nanometric resonant device 有权
标题翻译：基于晶体管的微米或纳米谐振装置
公开(公告)号：US08018291B2
公开(公告)日：2011-09-13
申请号：US12710817
申请日：2010-02-23
申请人： Laurent Duraffourg , Philippe Andreucci , Eric Colinet , Sebastien Hentz , Eric Ollier
发明人： Laurent Duraffourg , Philippe Andreucci , Eric Colinet , Sebastien Hentz , Eric Ollier
IPC分类号： H03B5/30
CPC分类号： H03B5/323 , H03H9/02259
摘要： The resonant device comprises an electromechanical resonator of nanometric or micrometric size that comprises a mobile element and a fixed element. Detection means provide detection signals representative of movement of the mobile element with respect to the fixed element to a feedback loop that is connected to an excitation input of the resonator. The resonator is formed on the same substrate as the detection means and feedback loop. The feedback loop comprises at most first and second transistors connected in series between a reference voltage and the excitation terminal. A capacitive load is connected between the excitation terminal and reference voltage. The detection signals control the conductivity of the first transistor.
摘要翻译：谐振装置包括纳米级或微米尺寸的机电谐振器，其包括移动元件和固定元件。检测装置将表示移动元件相对于固定元件的移动的检测信号提供给连接到谐振器的激励输入的反馈环路。谐振器形成在与检测装置和反馈回路相同的基板上。反馈回路包括至多第一和第二晶体管串联连接在参考电压和激励端子之间。电容性负载连接在励磁端子和参考电压之间。检测信号控制第一晶体管的电导率。

5. 发明申请

US20140013848A1 MEASURING SYSTEM HAVING ELECTROMECHANICAL RESONATORS, METHOD FOR MANUFACTURING SUCH A SYSTEM, AND METHOD FOR READING AT LEAST TWO ELECTROMECHANICAL RESONATORS 有权
标题翻译：具有机电谐振器的测量系统，用于制造这种系统的方法和用于读取至少两个机电谐振器的方法
公开(公告)号：US20140013848A1
公开(公告)日：2014-01-16
申请号：US14009044
申请日：2012-03-29
申请人： Eric Colinet , Philippe Andreucci , Laurent Duraffourg , Sebastien Hentz
发明人： Eric Colinet , Philippe Andreucci , Laurent Duraffourg , Sebastien Hentz
IPC分类号： G01H13/00
CPC分类号： G01H13/00 , G01D5/02 , G01D5/14
摘要： A measuring system including: at least two electromechanical resonators each having a resonant frequency varying around an offload resonant frequency according to a physical quantity to be measured; at least one reading device connected to inputs of the resonators and configured to supply an excitation signal on the inputs; and a memory in which is recorded, for each resonator, offload resonance information relating to the offload resonant frequency of the resonator. Each reading device is configured to determine the resonant frequency of one or more resonators selected for reading by configuring at least one element of the reading device using the offload resonance information stored for each selected resonator.
摘要翻译：一种测量系统，包括：至少两个机电谐振器，每个机电谐振器根据待测量的物理量具有围绕卸载谐振频率变化的谐振频率; 至少一个读取装置，连接到所述谐振器的输入并被配置为在所述输入端上提供激励信号; 并且对于每个谐振器，记录关于谐振器的卸载谐振频率的卸载谐振信息的存储器。每个读取装置被配置为通过使用为每个选择的谐振器存储的卸载共振信息来配置读取装置的至少一个元件来确定选择用于读取的一个或多个谐振器的谐振频率。

6. 发明授权

US08183945B2 Oscillator based on series of four nanowires 有权
标题翻译：基于四纳米线的振荡器
公开(公告)号：US08183945B2
公开(公告)日：2012-05-22
申请号：US12710695
申请日：2010-02-23
申请人： Eric Colinet , Laurent Duraffourg
发明人： Eric Colinet , Laurent Duraffourg
IPC分类号： H03B5/30
CPC分类号： H03B5/30
摘要： The oscillator comprises at least a first series of a multiple of four sub-assemblies each of which comprises an excitation terminal and an output terminal. The sub-assemblies are arranged in series in a closed loop. The output terminal of each sub-assembly is connected to the excitation terminal of the following sub-assembly. The output terminal of one of the sub-assemblies constitutes the output terminal of the oscillator. Each sub-assembly comprises excitation means and a nanowire which constitutes the electromechanical resonator and the piezoresistive detection means of movement of the resonator. A first terminal of the nanowire is connected to a first supply voltage. The second terminal of the nanowire constitutes the output terminal of the sub-assembly which is grounded via a corresponding resistive circuit. An input terminal of the excitation means constitutes the excitation terminal of the sub-assembly.
摘要翻译：所述振荡器至少包括四个子组件中的至少一个第一系列，每个子组件包括激励端子和输出端子。子组件在闭环中串联布置。每个子组件的输出端子连接到以下子组件的激励端子。其中一个子组件的输出端构成振荡器的输出端。每个子组件包括构成机电谐振器的激励装置和纳米线，以及谐振器运动的压阻检测装置。纳米线的第一端子连接到第一电源电压。纳米线的第二端子构成通过相应的电阻电路接地的子组件的输出端子。励磁装置的输入端子构成子组件的励磁端子。

7. 发明授权

US09470576B2 Measuring system having electromechanical resonators, method for manufacturing such a system, and method for reading at least two electromechanical resonators 有权
标题翻译：具有机电谐振器的测量系统，制造这种系统的方法以及用于读取至少两个机电谐振器的方法
公开(公告)号：US09470576B2
公开(公告)日：2016-10-18
申请号：US14009044
申请日：2012-03-29
申请人： Eric Colinet , Philippe Andreucci , Laurent Duraffourg , Sébastien Hentz
发明人： Eric Colinet , Philippe Andreucci , Laurent Duraffourg , Sébastien Hentz
IPC分类号： G01H13/00 , G01D5/02 , G01D5/14
CPC分类号： G01H13/00 , G01D5/02 , G01D5/14
摘要： A measuring system including: at least two electromechanical resonators each having a resonant frequency varying around an offload resonant frequency according to a physical quantity to be measured; at least one reading device connected to inputs of the resonators and configured to supply an excitation signal on the inputs; and a memory in which is recorded, for each resonator, offload resonance information relating to the offload resonant frequency of the resonator. Each reading device is configured to determine the resonant frequency of one or more resonators selected for reading by configuring at least one element of the reading device using the offload resonance information stored for each selected resonator.
摘要翻译：一种测量系统，包括：至少两个机电谐振器，每个机电谐振器根据待测量的物理量具有围绕卸载谐振频率变化的谐振频率; 至少一个读取装置，连接到所述谐振器的输入并被配置为在所述输入端上提供激励信号; 并且对于每个谐振器，记录关于谐振器的卸载谐振频率的卸载谐振信息的存储器。每个读取装置被配置为通过使用为每个选择的谐振器存储的卸载共振信息来配置读取装置的至少一个元件来确定选择用于读取的一个或多个谐振器的谐振频率。

8. 发明申请

US20130214644A1 DEVICE WITH SUSPENDED BEAM AND PIEZORESISTIVE MEANS OF DETECTING DISPLACEMENT OF THE BEAM AND METHOD OF MANUFACTURING THE DEVICE 有权
标题翻译：具有悬挂梁的装置和用于检测梁的位移的伪装置和制造装置的方法
公开(公告)号：US20130214644A1
公开(公告)日：2013-08-22
申请号：US13821701
申请日：2011-09-09
申请人： Sebastien Hentz , Philippe Andreucci , Eric Colinet , Laurent Duraffourg , Sebastien Labarthe
发明人： Sebastien Hentz , Philippe Andreucci , Eric Colinet , Laurent Duraffourg , Sebastien Labarthe
IPC分类号： H02N2/18 , H02N2/00
CPC分类号： H02N2/18 , B81B3/0086 , B81B2201/0271 , B81B2203/0109 , H02N2/22 , H03H9/02259 , H03H9/2405 , H03H2009/0244 , H03H2009/02496 , Y10T29/42
摘要： A device with a suspended beam and piezoresistive means of detecting displacement of the beam and a method of manufacturing the device are disclosed. The device comprises a support, a suspended beam, moving parallel to the plane of the support, and means of detecting displacement, comprising at least two piezoresistive strain gauges that are not in line with each other. The beam is suspended through detection means. The two gauges are located on two opposite lateral faces of the beam respectively.
摘要翻译：公开了一种具有悬挂梁的装置和用于检测梁的位移的压阻装置和制造该装置的方法。该装置包括支撑件，悬挂梁，平行于支撑件的平面移动，以及检测位移的装置，包括至少两个彼此不一致的压阻应变计。光束通过检测装置悬挂。两个量规分别位于梁的两个相对的侧面上。

9. 发明申请

US20130144542A1 ANALYSIS DEVICE INCLUDING A MEMS AND/OR NEMS NETWORK 审中-公开
标题翻译：包括MEMS和/或NEMS网络的分析设备
公开(公告)号：US20130144542A1
公开(公告)日：2013-06-06
申请号：US13702790
申请日：2011-06-06
申请人： Thomas Ernst , Philippe Andreucci , Eric Colinet , Laurent Duraffourg , Edward B. Myers , Michael L. Roukes
发明人： Thomas Ernst , Philippe Andreucci , Eric Colinet , Laurent Duraffourg , Edward B. Myers , Michael L. Roukes
IPC分类号： G06F17/00
CPC分类号： G06F17/00 , B81B2201/06 , B81C1/00238 , B81C2203/0771 , B81C2203/0792 , G01N30/6095 , G01N2291/0256 , Y10T29/49117
摘要： A device for analyzing a fluid, including a layer including a plurality of sensors of MEMS and/or NEMS type, a layer including a mechanism controlling the sensor and for processing information transmitted by the sensors, the control and processing mechanism being electrically connected to the detectors, and a layer positioned on the layer including the sensors on a side of a face including the sensors including a mechanism spatially and temporally distributing the fluid on the sensors.
摘要翻译：一种用于分析流体的装置，包括包括多个MEMS和/或NEMS类型的多个传感器的层，包括控制传感器的机构和用于处理由传感器传输的信息的层，控制和处理机构电连接到检测器和位于包括传感器的层上的层的层包括传感器的层包括在空间上和时间上将流体分布在传感器上的机构。

10. 发明授权

US10048234B2 Analyzer for fluids containing an inflammable substance and corresponding method 有权
公开(公告)号：US10048234B2
公开(公告)日：2018-08-14
申请号：US14405000
申请日：2012-06-04
申请人： Phillipe Andreucci , Eric Colinet , Philippe Coric , Jean-Claude De Wit , Pierre Puget
发明人： Phillipe Andreucci , Eric Colinet , Philippe Coric , Jean-Claude De Wit , Pierre Puget
IPC分类号： G01N30/16 , G01N33/22
摘要： Analyzer 1 for analyzing a fluid 3 containing at least one substance to be analyzed and at least one inflammable substance containing: a source of gas 9 to provide a flux of diluent gas, an injecting nozzle 11 for introducing samples of the fluid into the flux of diluent gas and for producing a gaseous flux, and a detector 7 for analyzing the gaseous flux, wherein: the source of gas is intended to deliver a flux of diluent gas containing a material capable of supporting the combustion of the inflammable substance, preferably to deliver a flux of air, the injection nozzle is configured so as to introduce into the diluent gas samples of the fluid such that the average volume fraction of the fluid in the gaseous flux is less than 1/2,000 and preferably less than 1/20,000, and the detector contains at least one microsensor for detecting the substance to be analyzed. Corresponding method.

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