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1. 发明申请

US20130194787A1 MULTI-WAVELENGTH VCSEL ARRAY TO REDUCE SPECKLE 有权
标题翻译：多波长VCSEL阵列减少光斑
公开(公告)号：US20130194787A1
公开(公告)日：2013-08-01
申请号：US13363181
申请日：2012-01-31
申请人： JONATHAN GESKE , Chad Wang , Elliot Burke
发明人： JONATHAN GESKE , Chad Wang , Elliot Burke
IPC分类号： F21L4/00 , F21V9/00
CPC分类号： H01S5/4087 , G01S7/4815 , H01S5/026 , H01S5/141 , H01S5/18358 , H01S5/18394 , H01S5/187 , H01S5/4062 , H01S5/423 , H01S2301/176
摘要： Embodiments of the invention describe an illuminator having a light source to originate an illumination beam, wherein the light source further comprises a set of vertical-cavity surface emitting lasers (VCSELs), including a first VCSEL having a first laser emission wavelength, and a second VCSEL having a second laser emission wavelength different than the first laser emission wavelength. Thus, by varying laser emission wavelengths of VCSELs in a VCSEL array, embodiments of the invention produce low-contrast speckle, and do not limit the imaging capabilities of the host illumination system. In some embodiments of the invention, vertical external cavity surface emitting lasers (VECSELs) are utilized to produce the above described varying laser emission wavelengths.
摘要翻译：本发明的实施例描述了具有产生照明光束的光源的照明器，其中光源还包括一组垂直腔表面发射激光器（VCSEL），包括具有第一激光发射波长的第一VCSEL和第二激光发射波长的第二VCSEL VCSEL具有与第一激光发射波长不同的第二激光发射波长。因此，通过改变VCSEL阵列中的VCSEL的激光发射波长，本发明的实施例产生低对比度散斑，并且不限制主照明系统的成像能力。在本发明的一些实施例中，利用垂直外腔表面发射激光器（VECSEL）来产生上述变化的激光发射波长。

2. 发明申请

US20100254018A1 BEAM SEGMENTOR FOR ENLARGING VIEWING APERTURE OF MICRODISPLAY 有权
标题翻译：用于放大观看MICRODISPLAY的光束的光束部分
公开(公告)号：US20100254018A1
公开(公告)日：2010-10-07
申请号：US12418318
申请日：2009-04-03
申请人： Elliot Burke
发明人： Elliot Burke
IPC分类号： G02B27/01 , G02B27/02 , G02B27/10 , G02B5/08
CPC分类号： G02B27/0101 , G02B6/00 , G02B27/143 , G02B2027/012 , G02B2027/0125
摘要： A display platform orients a virtual image in alignment with a viewer's eye. A transmissive plate receives a light beam conveying the virtual image into the transmissive plate for propagation by internal reflection between inner and outer surfaces of the transmissive plate along the length of the transmissive plate. A plurality of reflective facets progressively interrupt the propagation of the light beam along the length of the transmissive plate for reflecting successive portions of the light beam in a direction for rendering the virtual image visible to the viewer.
摘要翻译：显示平台使虚拟图像与观看者的眼睛对齐。透射板接收将虚拟图像传送到透射板中的光束，用于沿着透射板的长度通过内部反射在透射板的内表面和外表面之间进行传播。多个反射小平面逐渐地中断沿着透射板的长度的光束的传播，用于反射光束的连续部分在使得虚拟图像可视化的方向上。

3. 发明授权

US08743923B2 Multi-wavelength VCSEL array to reduce speckle 有权
标题翻译：多波长VCSEL阵列，减少斑点
公开(公告)号：US08743923B2
公开(公告)日：2014-06-03
申请号：US13363181
申请日：2012-01-31
申请人： Jonathan Geske , Chad Wang , Elliot Burke
发明人： Jonathan Geske , Chad Wang , Elliot Burke
IPC分类号： H01S5/00
CPC分类号： H01S5/4087 , G01S7/4815 , H01S5/026 , H01S5/141 , H01S5/18358 , H01S5/18394 , H01S5/187 , H01S5/4062 , H01S5/423 , H01S2301/176
摘要： Embodiments of the invention describe an illuminator having a light source to originate an illumination beam, wherein the light source further comprises a set of vertical-cavity surface emitting lasers (VCSELs), including a first VCSEL having a first laser emission wavelength, and a second VCSEL having a second laser emission wavelength different than the first laser emission wavelength. Thus, by varying laser emission wavelengths of VCSELs in a VCSEL array, embodiments of the invention produce low-contrast speckle, and do not limit the imaging capabilities of the host illumination system. In some embodiments of the invention, vertical external cavity surface emitting lasers (VECSELs) are utilized to produce the above described varying laser emission wavelengths.
摘要翻译：本发明的实施例描述了具有产生照明光束的光源的照明器，其中光源还包括一组垂直腔表面发射激光器（VCSEL），包括具有第一激光发射波长的第一VCSEL和第二激光发射波长的第二VCSEL VCSEL具有与第一激光发射波长不同的第二激光发射波长。因此，通过改变VCSEL阵列中的VCSEL的激光发射波长，本发明的实施例产生低对比度散斑，并且不限制主照明系统的成像能力。在本发明的一些实施例中，利用垂直外腔表面发射激光器（VECSEL）来产生上述变化的激光发射波长。

4. 发明申请

US20110134017A1 COMPACT NEAR EYE DISPLAY WITH SCANNED IMAGE GENERATION 有权
标题翻译：紧凑的眼睛显示与扫描图像生成
公开(公告)号：US20110134017A1
公开(公告)日：2011-06-09
申请号：US12631083
申请日：2009-12-04
申请人： Elliot Burke
发明人： Elliot Burke
IPC分类号： G09G3/00
CPC分类号： G02B27/0101 , G02B6/00 , G02B26/10 , G02B2027/015
摘要： A compact near eye display generates image segments for a first dimension of an intended image. Each of the image segments is transformed into angularly distinguished beamlets that converge through a first dimension pupil within an eyebox. A scanning optic angularly separates the angularly distinguished beamlets of different image segments for creating a second dimension pupil. The angularly distinguished and separated beamlets propagate along a waveguide in a form that minimizes the thickness of the display in front of a viewer's eye and limits the overall size of the optics required to support the projection of virtual images into the viewer's eye.
摘要翻译：紧凑的近眼显示器产生用于预期图像的第一维度的图像片段。每个图像段被转换成角度特异的子束，其通过眼箱内的第一尺寸光瞳会聚。扫描光学器角度地分离不同图像片段的角度明确的子束以产生第二尺寸光瞳。角度分辨和分离的子束沿着波导传播，其形式使得观察者眼睛前方的显示器的厚度最小化，并限制支持将虚拟图像投影到观察者的眼睛中所需的光学器件的总体尺寸。

5. 发明授权

US07177019B2 Apparatus for imaging metrology 有权
标题翻译：成像计量仪器
公开(公告)号：US07177019B2
公开(公告)日：2007-02-13
申请号：US11048552
申请日：2005-02-01
申请人： Fred E. Stanke , Douglas E. Ruth , James M. Cahill , Michael Weber , Clinton B. Carlisle , Hung Pham , Edric Tong , Elliot Burke
发明人： Fred E. Stanke , Douglas E. Ruth , James M. Cahill , Michael Weber , Clinton B. Carlisle , Hung Pham , Edric Tong , Elliot Burke
IPC分类号： G01B11/24
CPC分类号： H01L21/67 , B24B37/005 , B24B49/12 , G01B11/0625 , G01B11/30 , G01N21/211 , G01N21/9501 , H01L22/12
摘要： This invention is an apparatus for imaging metrology, which in particular embodiments may be integrated with a processor station such that a metrology station is apart from but coupled to a process station. The metrology station is provided with a first imaging camera with a first field of view containing the measurement region. Alternate embodiments include a second imaging camera with a second field of view. Preferred embodiments comprise a broadband ultraviolet light source, although other embodiments may have a visible or near infrared light source of broad or narrow optical bandwidth. Embodiments including a broad bandwidth source typically include a spectrograph, or an imaging spectrograph. Particular embodiments may include curved, reflective optics or a measurement region wetted by a liquid. In a typical embodiment, the metrology station and the measurement region are configured to have 4 degrees of freedom of movement relative to each other.
摘要翻译：本发明是一种用于成像测量的装置，其在特定实施例中可以与处理器站集成，使得计量站离开处理站而不是耦合到处理站。计量站设置有具有包含测量区域的第一视野的第一成像照相机。替代实施例包括具有第二视野的第二成像相机。优选实施例包括宽带紫外光源，但是其他实施例可以具有宽或窄光带宽的可见光或近红外光源。包括宽带宽源的实施例通常包括光谱仪或成像光谱仪。具体实施例可以包括弯曲的，反射光学的或由液体润湿的测量区域。在典型的实施例中，计量站和测量区域被配置为具有相对于彼此的4个移动自由度。

6. 发明授权

US07042580B1 Apparatus for imaging metrology 有权
标题翻译：成像计量仪器
公开(公告)号：US07042580B1
公开(公告)日：2006-05-09
申请号：US09533613
申请日：2000-03-22
申请人： Fred E. Stanke , Clinton B. Carlisle , Hung Pham , Edric Tong , Douglas E. Ruth , James M. Cahill , Michael Weber , Elliot Burke
发明人： Fred E. Stanke , Clinton B. Carlisle , Hung Pham , Edric Tong , Douglas E. Ruth , James M. Cahill , Michael Weber , Elliot Burke
IPC分类号： G01B11/24
CPC分类号： G01B11/0625 , B24B37/042 , B24B49/12 , G01B11/30 , G01N21/55 , G01N21/8422 , G01N21/9501 , G01N2021/8825 , H01L21/67259
摘要： This invention is an apparatus for imaging metrology, which in particular embodiments may be integrated with a processor station such that a metrology station is apart from but coupled to a process station. The metrology station is provided with a first imaging camera with a first field of view containing the measurement region. Alternate embodiments include a second imaging camera with a second field of view. Preferred embodiments comprise a broadband ultraviolet light source, although other embodiments may have a visible or near infrared light source of broad or narrow optical bandwidth. Embodiments including a broad bandwidth source typically include a spectrograph, or an imaging spectrograph. Particular embodiments may include curved, reflective optics or a measurement region wetted by a liquid. In a typical embodiment, the metrology station and the measurement region are configured to have 4 degrees of freedom of movement relative to each other.
摘要翻译：本发明是一种用于成像测量的装置，其在特定实施例中可以与处理器站集成，使得计量站离开处理站而不是耦合到处理站。计量站设置有具有包含测量区域的第一视野的第一成像照相机。替代实施例包括具有第二视野的第二成像相机。优选实施例包括宽带紫外光源，但是其他实施例可以具有宽或窄光带宽的可见光或近红外光源。包括宽带宽源的实施例通常包括光谱仪或成像光谱仪。具体实施例可以包括弯曲的，反射光学的或由液体润湿的测量区域。在典型的实施例中，计量站和测量区域被配置为具有相对于彼此的4个移动自由度。

7. 发明授权

US06919958B2 Wafer metrology apparatus and method 失效
标题翻译：晶圆计量仪器及方法
公开(公告)号：US06919958B2
公开(公告)日：2005-07-19
申请号：US10397917
申请日：2003-03-26
申请人： Fred E. Stanke , Clinton B. Carlisle , Hung Van Pham , Edric Tong , Douglas E. Ruth , James M. Cahill, Jr. , Michael Weber-Grabau , Elliot Burke , Adam E. Norton
发明人： Fred E. Stanke , Clinton B. Carlisle , Hung Van Pham , Edric Tong , Douglas E. Ruth , James M. Cahill, Jr. , Michael Weber-Grabau , Elliot Burke , Adam E. Norton
IPC分类号： B24B49/12 , G01B11/06 , G01B11/30 , G01N21/21 , G01N21/95 , H01L21/66 , H01L21/67 , G01N21/88
CPC分类号： H01L21/67 , B24B49/12 , G01B11/0625 , G01B11/30 , G01N21/211 , H01L22/12
摘要： This invention is an apparatus for imaging metrology, which in particular embodiments may be integrated with a processor station such that a metrology station is apart from but coupled to a process station. The metrology station is provided with a first imaging camera with a first field of view containing the measurement region. Alternate embodiments include a second imaging camera with a second field of view. Preferred embodiments comprise a broadband ultraviolet light source, although other embodiments may have a visible or near infrared light source of broad or narrow optical bandwidth. Embodiments including a broad bandwidth source typically include a spectrograph, or an imaging spectrograph. Particular embodiments may include curved, reflective optics or a measurement region wetted by a liquid. In a typical embodiment, the metrology station and the measurement region are configured to have 4 degrees of freedom of movement relative to each other.
摘要翻译：本发明是一种用于成像测量的装置，其在特定实施例中可以与处理器站集成，使得计量站离开处理站而不是耦合到处理站。计量站设置有具有包含测量区域的第一视野的第一成像照相机。替代实施例包括具有第二视野的第二成像相机。优选实施例包括宽带紫外光源，但是其他实施例可以具有宽或窄光带宽的可见光或近红外光源。包括宽带宽源的实施例通常包括光谱仪或成像光谱仪。具体实施例可以包括弯曲的，反射光学的或由液体润湿的测量区域。在典型的实施例中，计量站和测量区域被配置为具有相对于彼此的4个移动自由度。

8. 发明申请

US20050128490A1 Apparatus for imaging metrology 有权
标题翻译：成像计量仪器
公开(公告)号：US20050128490A1
公开(公告)日：2005-06-16
申请号：US11048552
申请日：2005-02-01
申请人： Fred Stanke , Douglas Ruth , James Cahill , Michael Weber , Clinton Carlisle , Hung Pham , Edric Tong , Elliot Burke
发明人： Fred Stanke , Douglas Ruth , James Cahill , Michael Weber , Clinton Carlisle , Hung Pham , Edric Tong , Elliot Burke
IPC分类号： B24B37/04 , B24B49/12 , G01B11/06 , G01B11/30 , G01N21/21 , G01N21/95 , H01L21/66 , H01L21/67 , G01B11/24
CPC分类号： H01L21/67 , B24B37/005 , B24B49/12 , G01B11/0625 , G01B11/30 , G01N21/211 , G01N21/9501 , H01L22/12
摘要： This invention is an apparatus for imaging metrology, which in particular embodiments may be integrated with a processor station such that a metrology station is apart from but coupled to a process station. The metrology station is provided with a first imaging camera with a first field of view containing the measurement region. Alternate embodiments include a second imaging camera with a second field of view. Preferred embodiments comprise a broadband ultraviolet light source, although other embodiments may have a visible or near infrared light source of broad or narrow optical bandwidth. Embodiments including a broad bandwidth source typically include a spectrograph, or an imaging spectrograph. Particular embodiments may include curved, reflective optics or a measurement region wetted by a liquid. In a typical embodiment, the metrology station and the measurement region are configured to have 4 degrees of freedom of movement relative to each other.
摘要翻译：本发明是一种用于成像测量的装置，其在特定实施例中可以与处理器站集成，使得计量站离开处理站而不是耦合到处理站。计量站设置有具有包含测量区域的第一视野的第一成像照相机。替代实施例包括具有第二视野的第二成像相机。优选实施例包括宽带紫外光源，但是其他实施例可以具有宽或窄光带宽的可见光或近红外光源。包括宽带宽源的实施例通常包括光谱仪或成像光谱仪。具体实施例可以包括弯曲的，反射光学的或由液体润湿的测量区域。在典型的实施例中，计量站和测量区域被配置为具有相对于彼此的4个移动自由度。

9. 发明授权

US08698705B2 Compact near eye display with scanned image generation 有权
标题翻译：紧凑的近眼显示，扫描图像生成
公开(公告)号：US08698705B2
公开(公告)日：2014-04-15
申请号：US12631083
申请日：2009-12-04
申请人： Elliot Burke
发明人： Elliot Burke
IPC分类号： G02B27/01
CPC分类号： G02B27/0101 , G02B6/00 , G02B26/10 , G02B2027/015
摘要： A compact near eye display generates image segments for a first dimension of an intended image. Each of the image segments is transformed into angularly distinguished beamlets that converge through a first dimension pupil within an eyebox. A scanning optic angularly separates the angularly distinguished beamlets of different image segments for creating a second dimension pupil. The angularly distinguished and separated beamlets propagate along a waveguide in a form that minimizes the thickness of the display in front of a viewer's eye and limits the overall size of the optics required to support the projection of virtual images into the viewer's eye.
摘要翻译：紧凑的近眼显示器产生用于预期图像的第一维度的图像片段。每个图像段被转换成角度特异的子束，其通过眼箱内的第一尺寸光瞳会聚。扫描光学器角度地分离不同图像片段的角度明确的子束以产生第二尺寸光瞳。角度分辨和分离的子束沿着波导传播，其形式使得观察者眼睛前方的显示器的厚度最小化，并限制支持将虚拟图像投影到观察者的眼睛中所需的光学器件的总体尺寸。

10. 发明授权

US08059342B2 Beam segmentor for enlarging viewing aperture of microdisplay 有权
标题翻译：光束分割器用于放大微显示器的观察孔径
公开(公告)号：US08059342B2
公开(公告)日：2011-11-15
申请号：US12418318
申请日：2009-04-03
申请人： Elliot Burke
发明人： Elliot Burke
IPC分类号： G02B27/14 , G09G5/00 , F21V7/04
CPC分类号： G02B27/0101 , G02B6/00 , G02B27/143 , G02B2027/012 , G02B2027/0125
摘要： A display platform orients a virtual image in alignment with a viewer's eye. A transmissive plate receives a light beam conveying the virtual image into the transmissive plate for propagation by internal reflection between inner and outer surfaces of the transmissive plate along the length of the transmissive plate. A plurality of reflective facets progressively interrupt the propagation of the light beam along the length of the transmissive plate for reflecting successive portions of the light beam in a direction for rendering the virtual image visible to the viewer.
摘要翻译：显示平台使虚拟图像与观看者的眼睛对齐。透射板接收将虚拟图像传送到透射板中的光束，用于沿着透射板的长度通过内部反射在透射板的内表面和外表面之间进行传播。多个反射小平面逐渐地中断沿着透射板的长度的光束的传播，用于反射光束的连续部分在使得虚拟图像可视化的方向上。

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