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    • 1. 发明授权
    • Sulfonyloxime compound, and radiation sensitive acid generator, positive type radiation sensitive resin composition and negative type radiation sensitive resin composition using same
    • 磺酰肟化合物和辐射敏感酸产生剂,正型辐射敏感树脂组合物和负型辐射敏感树脂组合物使用
    • US06824954B2
    • 2004-11-30
    • US10226348
    • 2002-08-23
    • Eiji YonedaTatsuya ToneriYong WangTsutomu Shimokawa
    • Eiji YonedaTatsuya ToneriYong WangTsutomu Shimokawa
    • G03F7039
    • G03F7/0382G03F7/0045G03F7/0392Y10S430/115Y10S430/12Y10S430/122
    • A sulfonyloxime compound is provided which is represented by a general formula (1): wherein, R1 represents a hydrogen atom, an alkyl group, an aryl group, or a heteroaryl group; R2 represents an alkyl group, an aryl group, or a heteroaryl group; X represents a halogen atom; Y represents —R3, a —CO—R3 group, —COO—R3 group, —CONR3R4 group, —S—R3 group, —SO—R3 group, —SO2—R3 group, a —CN group or a —NO2 group, and R3 and R4 within the Y group each represent a hydrogen atom, an alkyl group, an aryl group, or a heteroaryl group, although any two of R1, R2 and R3 may also be bonded together to form a cyclic structure, and furthermore dimers of a compound represented by the general formula (1) in which R1, R2 or Y groups from separate molecules are bonded together to form a single bivalent group, are also possible. This compound is very useful as a radiation sensitive acid generator which is sensitive to activated radiation such as far ultraviolet radiation or electron beams and the like, and displays superior heat stability and storage stability. Furthermore, chemically amplified positive type or negative type radiation sensitive resin compositions incorporating such a radiation sensitive acid generator are also provided.
    • 提供由通式(1)表示的磺酰肟化合物:其中,R 1表示氢原子,烷基,芳基或杂芳基; R 2表示烷基,芳基或杂芳基; X表示卤原子; Y表示-R 3,-CO-R 3基团,-COO-R 3基团,-CONR 3 R 4基团,-SR 3基团,-SO-R 3基团, 3个基团,-SO 2 -R 3基团,-CN基团或-NO 2基团,Y基团中的R 3和R 4各自表示氢原子,烷基,芳基 或杂芳基,尽管R 1,R 2和R 3中的任何两个也可以键合在一起形成环状结构,此外由通式(1)表示的化合物的二聚体在 来自分离的分子的R 1,R 2或Y基团结合在一起形成单个二价基团也是可能的。 该化合物作为辐射敏感的酸产生剂是非常有用的,其对诸如远紫外线辐射或电子束等的活化辐射敏感,并且显示出优异的热稳定性和储存稳定性。 此外,还提供了掺入这种辐射敏感性酸发生剂的化学放大阳性或负型辐射敏感性树脂组合物。