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1. 发明授权

US5249142A Indirect temperature-measurement of films formed on semiconductor wafers 失效
标题翻译：在半导体晶片上形成的膜的间接温度测量
公开(公告)号：US5249142A
公开(公告)日：1993-09-28
申请号：US864185
申请日：1992-04-03
申请人： Eiichi Shirakawa , Masafumi Nomura , Kimiharu Matsumura
发明人： Eiichi Shirakawa , Masafumi Nomura , Kimiharu Matsumura
IPC分类号： G01J5/60
CPC分类号： G01J5/60
摘要： A method of measuring the temperature of a matter accurately, in non-contact fashion and without setting any emissivity comprising obtaining a spectral characteristics of absorbing electromagnetic waves inherent to a matter whose temperature is to be measured, obtaining those absorption peak wavelengths of the electromagnetic waves which correspond to two or more high points of electromagnetic wave absorption rate obtained from the spectral characteristics, measuring amounts of the electromagnetic waves, which have the absorption peak wavelengths, radiated from the temperature-measured matter, and calculating the temperature of the matter from blues of the radiant amounts of the electromagnetic waves thus measured.
摘要翻译：一种以非接触的方式精确地测量物体的温度并且不设置任何发射率的方法，包括获得吸收其温度的物质固有的电磁波的光谱特性，获得电磁波的吸收峰值波长其对应于从光谱特性获得的两个或更多个电磁波吸收率的高点，测量具有从温度测量物质辐射的吸收峰波长的电磁波的量，以及从蓝色计算物质的温度的辐射量的电磁波。

2. 发明授权

US5038608A Method for measuring the flow rate of exhaust gas 失效
标题翻译：废气流量测定方法
公开(公告)号：US5038608A
公开(公告)日：1991-08-13
申请号：US468361
申请日：1990-01-22
申请人： Hiroyuki Sakai , Eiichi Shirakawa , Kimiharu Matsumura
发明人： Hiroyuki Sakai , Eiichi Shirakawa , Kimiharu Matsumura
IPC分类号： G01F5/00
CPC分类号： G01F5/00
摘要： In a method of measuring the flow rate of an exhaust gas, an external atmosphere is caused to flow into a pipe which branches off from the main pipe to open at the other end onto the external atmosphere. The flow rate of the atmosphere in the branched-pipe is measured, and the flow rate of the exhaust gas in the main pipe corresponding to the measured value is determined based on a calibration curve.
摘要翻译：在测量废气流量的方法中，使外部气氛流入从主管分支的管道，另一端向外部气氛打开。测量分支管中气氛的流量，并根据校准曲线确定与测量值对应的主管中废气的流量。

3. 发明授权

US5225663A Heat process device 失效
标题翻译：加热装置
公开(公告)号：US5225663A
公开(公告)日：1993-07-06
申请号：US793509
申请日：1991-11-18
申请人： Kimiharu Matsumura , Eiichi Shirakawa
发明人： Kimiharu Matsumura , Eiichi Shirakawa
IPC分类号： H01L21/00
CPC分类号： H01L21/67103
摘要： A heat process device according to the present invention includes a film-like heating body serving as a heat source for a heat transfer plate on which an object to be processed is mounted and heated. Therefore, the heat process device can be excellent in controlling the heating temperature. It can also apply a uniform heat process to the object. Further, it can be made small in size and easy to operate.
摘要翻译：根据本发明的热处理装置包括用作传热板的热源的膜状加热体，在其上安装加热被处理物体。因此，加热装置在控制加热温度方面可以是优异的。它也可以对物体施加均匀的加热过程。此外，其尺寸可小，易于操作。

4. 发明授权

US08963964B2 Computer-readable storage medium having display control program stored therein, display control method, display control system, and display control apparatus 有权
标题翻译：具有存储在其中的显示控制程序的计算机可读存储介质，显示控制方法，显示控制系统和显示控制装置
公开(公告)号：US08963964B2
公开(公告)日：2015-02-24
申请号：US13198086
申请日：2011-08-04
申请人： Eiichi Shirakawa
发明人： Eiichi Shirakawa
IPC分类号： G09G5/00 , G06F3/14 , G09G5/14
CPC分类号： G06F3/1423 , G09G5/14
摘要： A computer-readable storage medium having stored therein a program that is executed by a computer using a display section and an input section for designating a position on a screen of the display section. The program causes the computer to operate as: means for displaying at least a part of a first content and a second content such that a first region defined by the first content includes a second region for displaying the second content; means for determining, on the basis of a position designated by the input section, whether or not a criterion concerning the input is met; and means for switching between a first mode in which the input operation changes a display form of the first content, and a second mode in which the input operation changes a display form of the second content within the second region, depending on a result of the determination.
摘要翻译：一种计算机可读存储介质，其中存储有由计算机使用显示部分执行的程序和用于指定显示部分的屏幕上的位置的输入部分。该程序使计算机操作为：用于显示第一内容和第二内容的至少一部分的装置，使得由第一内容定义的第一区域包括用于显示第二内容的第二区域; 用于基于由所述输入部分指定的位置来确定是否满足关于所述输入的标准的装置; 以及用于在其中输入操作改变第一内容的显示形式的第一模式与其中输入操作改变第二区域内的第二内容的显示形式的第二模式之间切换的装置，这取决于第二模式的结果决心。

5. 发明授权

US06841342B2 Substrate processing apparatus and substrate processing method 失效
标题翻译：基板加工装置及基板处理方法
公开(公告)号：US06841342B2
公开(公告)日：2005-01-11
申请号：US10212725
申请日：2002-08-07
申请人： Takanori Nishi , Eiichi Shirakawa
发明人： Takanori Nishi , Eiichi Shirakawa
IPC分类号： G03F7/038 , G03F7/039 , G03F7/38
CPC分类号： G03F7/38 , G03F7/0382 , G03F7/0392
摘要： A substrate processing apparatus for processing a substrate coated with a chemical amplification type resist and subjected to a light-exposure treatment comprises a substrate table on which is disposed a substrate, a heater for heating the substrate disposed on the substrate table, and an electric field forming mechanism for forming an electric field exerting force, which is directed toward the substrate, on the protons generated in the resist formed on the substrate disposed on the substrate table.
摘要翻译：一种用于处理涂覆有化学放大型抗蚀剂并进行曝光处理的基板的基板处理装置包括：基板，其上设置有基板;加热器，用于加热设置在基板台上的基板;以及电场在形成在设置在基板台上的基板上的抗蚀剂中产生的质子上形成朝向基板的电场施加力的形成机构。

6. 发明授权

US06744020B2 Heat processing apparatus 失效
标题翻译：热处理设备
公开(公告)号：US06744020B2
公开(公告)日：2004-06-01
申请号：US10028789
申请日：2001-12-28
申请人： Eiichi Shirakawa , Tetsuo Fukuoka , Tsuyoshi Nogami
发明人： Eiichi Shirakawa , Tetsuo Fukuoka , Tsuyoshi Nogami
IPC分类号： H05B102
CPC分类号： F28D15/02 , F27D2019/0037 , F28D15/06 , H01L21/67103 , H01L21/67109 , H01L21/67248
摘要： A heat processing apparatus comprises a hot plate for putting the substrate on or near its surface, a ceiling with a first and second concentric regions with a first and second heat pipes, respectively, opposite to the hot plate surface, a member surrounding a space between the hot plate and the ceiling, a gas flow generator supplying gas to the a region from a circumference of the hot plate to a center of the ceiling, and a temperature control mechanism for controlling a regional temperature of the first region in such a manner that a heat emission is greater from a center of the substrate than from a circumference of the substrate, thus heating a substrate to a uniform temperature all over its surface.
摘要翻译：热处理装置包括用于将基板放置在其表面上或其表面附近的热板，具有第一和第二同心区域的顶板，分别具有与热板表面相对的第一和第二热管，围绕位于热板表面之间的空间的构件，热板和天花板，气体发生器，其从所述热板的圆周到所述顶板的中心向所述区域供应气体;以及温度控制机构，用于以这样的方式控制所述第一区域的区域温度：从衬底的中心散热比从衬底的圆周更大，从而将衬底加热至整个表面均匀的温度。

7. 发明申请

US20120293492A1 INFORMATION PROCESSING SYSTEM, INFORMATION PROCESSING APPARATUS, COMPUTER-READABLE STORAGE MEDIUM HAVING INFORMATION PROCESSING PROGRAM STORED THEREIN, AND INFORMATION PROCESSING METHOD 审中-公开
标题翻译：信息处理系统，信息处理装置，具有存储信息处理程序的计算机可读存储介质和信息处理方法
公开(公告)号：US20120293492A1
公开(公告)日：2012-11-22
申请号：US13181778
申请日：2011-07-13
申请人： Tomoaki KUROUME , Tetsuya Sasaki , Eiichi Shirakawa
发明人： Tomoaki KUROUME , Tetsuya Sasaki , Eiichi Shirakawa
IPC分类号： G06T15/00
CPC分类号： H04N13/398 , H04N13/167 , H04N13/178 , H04N13/194
摘要： An information processing system includes a server for managing image files of a planar view image file format and a plurality of first information processing apparatuses each capable of transmitting/receiving an image file via the server. At least one of the first information processing apparatuses includes first transmission means for modifying metadata of an image file of a multi-view image file format which contains a multi-view image, to metadata of an image file of a planar view image file format, and transmitting the image file to the server. At least one of the first information processing apparatuses includes first display control means for, when an image file of the planar view image file format that is received from the server contains a multi-view image, performing multi-view display on a first display device by using the multi-view image.
摘要翻译：信息处理系统包括用于管理平面图像文件格式的图像文件的服务器和能够经由服务器发送/接收图像文件的多个第一信息处理装置。第一信息处理装置中的至少一个包括用于修改包含多视点图像的多视点图像文件格式的图像文件的元数据的第一传输装置，以及平面图像文件格式的图像文件的元数据，并将图像文件发送到服务器。第一信息处理装置中的至少一个包括第一显示控制装置，用于当从服务器接收的平面图像文件格式的图像文件包含多视图图像时，在第一显示装置上执行多视图显示通过使用多视图图像。

8. 发明申请

US20120066627A1 COMPUTER-READABLE STORAGE MEDIUM HAVING STORED THEREON DISPLAY CONTROL PROGRAM, DISPLAY CONTROL SYSTEM, DISPLAY CONTROL APPARATUS, AND DISPLAY CONTROL METHOD 审中-公开
标题翻译：具有存储的显示控制程序的计算机可读存储介质，显示控制系统，显示控制装置和显示控制方法
公开(公告)号：US20120066627A1
公开(公告)日：2012-03-15
申请号：US12984839
申请日：2011-01-05
申请人： Satoshi Furukawa , Eiichi Shirakawa
发明人： Satoshi Furukawa , Eiichi Shirakawa
IPC分类号： G06F3/048
CPC分类号： G06F3/0488
摘要： First, a plurality of selection objects having at least one part thereof displayed on a display area of a display device are moved relative to the display area, based on an output signal outputted from an input device. Then, when an end-located selection object among the moved plurality of selection objects reaches a predetermined position of the display area, displayed on the display area is an object having a shape identical or similar to one part of the plurality of selection objects displayed on the display area.
摘要翻译：首先，基于从输入装置输出的输出信号，在显示装置的显示区域上显示有至少一部分的多个选择对象相对于显示区域移动。然后，当移动的多个选择对象中的终端选择对象到达显示区域的预定位置时，显示在显示区域上的是具有与显示在多个选择对象上的多个选择对象中的一部分相同或类似的形状的对象显示区域。

9. 发明授权

US06191394B1 Heat treating apparatus 有权
标题翻译：热处理设备
公开(公告)号：US06191394B1
公开(公告)日：2001-02-20
申请号：US09314138
申请日：1999-05-19
申请人： Eiichi Shirakawa , Nobuyuki Sata
发明人： Eiichi Shirakawa , Nobuyuki Sata
IPC分类号： H05B368
CPC分类号： H01L21/67248 , H01L21/67103 , H01L21/67109
摘要： A heat treating apparatus comprises a hot plate having a top surface on which is placed a substrate that is to be subjected to a heat treatment, setting means for setting an original target temperature of the hot plate required for subjecting the substrate to a heat treatment, a heat energy supply source for supplying a heat energy to the hot plate, a sensor for detecting the temperature of the hot plate, and control means receiving a detection signal from the sensor to obtain a difference in the detected temperature of the hot plate between the state that the substrate is not placed on the hot plate and the state that the substrate is placed on the hot plate, the original target temperature being switched based on the difference, and a signal denoting the switched target temperature in place of the original target temperature being supplied from the control means to the heat energy supply source.
摘要翻译：一种热处理装置，其特征在于，包括具有顶面的热板，被放置在要进行热处理的基板上的加热板，用于设定对所述基板进行热处理所需的加热板的原始目标温度的设定装置，用于向热板供给热能的热能源，用于检测热板温度的传感器，以及从传感器接收检测信号的控制装置，以获得热板的检测温度差表示基板未被放置在热板上以及基板被放置在热板上的状态，基于该差异来切换原始目标温度，并且代表表示切换的目标温度的信号代替原始目标温度从控制装置供应到热能源。

10. 发明授权

US5070813A Coating apparatus 失效
标题翻译：涂装设备
公开(公告)号：US5070813A
公开(公告)日：1991-12-10
申请号：US472813
申请日：1990-01-31
申请人： Hiroyuki Sakai , Eiichi Shirakawa , Chizo Yamaguchi , Takashi Takekuma
发明人： Hiroyuki Sakai , Eiichi Shirakawa , Chizo Yamaguchi , Takashi Takekuma
IPC分类号： G01F5/00 , G05D7/06 , H01L21/00
CPC分类号： H01L21/6715 , G01F5/00 , G05D7/0635 , Y10T137/2564
摘要： Disclosed is a coating apparatus, comprising a gas exhaust rate controller disposed within an exhaust pipe connected to a cup which houses a substance to be treated, and a branch pipe connected to the exhaust pipe. The flow speed of the fluid within the branch pipe is measured, and the driving of the exhaust rate controller is controlled based on the measured value of the flow speed in accordance with the state of treatment of the object to be treated.
摘要翻译：公开了一种涂布装置，其包括排气速率控制器，其布置在连接到容纳待处理物质的杯的排气管内，以及连接到排气管的分支管。测量分支管内的流体的流速，根据被处理物的处理状态，根据流速的测定值来控制排气速度控制器的驱动。

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