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    • 1. 发明授权
    • Radiation-sensitive resin composition
    • 辐射敏感树脂组合物
    • US06506537B2
    • 2003-01-14
    • US09878274
    • 2001-06-12
    • Eiichi KobayashiJun NumataMikio YamachikaMasafumi Yamamoto
    • Eiichi KobayashiJun NumataMikio YamachikaMasafumi Yamamoto
    • G03F7004
    • G03F7/0758G03F7/0045G03F7/039Y10S430/106Y10S430/111
    • A positive-type radiation-sensitive resin composition is provided. The composition includes: (A) a low-molecular compound comprising a compound having at least one amino group having one or two hydrogen atom(s) bonded to the nitrogen atom; at least one hydrogen atom the amino group has having been substituted with a t-butoxycarbonyl group; (B) a radiation-sensitive acid generator; and (C) a silicon-atom-containing resin comprising an alkali-insoluble or alkali-slightly-soluble resin having been protected with an acid-cleavable group; the resin being capable of turning soluble in alkali upon cleavage of the acid-cleavable group. This radiation-sensitive resin composition is effectively responsive to radiations of various types, has superior sensitivity and resolution and also a superior long-term storage stability, and is useful as a positive-type chemically amplified resist.
    • 提供正型辐射敏感性树脂组合物。 该组合物包括:(A)包含具有至少一个具有与氮原子键合的一个或两个氢原子的氨基的化合物的低分子化合物; 至少一个氢原子已经被叔丁氧基羰基取代;(B)辐射敏感性酸产生剂; 和(C)含有硅原子的树脂,其包含用酸可裂解基团保护的碱不溶性或碱 - 微溶性树脂; 该树脂在切割酸可分解基团时能够转变为碱溶性。该辐射敏感性树脂组合物对各种辐射有效响应,具有优异的灵敏度和分辨率,并且还具有优异的长期储存稳定性,并且 可用作正型化学放大抗蚀剂。
    • 2. 发明授权
    • Radiation-sensitive resin composition
    • 辐射敏感树脂组合物
    • US06623907B2
    • 2003-09-23
    • US09774714
    • 2001-02-01
    • Jun NumataAki SuzukiHiromichi HaraNorihiro NatsumeKiyoshi MurataMasafumi YamamotoAkimasa SoyanoToru KajitaTsutomu Shimokawa
    • Jun NumataAki SuzukiHiromichi HaraNorihiro NatsumeKiyoshi MurataMasafumi YamamotoAkimasa SoyanoToru KajitaTsutomu Shimokawa
    • G03F7004
    • G03F7/0045G03F7/038G03F7/039Y10S430/111Y10S430/128
    • A positive-tone radiation-sensitive resin composition comprising: (A) a low molecular weight compound having at least one amino group in which the nitrogen atom has at least one hydrogen atom bonded thereto and at least one of the hydrogen atoms is replaced by a t-butoxycarbonyl group, (B) a photoacid generator, and (C-1) a resin insoluble or scarcely soluble in alkali which is protected by an acid-dissociable group and becomes soluble in alkali when the acid-dissociable group dissociates or (C-2) an alkali-soluble resin and an alkali solubility control agent is disclosed. Also disclosed is a negative-tone radiation-sensitive resin composition comprising the low molecular weight compound (A), the photoacid generator (B), an alkali-soluble resin (D), and a compound capable of crosslinking with the alkali-soluble resin in the presence of an acid(E). The composition are useful as a chemically amplified resist which effectively responds to various radiations, exhibits superior sensitivity and resolution, forms fine patterns at a high precision and in a stable manner even if the patterns are isolated line patterns.
    • 一种正色辐射敏感性树脂组合物,其包含:(A)具有至少一个氨基的低分子量化合物,其中所述氮原子具有与其键合的至少一个氢原子,并且至少一个氢原子被 叔丁氧基羰基,(B)光酸产生剂和(C-1)不溶于或几乎不溶于碱的树脂,其被酸解离基团保护并且当酸解离基解离时变得可溶于碱,或(C -2)碱溶性树脂和碱溶性控制剂。 还公开了包含低分子量化合物(A),光酸产生剂(B),碱溶性树脂(D)和能够与碱溶性树脂交联的化合物的负色辐射敏感性树脂组合物 在酸(E)的存在下。 该组合物可用作化学放大抗蚀剂,其有效地响应各种辐射,表现出优异的灵敏度和分辨率,即使图案是隔离线图案,也以高精度和稳定的方式形成精细图案。
    • 6. 发明授权
    • Preparation of copolymers
    • 共聚物的制备
    • US06677419B1
    • 2004-01-13
    • US10293740
    • 2002-11-13
    • Phillip J. BrockEiichi KobayashiIsao NishimuraYukio NishimuraThomas I. WallowMasafumi Yamamoto
    • Phillip J. BrockEiichi KobayashiIsao NishimuraYukio NishimuraThomas I. WallowMasafumi Yamamoto
    • C08F1000
    • C08F232/08C08F220/06C08F220/18C08F220/28
    • A scaleable and high-yielding method of preparing copolymers that is useful as a component of a radiation sensitive resin composition is provided. The method includes the step of reacting at least one monomer A which is an unsaturated alicyclic monomer and forms a polymer main chain by dissociation of the unsaturated bond, and at least one unsaturated monomer B, which also forms a polymer chain by dissociation of an unsaturated bond, wherein less than two electron-withdrawing groups are directly appended to said unsaturation, and where said monomer B is other than the unsaturated alicyclic monomer and forms a polymer main chain, in the presence of a free radical initiator. The reacting step is carried out in a stoichiometric excess of monomer A as compared to monomer B. By carrying out the reacting step in an excess of monomer A as compared to monomer B, the resultant copolymer will have a greater molar concentration of monomer A than is obtainable using other methods.
    • 提供了可用作辐射敏感性树脂组合物的组分的共聚物的可扩展和高产率的方法。 所述方法包括使至少一种不饱和脂环族单体的单体A与不饱和键解离形成聚合物主链的至少一种不饱和单体B,其通过不饱和键解离形成聚合物链 键,其中少于两个吸电子基团直接连接到所述不饱和基团上,并且其中所述单体B不同于不饱和脂环族单体并形成聚合物主链,在自由基引发剂存在下。 与单体B相比,反应步骤在化学计量过量的单体A中进行。通过与单体B相比,通过进行过量单体A的反应步骤,所得共聚物将具有比单体A更大的摩尔浓度 可以使用其他方法获得。
    • 10. 发明授权
    • LED driver with end-of-life detection circuitry
    • 带有寿命终止检测电路的LED驱动器
    • US08853949B2
    • 2014-10-07
    • US13330987
    • 2011-12-20
    • Katsunobu HamamotoMasafumi YamamotoKeisuke UedaHisaya Takikita
    • Katsunobu HamamotoMasafumi YamamotoKeisuke UedaHisaya Takikita
    • H05B37/02H05B33/08
    • H05B33/0815H05B33/0893Y02B20/346
    • An LED lighting device includes a DC/DC power converter having output terminals coupled to respective lamp sockets. A controller receives signals from a current sensor and a voltage sensor, and controls the DC/DC power converter to increase/decrease an output voltage based on a sensed output current with respect to a target value. A sensed output voltage is compared to predetermined upper and lower limit values, and the DC/DC power converter is disabled when the output voltage exceeds the predetermined upper limit value or falls below the predetermined lower limit. The controller further measures an accumulated lighting time of the device, and after the accumulated lighting time has exceeded a predetermined switching time, decreases the upper limit value monotonously or in increments as the accumulated lighting time passes.
    • LED照明装置包括具有耦合到相应灯插座的输出端的DC / DC功率转换器。 控制器从电流传感器和电压传感器接收信号,并且基于相对于目标值的感测输出电流来控制DC / DC功率转换器来增加/减小输出电压。 将感测的输出电压与预定的上限和下限值进行比较,并且当输出电压超过预定上限值或低于预定下限时,DC / DC功率转换器被禁用。 控制器进一步测量装置的累积点亮时间,并且在累积点亮时间超过预定切换时间之后,随着累积点亮时间的过去,单调或逐渐减小上限值。