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1. 发明公开

US20240162068A1 SEMICONDUCTOR SUBSTRATE CARRYING CONTAINER WITH SUPPORT WALL FORMED WITH CORRUGATION PORTIONS 审中-公开
公开(公告)号：US20240162068A1
公开(公告)日：2024-05-16
申请号：US18387734
申请日：2023-11-07
申请人： ENTEGRIS, INC.
发明人： Jack Dunlope , Christopher Strickhouser , Matthew A. Fuller , Colton J. Harr
IPC分类号： H01L21/673 , H01L21/687
CPC分类号： H01L21/67326 , H01L21/6732 , H01L21/6875 , H01L21/68785
摘要： A semiconductor substrate carrying container, such as a front opening unified pod or shipping box, that includes a container shell having a plurality of walls, a front, and a rear, the plurality of walls defining an interior space that is sized to be able to receive a plurality of semiconductor substrates or trays, and a support structure configured to receive the plurality of semiconductor substrates or trays. The support structure includes at least one support wall that is formed by a plurality of corrugation portions provided along opposite sides of a centerline along a vertical plane at a center of the at least one support wall.

2. 发明授权

US11610795B2 Membrane diffuser for a substrate container 有权
公开(公告)号：US11610795B2
公开(公告)日：2023-03-21
申请号：US16552005
申请日：2019-08-27
申请人： ENTEGRIS, INC.
发明人： Mark V. Smith , Nicholas Thelen , Matthew A. Fuller , Michael C. Zabka , Sung In Moon , John P. Puglia
IPC分类号： H01L21/673 , H01L21/67
摘要： Purge diffusers for use in systems for transporting substrates include: i) a purge diffuser core having an internal purge gas channel, one or more diffuser ports and an outer surface; ii) filter media secured to the outer surface of the purge diffuser core; and iii) a purge port connector for mounting the purge diffuser to a purge port of a substrate container for transporting substrates. The purge diffuser core may be a unitary article, may be formed by injection molding, and may include diverters internal to the internal purge gas channel.

3. 发明申请

US20220293446A1 SEMICONDUCTOR SUBSTRATE CARRYING CONTAINER WITH FRONT AND REAR OPENINGS 有权
公开(公告)号：US20220293446A1
公开(公告)日：2022-09-15
申请号：US17690388
申请日：2022-03-09
申请人： ENTEGRIS, INC.
发明人： Matthew A. Fuller , Jeffery J. King
IPC分类号： H01L21/677
摘要： A semiconductor substrate carrying container, such as a front opening unified pod, is configured such that a semiconductor substrate can be accessed and removed from or inserted into an interior space of the container via a rear opening that is located opposite a front opening that also permits removal and insertion therethrough. The removal and insertion via the rear opening can be achieved in any suitable manner including, but not limited to, using an automated mechanism, such as a robot arm, or manually.

4. 发明授权

US10723525B2 Wafer container with latching mechanism for large diameter wafers 有权
公开(公告)号：US10723525B2
公开(公告)日：2020-07-28
申请号：US16209142
申请日：2018-12-04
申请人： ENTEGRIS, INC.
发明人： Barry Gregerson , Matthew A. Fuller
IPC分类号： B65D45/16 , H01L21/673 , H01L21/677
摘要： A wafer container with a latch mechanism that provides sealing for large wafer containers, such as for 450 mm wafers, accomplishes secure door closing and latching with reduced torque requirements for rotating the central rotatable cam plate. In various embodiments, a camming slot formed in the rotatable cammed plate is arcuate and defined by opposing cam surfaces which are selectively engaged by a cam follower, such as a roller, attached to a proximal end of a latch arm. The roller can include unitary axle portions that snap into the proximal end of the latch arm and is supported at both axial ends of the roller. The proximal end of the latch arm can include parallel extensions separated by a gap, and have guide in surfaces to deflect the extensions as the axle portions of the roller are forced into position thereby seating the roller at both axial ends.

5. 发明申请

US20170271188A1 SUBSTRATE CONTAINER VALVE ASSEMBLIES 审中-公开
公开(公告)号：US20170271188A1
公开(公告)日：2017-09-21
申请号：US15532320
申请日：2015-12-01
申请人： ENTEGRIS, INC.
发明人： Matthew A. Fuller , Mark V. Smith , Jeffery J. King , John Burns
IPC分类号： H01L21/673 , F16K27/02 , F16K15/14
CPC分类号： H01L21/67393 , F16K15/148 , F16K27/0209 , H01L21/6732 , H01L21/67379
摘要： A substrate container includes a container portion having an open side or bottom, and a door to sealingly close the open side or bottom, one of the door and the container portion defining access structure. The substrate container additionally includes a check-valve assembly, the check-valve assembly being retained with respect to the access structure to provide fluid communication with an interior of the substrate container. The check-valve assembly includes a grommet, the grommet being formed of an elastomeric material. A valve seat is disposed within the grommet, the valve seat being integrally formed with the grommet according to one aspect, and being formed of a separate piece according to another aspect. An elastomeric valve member, specifically an elastomeric umbrella valve member according to one aspect, is disposed within the grommet and held to engage the valve seat, thereby restricting fluid flow through the check-valve assembly with respect to the interior of the substrate container.

6. 发明授权

US09520310B2 Wafer container with door interface seal 有权
标题翻译：晶圆容器带门界面密封
公开(公告)号：US09520310B2
公开(公告)日：2016-12-13
申请号：US14398958
申请日：2013-05-06
申请人： ENTEGRIS, INC.
发明人： Barry Gregerson , Matthew A. Fuller
IPC分类号： H01L21/673 , B65D85/30 , F16J15/10
CPC分类号： H01L21/67376 , B65D85/30 , F16J15/104
摘要： A wafer container may be a front opening wafer container comprising a container portion and a door, one of the container portion and the door having a radially installed seal with a plurality of opposing lateral projections that deflect from a normal position in a direction away from an install direction when the seal is installed in a groove, the lateral projections resisting removal of the seal after the seal is seated in the groove. A core portion and a cantilevered finger member engages the other of the door and container portion when the door is seated in the container portion. Other lateral projections on the seal effectively seal the path between the seal and groove surfaces.
摘要翻译：晶片容器可以是包括容器部分和门的前开口晶片容器，容器部分和门中的一个具有径向安装的密封件，其具有多个相对的横向突起，所述多个相对的横向突起从远离正常位置的方向从正常位置偏转当密封件安装在凹槽中时，安装方向，在密封件就位于凹槽中之后，侧向突起抵抗密封件的移除。当门位于容器部分中时，芯部分和悬臂指部件接合门和容器部分中的另一个。密封件上的其他横向突起有效地密封了密封和凹槽表面之间的路径。

7. 发明公开

US20240363380A1 METHOD AND DEVICE TO DISTRIBUTE GAS INTO A CONTAINER 审中-公开
公开(公告)号：US20240363380A1
公开(公告)日：2024-10-31
申请号：US18648149
申请日：2024-04-26
申请人： ENTEGRIS, INC.
发明人： Mark V. Smith , Matthew A. Fuller , Shawn D. Eggum , Aleksandr A. Yakuba
IPC分类号： H01L21/673
CPC分类号： H01L21/67389
摘要： A method and purge flow distribution module for controlling flow of purge gas into a substrate container is provided. The purge flow distribution module includes a purge module comprising an inlet for receiving a flow of purge gas, a check valve for regulating a flow direction of the purge gas, and an outlet for supplying the purge gas, and a chamber surrounding at least an outlet of the purge module. The chamber includes a first opening for directing a first flow path to at least one rear gas distributing device for distributing a first portion of the purge gas in a rear portion of the substrate container and a second opening for a second flow path to at least one front gas distributing device for distributing a second portion of the purge gas to a front portion of the substrate container.

8. 发明公开

US20240274454A1 SUBSTRATE CONTAINER SYSTEMS AND METHODS OF PURGING A SUBSTRATE CONTAINER 审中-公开
公开(公告)号：US20240274454A1
公开(公告)日：2024-08-15
申请号：US18438258
申请日：2024-02-09
申请人： ENTEGRIS, INC.
发明人： Ryan Madhu Jacob , Matthew A. Fuller , Mark V. Smith , Aleksandr Anatoliyvich Yakuba , Colton J. Harr
IPC分类号： H01L21/673
CPC分类号： H01L21/67389
摘要： Described are support devices that are useful with substrate containers used to hold or transport substrates in a clean environment, as well as associated systems and methods of using the support devices and substrate containers.

9. 发明公开

US20240222172A1 SUBSTRATE CONTAINER WITH PURGE GAS DIFFUSER 审中-公开
公开(公告)号：US20240222172A1
公开(公告)日：2024-07-04
申请号：US18398065
申请日：2023-12-27
申请人： ENTEGRIS, INC.
发明人： Mark V. Smith , Matthew A. Fuller , Colton J. Harr , Thomas H. Wilkie , Shawn D. Eggum , Aleksandr Yakuba
IPC分类号： H01L21/673
CPC分类号： H01L21/67386
摘要： Described are wafer containers adapted to store or transport semiconductor wafers in a clean environment, including containers that include a purge gas delivery device, as well as methods for purging the environment within the container.

10. 发明公开

US20230411191A1 PURGING GAS AMPLIFIER 审中-公开
公开(公告)号：US20230411191A1
公开(公告)日：2023-12-21
申请号：US18211158
申请日：2023-06-16
申请人： ENTEGRIS, INC.
发明人： Matthew A. Fuller , Aleksandr A. Yakuba , Mark V. Smith
IPC分类号： H01L21/673
CPC分类号： H01L21/67389
摘要： A container includes a deflector, disposed in an interior of a substrate container, having a longitudinal opening and a deflection surface and a gas distributor configured to provide a purging gas to purge an interior of a substrate container. The gas distributor is configured such that at least a portion of the purging gas flows into a gap formed between the gas distributor and the deflector. The deflector is configured such that at least a portion of the purging gas in the gap flows through the longitudinal opening. The deflector directs a gas flow pattern of the purging gas from the gas distributor to an outlet of the substrate container to improve purging efficacy of the substrate container.

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