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1. 发明授权

US06785051B2 Intrinsic birefringence compensation for below 200 nanometer wavelength optical lithography components with cubic crystalline structures 失效
标题翻译：对于具有立方晶体结构的200纳米波长光刻组件的固有双折射补偿
公开(公告)号：US06785051B2
公开(公告)日：2004-08-31
申请号：US10195198
申请日：2002-07-15
申请人： Douglas C. Allan , James E. Webb , John H. Bruning
发明人： Douglas C. Allan , James E. Webb , John H. Bruning
IPC分类号： G02B530
CPC分类号： G02B17/0892 , G01L1/241 , G02B1/02 , G02B5/3091 , G02B17/0808 , G02B17/086 , G02F1/0131 , G03F7/70225 , G03F7/70566 , G03F7/70958 , G03F7/70966
摘要： Stress-induced photoelastic birefringence compensates for intrinsic birefringence of cubic crystalline structures in deep ultraviolet (less than 200 nm) microlithographic imaging systems. Both the photoelastic birefringence and the intrinsic birefringence are expressed in a tensor format simplified by the symmetries of cubic crystalline structures. The stress-induced photoelastic birefringence can be sized to individually compensate for intrinsic birefringence exhibited in the same optical elements or preferably to collectively compensate for the cumulative effects of intrinsic birefringence in other optical elements in the lithography system.
摘要翻译：应力诱导的光弹性双折射补偿深紫外（小于200nm）微光刻成像系统中立方晶体结构的固有双折射。光弹性双折射和本征双折射均以立方晶体结构的对称性简化的张量形式表示。应力诱导的光弹性双折射的尺寸可以单独地补偿在相同的光学元件中显示的本征双折射，或优选地共同地补偿在光刻系统中的其它光学元件中的本征双折射的累积效应。

2. 发明授权

US06765717B2 Preferred crystal orientation optical elements from cubic materials 有权
标题翻译：来自立方体材料的优选晶体取向光学元件
公开(公告)号：US06765717B2
公开(公告)日：2004-07-20
申请号：US10146761
申请日：2002-05-15
申请人： Douglas C. Allan , Nicholas F. Borrelli , Charlene M. Smith , Bryan D. Stone
发明人： Douglas C. Allan , Nicholas F. Borrelli , Charlene M. Smith , Bryan D. Stone
IPC分类号： G02B508
CPC分类号： G02B1/08 , C30B29/12 , C30B33/00 , G02B1/02 , G03F7/70966
摘要： The invention provides a method of making a crystal direction of the optical calcium fluoride crystal. In a preferred embodiment, the below 194 nm transmitting optical element is a oriented calcium fluoride lens. In a preferred embodiment, the below 194 nm transmitting optical element is a oriented calcium fluoride beam splitter.
摘要翻译：本发明提供了一种通过提供具有输入面{100}晶体的光学元件光学氟化钙晶体来制造<194nm波长氟化钙晶体光刻元件，沿着光轴发射具有最小双折射的小于约194nm的波长的方法并且将具有光轴的光刻元件的光学平版印刷元件表面形成输入面{100}晶面，其光轴与光学氟化钙晶体的<100>晶体方向对准。在优选实施例中，下述194nm透射光学元件是<100>取向的氟化钙透镜。在优选实施例中，下述194nm透射光学元件是<100>取向氟化钙分束器。

3. 发明授权

US06655857B2 Composite optical waveguide fiber 失效
标题翻译：复合光波导光纤
公开(公告)号：US06655857B2
公开(公告)日：2003-12-02
申请号：US09966940
申请日：2001-09-28
申请人： Douglas C. Allan
发明人： Douglas C. Allan
IPC分类号： G02B630
CPC分类号： G02B6/2551
摘要： The present invention includes a composite optical waveguide fiber. The composite optical waveguide fiber includes a first optical waveguide fiber. The first optical waveguide fiber has a first diameter and a first outermost layer having a first coefficient of thermal expansion. The composite optical waveguide fiber further includes a second optical waveguide fiber coupled to the first optical waveguide fiber. The second optical waveguide fiber has a second diameter and a second outermost layer, the second outermost layer having a second coefficient of thermal expansion. Wherein the first coefficient of thermal expansion is greater than the second coefficient of thermal expansion. Wherein the first diameter is greater than the second diameter.
摘要翻译：本发明包括复合光波导光纤。复合光波导光纤包括第一光波导光纤。第一光波导纤维具有第一直径和具有第一热膨胀系数的第一最外层。复合光波导光纤还包括耦合到第一光波导光纤的第二光波导光纤。第二光波导纤维具有第二直径和第二最外层，第二最外层具有第二热膨胀系数。其中第一热膨胀系数大于第二热膨胀系数。其中第一直径大于第二直径。

4. 发明申请

US20130255314A1 METHOD FOR FUSION DRAWING ION-EXCHANGEABLE GLASS 审中-公开
标题翻译：融合图可交换玻璃的方法
公开(公告)号：US20130255314A1
公开(公告)日：2013-10-03
申请号：US13431374
申请日：2012-03-27
申请人： Douglas C. Allan , Bradley F. Bowden , Xiaoju Guo , John C. Mauro , Marcel Potuzak
发明人： Douglas C. Allan , Bradley F. Bowden , Xiaoju Guo , John C. Mauro , Marcel Potuzak
IPC分类号： C03B17/06 , C03C21/00 , C03B15/02
CPC分类号： C03B17/067 , C03C21/00
摘要： A method of making glass through a glass ribbon forming process in which a glass ribbon is drawn from a root point to an exit point is provided. The method comprises the steps of: (I) cooling the glass ribbon at a first cooling rate from an initial temperature to a process start temperature, the initial temperature corresponding to a temperature at the root point; (II) cooling the glass ribbon at a second cooling rate from the process start temperature to a process end temperature; and (III) cooling the glass ribbon at a third cooling rate from the process end temperature to an exit temperature, the exit temperature corresponding to a temperature at the exit point, wherein an average of the second cooling rate is lower than an average of the first cooling rate and an average of the third cooling rate.
摘要翻译：提供了一种通过玻璃带形成工艺制造玻璃的方法，其中将玻璃带从根部点抽出到出口点。该方法包括以下步骤：（I）以从初始温度到过程开始温度的第一冷却速率冷却玻璃带，初始温度对应于根部处的温度; （II）以从过程开始温度到过程结束温度的第二冷却速率冷却玻璃带; 和（III）以从处理结束温度到出口温度的第三冷却速率冷却玻璃带，出口温度对应于出口处的温度，其中第二冷却速率的平均值低于第一冷却速率和第三冷却速率的平均值。

5. 发明授权

US06810197B2 Isotopically altered optical fiber 失效
标题翻译：同位素改变的光纤
公开(公告)号：US06810197B2
公开(公告)日：2004-10-26
申请号：US10322148
申请日：2002-12-18
申请人： Douglas C. Allan , John T. Brown , Lisa C. Chacon , Adam J. G. Ellison , James C. Fajardo , Stuart Gray , Keith L. House , Karl W. Koch, III , Dale R. Powers , James A. West
发明人： Douglas C. Allan , John T. Brown , Lisa C. Chacon , Adam J. G. Ellison , James C. Fajardo , Stuart Gray , Keith L. House , Karl W. Koch, III , Dale R. Powers , James A. West
IPC分类号： G02B600
CPC分类号： C03C13/045 , C03B37/01413 , C03B37/01446 , C03B37/01807 , C03B37/01823 , C03B37/01853 , C03B2201/20 , C03B2201/22 , C03B2201/31 , C03B2203/22 , C03B2207/30 , C03B2207/36 , C03C4/0042 , C03C13/046 , G02B6/02 , G02B6/02228 , G02B6/02271 , G02B6/03644 , G02B6/03677 , G02B6/03694
摘要： An isotopically-altered, silica based optical fiber is provided having lower losses, broader bandwidth, and broader Raman gain spectrum characteristics than conventional silica-based fiber. A heavier, less naturally abundant isotope of silicon or oxygen is substituted for a lighter, more naturally abundant isotope to shift the infrared absorption to a slightly longer wavelength. In one embodiment, oxygen-18 is substituted for the much more naturally abundant oxygen-16 at least in the core region of the fiber. The resulting isotopically-altered fiber has a minimum loss of 0.044 dB/km less than conventional fiber, and a bandwidth that is 17 percent broader for a loss range between 0.044-0.034 dB/km. The fiber may be easily manufactured with conventional fiber manufacturing equipment by way of a plasma chemical vapor deposition technique. When a 50 percent substitution of oxygen-18 for oxygen-16 is made in the core region of the fiber, the Raman gain spectrum is substantially broadened.
摘要翻译：提供了一种同位素改性的二氧化硅基光纤，其比传统的二氧化硅基光纤具有更低的损耗，更宽的带宽和更广泛的拉曼增益光谱特性。更重，更不自然丰富的硅或氧的同位素代替较轻的，更自然的丰富的同位素，以将红外吸收转移到稍长的波长。在一个实施方案中，氧-18至少在纤维的核心区域中替代天然丰富的氧-16。所得到的同位素改变的光纤比常规光纤的损耗最小为0.044 dB / km，对于0.044-0.034 dB / km之间的损耗范围，宽带宽为17％。纤维可以通过等离子体化学气相沉积技术容易地用常规纤维制造设备制造。当在纤维的纤芯区域中进行氧-16取代氧-16的50％时，拉曼增益谱显着扩大。

6. 发明授权

US06796148B1 Deep UV laser internally induced densification in silica glasses 有权
标题翻译：深紫外线激光在二氧化硅眼镜内部诱导致密化
公开(公告)号：US06796148B1
公开(公告)日：2004-09-28
申请号：US09675721
申请日：2001-01-10
申请人： Nicholas F. Borrelli , Douglas C. Allan , Charlene M. Smith
发明人： Nicholas F. Borrelli , Douglas C. Allan , Charlene M. Smith
IPC分类号： C03B37027
CPC分类号： G02B6/13 , G02B2006/121 , G02B2006/12147 , G02B2006/12159
摘要： A method of writing a light guiding structure in a bulk glass substrate including selecting a bulk glass substrate made from a soft silica-based material; and focusing an excimer laser beam at a focus within said substrate while translating the focus relative to the substrate along a scan path at a scan speed effective to induce an increase in the refractive index of the material along the scan path relative to that of the unexposed material while incurring substantially no laser induced breakdown of the material along the scan path. Various optical devices, including waveguides can be made in this way.
摘要翻译：一种在散装玻璃基板中写入导光结构的方法，包括选择由软二氧化硅基材料制成的块状玻璃基板; 并且将准分子激光束聚焦在所述衬底内的焦点处，同时以扫描速度沿着扫描路径相对于衬底平移焦点，该扫描速度有效地引起材料沿着扫描路径相对于未曝光的折射率的增加材料，同时基本上不会导致沿着扫描路径的材料的激光诱发击穿。可以以这种方式制造包括波导在内的各种光学装置。

7. 发明授权

US06788862B2 Microstructured optical waveguide having large optical nonlinearity 失效
标题翻译：具有大光学非线性的微结构光波导
公开(公告)号：US06788862B2
公开(公告)日：2004-09-07
申请号：US10146199
申请日：2002-05-14
申请人： Bruce G. Aitken , Douglas C. Allan , Nicholas F. Borrelli , Karl W. Koch, III , James A. West
发明人： Bruce G. Aitken , Douglas C. Allan , Nicholas F. Borrelli , Karl W. Koch, III , James A. West
IPC分类号： G02B602
CPC分类号： G02B6/02333 , G02B6/021 , G02B6/02214 , G02B6/02257 , G02B6/02271 , G02B6/02347 , G02B6/02366 , G02F1/3513 , G02F1/365
摘要： A microstructured optical waveguide that supports the propagation of an optical signal of a desired wavelength is described. The optical waveguide includes a core region formed from an optically nonlinear material having a &ggr; of at least about 2.5×10−19 m2/W at 1260 nm. The optical waveguide also includes a cladding region surrounding the core region, the cladding region including a bulk material and a lattice of columns located in the bulk material, the lattice of columns having a pitch, and each column having a cross-sectional area. The pitch of the lattice and the areas of the columns are selected such that the dispersion of the optical signal at the desired wavelength is within the range of about −70 ps/nm-km to about 70 ps/nm-km.
摘要翻译：描述支持所需波长的光信号的传播的微结构光波导。光波导包括由在1260nm具有至少约2.5x10 -2 m 2 / W的γ的光学非线性材料形成的芯区域。光波导还包括围绕芯区域的包层区域，包层区域包括体材料和位于本体材料中的列的格子，柱的格子具有间距，并且每列具有横截面积。选择晶格的间距和列的面积，使得在期望波长处的光信号的色散在约-70ps / nm-km至约70ps / nm-km的范围内。

8. 发明授权

US07418308B2 Method of optimizing glass strain 有权
标题翻译：优化玻璃应变的方法
公开(公告)号：US07418308B2
公开(公告)日：2008-08-26
申请号：US10699591
申请日：2003-10-31
申请人： Douglas C. Allan , Motoya Anma , Josef C. Lapp
发明人： Douglas C. Allan , Motoya Anma , Josef C. Lapp
IPC分类号： G06F19/00 , C03B37/07
CPC分类号： G05B13/024
摘要： A method of determining parameters of plurality of thermal cycles to achieve a set glass strain level includes providing a plurality of input parameters for a glass substrate and a plurality of parameters for a plurality of thermal cycles. The method also includes iteratively modifying at least one of the pluralities of thermal cycle parameters so the glass strain is not greater than the set glass strain level after a final thermal cycle is completed. An aspect of the method usefully enables a user to determine from the material parameters and processing sequences of the glass manufacturer and further entities that may further process the glass (e.g., the glass manufacturer's customers) whether a particular glass strain can be achieved; and if not the example embodiments allows the manufacturer to calculate changes in the customers' processes to meet the desired glass strain.
摘要翻译：确定多个热循环的参数以实现凝固玻璃应变水平的方法包括为玻璃基板提供多个输入参数以及多个热循环的多个参数。该方法还包括迭代地修改多个热循环参数中的至少一个，使得在最终热循环完成之后玻璃应变不大于设定的玻璃应变水平。该方法的一个方面有用地使用户能够根据玻璃制造商的材料参数和处理顺序以及可以进一步处理玻璃（例如，玻璃制造商的客户）的玻璃制品的其他实体是否可以实现特定的玻璃应变来确定; 并且如果不是示例性实施例允许制造商计算客户的过程中的变化以满足期望的玻璃应变。

9. 发明授权

US06819852B2 Optimized defects in band-gap waveguides 失效
标题翻译：带隙波导中的优化缺陷
公开(公告)号：US06819852B2
公开(公告)日：2004-11-16
申请号：US10713241
申请日：2003-11-13
申请人： Douglas C. Allan , Nicholas F. Borrelli , James C. Fajardo , Karl W. Koch, III , James A. West
发明人： Douglas C. Allan , Nicholas F. Borrelli , James C. Fajardo , Karl W. Koch, III , James A. West
IPC分类号： G02B610
CPC分类号： B82Y20/00 , G02B6/02328 , G02B6/1225
摘要： Disclosed is a photonic band-gap crystal waveguide having the physical dimension of the photonic crystal lattice and the size of the defect selected to provide for optimum mode power confinement to the defect. The defect has a boundary which has a characteristic numerical value associated with it. The ratio of this numerical value to the pitch of the photonic crystal is selected to avoid surface modes found to exist in certain configurations of the photonic band-gap crystal waveguide. Embodiments in accord with the invention having circular and hexagonal defect cross sections are disclosed and described. A method of making the photonic band-gap crystal waveguide is also disclosed and described.
摘要翻译：公开了具有光子晶格的物理尺寸和选择的缺陷的尺寸以提供对缺陷的最佳模式功率约束的光子带隙晶体波导。缺陷具有与其相关联的特征数值的边界。选择该数值与光子晶体的间距的比率以避免发现在光子带隙晶体波导的某些配置中存在的表面模式。公开和描述了具有圆形和六边形缺陷横截面的本发明的实施例。还公开并描述了制造光子带隙晶体波导的方法。

10. 发明授权

US06778749B2 Optimized defects in band-gap waveguides 失效
公开(公告)号：US06778749B2
公开(公告)日：2004-08-17
申请号：US10067644
申请日：2002-02-04
申请人： Douglas C. Allan , Nicholas F. Borrelli , James C. Fajardo , Karl W. Koch, III , James A. West
发明人： Douglas C. Allan , Nicholas F. Borrelli , James C. Fajardo , Karl W. Koch, III , James A. West
IPC分类号： G02B602
CPC分类号： B82Y20/00 , G02B6/02328 , G02B6/1225
摘要： Disclosed is a photonic band-gap crystal waveguide having the physical dimension of the photonic crystal lattice and the size of the defect selected to provide for optimum mode power confinement to the defect. The defect has a boundary which has a characteristic numerical value associated with it. The ratio of this numerical value to the pitch of the photonic crystal is selected to avoid surface modes found to exist in certain configurations of the photonic band-gap crystal waveguide. Embodiments in accord with the invention having circular and hexagonal defect cross sections are disclosed and described. A method of making the photonic band-gap crystal waveguide is also disclosed and described.

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