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    • 6. 发明申请
    • Method of forming a nanogap and method of manufacturing a nano field effect transitor for molecular device and bio-sensor, and molecular device and bio-sensor manufactured using the same
    • 形成纳米间隙的方法和制造用于分子装置和生物传感器的纳米场效应转移体的方法以及使用其制造的分子装置和生物传感器
    • US20060154400A1
    • 2006-07-13
    • US11328789
    • 2006-01-10
    • Yang-Kyu ChoiJu-Hyun Kim
    • Yang-Kyu ChoiJu-Hyun Kim
    • H01L21/00G03C5/00
    • G01N33/54373B82Y10/00B82Y15/00B82Y30/00G01N33/552G01N33/553G01N2610/00
    • The present invention relates to a method of forming a nanogap, a method of manufacturing a nano field effect transistor for a molecular device or a bio-sensor, and a fabrication thereof, and more particularly, to a method of forming a high reproductive nanogap using a thin layer with a molecular size or a size which is similar to that of a molecule and a nano field effect transistor manufactured by the method of forming the nanogap. The method of forming a nanogap according to the present invention comprises steps of (a) forming sequentially an insulating layer, a first metal layer and a hard mask on a silicon substrate; (b) etching partially the first metal layer using the mask as an etching mask; (c) forming a self-assembled monolayer (SAM) on a side surface of the first metal layer to form a nanogap on the silicon substrate; (d) depositing metal on the entire structure including the mask to form a second metal layer; (e) removing the metal deposited on the hard mask using a lift-off process by etching the mask formed in step (a) and (f) etching the SAM formed in step (c) to form the nanogap.
    • 本发明涉及形成纳米间隙的方法,制造用于分子器件或生物传感器的纳米场效应晶体管的方法及其制造方法,更具体地说,涉及一种使用 通过形成纳米凹槽的方法制造的分子尺寸或尺寸与分子尺寸相似的薄层和纳米场效应晶体管制成的薄层。 根据本发明的形成纳米间隙的方法包括以下步骤:(a)在硅衬底上依次形成绝缘层,第一金属层和硬掩模; (b)使用掩模作为蚀刻掩模部分地蚀刻第一金属层; (c)在第一金属层的侧表面上形成自组装单层(SAM),以在硅衬底上形成纳米隙; (d)在包括所述掩模的整个结构上沉积金属以形成第二金属层; (e)通过蚀刻步骤(a)中形成的掩模和(f)蚀刻步骤(c)中形成的SAM以形成纳米凹槽,使用剥离工艺去除沉积在硬掩模上的金属。