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1. 发明授权

US06812814B2 Microelectromechanical (MEMS) switching apparatus 有权
公开(公告)号：US06812814B2
公开(公告)日：2004-11-02
申请号：US10681550
申请日：2003-10-07
申请人： Qing Ma , Valluri Rao , John Heck , Li-Peng Wang , Dong Shim , Quan Tran
发明人： Qing Ma , Valluri Rao , John Heck , Li-Peng Wang , Dong Shim , Quan Tran
IPC分类号： H01P110
CPC分类号： H01H59/0009 , H01H2001/0078 , H01H2059/0036
摘要： This application discloses a microelectromechanical (MEMS) switch apparatus comprising an anchor attached to a substrate and an electrically conductive beam attached to the anchor and in electrical contact therewith. The beam comprises a tapered portion having a proximal end and a distal end, the proximal end being attached to the anchor, an actuation portion attached to the distal end of the tapered portion, a tip attached to the actuation portion, the tip having a contact dimple thereon. The switch apparatus also includes an actuation electrode attached to the substrate and positioned between the actuation portion and the substrate. Additional embodiments are also described and claimed.

2. 发明申请

US20060001329A1 FBAR device frequency stabilized against temperature drift 审中-公开
标题翻译： FBAR器件频率稳定，防止温度漂移
公开(公告)号：US20060001329A1
公开(公告)日：2006-01-05
申请号：US10882510
申请日：2004-06-30
申请人： Valluri Rao , Qing Ma , Quan Tran , Dong Shim , Li-Peng Wang
发明人： Valluri Rao , Qing Ma , Quan Tran , Dong Shim , Li-Peng Wang
IPC分类号： H01L41/08
CPC分类号： H03H9/02102 , H03H2009/02196
摘要： A film bulk acoustic resonator (FBAR) comprises a piezoelectric film sandwiched between a top electrode and a bottom electrode. A temperature sensor is provided to sense a temperature to determine a temperature induced frequency drift for the FBAR. A voltage controller operatively connected to the temperature sensor supplies a direct current (DC) bias voltage to the FBAR to induce an opposite voltage induced frequency drift to compensate for the temperature induced frequency drift.
摘要翻译：薄膜体声波谐振器（FBAR）包括夹在顶部电极和底部电极之间的压电薄膜。提供温度传感器以感测温度以确定FBAR的温度感应频率漂移。可操作地连接到温度传感器的电压控制器向FBAR提供直流（DC）偏置电压以引起相反的电压感应频率漂移以补偿温度引起的频率漂移。

3. 发明申请

US20050122001A1 Microelectromechanical apparatus and methods for surface acoustic wave switching 有权
标题翻译：微机电装置及表面声波切换方法
公开(公告)号：US20050122001A1
公开(公告)日：2005-06-09
申请号：US11037307
申请日：2005-01-18
申请人： Qing Ma , Dong Shim
发明人： Qing Ma , Dong Shim
IPC分类号： B81B3/00 , H03H9/02 , H03H9/05 , H03H9/25 , H01L41/107
CPC分类号： H03H9/0542 , H03H9/02779 , H03H9/6403
摘要： Microelectromechanical system (MEMS) apparatus and methods for surface acoustic wave (SAW) switching are disclosed. The apparatus includes a piezoelectric substrate having spaced apart input and output SAW transducers. A MEMS switch is arranged between the input and output SAW transducers The MEMS switch has a deformable member in electromagnetic communication with one or more actuation electrodes formed on or above the substrate. The deformable member is deformable to mechanically contact the substrate to deflect or absorb a SAW generated by the input SAW transducer.
摘要翻译：公开了用于表面声波（SAW）切换的微机电系统（MEMS）装置和方法。该装置包括具有间隔开的输入和输出SAW换能器的压电基片。 MEMS开关布置在输入和输出SAW换能器之间MEMS开关具有与形成在基板上或上方的一个或多个致动电极电磁连通的可变形构件。可变形构件可变形以机械地接触衬底以偏转或吸收由输入SAW换能器产生的SAW。

4. 发明申请

US20070127998A1 ELECTRODE TIP DRESSER 失效
标题翻译：电极提拉机
公开(公告)号：US20070127998A1
公开(公告)日：2007-06-07
申请号：US11363469
申请日：2006-02-27
申请人： Dong Shim
发明人： Dong Shim
IPC分类号： B23C3/14
CPC分类号： B23K11/3063 , Y10T29/5191 , Y10T409/3042 , Y10T409/304256
摘要： An electrode tip dresser is disclosed which can dress a pair of electrode tips to a usable state while achieving a desired accuracy of a tip surface of each electrode tip including an angular portion at a peripheral edge of the tip surface, without separating each electrode tip from a welding gun. The electrode tip dresser includes a holder which is rotatable about a common axis of electrode tips, a pair of support shafts which are held by the holder, are arranged in parallel in an approach direction of the electrode tips, and extend in a direction orthogonal to the approach direction, and a pair of dressing rollers which are rotatably supported by the support shafts, respectively, to dress the electrode tips to a usable state. Each dressing roller includes a groove which has a cross-section conforming to the outline of the tip section of the associated electrode tip when the cross-section is taken in a direction orthogonal to the associated support shaft, and the outline is taken after the dressing of the electrode tip. Each dressing roller includes two axially-divided roller bodies. The dividing plane of the divided roller bodies is arranged at the center of the tip surface of the associated electrode tip in a direction orthogonal to the axis of the associated electrode tip.
摘要翻译：公开了一种电极头修整器，其可以将一对电极端头连接到可使用状态，同时实现每个电极端头的尖端表面的期望精度，包括在尖端表面的周边边缘处的角部，而不将每个电极尖端从焊枪电极头修整器包括可围绕电极头的公共轴线旋转的保持器，由保持器保持的一对支撑轴在电极尖端的接近方向上平行布置，并且沿与电极顶端正交的方向延伸接近方向和一对修整辊，其分别由支撑轴可旋转地支撑，以将电极末端装配到可用状态。每个修整辊包括一个槽，当横截面沿着与相关联的支撑轴正交的方向截取时，该槽具有与相关联的电极末端的末端部分的轮廓相符的横截面，并且在修整后取出轮廓的电极尖端。每个修整辊包括两个轴向分割的辊体。分割的辊体的分割平面在与相关联的电极头的轴线正交的方向上配置在相关联的电极头的尖端表面的中心。

5. 发明申请

US20050248420A1 Forming integrated plural frequency band film bulk acoustic resonators 审中-公开
标题翻译：形成集成的多个频带膜体声共振器
公开(公告)号：US20050248420A1
公开(公告)日：2005-11-10
申请号：US10841402
申请日：2004-05-07
申请人： Qing Ma , Li-Peng Wang , Dong Shim , Valluri Rao
发明人： Qing Ma , Li-Peng Wang , Dong Shim , Valluri Rao
IPC分类号： H01L41/08 , H03H3/04 , H03H9/205 , H03H9/58
CPC分类号： H03H3/04 , H03H2003/0471 , H03H2003/0478
摘要： Plural band film bulk acoustic resonators may be formed on the same integrated circuit using lithographic techniques. As a result, high volume production of reproducible components can be achieved, wherein the resonators, as manufactured, are designed to have different frequencies.
摘要翻译：可以使用平版印刷技术在相同的集成电路上形成多个带状薄膜体声共振器。结果，可以实现大量生产可重复组件，其中制造的谐振器被设计成具有不同的频率。

6. 发明申请

US20050007219A1 Microelectromechanical (MEMS) switching apparatus 有权
标题翻译：微机电（MEMS）开关装置
公开(公告)号：US20050007219A1
公开(公告)日：2005-01-13
申请号：US10912413
申请日：2004-08-04
申请人： Qing Ma , Valluri Rao , John Heck , Li-Peng Wang , Dong Shim , Quan Tran
发明人： Qing Ma , Valluri Rao , John Heck , Li-Peng Wang , Dong Shim , Quan Tran
IPC分类号： H01H59/00 , H01H51/22
CPC分类号： H01H59/0009 , H01H2001/0078 , H01H2059/0036
摘要： This application discloses a microelectromechanical (MEMS) switch apparatus comprising an anchor attached to a substrate and an electrically conductive beam attached to the anchor and in electrical contact therewith. The beam comprises a tapered portion having a proximal end and a distal end, the proximal end being attached to the anchor, an actuation portion attached to the distal end of the tapered portion, a tip attached to the actuation portion, the tip having a contact dimple thereon. The switch apparatus also includes an actuation electrode attached to the substrate and positioned between the actuation portion and the substrate. Additional embodiments are also described and claimed.
摘要翻译：本申请公开了一种微机电（MEMS）开关设备，其包括附接到基板的锚固件和附接到锚固件并与其接触的导电梁。所述梁包括具有近端和远端的锥形部分，所述近端附接到所述锚固件，附接到所述锥形部分的远端的致动部分，附接到所述致动部分的尖端，所述尖端具有触点在其上的凹坑。开关装置还包括附接到基板并位于致动部分和基板之间的致动电极。还描述和要求保护附加实施例。

7. 发明申请

US20060290445A1 Tunable resonator with MEMS element 有权
标题翻译：具有MEMS元件的可调谐谐振器
公开(公告)号：US20060290445A1
公开(公告)日：2006-12-28
申请号：US11153998
申请日：2005-06-16
申请人： Jun Su , Dong Shim , Oing Ma , Valluri Rao
发明人： Jun Su , Dong Shim , Oing Ma , Valluri Rao
IPC分类号： H03H9/70 , H03H9/56
CPC分类号： H03H7/0153 , B81B7/02 , B81B2201/018 , B81B2201/0271 , H01P1/203 , H03H7/1758 , H03H7/1766 , H03H7/1783 , H03H7/1791 , H03H2007/006 , H03H2007/013 , H03H2210/015
摘要： According to an embodiment of the present invention, a microelectromechanical system (MEMS) element tunes a resonator to a frequency.
摘要翻译：根据本发明的实施例，微机电系统（MEMS）元件将谐振器调谐到频率。

8. 发明授权

US06967548B2 Microelectromechanical (MEMS) switching apparatus 有权
公开(公告)号：US06967548B2
公开(公告)日：2005-11-22
申请号：US10912413
申请日：2004-08-04
申请人： Qing Ma , Valluri Rao , John Heck , Li-Peng Wang , Dong Shim , Quan Tran
发明人： Qing Ma , Valluri Rao , John Heck , Li-Peng Wang , Dong Shim , Quan Tran
IPC分类号： H01H59/00 , H01P1/10
CPC分类号： H01H59/0009 , H01H2001/0078 , H01H2059/0036
摘要： This application discloses a microelectromechanical (MEMS) switch apparatus comprising an anchor attached to a substrate and an electrically conductive beam attached to the anchor and in electrical contact therewith. The beam comprises a tapered portion having a proximal end and a distal end, the proximal end being attached to the anchor, an actuation portion attached to the distal end of the tapered portion, a tip attached to the actuation portion, the tip having a contact dimple thereon. The switch apparatus also includes an actuation electrode attached to the substrate and positioned between the actuation portion and the substrate. Additional embodiments are also described and claimed.

9. 发明申请

US20050093652A1 Size scaling of film bulk acoustic resonator (FBAR) filters using impedance transformer (IT) or balun 审中-公开
标题翻译：使用阻抗变压器（IT）或平衡 - 不平衡转换器的薄膜体声波谐振器（FBAR）滤波器的尺寸缩放
公开(公告)号：US20050093652A1
公开(公告)日：2005-05-05
申请号：US10698889
申请日：2003-10-31
申请人： Qing Ma , Dong Shim
发明人： Qing Ma , Dong Shim
IPC分类号： H03H9/00 , H03H9/58
CPC分类号： H03H9/0095
摘要： The disclosure describes an apparatus comprising a film bulk acoustic resonator (FBAR) filter having an input and an output, and an impedance matching unit coupled to one of the input and the output of the FBAR filter. Also described is a process comprising providing a film bulk acoustic resonator (FBAR) filter, the FBAR filter having an input impedance and an output impedance, matching the impedance of an input circuit to the input impedance of the FBAR filter, and matching the output impedance of the FBAR filter to the impedance of an output circuit. Other embodiments are described and claimed.
摘要翻译：本公开描述了一种包括具有输入和输出的膜体声波谐振器（FBAR）滤波器和耦合到FBAR滤波器的输入和输出之一的阻抗匹配单元的装置。还描述了一种方法，其包括提供薄膜体声波谐振器（FBAR）滤波器，FBAR滤波器具有输入阻抗和输出阻抗，匹配输入电路的阻抗与FBAR滤波器的输入阻抗，并匹配输出阻抗的FBAR滤波器到输出电路的阻抗。描述和要求保护其他实施例。

10. 发明授权

US06686820B1 Microelectromechanical (MEMS) switching apparatus 有权
标题翻译：微机电（MEMS）开关装置
公开(公告)号：US06686820B1
公开(公告)日：2004-02-03
申请号：US10194096
申请日：2002-07-11
申请人： Qing Ma , Valluri Rao , John Heck , Li-Peng Wang , Dong Shim , Quan Tran
发明人： Qing Ma , Valluri Rao , John Heck , Li-Peng Wang , Dong Shim , Quan Tran
IPC分类号： H01P110
CPC分类号： H01H59/0009 , H01H2001/0078 , H01H2059/0036
摘要： This application discloses a microelectromechanical (MEMS) switch apparatus comprising an anchor attached to a substrate and an electrically conductive beam attached to the anchor and in electrical contact therewith. The beam comprises a tapered portion having a proximal end and a distal end, the proximal end being attached to the anchor, an actuation portion attached to the distal end of the tapered portion, a tip attached to the actuation portion, the tip having a contact dimple thereon. The switch apparatus also includes an actuation electrode attached to the substrate and positioned between the actuation portion and the substrate. Additional embodiments are also described and claimed.
摘要翻译：本申请公开了一种微机电（MEMS）开关设备，其包括附接到基板的锚固件和附接到锚固件并与其接触的导电梁。所述梁包括具有近端和远端的锥形部分，所述近端附接到所述锚固件，附接到所述锥形部分的远端的致动部分，附接到所述致动部分的尖端，所述尖端具有触点在其上的凹坑。开关装置还包括附接到基板并位于致动部分和基板之间的致动电极。还描述和要求保护附加实施例。

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