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1. 发明授权

US08498078B2 Magnetic head with flared write pole having multiple tapered regions 有权
标题翻译：具有多个锥形区域的具有扩口写入磁极的磁头
公开(公告)号：US08498078B2
公开(公告)日：2013-07-30
申请号：US12634533
申请日：2009-12-09
申请人： Donald G. Allen , Liubo Hong , Aron Pentek , Thomas J. A. Roucoux , Sue S. Zhang , Yi Zheng
发明人： Donald G. Allen , Liubo Hong , Aron Pentek , Thomas J. A. Roucoux , Sue S. Zhang , Yi Zheng
IPC分类号： G11B5/147 , G11B5/187
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/31
摘要： Methods for fabrication of tapered magnetic poles with a non-magnetic front bump layer. A magnetic pole may have a plurality of tapered surfaces at or near an air bearing surface (ABS), wherein a thickness of the write pole increases in a direction away from the ABS. A non-magnetic front bump layer may be formed on one or more of the tapered surfaces of the magnetic pole at a distance from the ABS. The front bump layer may increase the separation distance between a shield layer and the magnetic pole near the tapered surface, thereby improving the performance of the write head.
摘要翻译：用非磁性前凸块层制造锥形磁极的方法。磁极可以在空气轴承表面（ABS）处或附近具有多个锥形表面，其中写入极的厚度在远离ABS的方向上增加。可以在与ABS相距一定距离处的磁极的一个或多个锥形表面上形成非磁性前凸块层。前凸块层可以增加在锥形表面附近的屏蔽层和磁极之间的间隔距离，从而提高写入头的性能。

2. 发明申请

US20110134569A1 PMR WRITER AND METHOD OF FABRICATION 有权
标题翻译： PMR WRITER和制造方法
公开(公告)号：US20110134569A1
公开(公告)日：2011-06-09
申请号：US12634533
申请日：2009-12-09
申请人： Donald G. Allen , Liubo Hong , Aron Pentek , Thomas J. A. Roucoux , Sue S. Zhang , Yi Zheng
发明人： Donald G. Allen , Liubo Hong , Aron Pentek , Thomas J. A. Roucoux , Sue S. Zhang , Yi Zheng
IPC分类号： G11B5/10
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/31
摘要： Methods for fabrication of tapered magnetic poles with a non-magnetic front bump layer. A magnetic pole may have a plurality of tapered surfaces at or near and air bearing surface (ABS), wherein a thickness of the write pole increases in a direction away from the ABS. A non-magnetic front bump layer may be formed on one or more of the tapered surfaces of the magnetic pole at a distance from the ABS. The front bump layer may increase the separation distance between a shield layer and the magnetic pole near the tapered surface, thereby improving the performance of the write head.
摘要翻译：用非磁性前凸块层制造锥形磁极的方法。磁极可以在空气轴承表面（ABS）处或附近具有多个锥形表面，其中写入极的厚度在远离ABS的方向上增加。可以在与ABS相距一定距离处的磁极的一个或多个锥形表面上形成非磁性前凸块层。前凸块层可以增加在锥形表面附近的屏蔽层和磁极之间的间隔距离，从而提高写入头的性能。

3. 发明申请

US20130020204A1 MAGNETIC WRITE HEAD HAVING AN ELECTROPLATED WRITE POLE WITH A LEADING EDGE TAPER 审中-公开
标题翻译：具有导线边缘的电镀写入磁头的磁头
公开(公告)号：US20130020204A1
公开(公告)日：2013-01-24
申请号：US13187381
申请日：2011-07-20
申请人： Donald G. Allen , Liubo Hong , Aron Pentek , Thomas J. A. Roucoux , Junsheng Yang , Yi Zheng , Qiping Zhong , Honglin Zhu
发明人： Donald G. Allen , Liubo Hong , Aron Pentek , Thomas J. A. Roucoux , Junsheng Yang , Yi Zheng , Qiping Zhong , Honglin Zhu
IPC分类号： G11B5/127 , C25D7/00 , C23F1/04 , C25D5/02
CPC分类号： C25D5/022 , C25D5/48 , G11B5/3116 , G11B5/3163
摘要： A method for manufacturing a magnetic write head having a tapered leading edge. The method includes depositing a sacrificial non-magnetic layer to a thickness that is at least as great as the thickness of the write pole to be formed. The sacrificial non-magnetic layer is then masked and ion milled so as to form a tapered edge on the sacrificial non-magnetic layer that extends through the thickness of the non-magnetic fill layer. A magnetic material is then deposited and planarized by chemical mechanical polishing. The remaining magnetic material forms the entirety of the magnetic write pole so that there is no need to deposit additional magnetic layers further construct the write pole.
摘要翻译：一种用于制造具有锥形前缘的磁写头的方法。该方法包括将牺牲非磁性层沉积至至少与待形成的写极的厚度一样大的厚度。然后对牺牲非磁性层进行掩模和离子研磨，以在牺牲非磁性层上形成延伸穿过非磁性填充层的厚度的锥形边缘。然后通过化学机械抛光沉积和平坦化磁性材料。剩余的磁性材料形成整个磁性写入磁极，使得不需要沉积另外的磁性层进一步构造写入极。

4. 发明申请

US20130082027A1 METHOD FOR MANUFACTURING A PERPENDICULAR MAGNETIC WRITE HEAD USING NOVEL REACTIVE ION ETCHING CHEMISTRY 审中-公开
标题翻译：使用新型反应离子蚀刻化学品制造一个完整磁性写头的方法
公开(公告)号：US20130082027A1
公开(公告)日：2013-04-04
申请号：US13251058
申请日：2011-09-30
申请人： Guomin Mao , Donald G. Allen , Aron Pentek , Thomas J. A. Roucoux , Yi Zheng
发明人： Guomin Mao , Donald G. Allen , Aron Pentek , Thomas J. A. Roucoux , Yi Zheng
IPC分类号： G11B5/127
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116
摘要： A method for manufacturing a magnetic write head for magnetic data recording. The method includes forming a depositing a magnetic write pole material and forming a mask structure over the write pole material that includes a polymer mask under-layer, a dielectric hard mask formed over the polymer mask under-layer and a photoresist mask formed over the dielectric hard mask. The image of the photoresist mask is transferred onto the underlying dielectric hard mask and then a reactive ion etching is performed to transfer the image of the dielectric hard mask onto the polymer mask under-layer. This reactive ion etching is performed in an atmosphere chemistry that includes both an oxygen containing gas and a nitrogen containing gas.
摘要翻译：一种用于制造用于磁数据记录的磁写头的方法。该方法包括形成磁性写入极材料的沉积，并在包括聚合物掩模底层的写入极材料上形成掩模结构，在聚合物掩模底层上形成的电介质硬掩模和形成在电介质上的光致抗蚀剂掩模硬面膜将光致抗蚀剂掩模的图像转印到下面的电介质硬掩模上，然后进行反应离子蚀刻，以将电介质硬掩模的图像转印到聚合物掩模底层上。该反应离子蚀刻在包含含氧气体和含氮气体的气氛化学中进行。

5. 发明授权

US08547660B2 Magnetic write head manufactured by an enhanced damascene process producing a tapered write pole with a non-magnetic spacer and non-magnetic bump 有权
标题翻译：通过增强的镶嵌工艺制造的磁性写头，其产生具有非磁性间隔物和非磁性凸块的锥形写柱
公开(公告)号：US08547660B2
公开(公告)日：2013-10-01
申请号：US12641251
申请日：2009-12-17
申请人： Donald G. Allen , Amanda Baer , Yingjian Chen , Andrew Chiu , Liubo Hong , Wen-Chien D. Hsiao , Edward H. P. Lee , Fenglin Liu , Aron Pentek , Katalin Pentek , Kyusik Shin , Yi Zheng , Qiping Zhong , Honglin Zhu
发明人： Donald G. Allen , Amanda Baer , Yingjian Chen , Andrew Chiu , Liubo Hong , Wen-Chien D. Hsiao , Edward H. P. Lee , Fenglin Liu , Aron Pentek , Katalin Pentek , Kyusik Shin , Yi Zheng , Qiping Zhong , Honglin Zhu
IPC分类号： G11B5/127
CPC分类号： G11B5/3163 , G11B5/112 , G11B5/1278 , G11B5/3116 , G11B5/314 , G11B5/3143 , G11B5/3146 , G11B5/315 , Y10T428/11 , Y10T428/1171
摘要： A magnetic write head having a tapered trailing edge and having a magnetic layer formed over a trailing edge of the write pole at a location recessed from the ABS, the magnetic layer being separated from the trailing edge of the write pole by a thin non-magnetic layer. The thin non-magnetic layer is preferably sufficiently thin that the magnetic layer can function as a portion of the write pole in a region removed from the ABS. A trailing magnetic shield is formed over the write pole and is separated from the write pole by a non-magnetic trailing gap layer. A non-magnetic spacer layer can be formed over the magnetic layer to provide additional separation between the magnetic layer and the trailing magnetic shield.
摘要翻译：一种具有锥形后缘并具有磁性层的磁性写头，该磁性层形成在从ABS的凹陷处的写入极的后缘上，该磁性层通过薄的非磁性的方式与写入极的后缘分离层。薄的非磁性层优选地足够薄，使得磁性层可以在从ABS去除的区域中用作写入极的一部分。尾磁屏蔽形成在写极上，并且通过非磁性拖尾间隙层与写极分离。可以在磁性层之上形成非磁性间隔层，以在磁性层和尾部磁屏蔽之间提供额外的间隔。

6. 发明申请

US20110151279A1 MAGNETIC WRITE HEAD MANUFACTURED BY AN ENHANCED DAMASCENE PROCESS PRODUCING A TAPERED WRITE POLE WITH A NON-MAGNETIC SPACER AND NON-MAGNETIC BUMP 有权
标题翻译：通过增强的大面积工艺制造的磁性写头，用非磁性间隔器和非磁性块形成带状写入点
公开(公告)号：US20110151279A1
公开(公告)日：2011-06-23
申请号：US12641251
申请日：2009-12-17
申请人： Donald G. Allen , Amanda Baer , Yingjian Chen , Andrew Chiu , Liubo Hong , Wen-Chien D. Hsiao , Edward H.P. Lee , Fenglin Liu , Aron Pentek , Katalin Pentek , Kyusik Shin , Yi Zheng , Qiping Zhong , Honglin Zhu
发明人： Donald G. Allen , Amanda Baer , Yingjian Chen , Andrew Chiu , Liubo Hong , Wen-Chien D. Hsiao , Edward H.P. Lee , Fenglin Liu , Aron Pentek , Katalin Pentek , Kyusik Shin , Yi Zheng , Qiping Zhong , Honglin Zhu
IPC分类号： G11B5/33
CPC分类号： G11B5/3163 , G11B5/112 , G11B5/1278 , G11B5/3116 , G11B5/314 , G11B5/3143 , G11B5/3146 , G11B5/315 , Y10T428/11 , Y10T428/1171
摘要： A magnetic write head having a tapered trailing edge and having a magnetic layer formed over a trailing edge of the write pole at a location recessed from the ABS, the magnetic layer being separated from the trailing edge of the write pole by a thin non-magnetic layer. The thin non-magnetic layer is preferably sufficiently thin that the magnetic layer can function as a portion of the write pole in a region removed from the ABS. A trailing magnetic shield is formed over the write pole and is separated from the write pole by a non-magnetic trailing gap layer. A non-magnetic spacer layer can be formed over the magnetic layer to provide additional separation between the magnetic layer and the trailing magnetic shield.
摘要翻译：一种具有锥形后缘并具有磁性层的磁性写头，该磁性层形成在从ABS的凹陷处的写入极的后缘上，该磁性层通过薄的非磁性的方式与写入极的后缘分离层。薄的非磁性层优选地足够薄，使得磁性层可以在从ABS去除的区域中用作写入极的一部分。尾磁屏蔽形成在写极上，并且通过非磁性拖尾间隙层与写极分离。可以在磁性层之上形成非磁性间隔层，以在磁性层和尾部磁屏蔽之间提供额外的间隔。

7. 发明授权

US08318031B2 Method for manufacturing a perpendicular magnetic write head having a tapered write pole 有权
标题翻译：一种具有锥形写入极的垂直磁性写入头的制造方法
公开(公告)号：US08318031B2
公开(公告)日：2012-11-27
申请号：US12748182
申请日：2010-03-26
申请人： Aron Pentek , Thomas J. A. Roucoux , Yi Zheng
发明人： Aron Pentek , Thomas J. A. Roucoux , Yi Zheng
IPC分类号： B44C1/22
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116 , G11B5/3146 , G11B5/315
摘要： A method for manufacturing a magnetic write head having a write pole with a tapered leading edge and a tapered trailing edge. The method includes forming a non-magnetic bump player over a surface, forming a mask over the non-magnetic bump layer and performing a first ion milling to form a tapered back edge on the non-magnetic bump layer. A magnetic write pole material is then deposited over the surface and over the non-magnetic bump layer. Then a non-magnetic step structure is formed over the magnetic write pole material and an ion milling is performed to form a taper on the upper surface of the write pole. The write pole lateral dimensions can then be defined, and a non-magnetic bump formed over the tapered portion of the upper surface of the write pole. Another ion milling can then be performed to extend the taper of the surface of the write pole.
摘要翻译：一种用于制造具有带有锥形前缘和锥形后缘的写极的磁写头的方法。所述方法包括在表面上形成非磁性碰撞播放器，在非磁性凸块层上形成掩模，并执行第一离子铣削以在非磁性凸块层上形成锥形后缘。然后将磁性写入磁极材料沉积在表面上并在非磁性凸起层上方。然后在磁性写入磁极材料上形成非磁性阶梯结构，并且执行离子铣削以在写入极的上表面上形成锥形。然后可以限定写入极横向尺寸，并且在写入极的上表面的锥形部分上形成非磁性凸块。然后可以执行另一种离子铣削来延伸写极的表面的锥度。

8. 发明授权

US08347489B2 Method for manufacturing a perpendicular magnetic write head having a leading edge tapered write pole, self aligned side shield and independent trailing shield 有权
标题翻译：用于制造具有前缘锥形写极，自对准侧屏蔽和独立后屏蔽的垂直磁写头的方法
公开(公告)号：US08347489B2
公开(公告)日：2013-01-08
申请号：US12874116
申请日：2010-09-01
申请人： Liubo Hong , Aron Pentek , Yi Zheng , Honglin Zhu
发明人： Liubo Hong , Aron Pentek , Yi Zheng , Honglin Zhu
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/23 , G11B5/3116 , G11B5/315 , Y10T29/49041 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method for manufacturing a magnetic write head having a tapered write pole as well as a leading edge taper, and independent trailing and side magnetic shields. The method allows the write pole to be constructed by a dry process wherein the write pole material is either deposited by a process such as sputter deposition or electrically plated and the write pole shape is defined by masking and ion milling. The write pole has a stepped feature that can either be used to provide increased magnetic spacing between the trailing shield and the write pole at a location slightly recessed from the ABS or can be magnetic material that increases the effective thickness of the write pole at a location slightly recessed from the ABS. A bump structure can be further built over that stepped feature to enhance field gradient as well as reduce trailing shield saturation.
摘要翻译：一种用于制造具有锥形写柱以及前缘锥形的磁写头的方法，以及独立的后侧和侧面磁屏蔽。该方法允许写极通过干法进行构建，其中写极材料通过诸如溅射沉积或电镀的工艺沉积，并且写极形状通过掩模和离子铣削定义。写极具有阶梯特征，其可以用于在稍微从ABS处凹陷的位置处在后屏蔽和写极之间提供增加的磁间隔，或者可以是磁性材料，其增加写极的位置处的有效厚度从ABS略微凹进。可以在该阶梯特征上进一步构建凸块结构，以增强磁场梯度以及减少后屏蔽饱和度。

9. 发明授权

US08451560B2 Magnetic head with flared write pole with multiple non-magnetic layers thereover 有权
标题翻译：磁头带有多个非磁性层的扩口写磁极
公开(公告)号：US08451560B2
公开(公告)日：2013-05-28
申请号：US12634480
申请日：2009-12-09
申请人： Liubo Hong , Aron Pentek , Yi Zheng
发明人： Liubo Hong , Aron Pentek , Yi Zheng
IPC分类号： G11B5/11 , G11B5/187 , G11B5/23
CPC分类号： G11B5/1278 , G11B5/23 , G11B5/3116 , G11B5/315 , G11B5/3163 , Y10T428/1171
摘要： Methods for fabrication of tapered magnetic poles with a non-magnetic front bump layer. A magnetic pole may have a tapered surface at or near an air bearing surface (ABS), wherein a thickness of the write pole increases in a direction away from the ABS. A non-magnetic front bump layer may be formed on the tapered surface of the magnetic pole and away from the ABS. The front bump layer may increase the separation distance between a shield layer and the magnetic pole near the tapered surface, thereby improving the performance of the write head.
摘要翻译：用非磁性前凸块层制造锥形磁极的方法。磁极可以在空气轴承表面（ABS）处或附近具有锥形表面，其中写入极的厚度在远离ABS的方向上增加。可以在磁极的锥形表面上远离ABS形成非磁性前凸块层。前凸块层可以增加在锥形表面附近的屏蔽层和磁极之间的间隔距离，从而提高写入头的性能。

10. 发明申请

US20110132869A1 MAGNETIC WRITE HEAD MANUFACTURED BY DAMASCENE PROCESS PRODUCING A TAPERED WRITE POLE WITH A NON-MAGNETIC STEP AND NON-MAGNETIC BUMP 有权
标题翻译：由具有非磁性步进和非磁性制动的带状刀片制造的大型制造工艺制造的磁性写头
公开(公告)号：US20110132869A1
公开(公告)日：2011-06-09
申请号：US12634490
申请日：2009-12-09
申请人： Liubo Hong , Aron Pentek , Yi Zheng
发明人： Liubo Hong , Aron Pentek , Yi Zheng
IPC分类号： G11B5/31
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116 , G11B5/3146 , G11B5/315 , Y10T29/49041 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method for manufacturing a magnetic write head having a non-magnetic step layer, non-magnetic bump at the front of the non-magnetic step layer and a write pole with a tapered trailing edge. The tapered portion of the trailing edge of the write pole is formed by a two step process that allows the write pole taper to be formed with greater accuracy and repeatability than would be possible using a single step taper process. An alternative method is also described on how to make a non-magnetic bump structure with adjustable bump throat height prior to Damascene side shield gap formation in a Damascene wrap around shield head.
摘要翻译：一种用于制造具有非磁性步骤层，非磁性阶梯层前面的非磁性凸起和具有锥形后缘的写入磁极的磁性写入头的方法。写柱的后缘的锥形部分通过两步法形成，其允许以比使用单步骤锥形工艺可能的更高的精度和重复性形成写柱锥度。还描述了一种替代方法，该方法还描述了如何制造具有可调凸起喉部高度的非磁性凸块结构，然后在镶嵌在屏蔽头周围的大马士革侧面屏蔽间隙形成。

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