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1. 发明申请

US20110232843A1 SUBSTRATE PROCESSING APPARATUS WITH COMPOSITE SEAL 有权
标题翻译：具有复合密封的基板加工装置
公开(公告)号：US20110232843A1
公开(公告)日：2011-09-29
申请号：US12731223
申请日：2010-03-25
申请人： Don Bowman , Stephen Coppola , Kenneth W. Cornett , Dan Funke , Julian Kamibayashiyama , Jeff Navarro , Jeremy M. Payne , Donald J. Peterson , Douglas C. Schenk
发明人： Don Bowman , Stephen Coppola , Kenneth W. Cornett , Dan Funke , Julian Kamibayashiyama , Jeff Navarro , Jeremy M. Payne , Donald J. Peterson , Douglas C. Schenk
IPC分类号： F16J15/10 , H01L21/465
CPC分类号： H01L21/67126 , F16J15/062 , F16J15/104 , F16J15/166
摘要： A seal for sealing an interface between a container and a lid of a process chamber. The seal comprises a first seal element and a second seal element that are arranged to seal the interface in series, with the second seal element being situated to encounter processing activity upstream of the fist seal element. The first seal element has a deflectable portion and a protrusion extending radially from the deflectable portion. The second seal element has a radially extending recess in which the protrusion of the first seal element is received. The protrusion and recess interlock to restrict separation and/or rotation of the first and second seal elements. Inclined surfaces of the first seal element interact with the second seal element to apply axial sealing forces to sealing surfaces of the second seal member.
摘要翻译：用于密封容器和处理室的盖子之间的界面的密封件。所述密封件包括第一密封元件和第二密封元件，所述第一密封元件和第二密封元件被布置成串联地密封所述界面，所述第二密封元件位于所述第一密封元件和所述第二密封元件之间，以遇到第一密封元件具有可偏转部分和从可偏转部分径向延伸的突出部。第二密封元件具有径向延伸的凹部，第一密封元件的突起被容纳在其中。突起和凹槽互锁以限制第一和第二密封元件的分离和/或旋转。第一密封元件的倾斜表面与第二密封元件相互作用以向第二密封构件的密封表面施加轴向密封力。

2. 发明授权

US08623145B2 Substrate processing apparatus with composite seal 有权
标题翻译：带复合密封的基板加工设备
公开(公告)号：US08623145B2
公开(公告)日：2014-01-07
申请号：US12731223
申请日：2010-03-25
申请人： Don Bowman , Stephen Coppola , Kenneth W. Cornett , Dan Funke , Julian Kamibayashiyama , Jeff Navarro , Jeremy M. Payne , Donald J. Peterson , Douglas C. Schenk
发明人： Don Bowman , Stephen Coppola , Kenneth W. Cornett , Dan Funke , Julian Kamibayashiyama , Jeff Navarro , Jeremy M. Payne , Donald J. Peterson , Douglas C. Schenk
IPC分类号： C23C16/00 , F16J15/14 , F16J15/00 , F16J15/02 , F16J15/06 , F16J15/10
CPC分类号： H01L21/67126 , F16J15/062 , F16J15/104 , F16J15/166
摘要： A seal for sealing an interface between a container and a lid of a process chamber. The seal comprises a first seal element and a second seal element that are arranged to seal the interface in series, with the second seal element being situated to encounter processing activity upstream of the fist seal element. The first seal element has a deflectable portion and a protrusion extending radially from the deflectable portion. The second seal element has a radially extending recess in which the protrusion of the first seal element is received. The protrusion and recess interlock to restrict separation and/or rotation of the first and second seal elements. Inclined surfaces of the first seal element interact with the second seal element to apply axial sealing forces to sealing surfaces of the second seal member.
摘要翻译：用于密封容器和处理室的盖子之间的界面的密封件。所述密封件包括第一密封元件和第二密封元件，所述第一密封元件和第二密封元件被布置成串联地密封所述界面，所述第二密封元件位于所述第一密封元件和所述第二密封元件之间，以遇到第一密封元件具有可偏转部分和从可偏转部分径向延伸的突出部。第二密封元件具有径向延伸的凹部，第一密封元件的突起被容纳在其中。突起和凹槽互锁以限制第一和第二密封元件的分离和/或旋转。第一密封元件的倾斜表面与第二密封元件相互作用以向第二密封构件的密封表面施加轴向密封力。

3. 发明申请

US20060170774A1 Method and apparatus for calibrating and correcting tone scale differences between two or more outputs of a CCD 审中-公开
标题翻译：用于校准和校正CCD的两个或更多个输出之间的色标差异的方法和装置
公开(公告)号：US20060170774A1
公开(公告)日：2006-08-03
申请号：US11048469
申请日：2005-01-31
申请人： Stephen Coppola , John Compton
发明人： Stephen Coppola , John Compton
IPC分类号： H04N17/02 , H04N17/00
CPC分类号： H04N17/002
摘要： A method for calibrating a camera contemporaneously with image capture where the camera includes an image sensor with two or more output channels, the method includes the steps of providing two or more output channels that receive data from the image sensor; wherein the two or more output channels are respectively connected to two or more portions of the image sensor so that a boundary exists between the portions in a general direction; providing an illumination source that permits illumination of the image sensor substantially parallel to the general direction of the boundary so that creation of a gradient image is permitted in the image sensor; providing a measuring mechanism for permitting measurement of pixel values of the image sensor at a plurality of locations; providing a processor for permitting determination of a mapping function from the plurality of measured values; permitting mapping of pixels in each portion of the image sensor so that one or more pixel values are mapped to different pixel values based on the mapping function; and permitting applying the mapping function to an image captured in close temporal proximity to mapping the one or more pixels.
摘要翻译：一种用于在照相机包括具有两个或更多个输出通道的图像传感器的情况下与摄像机同时校准相机的方法，所述方法包括提供从图像传感器接收数据的两个或更多个输出通道的步骤; 其中两个或更多个输出通道分别连接到图像传感器的两个或更多个部分，使得在大体方向上的部分之间存在边界; 提供照明源，其允许图像传感器基本上平行于边界的大体方向照明，从而允许在图像传感器中创建梯度图像; 提供用于允许在多个位置处测量图像传感器的像素值的测量机构; 提供处理器，用于允许从多个测量值确定映射函数; 允许图像传感器的每个部分中的像素的映射，使得基于映射函数将一个或多个像素值映射到不同的像素值; 并且允许将映射函数应用于紧密临时捕获的图像以映射所述一个或多个像素。

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