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1. 发明申请

US20110232843A1 SUBSTRATE PROCESSING APPARATUS WITH COMPOSITE SEAL 有权
标题翻译：具有复合密封的基板加工装置
公开(公告)号：US20110232843A1
公开(公告)日：2011-09-29
申请号：US12731223
申请日：2010-03-25
申请人： Don Bowman , Stephen Coppola , Kenneth W. Cornett , Dan Funke , Julian Kamibayashiyama , Jeff Navarro , Jeremy M. Payne , Donald J. Peterson , Douglas C. Schenk
发明人： Don Bowman , Stephen Coppola , Kenneth W. Cornett , Dan Funke , Julian Kamibayashiyama , Jeff Navarro , Jeremy M. Payne , Donald J. Peterson , Douglas C. Schenk
IPC分类号： F16J15/10 , H01L21/465
CPC分类号： H01L21/67126 , F16J15/062 , F16J15/104 , F16J15/166
摘要： A seal for sealing an interface between a container and a lid of a process chamber. The seal comprises a first seal element and a second seal element that are arranged to seal the interface in series, with the second seal element being situated to encounter processing activity upstream of the fist seal element. The first seal element has a deflectable portion and a protrusion extending radially from the deflectable portion. The second seal element has a radially extending recess in which the protrusion of the first seal element is received. The protrusion and recess interlock to restrict separation and/or rotation of the first and second seal elements. Inclined surfaces of the first seal element interact with the second seal element to apply axial sealing forces to sealing surfaces of the second seal member.
摘要翻译：用于密封容器和处理室的盖子之间的界面的密封件。所述密封件包括第一密封元件和第二密封元件，所述第一密封元件和第二密封元件被布置成串联地密封所述界面，所述第二密封元件位于所述第一密封元件和所述第二密封元件之间，以遇到第一密封元件具有可偏转部分和从可偏转部分径向延伸的突出部。第二密封元件具有径向延伸的凹部，第一密封元件的突起被容纳在其中。突起和凹槽互锁以限制第一和第二密封元件的分离和/或旋转。第一密封元件的倾斜表面与第二密封元件相互作用以向第二密封构件的密封表面施加轴向密封力。

2. 发明授权

US08623145B2 Substrate processing apparatus with composite seal 有权
标题翻译：带复合密封的基板加工设备
公开(公告)号：US08623145B2
公开(公告)日：2014-01-07
申请号：US12731223
申请日：2010-03-25
申请人： Don Bowman , Stephen Coppola , Kenneth W. Cornett , Dan Funke , Julian Kamibayashiyama , Jeff Navarro , Jeremy M. Payne , Donald J. Peterson , Douglas C. Schenk
发明人： Don Bowman , Stephen Coppola , Kenneth W. Cornett , Dan Funke , Julian Kamibayashiyama , Jeff Navarro , Jeremy M. Payne , Donald J. Peterson , Douglas C. Schenk
IPC分类号： C23C16/00 , F16J15/14 , F16J15/00 , F16J15/02 , F16J15/06 , F16J15/10
CPC分类号： H01L21/67126 , F16J15/062 , F16J15/104 , F16J15/166
摘要： A seal for sealing an interface between a container and a lid of a process chamber. The seal comprises a first seal element and a second seal element that are arranged to seal the interface in series, with the second seal element being situated to encounter processing activity upstream of the fist seal element. The first seal element has a deflectable portion and a protrusion extending radially from the deflectable portion. The second seal element has a radially extending recess in which the protrusion of the first seal element is received. The protrusion and recess interlock to restrict separation and/or rotation of the first and second seal elements. Inclined surfaces of the first seal element interact with the second seal element to apply axial sealing forces to sealing surfaces of the second seal member.
摘要翻译：用于密封容器和处理室的盖子之间的界面的密封件。所述密封件包括第一密封元件和第二密封元件，所述第一密封元件和第二密封元件被布置成串联地密封所述界面，所述第二密封元件位于所述第一密封元件和所述第二密封元件之间，以遇到第一密封元件具有可偏转部分和从可偏转部分径向延伸的突出部。第二密封元件具有径向延伸的凹部，第一密封元件的突起被容纳在其中。突起和凹槽互锁以限制第一和第二密封元件的分离和/或旋转。第一密封元件的倾斜表面与第二密封元件相互作用以向第二密封构件的密封表面施加轴向密封力。

3. 发明授权

US09383036B2 Bonded slit valve door seal with thin non-metallic film gap control bumper 有权
标题翻译：粘合狭缝阀门密封与薄的非金属膜间隙控制保险杠
公开(公告)号：US09383036B2
公开(公告)日：2016-07-05
申请号：US12189251
申请日：2008-08-11
申请人： Julian Kamibayashiyama
发明人： Julian Kamibayashiyama
IPC分类号： F16K25/00 , F16K31/44 , F16K51/02 , F16K3/02 , F16K3/16
CPC分类号： F16K51/02 , F16K3/0227 , F16K3/16
摘要： The present invention provides a thin film spacer for maintaining a gap between a slit valve door and a sealing surface of a slit valve, such as a metallic insert. The film spacer can extend the life of a seal by limiting the line of sight exposure of the seal to corrosive gases within a wafer processing chamber, for example, and by controlling the compression percentage of the seal. The spacer may be located on an outer ambient side of the slit valve away from any corrosive gasses that may exist in the chamber.
摘要翻译：本发明提供一种薄膜间隔件，用于保持狭缝阀门与诸如金属插入物的狭缝阀的密封表面之间的间隙。通过将密封件的视线暴露限制在晶片处理室内的腐蚀性气体中，并且通过控制密封件的压缩百分比，膜间隔件可延长密封的寿命。间隔件可以位于狭缝阀的外部环境侧，远离可能存在于腔室中的任何腐蚀性气体。

4. 发明申请

US20090045371A1 BONDED SLIT VALVE DOOR SEAL WITH THIN NON-METALLIC FILM GAP CONTROL BUMPER 有权
标题翻译：与非金属薄膜接缝控制保险丝的接合切割阀门密封
公开(公告)号：US20090045371A1
公开(公告)日：2009-02-19
申请号：US12189251
申请日：2008-08-11
申请人： Julian Kamibayashiyama
发明人： Julian Kamibayashiyama
IPC分类号： F16K3/00
CPC分类号： F16K51/02 , F16K3/0227 , F16K3/16
摘要： The present invention provides a thin film spacer for maintaining a gap between a slit valve door and a sealing surface of a slit valve, such as a metallic insert. The film spacer can extend the life of a seal by limiting the line of sight exposure of the seal to corrosive gases within a wafer processing chamber, for example, and by controlling the compression percentage of the seal. The spacer may be located on an outer ambient side of the slit valve away from any corrosive gasses that may exist in the chamber.
摘要翻译：本发明提供一种薄膜间隔件，用于保持狭缝阀门与诸如金属插入物的狭缝阀的密封表面之间的间隙。通过将密封件的视线暴露限制在晶片处理室内的腐蚀性气体中，并且通过控制密封件的压缩百分比，膜间隔件可延长密封的寿命。间隔件可以位于狭缝阀的外部环境侧，远离可能存在于腔室中的任何腐蚀性气体。

5. 发明申请

US20060038357A1 Wedging retainer gasket construction 审中-公开
标题翻译：楔形保持垫圈结构
公开(公告)号：US20060038357A1
公开(公告)日：2006-02-23
申请号：US11102262
申请日：2005-04-08
申请人： Julian Kamibayashiyama
发明人： Julian Kamibayashiyama
IPC分类号： F02F11/00
CPC分类号： F16J15/127
摘要： Sealing gasket construction for providing a fluid seal intermediate a pair of opposed, mating parts or structures, one of the parts having an edge and a void space defined along the edge. The gasket includes a retainer and a resilient seal element having a wedging portion extending radially beyond one of the retainer inner or outer perimeter. The wedging portion is configured in a free state to extend into the area of the void space and to be wedged against the other one of the interfacing parts, and thereby made to occupy at least a portion of the void space.
摘要翻译：用于在一对相对的配合部件或结构之间提供流体密封件的密封垫圈结构，其中一个部件具有沿着边缘限定的边缘和空隙空间。垫圈包括保持器和弹性密封元件，弹性密封元件具有径向延伸超过保持器内部或外周边之一的楔形部分。楔形部分构造成自由状态以延伸到空隙空间的区域中，并且楔入抵接另一个接口部分，从而使其占据空隙空间的至少一部分。

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