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    • 5. 发明申请
    • Methods and systems for manufacturing polycrystalline silicon and silicon-germanium solar cells
    • 制造多晶硅和硅锗太阳能电池的方法和系统
    • US20100178435A1
    • 2010-07-15
    • US12319748
    • 2009-01-13
    • John Lawrence ErvinSanjai Sinha
    • John Lawrence ErvinSanjai Sinha
    • H05H1/24C23C16/54
    • C23C4/04C23C4/18C23C16/24C23C16/513C23C16/56H05H1/30H05H1/42
    • The present invention relates to a novel, unconventional methods and systems for the fabrication of silicon on silicon-germanium photovoltaic cell applications. In some embodiments high purity gaseous and/or liquid intermediate compounds of silicon (or silicon germanium) are converted directly to polycrystalline films by a thermal plasma chemical vapor deposition process or by a thermal plasma spraying technique. The intermediate compounds of silicon (or silicon germanium) are injected into the thermal plasma source where temperatures range from 2,000 K to 20,000 K. The compounds dissociate and silicon (or silicon germanium) is deposited onto substrates. Polycrystalline films having densities approaching the bulk value are obtained on cooling. PN junction photovoltaic cells can be directly prepared by spraying, or doped films after heat treatment are subsequently transformed to viable photovoltaic cells having high efficiency, low cost at a high throughput. In some embodiments a roll-to-roll or a cluster-tool type automated, continuous system is provided.
    • 本发明涉及用于在硅锗光伏电池应用中制造硅的新型非常规方法和系统。 在一些实施方案中,硅(或硅锗)的高纯度气态和/或液体中间体化合物通过热等离子体化学气相沉积工艺或通过热等离子喷涂技术直接转化为多晶膜。 将硅(或硅锗)的中间体化合物注入到温度范围为2,000K至20,000K的热等离子体源中。化合物离解并将硅(或硅锗)沉积到基底上。 在冷却时获得具有接近体积值的密度的多晶膜。 PN结光伏电池可以通过喷涂直接制备,或者热处理后的掺杂膜随后转化成具有高效率,低成本的高生产率的可行的光伏电池。 在一些实施例中,提供了卷对卷或群集工具型自动连续系统。
    • 6. 发明申请
    • Methods and systems for manufacturing polycrystalline silicon and silicon-germanium solar cells
    • 制造多晶硅和硅锗太阳能电池的方法和系统
    • US20080023070A1
    • 2008-01-31
    • US11881501
    • 2007-07-26
    • Sanjai Sinha
    • Sanjai Sinha
    • H01L31/18H01L31/00
    • H01L31/1812H01L31/182Y02E10/546Y02P70/521
    • The present invention relates to a novel, unconventional methods and systems for the fabrication of silicon or silicon-germanium photovoltaic cell applications. In some embodiments high purity gaseous and/or liquid intermediate compounds of silicon (or silicon germanium) are converted directly to polycrystalline films by a thermal plasma chemical vapor deposition process or by a thermal plasma spraying technique. The intermediate compounds of silicon (or silicon germanium) are injected into the thermal plasma source where temperatures range from 2000 K to about 20,000 K. The compounds dissociate and silicon (or silicon germanium) is deposited onto substrates. Polycrystalline films having densities approaching the bulk value are obtained on cooling. PN junction photovoltaic cells can be directly prepared by spraying, or doped films after heat treatment are subsequently transformed to viable photovoltaic cells having high efficiency, low cost at a high throughput. In some embodiments a roll-to-roll or a cluster-tool type automated, continuous system is provided.
    • 本发明涉及用于制造硅或硅锗光伏电池应用的新型非常规方法和系统。 在一些实施方案中,硅(或硅锗)的高纯度气态和/或液体中间体化合物通过热等离子体化学气相沉积工艺或通过热等离子喷涂技术直接转化为多晶膜。 将硅(或硅锗)的中间体化合物注入到温度范围为2000K至约20,000K的热等离子体源中。化合物离解并将硅(或硅锗)沉积到基底上。 在冷却时获得具有接近体积值的密度的多晶膜。 PN结光伏电池可以通过喷涂直接制备,或者热处理后的掺杂膜随后转化成具有高效率,低成本的高生产率的可行的光伏电池。 在一些实施例中,提供了卷对卷或群集工具型自动连续系统。