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1. 发明授权

US06509577B1 Systems and methods for exposing substrate periphery 有权
标题翻译：曝光基板周边的系统和方法
公开(公告)号：US06509577B1
公开(公告)日：2003-01-21
申请号：US09709975
申请日：2000-11-10
申请人： Dikran Babikian , Larry Stark , Bryan Wade
发明人： Dikran Babikian , Larry Stark , Bryan Wade
IPC分类号： G01V800
CPC分类号： G03F7/2028
摘要： The present invention describes systems and methods for exposure and removal of material on the periphery of a substrate. The system includes an emitting radiation or exposure source, preferably a guide such as an optical assembly and an emitter, an edge detector, a transport, which comprise rotating and radial mechanisms, and a substrate support. The optical assembly directs radiation from the exposure source to the wafer or emitter. The transport supports the emitter and the edge detector about the substrate, and a tracking exposure head preferably supports the emitter and edge detector. As the emitter moves along the periphery of the substrate, the edge detector sends signals to control systems, which process signals, and command the transport to adjust the position of the emitter when necessary to expose the periphery of the substrate. In another embodiment, the system provides an exposure source chamber, a process chamber, and optionally a control chamber to isolate particle and thermal problems. In another embodiment, the wafer is in a rotating drum, which supports a radial mechanism, supporting a tracking exposure head holding the emitter and edge detector. The drum and tracking exposure head have guidance components and stopping mechanisms.
摘要翻译：本发明描述了用于曝光和去除衬底周边上的材料的系统和方法。该系统包括发射辐射或曝光源，优选地诸如光学组件和发射器的引导件，边缘检测器，包括旋转和径向机构的传送器以及衬底支撑件。光学组件将来自曝光源的辐射引导到晶片或发射器。传输器围绕衬底支撑发射器和边缘检测器，并且跟踪曝光头优选地支撑发射器和边缘检测器。当发射体沿着衬底的周边移动时，边缘检测器向控制系统发送信号，控制系统处理信号，并且在必要时命令传输器调节发射器的位置以暴露衬底的周边。在另一个实施例中，系统提供曝光源室，处理室和任选的控制室，以隔离颗粒和热问题。在另一个实施例中，晶片处于支撑径向机构的旋转滚筒中，支撑着保持发射器和边缘检测器的跟踪曝光头。滚筒和跟踪曝光头具有引导部件和停止机构。

2. 发明申请

US20050279490A1 Systems and methods for controlling local environment 有权
公开(公告)号：US20050279490A1
公开(公告)日：2005-12-22
申请号：US11211110
申请日：2005-08-23
申请人： Dikran Babikian , Bryan Wade
发明人： Dikran Babikian , Bryan Wade
IPC分类号： F24F5/00 , F28D3/00 , F24F3/14 , F24F6/00 , F25B49/00 , F25D17/04
CPC分类号： F24F5/0035 , F24F2006/006
摘要： The present invention provides systems and methods of controlling local environment. In one embodiment, incoming air enters a contactor such the Direct Contact Cooler-Condenser (DCCC) where the air contacts water distributed on the contact media. After passing through the DCCC, the air is saturated at a temperature equal or close to that of the water. Depending on the state of the incoming air, in the DCCC will be humidified or dehumidified to yield saturated air at the desired humidity ratio. In one embodiment, a blower draws air through the DCCC and blows into the heater. The heater heats the air to the desired dry-bulb temperature. Before exiting, the air may pass through a filter.

3. 发明授权

US06952622B2 Robot pre-positioning in a wafer processing system 有权
标题翻译：机器人预定位于晶圆处理系统中
公开(公告)号：US06952622B2
公开(公告)日：2005-10-04
申请号：US10685683
申请日：2003-10-14
申请人： Dikran Babikian , Hilario Oh
发明人： Dikran Babikian , Hilario Oh
IPC分类号： G06F19/00 , H01H43/00
CPC分类号： G05B19/41865 , C01P2004/84 , G05B2219/32247 , G05B2219/32275 , G05B2219/45031 , H01L21/67276 , Y02P90/20 , Y10S438/907 , Y10S438/908
摘要： A wafer cluster tool is described which operates in a regular, periodic fashion. Embodiments of the invention have a periodicity of one sending period. The invention enables the determination of pick-up times for process chambers in the cluster tool, and embodiments of the invention allow the creation and maintenance of an updated timetable. The timetable indicates times when each of the process chambers is to be serviced. These values are updated as the process chambers receive new wafers. Robots in the cluster tool may pre-position themselves in front of modules, or process chambers, to be served. Robot pre-positioning eliminates the wait time of individual modules beyond queue times which have been pre-determined for the modules. This renders the path of the individual robots pre-deterministic, and enables the cluster tool to utilize single gripper robots.
摘要翻译：描述了以规则的周期性方式工作的晶片簇工具。本发明的实施例具有一个发送周期的周期。本发明能够确定群集工具中的处理室的拾取时间，并且本发明的实施例允许创建和维护更新的时间表。时间表指示要处理每个处理室的时间。这些值随着处理室接收新晶片而更新。集群工具中的机器人可以将自己预先置于要供应的模块或处理室之前。机器人预定位消除了已经为模块预先确定的队列时间以外的各个模块的等待时间。这使得各个机器人预先确定性的路径，并使群集工具能够利用单个抓爪机器人。

4. 发明申请

US20110114661A1 PAPER TOWEL CABINET WITH PAPER TOWEL MODULE 有权
标题翻译：纸卷纸箱与纸巾模块
公开(公告)号：US20110114661A1
公开(公告)日：2011-05-19
申请号：US12618653
申请日：2009-11-13
申请人： Dikran Babikian
发明人： Dikran Babikian
IPC分类号： A47K10/42 , A47K10/20
CPC分类号： A47K10/42
摘要： A paper towel cabinet includes a first side wall and a second side wall, a pivotally mounted front wall defining a door, a back wall extending between the side walls, and a paper towel tray having an opening to provide access to paper towels. The paper towel cabinet also includes a module assembly comprising a first module having a front surface extending transversely relative to the first side wall and toward the second side wall. When the door is in an open position, the front surface prevents paper towels leaning toward the door from falling out of the cabinet. The cabinet also includes a bar mounted proximate to the opening and having a length extending between the side walls. The bar is positioned between a stack of paper towels and the opening when the stack of paper towels is placed on the paper towel tray.
摘要翻译：纸巾柜包括第一侧壁和第二侧壁，限定门的可枢转安装的前壁，在侧壁之间延伸的后壁和具有开口以提供进入纸巾的纸巾托盘。纸巾柜还包括模块组件，其包括第一模块，第一模块具有相对于第一侧壁横向延伸并朝向第二侧壁的前表面。当门处于打开位置时，前表面防止靠在门上的纸巾从机柜中脱落。机柜还包括靠近开口安装的杆，并且具有在侧壁之间延伸的长度。当将一叠纸巾放置在纸巾托盘上时，该条被定位在一叠纸巾和开口之间。

5. 发明申请

US20110000760A1 VENDING APPARATUS AND METHOD 有权
标题翻译：自动装置和方法
公开(公告)号：US20110000760A1
公开(公告)日：2011-01-06
申请号：US12829366
申请日：2010-07-01
申请人： Nancy LaCroix-Toyne , Raffi Mekhitarian , Dikran Babikian , Jacobus Marcus Berkhout , Robert Riccomini , William Conway , Peter Hues
发明人： Nancy LaCroix-Toyne , Raffi Mekhitarian , Dikran Babikian , Jacobus Marcus Berkhout , Robert Riccomini , William Conway , Peter Hues
IPC分类号： G07F9/10 , B65D83/00
CPC分类号： G07F11/24 , G07F5/00 , G07F5/02 , G07F5/04 , G07F5/06 , G07F5/08 , G07F5/10 , G07F5/12 , G07F5/14 , G07F5/16 , G07F5/18 , G07F5/20 , G07F5/22 , G07F11/00
摘要： A vending apparatus and method of vending a product. Embodiments of a vending apparatus include a dispense mechanism configured to dispense a product, the dispense mechanism including a chamber that is rotatable relative to an opening of the dispense mechanism for aligning the product with the opening and dispensing the product therethrough. Further embodiments of a vending apparatus include a coin mechanism for receiving at least one coin before the vending apparatus dispenses a product, the coin mechanism including a delay mechanism configured to slow movement of an actuating device for avoiding jamming of the at least one coin in the coin mechanism.
摘要翻译：一种自动售货机和售卖产品的方法。自动售货装置的实施例包括配置成分配产品的分配机构，分配机构包括可相对于分配机构的开口旋转的室，用于使产品与开口对准并通过其分配产品。自动售货设备的其它实施例包括用于在自动售货设备分配产品之前接收至少一个硬币的硬币机构，所述硬币机构包括延迟机构，所述延迟机构被配置为减慢致动装置的运动，以避免所述至少一个硬币在硬币机制

6. 外观设计

USD605886S1 Baby changing station bed 有权
公开(公告)号：USD605886S1
公开(公告)日：2009-12-15
申请号：US29340598
申请日：2009-07-21
申请人： Brendan Cherry , Dikran Babikian , Dan Harden , Robert Strickler
设计人： Brendan Cherry , Dikran Babikian , Dan Harden , Robert Strickler

7. 发明申请

US20090038079A1 Baby changing station 有权
标题翻译：婴儿换尿布
公开(公告)号：US20090038079A1
公开(公告)日：2009-02-12
申请号：US12221918
申请日：2008-08-06
申请人： Dikran Babikian , Branko Bem
发明人： Dikran Babikian , Branko Bem
IPC分类号： A47D5/00 , A47C16/00
CPC分类号： A47D5/006 , A47D5/003
摘要： A baby supporting device is provided which includes a frame. The frame includes a first portion for mounting onto a wall and a second portion pivotally coupled to the first portion and rotatable between a first position and a second position. A first stop member extends from the first portion, and a second stop member extends from the second portion, such that when the second stop member engages the first stop member it stops the second portion at the second position. A first surface covers at least a portion of the first portion, and a second surface covers at least a portion of the second portion.
摘要翻译：提供了一种婴儿支撑装置，其包括框架。框架包括用于安装到壁上的第一部分和可枢转地联接到第一部分并且可在第一位置和第二位置之间旋转的第二部分。第一止挡构件从第一部分延伸，并且第二止挡构件从第二部分延伸，使得当第二止挡构件接合第一止动构件时，第二止挡构件在第二位置处停止第二部分。第一表面覆盖第一部分的至少一部分，并且第二表面覆盖第二部分的至少一部分。

8. 发明授权

US07041172B2 Methods and apparatus for dispensing semiconductor processing solutions with multi-syringe fluid delivery systems 有权
公开(公告)号：US07041172B2
公开(公告)日：2006-05-09
申请号：US10372028
申请日：2003-02-20
申请人： Branko Bem , Dikran Babikian
发明人： Branko Bem , Dikran Babikian
IPC分类号： B05C5/02
CPC分类号： H01L21/6715 , B05C5/001 , B05C5/0208
摘要： Methods and apparatus for controllably dispensing photoresist solutions and other fluids in semiconductor manufacturing equipment from an array of syringe-based fluid dispensers. A multi-syringe fluid dispensing system is provided for photoresist coating within a wafer track coating module. The coating module may contain a spin chuck that is positioned within a catch cup. A robotic dispense arm and gripper assembly may be positioned within the coating module for gripping and positioning a fluid syringe. An array of syringes may be stored on a solution tray within the wafer track coating module for holding a plurality of fluid syringes containing photoresist solutions.

9. 发明授权

US08631967B2 Sensor protector 有权
标题翻译：传感器保护器
公开(公告)号：US08631967B2
公开(公告)日：2014-01-21
申请号：US13253790
申请日：2011-10-05
申请人： Dikran Babikian
发明人： Dikran Babikian
IPC分类号： A47K10/00
CPC分类号： H03K17/955 , A47K2010/3668 , H03K2217/960705 , H03K2217/960755
摘要： A method for preventing recalibration of an automated product dispenser, a sensor protector for a product dispenser, and a product dispenser including a housing having a sensor area, a capacitive sensor adjacent a first surface of the sensor area of the housing, where the sensor has a target sensing area extending through the first surface and beyond a second surface of the housing opposite the first surface in a direction away from the first surface and a sensor protector which includes a plurality of spaced apart projections extending from the second surface in the direction away from the first surface.
摘要翻译：一种用于防止自动产品分配器的重新校准的方法，用于产品分配器的传感器保护器和产品分配器，其包括具有传感器区域的壳体，邻近壳体的传感器区域的第一表面的电容传感器，其中传感器具有目标感测区域延伸穿过所述第一表面并且超过所述壳体的与所述第一表面相对的第二表面在远离所述第一表面的方向上;以及传感器保护器，所述传感器保护器包括从所述第二表面沿着所述方向远离的多个间隔开的突出部从第一个表面。

10. 发明授权

US08579157B2 Automated fluid dispenser 有权
标题翻译：自动流体分配器
公开(公告)号：US08579157B2
公开(公告)日：2013-11-12
申请号：US12605258
申请日：2009-10-23
申请人： Branko Bem , Dikran Babikian , Robert A. Riccomini , Amelia Ngai
发明人： Branko Bem , Dikran Babikian , Robert A. Riccomini , Amelia Ngai
IPC分类号： B67D1/00
CPC分类号： A47K5/12 , A47K5/1217 , A47K2005/1218
摘要： A fluid dispenser is provided. The dispenser includes a reservoir for storing the fluid to be dispensed, an outlet for dispensing the fluid, a pump in the reservoir for pumping the fluid to the outlet, a motor external of the reservoir, and a coupling magnetically transferring a force generated by the motor to the pump for operating the pump for pumping the fluid.
摘要翻译：提供流体分配器。分配器包括用于存储要分配的流体的储存器，用于分配流体的出口，用于将流体泵送到出口的储存器中的泵，储存器外部的马达以及磁耦合地传递由电机到泵，用于操作泵以泵送流体。

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