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    • 1. 发明授权
    • Method of determining an intrinsic spectrum from a measured spectrum
    • 从测量光谱确定固有光谱的方法
    • US06370490B1
    • 2002-04-09
    • US09592059
    • 2000-06-12
    • Derk ReefmanWilliam Jacques Jean ReyAugustus Josephus Elizabeth Maria Janssen
    • Derk ReefmanWilliam Jacques Jean ReyAugustus Josephus Elizabeth Maria Janssen
    • G06F1716
    • G01N23/00G06F17/16
    • In determining an intrinsic spectrum from a measured spectrum using the Maximum Entropy Algorithm, it is hardly or even not at all practical to determine the eigenvalues of an N×N matrix of large dimensions (N of the order of from 104 to 105). According to the invention such a large matrix is subdivided into a large number of much smaller partial matrices that are located on the diagonal or trace of the large matrix. The set of eigenvalues to be determined then consists of all eigenvalues of the partial matrices which can be determined much faster. Because of the Toeplitz-like character of the partial matrices, their eigenvalues can be determined very fast by Fourier transformation of a single row of such a matrix. Using the set of eigenvalues thus obtained, the intrinsic spectrum is determined by means of a minimizing algorithm. The convergence rate of the minimizing algorithm can be highly enhanced by adding a random noise value to the variables of the minimizing process and by decreasing that noise value to zero in a number of iteration steps.
    • 在使用最大熵算法确定来自测量光谱的固有频谱的情况下,确定大尺寸(从104到105的数量级)的N×N矩阵的特征值几乎不是甚至根本不可行。 根据本发明,如此大的矩阵被细分成大量较小的部分矩阵,其位于大矩阵的对角线或迹线上。 要确定的特征值集合然后由可以被确定得更快的部分矩阵的所有特征值组成。 由于部分矩阵的Toeplitz样特征,它们的特征值可以通过这样一个矩阵的单行的傅里叶变换非常快地被确定。 使用如此获得的特征值集合,通过最小化算法确定固有频谱。 通过向最小化过程的变量添加随机噪声值,并通过在多个迭代步骤中将该噪声值降低为零,可以高度提高最小化算法的收敛速度。
    • 6. 发明申请
    • Determining Image Blur in an Imaging System
    • 确定成像系统中的图像模糊
    • US20080226152A1
    • 2008-09-18
    • US10598035
    • 2005-02-08
    • Peter DirksenAugustus Josephus Elizabeth Maria JanssenJosephus Johannes Maria BraatAdriaan Leeuwestein
    • Peter DirksenAugustus Josephus Elizabeth Maria JanssenJosephus Johannes Maria BraatAdriaan Leeuwestein
    • G06K9/00
    • G03F7/70608G03F7/706
    • The invention relates to a method of determining a parameter relating to image blur in an imaging system (IS) comprising the step of illuminating an object having a test pattern (MTP) by means of the imaging system (IS), thereby forming an image of the test pattern. The test pattern (MTP) has a size smaller than the resolution of the imaging system (IS), which makes the image of the test pattern independent of illuminator aberrations. The test pattern (MTP) is an isolated pattern, which causes the image to be free of optical proximity effects. The image is blurred due to stochastic fluctuations in the imaging system and/or in the detector detecting the blurred image. The parameter relating to the image blur is determined from a parameter relating to the shape of the blurred image. According to the invention, resist diffusion and/or focus noise may be characterized. In the method of designing a mask, the parameter relating to the image blur due to diffusion in the resist is taken into account. The computer program according to the invention is able to execute the step of determining the parameter relating to the image blur from a parameter relating to a shape of the blurred image.
    • 本发明涉及一种确定与成像系统(IS)中的图像模糊相关的参数的方法,包括通过成像系统(IS)照亮具有测试图案(MTP)的对象的步骤,从而形成图像 测试模式。 测试图案(MTP)的尺寸小于成像系统(IS)的分辨率,这使得测试图案的图像与照明器像差无关。 测试图案(MTP)是一种孤立的图案,使图像无光学邻近效应。 图像由于成像系统中的随机波动和/或检测模糊图像的检测器而模糊。 根据与模糊图像的形状相关的参数确定与图像模糊有关的参数。 根据本发明,可以表征抗蚀剂扩散和/或聚焦噪声。 在设计掩模的方法中,考虑与抗蚀剂中的扩散引起的图像模糊有关的参数。 根据本发明的计算机程序能够执行从与模糊图像的形状相关的参数确定与图像模糊有关的参数的步骤。
    • 7. 发明授权
    • Transmission system for transmitting an audio signal
    • 用于发送音频信号的传输系统
    • US06978241B1
    • 2005-12-20
    • US09575609
    • 2000-05-22
    • Robert Johannes SluijterAugustus Josephus Elizabeth Maria Janssen
    • Robert Johannes SluijterAugustus Josephus Elizabeth Maria Janssen
    • G10L19/02G10L25/90G10L21/04
    • G10L19/02G10L2025/906
    • An analyzer determines frequency and amplitudes of an audio signal represented by sinusoids for transmission transmitted to a receiver decoder which includes a synthesizer to reconstruct the audio signal. A pitch detector determines the pitch for transmission to the receiver along with the structure of the spectrum of the speech signal. The structure of the spectrum is often transmitted in the form of LPC parameters. To correct for frequency changes of the periodic component of an audio signal, a frequency change determiner determines a change of the frequency of the periodical component over the analysis period. This change of frequency is transmitted to the decoder for increasing the accuracy of the reconstruction of the audio signal. Further, the frequency change is only used to obtain a more accurate value of the pitch. The frequency change is determined by using a time warper which performs a time transformation such that a time transformed audio signal is obtained with a minimum frequency change.
    • 分析器确定由发送到接收机解码器的传输的正弦波表示的音频信号的频率和幅度,该接收机解码器包括用于重建音频信号的合成器。 音调检测器确定用于传输到接收机的音高以及语音信号的频谱的结构。 频谱的结构通常以LPC参数的形式传输。 为了校正音频信号的周期分量的频率变化,频率变化确定器确定分析周期中周期性分量的频率的变化。 频率的这种变化被传送到解码器,以提高音频信号重建的精度。 此外,频率变化仅用于获得更准确的音调值。 频率变化通过使用执行时间变换的时间整形器来确定,使得以最小的频率变化获得时间变换的音频信号。