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    • 8. 发明授权
    • Semiconductor micro epi-optical components
    • 半导体微表面光学元件
    • US06252725B1
    • 2001-06-26
    • US09498634
    • 2000-02-07
    • Dean TranEric R. AndersonRonald L. StrijekEdward A. RezekLuis M. Rochin
    • Dean TranEric R. AndersonRonald L. StrijekEdward A. RezekLuis M. Rochin
    • G02B702
    • H01L31/18G02B6/122G02B6/42G02B6/4246G02B2006/12102G02B2006/12114G02B2006/12176H01L33/005
    • A method for fabricating a monolithic micro-optical component. The construction of the micro-optical components is accomplished by using standard semiconductor fabrication techniques. The method comprises the steps of depositing an etch stop layer (44) onto a semiconductor substrate (42); depositing an optical component layer (46) onto the etch stop layer (44); coating the entire surface of the optical component layer with a photoresist material; applying a photoresist mask (50) to the photoresist material on the optical component layer (46); selectively etching away the optical component layer (46) to form at least one optical column (52); forming a pedestal (54) for each of the optical columns (52) by selectively etching away the etch stop layer (44); and finally polishing each of the optical columns (52), thereby forming monolithic optical components (56). The method may optionally include the step of removing the photoresist mask from each of the optical columns prior to polishing the optical columns, as well as the step of depositing an antireflectivity coating onto each of the optical components.
    • 一种用于制造单片微光学部件的方法。 微型光学部件的构造通过使用标准半导体制造技术来实现。 该方法包括以下步骤:在半导体衬底(42)上沉积蚀刻停止层(44); 在所述蚀刻停止层(44)上沉积光学部件层(46); 用光致抗蚀剂材料涂覆光学部件层的整个表面; 将光致抗蚀剂掩模(50)施加到光学部件层(46)上的光致抗蚀剂材料上; 选择性地蚀刻掉光学部件层(46)以形成至少一个光学柱(52); 通过选择性地蚀刻掉蚀刻停止层(44),为每个光学柱(52)形成基座(54); 并最后对每个光学柱(52)进行抛光,由此形成单片光学部件(56)。 该方法可以可选地包括在抛光光学柱之前从每个光学柱去除光致抗蚀剂掩模的步骤,以及在每个光学部件上沉积抗反射涂层的步骤。
    • 10. 发明授权
    • Apparatus and method for snap-on thermo-compression bonding
    • 用于卡扣热压接的装置和方法
    • US06172414B2
    • 2001-01-09
    • US09067222
    • 1998-04-28
    • Dean TranEric R. AndersonRonald L. StrijekEdward A. Rezek
    • Dean TranEric R. AndersonRonald L. StrijekEdward A. Rezek
    • H01L2304
    • H01L24/75H01L2224/75H01L2224/81141H01L2224/81193H01L2924/01033H01L2924/01079H01L2924/01082H01L2924/14Y10T29/49144Y10T29/49544
    • An interconnected apparatus for producing a low loss, reproducible electrical interconnection between a semiconductor device and a substrate includes a rod and rod receptor. The rod, generally cylindrically shaped, is attached to the semiconductor device and includes an outer circumferential wall which comes into contact with the rod receptor during a bonding process. A lip portion is formed on one end of the rod receptor for interlocking engagement with the rod. The rod receptor is plated on the substrate and includes a generally circularly shaped body which forms a centrally disposed well for receiving the rod. A lip portion is formed on one end or mouth of the rod receptor for interlocking engagement with the rod. When the rod and corresponding receptor are aligned and brought together, the rod deforms and interlocks with its corresponding rod receptor. A thermo-compression bonding process is utilized to bond the rod to the rod receptor, thereby producing a strong interlocking bond.
    • 用于在半导体器件和衬底之间产生低损耗,可再现的电互连的互连设备包括棒和棒接收器。 通常为圆柱形的杆附接到半导体器件,并且包括在接合过程中与杆接收器接触的外周壁。 唇形部分形成在杆接收器的一端上以与杆互锁接合。 杆接收器被电镀在基底上,并且包括大致圆形的主体,其形成用于容纳杆的居中设置的孔。 唇形部分形成在杆接收器的一端或口上,用于与棒互锁接合。 当杆和相应的接收器对准并聚集在一起时,杆变形并与其相应的杆接收器互锁。 利用热压接合方法将棒粘合到杆接收器,从而产生强的互锁键。