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    • 4. 发明授权
    • Test components fabricated with large area sensors used for determining the resistance of an MR sensor
    • 用大面积传感器制造的测试部件用于确定MR传感器的电阻
    • US07855553B2
    • 2010-12-21
    • US11965587
    • 2007-12-27
    • Robert S. BeachMary K. GutberletDavid J. Seagle
    • Robert S. BeachMary K. GutberletDavid J. Seagle
    • G01R33/12
    • G11B20/1816G11B5/3166G11B5/3173G11B5/3193G11B5/3903G11B2220/2516
    • Test methods and components are disclosed for testing resistances of magnetoresistance (MR) sensors in read elements. Test components are fabricated on a wafer with a first test lead, a test MR sensor, and a second test lead. The test leads and test MR sensor are fabricated with similar processes as first shields, MR sensors, and second shields of read elements on tie wafer. However, the test MR sensor is fabricated with an area that is larger than areas of the MR sensors in the read elements. The larger area of the test MR sensor causes the resistance of the test MR sensor to be insignificant compared to the lead resistance. Thus, a resistance measurement of the test component represents the lead resistance of a read element. An accurate resistance measurement of an MR sensor in a read element may then be determined by subtracting the lead resistance.
    • 公开了用于测试读取元件中的磁阻(MR)传感器的电阻的测试方法和组件。 在具有第一测试导线,测试MR传感器和第二测试导线的晶片上制造测试部件。 测试引线和测试MR传感器采用与晶片上的读取元件的第一屏蔽,MR传感器和第二屏蔽类似的工艺制造。 然而,测试MR传感器的制造面积大于读取元件中MR传感器的面积。 测试MR传感器的较大面积导致测试MR传感器的电阻与引线电阻相比不显着。 因此,测试部件的电阻测量表示读取元件的引线电阻。 然后可以通过减去引线电阻来确定读取元件中的MR传感器的精确电阻测量。