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1. 发明授权

US5737072A Automated photomask inspection apparatus and method 失效
公开(公告)号：US5737072A
公开(公告)日：1998-04-07
申请号：US726291
申请日：1996-10-04
申请人： David Garth Emery , Zain Kahuna Saidin , Mark J. Wihl , Tao-Yi Fu , Marek Zywno , Damon F. Kvamme , Michael E. Fein
发明人： David Garth Emery , Zain Kahuna Saidin , Mark J. Wihl , Tao-Yi Fu , Marek Zywno , Damon F. Kvamme , Michael E. Fein
IPC分类号： G01B11/30 , G01N21/88 , G01N21/93 , G01N21/94 , G01N21/956 , G03F1/00 , H01L21/027 , H01L21/66
CPC分类号： G03F1/84 , G01N21/95607 , G01N2021/95676
摘要： A method and apparatus for inspecting patterned transmissive substrates, such as photomasks, for unwanted particles and features occurring on the transmissive, opaque portions and at the transition regions of the opaque and transmissive portions of the substrate. A transmissive substrate is illuminated by a laser through an optical system comprised of a laser scanning system, individual transmitted and reflected light collection optics and detectors collect and generate signals representative of the light transmitted and reflected by the substrate as the substrate is scanned repeatedly in one axis in a serpentine pattern by a laser beam which is focused on the patterned substrate surface. The defect identification of the substrate is performed using only those transmitted and reflected light signals, and other signals derived from them, such as the second derivative of each of them. The actual defect identification is then performed by comparing combinations of at least two of those measured and derived signals. Simultaneously, defect and particle inspection using the same measured transmitted and reflected light signals. Additionally, phase shift and line widths on the substrate can also be performed simultaneously using the same transmitted light signal that is collected for defect analysis.

2. 发明授权

US5572598A Automated photomask inspection apparatus 失效
公开(公告)号：US5572598A
公开(公告)日：1996-11-05
申请号：US202868
申请日：1994-02-25
申请人： Mark J. Wihl , Tao-Yi Fu , Marek Zywno , Damon F. Kvamme , Michael E. Fein
发明人： Mark J. Wihl , Tao-Yi Fu , Marek Zywno , Damon F. Kvamme , Michael E. Fein
IPC分类号： G01B11/30 , G01N21/93 , G01N21/956 , G03F1/84 , G06K9/00 , G06T7/00 , H01L21/66
CPC分类号： G03F1/84 , G01N21/95607 , G01N2021/95676
摘要： An automated photomask inspection apparatus including an XY state (12) for transporting a substrate (14) under test in a serpentine path in an XY plane, an optical system (16) comprising a laser (30), a transmission light detector (34), a reflected light detector (36), optical elements defining reference beam paths and illuminating beam paths between the laser, the substrate and the detectors and an acousto-optical beam scanner (40, 42) for reciprocatingly scanning the illuminating and reference beams relative to the substrate surface, and an electronic control, analysis and display system for controlling the operation of the stage and optical system and for interpreting and storing the signals output by the detectors. The apparatus can operate in a die-to-die comparison mode or a die-to-database mode.

3. 发明授权

US5563702A Automated photomask inspection apparatus and method 失效
标题翻译：自动光掩模检查装置及方法
公开(公告)号：US5563702A
公开(公告)日：1996-10-08
申请号：US274310
申请日：1994-07-13
申请人： David G. Emery , Zain K. Saidin , Mark J. Wihl , Tao-Yi Fu , Marek Zywno , Damon F. Kvamme , Michael E. Fein
发明人： David G. Emery , Zain K. Saidin , Mark J. Wihl , Tao-Yi Fu , Marek Zywno , Damon F. Kvamme , Michael E. Fein
IPC分类号： G01B11/30 , G01N21/88 , G01N21/93 , G01N21/94 , G01N21/956 , G03F1/00 , H01L21/027 , H01L21/66
CPC分类号： G03F1/84 , G01N21/95607 , G01N2021/95676
摘要： A method and apparatus for inspecting patterned transmissive substrates, such as photomasks, for unwanted particles and features occurring on the transmissive, opaque portions and at the transition regions of the opaque and transmissive portions of the substrate. A transmissive substrate is illuminated by a laser through an optical system comprised of a laser scanning system, individual transmitted and reflected light collection optics and detectors collect and generate signals representative of the light transmitted and reflected by the substrate as the substrate is scanned repeatedly in one axis in a serpentine pattern by a laser beam which is focused on the patterned substrate surface. The defect identification of the substrate is performed using only those transmitted and reflected light signals, and other signals derived from them, such as the second derivative of each of them. The actual defect identification is then performed by comparing combinations of at least two of those measured and derived signals. Simultaneously, defect and particle inspection using the same measured transmitted and reflected light signals. Additionally, phase shift and line widths on the substrate can also be performed simultaneously using the same transmitted light signal that is collected for defect analysis.
摘要翻译：一种用于检查图案化的透射基底（例如光掩模）用于不期望的颗粒和特征的方法和装置，其出现在基底的不透明部分和透射部分的透射性不透明部分和过渡区域上。透射基板由激光器通过包括激光扫描系统，单独的透射和反射光收集光学器件的光学系统照射，并且检测器收集并产生代表由衬底透射和反射的光的信号，因为衬底被一次扫描通过聚焦在图案化衬底表面上的激光束以蛇形图案。仅使用透射和反射光信号以及从它们得到的其他信号（例如它们的二次导数）来执行衬底的缺陷识别。然后通过比较这些测量和导出的信号中的至少两个的组合来执行实际的缺陷识别。同时，使用相同测量的透射和反射光信号进行缺陷和粒子检测。此外，基板上的相移和线宽也可以使用用于缺陷分析收集的相同的透射光信号同时进行。

4. 发明授权

US06584218B2 Automated photomask inspection apparatus 有权
公开(公告)号：US06584218B2
公开(公告)日：2003-06-24
申请号：US10003166
申请日：2001-11-14
申请人： Mark Joseph Wihl , Tao-Yi Fu , Marek Zywno , Damon Floyd Kvamme , Michael E. Fein
发明人： Mark Joseph Wihl , Tao-Yi Fu , Marek Zywno , Damon Floyd Kvamme , Michael E. Fein
IPC分类号： G06K900
CPC分类号： G03F1/84 , G01N21/95607 , G01N2021/95676
摘要： An automated photomask inspection apparatus including an XY state (12) for transporting a substrate (14) under test in a serpentine path in an XY plane, an optical system (16) comprising a laser (30), a transmission light detector (34), a reflected light detector (36), optical elements defining reference beam paths and illuminating beam paths between the laser, the substrate and the detectors and an acousto-optical beam scanner (40, 42) for reciprocatingly scanning the illuminating and reference beams relative to the substrate surface, and an electronic control, analysis and display system for controlling the operation of the stage and optical system and for interpreting and storing the signals output by the detectors. The apparatus can operate in a die-to-die comparison mode or a die-to-database mode.

5. 发明授权

US06363166B1 Automated photomask inspection apparatus 有权
标题翻译：自动光掩模检测仪
公开(公告)号：US06363166B1
公开(公告)日：2002-03-26
申请号：US09539672
申请日：2000-03-30
申请人： Mark Joseph Wihl , Tao-Yi Fu , Marek Zywno , Damon Floyd Kvamme , Michael E. Fein
发明人： Mark Joseph Wihl , Tao-Yi Fu , Marek Zywno , Damon Floyd Kvamme , Michael E. Fein
IPC分类号： G06K900
CPC分类号： G03F1/84 , G01N21/95607 , G01N2021/95676
摘要： An automated photomask inspection apparatus including an XY state (12) for transporting a substrate (14) under test in a serpentine path in an XY plane, an optical system (16) comprising a laser (30), a transmission light detector (34), a reflected light detector (36), optical elements defining reference beam paths and illuminating beam paths between the laser, the substrate and the detectors and an acousto-optical beam scanner (40, 42) for reciprocatingly scanning the illuminating and reference beams relative to the substrate surface, and an electronic control, analysis and display system for controlling the operation of the stage and optical system and for interpreting and storing the signals output by the detectors. The apparatus can operate in a die-to-die comparison mode or a die-to-database mode.
摘要翻译：一种自动化光掩模检查装置，包括用于在XY平面中的蛇形路径中传送被测试的基板的XY状态（12），包括激光器（30），透射光检测器（34）的光学系统（16），反射光检测器（36），限定参考光束路径的光学元件和激光器，衬底和检测器之间的照明光束路径，以及用于相对于照射和参考光束往复扫描照射和参考光束的声光束扫描器（40,42）基板表面，以及用于控制平台和光学系统的操作以及用于解释和存储由检测器输出的信号的电子控制，分析和显示系统。该设备可以以管芯到管芯的比较模式或管芯到数据库模式工作。

6. 发明授权

US6052478A Automated photomask inspection apparatus 失效
公开(公告)号：US6052478A
公开(公告)日：2000-04-18
申请号：US727985
申请日：1996-10-09
申请人： Mark Joseph Wihl , Tao-Yi Fu , Marek Zywno , Damon Floyd Kvamme , Michael E. Fein
发明人： Mark Joseph Wihl , Tao-Yi Fu , Marek Zywno , Damon Floyd Kvamme , Michael E. Fein
IPC分类号： G01B11/30 , G01N21/93 , G01N21/956 , G03F1/84 , G06K9/00 , G06T7/00 , H01L21/66
CPC分类号： G03F1/84 , G01N21/95607 , G01N2021/95676
摘要： An automated photomask inspection apparatus including an XY state (12) for transporting a substrate (14) under test in a serpentine path in an XY plane, an optical system (16) comprising a laser (30), a transmission light detector (34), a reflected light detector (36), optical elements defining reference beam paths and illuminating beam paths between the laser, the substrate and the detectors and an acousto-optical beam scanner (40, 42) for reciprocatingly scanning the illuminating and reference beams relative to the substrate surface, and an electronic control, analysis and display system for controlling the operation of the stage and optical system and for interpreting and storing the signals output by the detectors. The apparatus can operate in a die-to-die comparison mode or a die-to-database mode.

7. 发明授权

US5085517A Automatic high speed optical inspection system 失效
标题翻译：自动高速光学检测系统
公开(公告)号：US5085517A
公开(公告)日：1992-02-04
申请号：US429963
申请日：1989-10-31
申请人： Curt H. Chadwick , Robert R. Sholes , John D. Greene , Francis D. Tucker, III , Michael E. Fein , P. C. Jann , David J. Harney , William Bell , Bin-Ming B. Isai , Walter I. Novak , Mark J. Wihl
发明人： Curt H. Chadwick , Robert R. Sholes , John D. Greene , Francis D. Tucker, III , Michael E. Fein , P. C. Jann , David J. Harney , William Bell , Bin-Ming B. Isai , Walter I. Novak , Mark J. Wihl
IPC分类号： G01B11/24 , G01B11/30 , G01N21/64 , G01N21/88 , G01N21/93 , G01N21/956 , G01R31/308 , G06T1/00 , G06T1/20
CPC分类号： G01R31/308 , G01N21/956 , G01N2021/8887 , G01N2021/95615 , G01N2021/95638 , G01N21/64 , G01N21/95607 , G01N2201/06126 , G01N2201/0826
摘要： In each configuration, at least one TDI sensor is used to image the portions of interest of the substrate that are substantially uniformly or critically illuminated. In one configuration, the substrate is compared to the expected characteristic features prestored in memory. In a second configuration, a first and second pattern in a region of at least one substrate are inspected by comparing one pattern against the other and noting whether they agree with each other. This is accomplished by illuminating the two patterns, imaging the first pattern and storing its characteristics in a temporary memory, then imaging the second pattern and comparing it to the stored characteristics from the temporary memory. Then the comparisons continue sequentially with the second pattern becoming the first pattern in the next imaging/comparison sequence against a new second pattern. With each comparison whether there has been agreement between the two patterns is noted. After all of the patterns are sequentially compared, the bad ones are identified by identifying those that did not compare with other patterns in the test process. This inspection technique is useful for doing die-to-die inspections, as well as repeating patern inspections within the same die. A variation of the second configuration uses two TDI sensors to simultaneously image the first and second patterns eliminating the need for the temporary memory.

8. 发明申请

US20120053431A1 PULSE OXIMETER SENSOR WITH PIECE-WISE FUNCTION 审中-公开
标题翻译：具有智能功能的脉冲OMS传感器
公开(公告)号：US20120053431A1
公开(公告)日：2012-03-01
申请号：US13292956
申请日：2011-11-09
申请人： Paul D. Mannheimer , Michael E. Fein , Charles E. Porges , Marcia Fein
发明人： Paul D. Mannheimer , Michael E. Fein , Charles E. Porges , Marcia Fein
IPC分类号： A61B5/1455
CPC分类号： A61B5/14551 , A61B2562/085
摘要： A memory in a sensor is used to store multiple coefficients for a physiological parameter. In one embodiment, not only are the sensor's specific calibration coefficients stored in a memory in the sensor for the formula to determine oxygen saturation, but multiple sets of coefficients are stored. The multiple sets apply to different ranges of saturation values to provide a better fit to occur by breaking the R to SpO2 relationship up into different pieces, each described by a different function. The different functions can also be according to different formulas for determining oxygen saturation.
摘要翻译：传感器中的存储器用于存储用于生理参数的多个系数。在一个实施例中，不仅传感器的特定校准系数存储在用于公式的传感器中的存储器中，以确定氧饱和度，而是存储多组系数。多个集合适用于不同的饱和度范围，以通过将R到SpO2关系分成不同的部分（每个由不同的功能描述）来提供更好的拟合。不同的功能也可以根据不同的公式来确定氧饱和度。

9. 发明授权

US08078246B2 Pulse oximeter sensor with piece-wise function 有权
标题翻译：具有分段功能的脉搏式血氧计传感器
公开(公告)号：US08078246B2
公开(公告)日：2011-12-13
申请号：US11241063
申请日：2005-09-30
申请人： Paul D. Mannheimer , Michael E. Fein , Marcia Fein, legal representative , Charles E. Porges
发明人： Paul D. Mannheimer , Michael E. Fein , Charles E. Porges
IPC分类号： A61B5/1455
CPC分类号： A61B5/14551 , A61B2562/085
摘要： A memory in a sensor is used to store multiple coefficients for a physiological parameter. In one embodiment, not only are the sensor's specific calibration coefficients stored in a memory in the sensor for the formula to determine oxygen saturation, but multiple sets of coefficients are stored. The multiple sets apply to different ranges of saturation values to provide a better fit to occur by breaking the R to SpO2 relationship up into different pieces, each described by a different function. The different functions can also be according to different formulas for determining oxygen saturation.
摘要翻译：传感器中的存储器用于存储用于生理参数的多个系数。在一个实施例中，不仅传感器的特定校准系数存储在用于公式的传感器中的存储器中，以确定氧饱和度，而是存储多组系数。多个集合适用于不同的饱和度范围，以通过将R到SpO2关系分成不同的部分（每个由不同的功能描述）来提供更好的拟合。不同的功能也可以根据不同的公式来确定氧饱和度。

10. 发明申请

US20110066015A1 OXIMETER SENSOR WITH DIGITAL MEMORY ENCODING PATIENT DATA 审中-公开
标题翻译：具有编码患者数据的数字存储器的OXIMETER传感器
公开(公告)号：US20110066015A1
公开(公告)日：2011-03-17
申请号：US12952657
申请日：2010-11-23
申请人： David Swedlow , Michael E. Fein , Marcia Fein , Paul D Mannheimer
发明人： David Swedlow , Michael E. Fein , Marcia Fein , Paul D Mannheimer
IPC分类号： A61B5/1455
CPC分类号： A61B5/74 , A61B5/0205 , A61B5/02055 , A61B5/053 , A61B5/11 , A61B5/14551 , A61B5/14552 , A61B5/1495 , A61B5/7232 , A61B2562/085 , G01D18/00 , Y10S323/911
摘要： The present invention provides a memory chip for use in an oximeter sensor, or an associated adapter or connector circuit. The memory chip allows the storing of patient related data, such as patient trending data or a patient ID, to provide enhanced capabilities for the oximeter sensor. In addition to providing unique data to store in such a memory, the present invention include unique uses of the data stored in such a memory.
摘要翻译：本发明提供了一种用于血氧计传感器或相关联的适配器或连接器电路的存储芯片。存储器芯片允许存储患者相关数据，例如患者趋势数据或患者ID，以提供用于血氧计传感器的增强功能。除了提供存储在这样的存储器中的唯一数据之外，本发明还包括存储在这种存储器中的数据的独特用途。

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