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    • 1. 发明授权
    • Low overhead closed loop control system
    • 低开销闭环控制系统
    • US07890220B2
    • 2011-02-15
    • US11120396
    • 2005-05-03
    • David Brian Chamberlain
    • David Brian Chamberlain
    • G05D16/00G06F19/00F16K31/36C23C14/00B05C11/00G05D7/00G06F11/00C23C16/00
    • H01L21/67253Y10T137/3056Y10T137/7761
    • A tool includes a chamber, a network, a sensor, a tool controller, and a pressure controller. The network carries messages to and from devices on the network. A header portion of a message indicates a sender of the message and at least one intended recipient of the message. The sensor measures a pressure within the chamber. The sensor, tool controller, and pressure controller are on the network. The pressure controller controls the pressure within the chamber in response to measurements provided by the sensor and in response to a set point provided by the tool controller. The pressure controller processes header portions of all messages carried on the network to determine the intended recipients of each message and processes at least part of data portions of both messages intended for the pressure controller and at least some messages not intended for the pressure controller.
    • 工具包括腔室,网络,传感器,工具控制器和压力控制器。 网络向网络上的设备携带消息。 消息的报头部分指示消息的发送者和消息的至少一个预期接收方。 传感器测量室内的压力。 传感器,工具控制器和压力控制器在网络上。 压力控制器响应于由传感器提供的测量值和响应于由工具控制器提供的设定点而控制室内的压力。 压力控制器处理网络上承载的所有消息的报头部分,以确定每个消息的预期接收者,并且处理旨在用于压力控制器的两个消息的至少部分数据部分以及不用于压力控制器的至少一些消息。
    • 2. 发明授权
    • Valve flapper with dynamic circumference seal
    • 带有动态圆周密封的阀瓣
    • US06439255B1
    • 2002-08-27
    • US09715404
    • 2000-11-17
    • David Brian Chamberlain
    • David Brian Chamberlain
    • F16K2500
    • F16K1/2261F16K1/2285Y10T137/0525
    • A valve assembly including a body defining a passageway having a longitudinal axis, a rotatable shaft extending into the passageway, generally perpendicular to the axis of the passageway, and a flapper secured to the shaft within the passageway and movable upon rotation of the shaft between an opened position and a closed position. The flapper includes a groove in an outer circumference, and a seal is received in the groove. The seal has an outer circumference greater than the outer circumference of the flapper so the entire outer circumference of the seal contacts a wall of the passageway when the flapper is moved to the closed position. The seal also has an inner circumference greater than an inner circumference of the groove of the flapper such that an enclosed space is defined between the seal and the groove. An aperture provides fluid communication between the enclosed space and the passageway.
    • 一种阀组件,其包括限定具有纵向轴线的通道的主体,延伸到所述通道中的大致垂直于所述通道的轴线的可旋转轴,以及在所述通道内固定到所述轴的挡板,并且当所述轴在一个 打开位置和关闭位置。 挡板包括在外周的凹槽,并且密封件容纳在凹槽中。 密封件的外周长大于挡板的外周,所以当挡板移动到关闭位置时,密封件的整个外周都与通道的壁接触。 密封件还具有比挡板的槽的内周大的内圆周,使得在密封件和凹槽之间限定封闭空间。 孔径在封闭空间和通道之间提供流体连通。