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    • 4. 发明授权
    • Ion beam apparatus and a method for neutralizing space charge in an ion beam
    • 离子束装置和用于中和离子束中的空间电荷的方法
    • US06515408B1
    • 2003-02-04
    • US09700206
    • 2001-02-15
    • Jonathan Gerald EnglandAndrew HolmesDavid ArmourJaap Van Den BergStephen Moffatt
    • Jonathan Gerald EnglandAndrew HolmesDavid ArmourJaap Van Den BergStephen Moffatt
    • H05H300
    • H01J49/02H01J37/026H01J37/3171H01J2237/0041
    • A source of thermionic electrons is provided inside the flight tube of a magnet, especially an analysing magnet, and extends along the beam flight path. This allows space charge to be neutralised along the beam's axis in spite of severely restricted electron mobility in this direction owing to the presence of substantially transverse magnetic field. Thermionically emitted electrons may contribute directly to the neutralisation of space charge in positive ion beams, or, in the case of negative ion beams, indirectly by ionizing residual or deliberately introduced neutral gas atoms or molecules. Examples are described and claimed in which the source is arranged outside the nominal beam envelope in the flight tube, but linked to the beam by magnetic flux generated in the flight tube. This reduces erosion of the source by the beam and so reduces beam contamination. In these examples, an important feature is the provision of electron repellers to reflect electrons back and forth across the beam. Alternative arrangements are described and claimed in which the source is positioned inside the beam. The thermionic electron source may comprise an array of filaments, and preferably is negatively biased with respect to the flight tube. Adjustment of this bias enables the energy of emitted electrons to be controlled.
    • 在一个磁体的飞行管内部,特别是一个分析磁体的内部,设有一个热离子电子源,并沿着光束飞行路径延伸。 尽管由于存在基本上横向的磁场,但是在该方向上电子迁移率受到严格的限制,这允许空间电荷沿着光束的轴线被中和。 热离子发射的电子可以直接影响正离子束中的空间电荷的中和,或者在负离子束的情况下,间接地通过电离剩余或故意引入的中性气体原子或分子。 这些实施例被描述和要求保护,其中源被布置在飞行管中的标称束包络外部,但是通过在飞行管中产生的磁通量与束束相连。 这减少了光束对光源的侵蚀,从而减少了光束的污染。 在这些示例中,重要的特征是提供电子驱除器以反射来自横梁的电子。 描述和要求保护其中源位于梁内的替代布置。 热离子电子源可以包括长丝阵列,并且优选地相对于飞行管负偏压。 该偏置的调整使得能够控制发射电子的能量。