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    • 1. 发明申请
    • Method for determining average properties of molecules in solution by injection into a flowing solvent
    • 通过注入流动溶剂测定溶液中分子的平均性质的方法
    • US20090222219A1
    • 2009-09-03
    • US12072986
    • 2008-02-29
    • Daniel I. SomeSteven P. Trainoff
    • Daniel I. SomeSteven P. Trainoff
    • G06F19/00
    • G01N15/0205G01N35/085G01N35/1095G01N2021/4711G01N2035/1032
    • A new method is presented for measuring the molecular properties of an unfractionated solution of macromolecules. Sample aliquots spanning a range of concentrations are injected sequentially into a stream of solution and flow towards the detectors. Each aliquot produces, thereby, an effective “peak” whose elements correspond to different concentrations of the diluted aliquot. The weight averaged molar mass, the mean square radius, and the second virial coefficient of the macromolecules in solution are derived from an analysis of the angular and concentration dependence of the scattering signals throughout the corresponding peaks. In contrast to earlier on-line methods, better accuracy is achieved, while using a smaller quantity of sample. A similar method for determining cross virial coefficients between two distinct species of macromolecules is also presented.
    • 提出了一种用于测量大分子的未分级溶液的分子性质的新方法。 将一系列浓度的样品等分试样依次注入溶液流中并流向检测器。 每个等分试样产生有效的“峰”,其元素对应于稀释的等分试样的不同浓度。 溶液中大分子的重量平均摩尔质量,均方半径和第二维里系数是从散射信号在整个相应峰中的角度和浓度依赖性的分析得出的。 与早期的在线方法相比,在使用较少量的样品的同时,实现了更高的精度。 还提出了用于确定两种不同种类的大分子之间的交叉维里系数的类似方法。
    • 2. 发明授权
    • Method for determining average properties of molecules in solution
    • 测定溶液中分子平均性质的方法
    • US07813882B2
    • 2010-10-12
    • US12072986
    • 2008-02-29
    • Daniel I. SomeSteven P. Trainoff
    • Daniel I. SomeSteven P. Trainoff
    • G01N31/00
    • G01N15/0205G01N35/085G01N35/1095G01N2021/4711G01N2035/1032
    • A new method is presented for measuring the molecular properties of an unfractionated solution of macromolecules. Sample aliquots spanning a range of concentrations are injected sequentially into a stream of solution and flow towards the detectors. Each aliquot produces, thereby, an effective “peak” whose elements correspond to different concentrations of the diluted aliquot. The weight averaged molar mass, the mean square radius, and the second virial coefficient of the macromolecules in solution are derived from an analysis of the angular and concentration dependence of the scattering signals throughout the corresponding peaks. In contrast to earlier on-line methods, better accuracy is achieved, while using a smaller quantity of sample. A similar method for determining cross virial coefficients between two distinct species of macromolecules is also presented.
    • 提出了一种用于测量大分子的未分级溶液的分子性质的新方法。 将一系列浓度的样品等分试样依次注入溶液流中并流向检测器。 每个等分试样产生有效的“峰”,其元素对应于稀释的等分试样的不同浓度。 溶液中大分子的重量平均摩尔质量,均方半径和第二维里系数是从散射信号在整个相应峰中的角度和浓度依赖性的分析得出的。 与早期的在线方法相比,在使用较少量的样品的同时,实现了更好的精度。 还提出了用于确定两种不同种类的大分子之间的交叉维里系数的类似方法。
    • 3. 发明授权
    • Patterned wafer inspection using spatial filtering
    • 使用空间滤波的图案化晶圆检查
    • US06686602B2
    • 2004-02-03
    • US10050890
    • 2002-01-15
    • Daniel I. Some
    • Daniel I. Some
    • G01N2188
    • G01N21/9501G01N21/95623
    • Apparatus for spatial filtering includes a Fourier lens, adapted to collect radiation emitted from a point and to separate the collected radiation into spatial components in a Fourier plane of the lens, and a programmable spatial filter, positioned at the Fourier plane. An image sensor is optically coupled to capture an image of the spatial components of the collected radiation in the Fourier plane, while the components are incident on the filter. A filter controller is coupled to receive and analyze the image captured by the image sensor and, responsive thereto, to control the spatial filter so as to block one or more of the spatial components.
    • 用于空间滤波的装置包括傅立叶透镜,其适于收集从点发射的辐射并将收集的辐射分离成透镜的傅立叶平面中的空间分量,以及位于傅立叶平面处的可编程空间滤波器。 图像传感器被光学耦合以捕获傅立叶平面中收集的辐射的空间分量的图像,同时组件入射到滤光器上。 滤波器控制器被耦合以接收和分析由图像传感器捕获的图像,并且响应于此控制空间滤波器以便阻挡一个或多个空间分量。
    • 6. 发明授权
    • Full frame thermal pump probe technique for detecting subsurface defects
    • 全帧热泵探头技术,用于检测地下缺陷
    • US07009695B2
    • 2006-03-07
    • US10812817
    • 2004-03-29
    • Daniel I. Some
    • Daniel I. Some
    • G01N21/88
    • G01N25/72
    • An area of a substrate is imaged with and without heating, to obtain a hot image and a cold image respectively. The hot and cold images are compared with one another to identify one or more locations as being defective, e.g. if the result of comparison at one location differs significantly relative to other locations. The comparison results in all locations form a differential image, and in several embodiments a number of differential images are obtained by repeatedly heating, imaging and comparing. In such embodiments, multiple differential images are averaged at each location, to improve the signal to noise ratio. Pump and probe lasers may be used for heating and for illumination respectively, or alternatively a single laser may be employed to generate both pump and probe beams.
    • 基板的面积和加热成像,分别得到热图像和冷图像。 将热图像和冷图像相互比较以将一个或多个位置识别为有缺陷的图像。 如果在一个位置的比较结果相对于其他位置显着不同。 所有位置的比较结果形成差分图像,并且在几个实施例中,通过反复加热,成像和比较获得多个差分图像。 在这样的实施例中,在每个位置对多个差分图像进行平均,以提高信噪比。 泵和探针激光器可以分别用于加热和照明,或者可以使用单个激光器来产生泵浦和探针光束。
    • 10. 发明授权
    • Laser scanning wafer inspection using nonlinear optical phenomena
    • 激光扫描晶圆检查采用非线性光学现象
    • US06791099B2
    • 2004-09-14
    • US09784626
    • 2001-02-14
    • Daniel I. SomeSilviu ReinhornGilad Almogy
    • Daniel I. SomeSilviu ReinhornGilad Almogy
    • G01V800
    • G01N21/9501G01N21/4788G01N21/64G01N21/65G01N21/658
    • An optical inspection apparatus and method is provided that utilizes both linear and nonlinear optical phenomena to detect defects. Embodiments include irradiating a portion of the surface of an article, such as a semiconductor device, with a light beam, such as a scanning laser at an incident wavelength. The light emanating from the irradiated surface portion is then separated into light at the incident wavelength and light at one or more predetermined non-incident wavelengths, as by a diffraction grating, prism or filters. The light at the incident and nonincident wavelengths is sent to separate detectors, such as photomultipliers (PMT), which respectively convert the detected linear optical phenomena (representing, e.g., surface topography) into an electrical signal, and the detected nonlinear optical phenomena, such as fluorescence, Raman scattering and/or second harmonic generation, into electrical signals representing, e.g., chemical composition and material interfaces. The signal from each detector is sent to a processor, which generates a defect map based on the information gleaned from both the linear and nonlinear optical phenomena.
    • 提供一种利用线性和非线性光学现象来检测缺陷的光学检查装置和方法。 实施例包括用入射波长的诸如扫描激光束的光束照射诸如半导体器件的物品的表面的一部分。 然后将从照射的表面部分发出的光分离成入射波长的光和一个或多个预定非入射波长的光,如通过衍射光栅,棱镜或滤光器。 将入射波长和非相干波长的光发送到分离的检测器,例如光电倍增管(PMT),其分别将检测到的线性光学现象(例如,表面形貌)转换为电信号,以及检测到的非线性光学现象 作为荧光,拉曼散射和/或二次谐波产生,代表例如化学成分和材料界面的电信号。 来自每个检测器的信号被发送到处理器,其基于从线性和非线性光学现象收集的信息产生缺陷图。