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    • 4. 发明申请
    • AIR FLOW MANAGEMENT IN A SYSTEM WITH HIGH SPEED SPINNING CHUCK
    • 在高速旋转切割系统中的空气流量管理
    • US20130038866A1
    • 2013-02-14
    • US13565212
    • 2012-08-02
    • George J. KrenPaul DoyleAlexander Belyaev
    • George J. KrenPaul DoyleAlexander Belyaev
    • G01N21/00B23B31/30B23B31/02
    • H01L21/68735Y10T279/11Y10T279/21Y10T279/34
    • The present invention is directed to a high speed, spinning chuck for use in a semiconductor wafer inspection system. The chuck of the present disclosure is configured with a turbulence-reducing lip. Spinning of the chuck produces radial airflows proximal to a surface of the wafer and proximal to the bottom of the chuck. The turbulence-reducing lip of the chuck of the present disclosure directs the radial airflows off of the top surface of the wafer and the bottom surface of the chuck in a manner that minimizes the size of the low pressure zone formed between these radial airflows. The minimization of the low pressure zone reduces air turbulence about the periphery of the chuck and substrate, thereby reducing the possibility of contaminants in the system being directed onto the surface of the substrate by such air turbulence.
    • 本发明涉及一种用于半导体晶片检查系统的高速纺丝卡盘。 本公开的卡盘配置有减少湍流的唇部。 卡盘的旋转产生靠近晶片表面并靠近卡盘底部的径向气流。 本公开的卡盘的减少湍流的唇部以使得在这些径向气流之间形成的低压区域的尺寸最小化的方式引导径向气流离开晶片的顶表面和卡盘的底表面。 低压区域的最小化减小了卡盘和基板周围的空气紊流,从而降低了系统中的污染物通过这种空气湍流被引导到基板的表面上的可能性。
    • 5. 发明授权
    • HDMI source detection
    • HDMI源检测
    • US08625029B2
    • 2014-01-07
    • US12002378
    • 2007-12-17
    • Paul DoyleEiji KonoTetsuya NomuraPeter Rae Shintani
    • Paul DoyleEiji KonoTetsuya NomuraPeter Rae Shintani
    • H04N7/00H04N11/00H04N5/44H04N3/27H04N5/46
    • H04N5/44G09G5/006G09G2320/08G09G2370/047G09G2370/12H01R13/641H04N21/43635H04N21/44231
    • A circuit for detection of an HDMI source device to an HDMI sink device through an HDMI sink connector without regard for the activity state of the HDMI source device has a pull-up resistor having first and second terminals with the first terminal coupled to a DC power source. A switching device is coupled between the pull-up resistor's second terminal and ground at a circuit node. The switching device is switched on to couple the circuit node to ground when power is applied to a control terminal thereof from the HDMI sink connector power pin, and being switched off otherwise. The circuit node is coupled to a DDC/CEC GROUND pin of the HDMI sink connector. The circuit node is readable as a binary signal to indicate the presence of a source device to the HDMI sink connector, wherein the node exhibits a logic low signal when either the node is grounded by the DDC/CEC GROUND pin connection to a source device or when the switching device is switched on. This abstract is not to be considered limiting, since other embodiments may deviate from the features described in this abstract.
    • 用于通过HDMI接收器连接器将HDMI源设备检测到HDMI信宿设备的电路不考虑HDMI源设备的活动状态,具有上拉电阻器,其具有第一和第二端子,其中第一端子耦合到DC电源 资源。 开关器件在电路节点处耦合在上拉电阻器的第二端子和地之间。 当从HDMI接收器连接器电源引脚向其控制端施加电力时,切换装置被接通以将电路节点耦合到地,否则被切断。 电路节点耦合到HDMI接收器连接器的DDC / CEC GROUND引脚。 电路节点可读取为二进制信号,以指示源设备到HDMI接收器连接器的存在,其中当节点通过DDC / CEC GROUND引脚连接到源设备接地时,节点呈现逻辑低信号,或 当开关器件接通时。 该摘要不被认为是限制性的,因为其他实施例可能偏离本摘要中描述的特征。
    • 6. 发明申请
    • Referenced Inspection Device
    • 参考检验装置
    • US20110069306A1
    • 2011-03-24
    • US12994793
    • 2009-05-29
    • Paul DoyleGuoheng ZhaoAlexander BelyaevJ. Rex Runyon
    • Paul DoyleGuoheng ZhaoAlexander BelyaevJ. Rex Runyon
    • G01N21/88G01R31/26
    • H01L21/6838
    • A tool for investigating a substrate, where the tool has a tool head for investigating the substrate, a chuck for disposing an upper surface of the substrate in proximity to the tool head, and an air bearing disposed on the tool head adjacent the substrate. The air bearing has a pressure source and a vacuum source, where the vacuum source draws the substrate toward the air bearing and the pressure source prevents the substrate from physically contacting the air bearing. The pressure source and the vacuum source work in cooperation to dispose the upper surface of the substrate at a known distance from the tool head. By using the air bearing as part of the tool in this manner, registration of the substrate to the tool head is accomplished relative to the upper surface of the substrate, not the back side of the substrate.
    • 一种用于调查基板的工具,其中该工具具有用于检查基板的工具头,用于将基板的上表面设置在工具头附近的卡盘以及设置在与基板相邻的工具头上的空气轴承。 空气轴承具有压力源和真空源,其中真空源将基板拉向空气轴承,并且压力源防止基板物理接触空气轴承。 压力源和真空源协同工作,将衬底的上表面设置在与工具头一段已知距离处。 通过以这种方式使用空气轴承作为工具的一部分,基板相对于基板的上表面而不是基板的背面完成对准工具头。